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ORCID"Failure analysis of integrated circuits beyond the diffraction limit: ..."
Aaron Lewis et al. (2000)
- Aaron Lewis, Efim Shambrot, Anna Radko, Klony Lieberman, Solomon Ezekiel, Dimitry Veinger, Gila Yampolski:
Failure analysis of integrated circuits beyond the diffraction limit: contact mode near-field scanning optical microscopy with integrated resistance, capacitance, and UV confocal imaging. Proc. IEEE 88(9): 1471-1479 (2000)
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