Development of Microscopic Hardness and Stiffness Investigation System with MicroRobot

Montree Pakkratoke; Shinnosuke Hirata; Chisato Kanamori; Hisayuki Aoyama

doi:10.20965/jrm.2012.p0123

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JRM Vol.24 No.1 pp. 123-132

doi: 10.20965/jrm.2012.p0123

(2012)

Paper:

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Development of Microscopic Hardness and Stiffness Investigation System with MicroRobot

Montree Pakkratoke, Shinnosuke Hirata,
Chisato Kanamori, and Hisayuki Aoyama

Department of Mechanical Engineering and Intelligent Systems, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan

Received:

May 31, 2011

Accepted:

August 16, 2011

Published:

February 20, 2012

Keywords:

voice coil actuator, tandem leaf spring mechanism, strain gauge, inchworm microrobot, microindenter

Abstract

In order to investigate micro hardness and stiffness in a special chamber, the development of a small-force generator mechanism and a piezodriven microrobot is described in this paper. This small-force generator is simply composed of a Voice Coil Actuator (VCA) and the tandem leaf spring mechanism. The small force can be controlled by an electrical current, which is supplied to the coil and positioned precisely at the balance point with the parallel leaf spring with no mechanical friction. The full bridge strain gauges on both sides of the double leaf spring can detect a small force that is applied to the sample with a microindenter. This handmade small device can produce and verify small forces up to 17 mN with good linearity and a 50 µN resolution. The displacement of the indenter head can be also measured by the Linear Valuable Differential Transformer (LVDT) on the machine for monitoring the depth behavior of the indenter during the whole dwell time. The small force generator with the indenter can be implemented on the piezodriven microrobot to check the microscopic hardness and stiffness. This microrobot can move around the measurement area precisely step by step with 1 µm steps on a metal plate, so that the sample can be scanned with microscopic resolution in situ, such as in an SEM chamber. In the experiment results, the basic performance of microelasticity investigations with a certified hardness block was successfully checked and the indentation load-depth characteristics were precisely acquired on the path of the microrobot.

Cite this article as:

M. Pakkratoke, S. Hirata, C. Kanamori, and H. Aoyama, “Development of Microscopic Hardness and Stiffness Investigation System with MicroRobot,” J. Robot. Mechatron., Vol.24 No.1, pp. 123-132, 2012.

Data files:

References

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[2] E. T. Lilleodden, W. Bonin, J. Nelson, J. T. Wyrobek, and W. W. Gerberich, “In situ imaging of µN load indents into GaAs,” J. of Materials Research, Vol.10, issue 09, pp. 2162-2165, 1995.
[3] N. A. Burnhan and R. J. Colton, “Measuring the nanomechanical properties and surface forces of materials using an atomic force microscope,” J. of Vacuum Science and Technology A., Vol.7, No.4, pp. 2906-2913, 1989.
[4] T. J. Bell, A. Bendeli, J. S. Field, M. V. Swain, and E. G. Thwaite, “The determination of surface plastic and elastic properties by ultra micro-indentation,” Metrologia Vol.28, No.6, pp. 463-469, 1992.
[5] CSIRO Telecommunication & Industrial Physics, Lindfield NSW 2070 Australia, “Ultra-micro indentation system (UMIS),” unpublished.
[6] Hysitron company, “TI-series Triboindenter,” unblished.
[7] MTS system corporation, “Nano indenter XPW,” unpublished.
[8] S. Fatikow, T. Wich, H. Hulsen, T. Sievers, and M. Jahnisch, “Microrobot system for automatic nanohandling inside a scanning electron microscope,” Int. Conf. on robotic and automation, pp. 1402-1407, 2006.
[9] O. Ergeneman, J. J. Abbott, G. Dogangil, and B. J. Nelson. “Functionalizing Intraocular Microrobots with Surface coatings,” Int. Conf. on Biomedical robotics and Biomechatronics, pp. 232-237, 2008.
[10] J. Dong, S. hong, and G. Hesselgren, “WIP: A Study on Development of Endodontic micro robot,” Proc. of the 2006 IJME- INTERTECH Conf., pp. 104-110, 2006.
[11] P. L. Young, K. Byungkyu, G. L. Moon, and P. Jong-Oh, “Locomotion mechanism design and fabrication of biomimetic micro robot using shape memory alloy,” Int. Conf. on robotics and automation, pp. 5007-5012, 2004.
[12] O. Fuchiwaki and H. Aoyama, “Manipulation by Miniature Robots in a SEM Vacuum Chamber,” J. of Robotics and Mechatronics, Vol.14, No.3, pp. 221-226, 2002.
[13] ISO/DIS 14577, “Instrumented indentation test for hardness and materials parameters,” 2007.
[14] R. Alfred, “Magnetic repulsion: An introductory experiment,” Am. J. Phys., Vol.41, pp. 1332-1336, 1973.
[15] B. Juan, H. Emilia, M. Salvador, and P. Jose, “Oscillations of a dipole in a magnetic field: An experiment,” Am. J. Phys., Vol.58, No.9, pp. 838-843, 1990.
[16] C. Ramon, M. M. Jose, and J. C. B. Maria, “The magnetic dipole interaction as measured by spring dynamometer,” Am. J. Phys., Vol.74, No.6, pp. 510-513, 2006.
[17] V. David, B. Marco, H. Ludek, and S. Petr, “Magnetostatic interactions and force between cylindrical permanent magnets,” J. of magnetism and magnetic materials., Vol.321, pp. 3758-3763, 2009.
[18] S. Defrancesco and V. Zanetti, “Experiments on magnetic repulsion,” Am. J. Phys., Vol.51, No.11, pp. 1023-1025, 1983.
[19] P. Montree, L. Natchapon, and H. Aoyama, “Combination of VCA based Micro Force Generator and Micro Robot for Micro Hardness and Stiffness Test,” SICE Annual Conf. 2010, p. 3186, 2010.

This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

[1] [1] J. B. Pethica, “Ion implantation into metals,” Proc. of the 3rd Int. Conf. on Modification of Surface Properties of Metals by Ion Implantation, held at UMIST, Manchester, p. 147, 1981.

[2] [2] E. T. Lilleodden, W. Bonin, J. Nelson, J. T. Wyrobek, and W. W. Gerberich, “In situ imaging of µN load indents into GaAs,” J. of Materials Research, Vol.10, issue 09, pp. 2162-2165, 1995.

[3] [3] N. A. Burnhan and R. J. Colton, “Measuring the nanomechanical properties and surface forces of materials using an atomic force microscope,” J. of Vacuum Science and Technology A., Vol.7, No.4, pp. 2906-2913, 1989.

[4] [4] T. J. Bell, A. Bendeli, J. S. Field, M. V. Swain, and E. G. Thwaite, “The determination of surface plastic and elastic properties by ultra micro-indentation,” Metrologia Vol.28, No.6, pp. 463-469, 1992.

[5] [5] CSIRO Telecommunication & Industrial Physics, Lindfield NSW 2070 Australia, “Ultra-micro indentation system (UMIS),” unpublished.

[6] [6] Hysitron company, “TI-series Triboindenter,” unblished.

[7] [7] MTS system corporation, “Nano indenter XPW,” unpublished.

[8] [8] S. Fatikow, T. Wich, H. Hulsen, T. Sievers, and M. Jahnisch, “Microrobot system for automatic nanohandling inside a scanning electron microscope,” Int. Conf. on robotic and automation, pp. 1402-1407, 2006.

[9] [9] O. Ergeneman, J. J. Abbott, G. Dogangil, and B. J. Nelson. “Functionalizing Intraocular Microrobots with Surface coatings,” Int. Conf. on Biomedical robotics and Biomechatronics, pp. 232-237, 2008.

[10] [10] J. Dong, S. hong, and G. Hesselgren, “WIP: A Study on Development of Endodontic micro robot,” Proc. of the 2006 IJME- INTERTECH Conf., pp. 104-110, 2006.

[11] [11] P. L. Young, K. Byungkyu, G. L. Moon, and P. Jong-Oh, “Locomotion mechanism design and fabrication of biomimetic micro robot using shape memory alloy,” Int. Conf. on robotics and automation, pp. 5007-5012, 2004.

[12] [12] O. Fuchiwaki and H. Aoyama, “Manipulation by Miniature Robots in a SEM Vacuum Chamber,” J. of Robotics and Mechatronics, Vol.14, No.3, pp. 221-226, 2002.

[13] [13] ISO/DIS 14577, “Instrumented indentation test for hardness and materials parameters,” 2007.

[14] [14] R. Alfred, “Magnetic repulsion: An introductory experiment,” Am. J. Phys., Vol.41, pp. 1332-1336, 1973.

[15] [15] B. Juan, H. Emilia, M. Salvador, and P. Jose, “Oscillations of a dipole in a magnetic field: An experiment,” Am. J. Phys., Vol.58, No.9, pp. 838-843, 1990.

[16] [16] C. Ramon, M. M. Jose, and J. C. B. Maria, “The magnetic dipole interaction as measured by spring dynamometer,” Am. J. Phys., Vol.74, No.6, pp. 510-513, 2006.

[17] [17] V. David, B. Marco, H. Ludek, and S. Petr, “Magnetostatic interactions and force between cylindrical permanent magnets,” J. of magnetism and magnetic materials., Vol.321, pp. 3758-3763, 2009.

[18] [18] S. Defrancesco and V. Zanetti, “Experiments on magnetic repulsion,” Am. J. Phys., Vol.51, No.11, pp. 1023-1025, 1983.

[19] [19] P. Montree, L. Natchapon, and H. Aoyama, “Combination of VCA based Micro Force Generator and Micro Robot for Micro Hardness and Stiffness Test,” SICE Annual Conf. 2010, p. 3186, 2010.

Development of Microscopic Hardness and Stiffness Investigation System with MicroRobot

Montree Pakkratoke, Shinnosuke Hirata, Chisato Kanamori, and Hisayuki Aoyama

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Montree Pakkratoke, Shinnosuke Hirata,
Chisato Kanamori, and Hisayuki Aoyama