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Design Rules: Digital Integrated Circuits © Prentice Hall 1995

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0% found this document useful (0 votes)

64 views

Design Rules: Digital Integrated Circuits © Prentice Hall 1995

Uploaded by

大橋カルロス

We take content rights seriously. If you suspect this is your content, claim it here.

Available Formats

Download as PDF, TXT or read online on Scribd

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Design Rules

Digital Integrated Circuits Design Rules © Prentice Hall 1995

Cross-Section of CMOS Technology

Digital Integrated Circuits Design Rules © Prentice Hall 1995

Design Rules

 Interface between designer and process

engineer
 Guidelines for constructing process masks
 Unit dimension: Minimum line width
» scalable design rules: lambda parameter
» absolute dimensions (micron rules)

Digital Integrated Circuits Design Rules © Prentice Hall 1995

CMOS Process Layers
Layer Color Representation

Well (p,n) Yellow

Active Area (n+,p+) Green
Select (p+,n+) Green
Polysilicon Red
Metal1 Blue
Metal2 Magenta
Contact To Poly Black
Contact To Diffusion Black
Via Black

Digital Integrated Circuits Design Rules © Prentice Hall 1995

Intra-Layer Design Rules
Same Potential Different Potential
9 2
0 Polysilicon
Well or
6
10 2
3 3
Active Metal1
Contact
or Via 2
3 Hole 3
2 2 4
Select Metal2

Digital Integrated Circuits Design Rules © Prentice Hall 1995

Transistor Layout
Transistor

3 2

Via’s and Contacts
2
Via 4
1 1
5
Metal to
Metal to 1 Poly Contact
Active Contact 3 2

2
2

Select Layer
2
Select
3
2
1
3 3

2 5

A A’

Out

(a) Layout

A A’
n
p-substrate Field
n+ p+ Oxide
(b) Cross-Section along A-A’
Digital Integrated Circuits Design Rules © Prentice Hall 1995

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Design Rules: Digital Integrated Circuits © Prentice Hall 1995

Uploaded by

Design Rules: Digital Integrated Circuits © Prentice Hall 1995

Uploaded by

Design Rules

Digital Integrated Circuits Design Rules © Prentice Hall 1995

Digital Integrated Circuits Design Rules © Prentice Hall 1995

 Interface between designer and process

Digital Integrated Circuits Design Rules © Prentice Hall 1995

Well (p,n) Yellow

Digital Integrated Circuits Design Rules © Prentice Hall 1995

Digital Integrated Circuits Design Rules © Prentice Hall 1995

Digital Integrated Circuits Design Rules © Prentice Hall 1995

Digital Integrated Circuits Design Rules © Prentice Hall 1995

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