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Scanning Electron Microscope: Dr. Fatimah Al-Hasani

The document describes the basic construction and components of a scanning electron microscope (SEM), including the electron optical system that produces an electron probe using an electron gun, condenser lens, objective lens, and scanning coil, as well as a specimen stage, secondary electron detector, and display unit. It explains how the thermionic emission gun works to produce an electron beam and how the condenser and objective lenses are used to focus the beam into a fine electron probe for scanning the specimen.

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56 views13 pages

Scanning Electron Microscope: Dr. Fatimah Al-Hasani

The document describes the basic construction and components of a scanning electron microscope (SEM), including the electron optical system that produces an electron probe using an electron gun, condenser lens, objective lens, and scanning coil, as well as a specimen stage, secondary electron detector, and display unit. It explains how the thermionic emission gun works to produce an electron beam and how the condenser and objective lenses are used to focus the beam into a fine electron probe for scanning the specimen.

Uploaded by

Alaa Saad
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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Scanning Electron Microscope

Dr. Fatimah Al-Hasani


Construction of SEM
The SEM requires :
1- an electron optical system to produce an electron probe.
2- a specimen stage to place the specimen.
3- a secondary-electron detector to collect secondary electrons.
4- an image display unit.
5- an operation system to perform various operations .
The electron optical system consists of: 1- an electron gun.
2- a condenser lens and an objective lens to produce an electron probe.
3- a scanning coil to scan the electron probe. and other components.
The electron optical system (inside of the microscope column) and a
space surrounding the specimen are kept at vacuum.
Basic construction of a SEM.
Electron Gun
The electron gun produces an electron beam. There are three types of electron guns:
1- the thermionic emission gun (TE gun).
2- the field-emission electron gun (FE gun).
3- Schottky-emission electron gun (SE gun) .
This section explains the thermionic emission gun (TE gun). Thermoelectrons are
emitted from a filament (cathode) made of a thin tungsten wire (about 0.1 mm) by
heating the filament at high temperature (about 2800K). These thermoelectrons are
gathered as an electron beam, flowing into the metal plate (anode) by applying a
positive voltage (1 to 30 kV) to the anode. If a hole is made at the center of the anode,
the electron beam flows through this hole. When you place an electrode (called a
Wehnelt electrode) between the cathode and anode and apply a negative voltage to it,
you can adjust the current of the electron beam. At this time, the electron beam is
finely focused by the action of the Wehnelt electrode. The finest point of the beam is
called the crossover, and this is regarded as an actual electron source with a diameter
of 15 to 20 µm. The TE gun, explained here, is most generally used. An LaB6 single
crystal is also used as a cathode, but it requires a higher vacuum because of its high
activity.
Construction of an electron gun
Construction of the FE gun. Construction of the SE gun
Construction of Lens
An electron microscope generally uses a magnetic lens.
When you pass a direct electric current through a coil-
wound electric wire, a rotationally-symmetric magnetic
field is formed and a lens action is produced on an
electron beam. To make a strong magnetic lens (with a
short focal length), it is necessary to increase the density
of the magnetic line. Thus the surroundings of the coil are
enclosed by yokes so that part of the magnetic field leaks
from a narrow gap. A portion with a narrow gap, called
“polepiece,” is fabricated with a high accuracy. The main
feature of the magnetic lens is that when you change the
current passing through the coil, the strength of the lens
is also changed. This is not achieved by an optical lens.
Construction of a magnetic lens.
Condenser Lens and Objective Lens
Placing a lens below the electron gun enables
you to adjust the diameter of the electron
beam. A fine electron beam (probe) is required
for the SEM. Two-stage lenses, which combine
the condenser and objective lenses, are located
below the electron gun. The electron beam from
the electron gun is focused by the two-stage
lenses, and a small electron probe is produced.
Formation of the electron probe by the lenses
Role of the condenser lens

If the lens action of the condenser lens is strengthened, the electron probe
becomes narrower where as if weakened, the electron probe becomes broader.
The “aperture” is placed between the condenser lens and objective lens. The
“aperture,” made of a thin metal plate, has a small hole. The electron beam,
which passed through the condenser lens, illluminates this aperture-plate. The
aperture allows a part of the electron beam to reach the objective lens. If the
excitation of the con- denser lens is increased, the electron beam greatly
broadens on the aperture and therefore, the number of the electrons (amount
of probe current) reaching the objective lens is decreased. To the contrary, if the
excitation of the condenser lens is decreased, the electron beam does not
broaden very much and therefore, most of the electrons pass through the
aperture and many electrons reach the objective lens. That is, the adjustment
of the excitation of the condenser lens enables you to change the electron-
probe diameter and the probe current.
However, even if the excitation of the condenser lens is infinitely increased, the
diameter of the electron probe does not become infinitely small.
Role of the objective lens
The objective lens is used for focusing, and this lens is a
very important lens that determines the final diameter
of the electron probe. If the performance of the
objective lens is not good, an optimally-fine electron
probe cannot be produced despite all of the efforts
before the action of the objective lens. Thus, it is
crucial to make the objective lens with the best
performance.

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