ISO 10110-7 / ISO 14997 Plus Surface Scratch & Dig

Evaluation Targets
Usage and Applications Guide

Version 1.1
© 2007, MLAI

Max Levy Autograph, Inc.

Table of Contents

1. Target Features............................................................................................................... 3
Versions .......................................................................................................................... 3
Standard ISO 10110-7 Features ...................................................................................... 4
Circles ......................................................................................................................... 4
Scratches ..................................................................................................................... 4
Enhanced Features .......................................................................................................... 5
Ronchi Rulings............................................................................................................ 5
Linear Scale ................................................................................................................ 6
Grids............................................................................................................................ 6
Summary of Target Features (Table)...............................................................................7
2. Overview of the ISO 10110-7 Standard......................................................................... 8
The ISO 10110 Series ..................................................................................................... 8
ISO 10110 Part 7............................................................................................................. 9
Other Applicable Standards ............................................................................................ 9
Obtaining the Standard ................................................................................................... 9
Test Methods................................................................................................................. 10
3. Usage Guide.................................................................................................................. 11
General Description ...................................................................................................... 11
Handling........................................................................................................................ 11
Cleaning ........................................................................................................................ 11
General Usage Procedure.............................................................................................. 12
Direct Measurement Method (Transmission) ........................................................... 12
Method for Viewing in Reflection............................................................................ 13
Method of Classification........................................................................................... 13
4. Conventions of the Standard......................................................................................... 15
Notation......................................................................................................................... 15
Surface Imperfection Tolerances (Method 1) ........................................................... 15
Standard Surface Imperfection Artifacts ...................................................................... 16
Additional ISO 10110 Drawing Codes ......................................................................... 17
5. A Comparison to MIL STD Scratch Dig ..................................................................... 18
MIL-PRF-13830B to ISO 10110-7 Comparison Guide ........................................... 19

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1. Target Features

Versions

The ISO 10110-7 / ISO 14997 PLUS

Scratch Dig standard from Max Levy
Autograph is available in three different
versions as required to span the wide range
of viewing options. All three versions
contain two plates with identical patterns.
Each version differs in the pattern
orientation, permitting usage in various
inspection systems. The versions are:

• DA074 – ISO 14997 Standards Set, First Surface

o Pattern Orientation: The pattern is printed in chrome on the first surface,
right reading looking at the target.
o Polarity: Positive – Opaque features on a clear glass background
o Use: The first surface pattern allows this artifact to be used in calibrating
inspection systems. With the pattern on the first surface, the effects of
internal reflection are reduced. However, this orientation makes the part
unsuitable for direct contact measurement of surface imperfections, as the
pattern is not coplanar with the surface defect being measured.
• DA075 – ISO 14997 Standards Set, Second Surface
o Pattern orientation: The pattern is printed in chrome on the second surface,
right reading looking through the target.
o Polarity: Positive – Opaque features on a clear glass background.
o Use: The second surface pattern allows for direct contact measurement of
surface defects. The target may be placed over an imperfection and used
to measure the grade of the defect directly.
• DA078 – ISO 14997 Standards Set, Negative
o Pattern orientation: The pattern is printed in chrome on the first surface,
looking at the target
o Polarity: Negative – Clear features on an opaque background
o Use: The target may be used in a transmitted light setup to calibrate
inspection apparatus. The negative polarity makes this target an ideal
reference for coating defects. This version of the target is not intended for
direct contact measurement of defects.

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Standard ISO 10110-7 Features

ISO 10110-7 lists a number of standard features to be included in a Scale Comparison

Plate. These features are listed in Annex E of the standard, and are reprinted in this guide
in Table 4.2. The ISO 14997 Scratch Dig Standards include all of the features described
by the standard. These features are explained below:

Circles

These precise circles are to be used in classifying localized surface

imperfections. Surface imperfections include all types of defects
that affect the surface, including short scratches (< 2mm in length),
pits, broken bubbles, sleeks, scuffs, and fixture marks. Spots and
colored areas also fall into this category.

Defects within this category are classified in terms of surface area. The ISO grade
number is the square root of the surface area covered within the circle. For a circular
defect, the grade number A is given by the following equation:

A = SA = π ⋅ r 2 where A = Grade Number

SA = Surface Area
D = Diameter

Plate 1 Covers circular defects from 4.5 µm to 45 µm in diameter. Plate 2 covers

circlular defects from 45 µm to 450 µm in diameter.

Scratches

The ISO 14997 Plus plates include a row of sample scratch

artifacts defined by the standard. Like all defects covered by ISO
10110-7, scratches are classified by the surface area that they
obscure. The Grade Number for a scratch is therefore given by the
equation:

A = SA = L ⋅ W where A = Grade Number

SA = Surface Area
L = Length
W = Width

Any scratch defect that is obscured by the sample defect on the artifact falls within the
Grade Number of the corresponding artifact.

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Note: According to ISO 10110-7 notation, any defect longer than 2mm is considered a
long scratch. In classifying long scratches, only the width of the scratch is used. The
sample scratch artifacts may be used to classify long scratches by only considering the
width of the scratch.

Section 5 of this guide provides a comparison of this ISO standard to the MIL-PRF-
13830B standard.

Enhanced Features

Ronchi Rulings

Ronchi rulings are a pattern of alternating clear and opaque lines

of equal width arranged in one direction. Ronchi rulings are
classified according to their spatial frequency in terms of Line
Pairs per Millimeter, or lp/mm.

The Ronchi ruling is an important diagnostic tool which serves the following purposes:

1. The ruling tests the resolution of the optical test system prior to inspection of the
defect. This test pattern assures that the optical system is able to properly resolve the
features under test. A system that cannot resolve the Ronchi ruling for a given size defect
(Grade Number) does not have the spatial resolution required to accurately measure the
defects for that Grade.

2. It provides a means for calibrating the line width measurement system to each of the
scratch features. This may be accomplished by direct measurement of the line width or
by a macroscopic inspection using a microdensitometer. A calibrated densitometer
shows that the rulings themselves are within the tolerance defined by drawing
110MLA0084-001 (available on the documentation CD).

A Ronchi ruling is included for each grade number on the two plates. The spatial
frequency is listed above the ruling area in terms of Line Pairs per Millimeter (LP/mm).
For each grade, the Ronchi frequency is determined by the line width of the scratch
feature. The line width of the Ronchi ruling is equal to the line width of the scratch
artifact. The frequency of the Ronchi ruling (in LP/mm) is therefore:

1
f = where f = frequency
2⋅w
w = line width

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Linear Scale

A linear measuring scale is included on both plates of the ISO

14997 Scratch Dig Artifacts Set. The scale is suited to directly
measure the length of scratches. Within the ISO 10110-7
specification, any defect longer than 2mm is classified as a long
scratch and will be classified only by its width. Smaller scratches
are classified according to the surface area that they obscure.

The scale has divisions every .025mm. The scale on each target is certified to be accurate
to within 0.002mm over its 60mm length. The actual measurement of the scale is listed
on the Certificate of Accuracy provided with the kit.

Grids

The grids included within each grade number are useful in the
classification of areas which contain multiple defects. For each
defect specification, the ISO 10110-7 notation identifies both a
number of defects, and a grade number for those defects. It is
possible to substitute a larger number of small defects for a smaller
number of large defects. The key to this exchange is that the
number of small defects must have less total surface area than the
large defects specified.

This method of sub-division is addressed more thoroughly in ISO 10110-7 (1996),

section 4.1.2.

For each grade, the edge length of an individual square within the grid is equal to the
diameter of the circle in that grade. The total Surface Area of a defect is therefore the
square of the side length multiplied by the number of squares the defect occupies. This
total surface area may be compared to the surface area of a larger defect to determine
whether the smaller defects fall within the grade under test.

Note: Within ISO 10110-7, concentrations of defects are not allowed. If 20% or more
of the total surface defects fall within any 5% of the test region, the part does not meet
the minimum defect tolerances of the standard. Exceptions are given only when specified
explicitly.

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Summary of Target Features

Ronchi Scratch Circle Grid Line Grid Cell Grid Open

Grade
Frequency Dimension Diameter Width Width Width
Number
(lp/mm) (microns) (microns) (microns) (microns) (microns)

0.004 500 1.0 x 16 4.5 1 4.5 3.5

0.006 312.5 1.6 x 25 7 1.6 7 5.4
0.010 200 2.5 x 40 11 2.5 11 8.5
0.016 125 4.0 x 63 18 4 18 14
0.025 80 6.3 x 100 28 6.3 28 21.7
0.040 50 10 x 160 45 10 45 35
0.060 31.25 16 x 225 70 10 70 60
0.100 20 25 x 400 110 10 110 100
0.160 12.5 40 x 630 180 10 180 170
0.250 8 63 x 1,000 280 10 280 270
0.400 5 100 x 1,600 450 10 450 440
Table 1.1 Summary of Target Features

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2. Overview of the ISO 10110-7 Standard

The ISO 10110 Series

The ISO 10110 series of standards specify the

design and functional characteristics of optical
elements and assemblies. Together, the series of
standards provide both a uniform notation for
optical design and a traceable reference for testing
the conformance of manufactured parts. Table 1.1
lists all of the parts currently included within ISO
10110.

ISO 10110 : Optics and Photonics :

Preparation of Drawings for Optical Elements and Systems

Part # Current Title

Release
-1 2006 General
-2 1996 Material Imperfections – Stress Birefringence
-3 1996 Material Imperfections – Bubbles and Inclusions
-4 1997 Material Imperfections – Inhomogeneity and Striae
-5 1996 Surface Form Tolerances
-6 1996 Centering Tolerances
-7 1996 Surface Imperfection Tolerances
-8 1997 Surface Texture
-9 1996 Surface Treatment and Coating
-10 2004 Table Representing Data of Optical Elements and Cemented
Assemblies
-11 1996 Non-toleranced Data
-12 1997 Aspheric Surfaces
-14 2003 Wavefront Deformation Tolerance
-17 2004 Laser Irradiation Damage Threshold
Table 2.1 ISO 10110 Parts

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ISO 10110 Part 7

ISO 10110-7 (1996) specifically covers surface imperfection tolerances. The following
defects are covered by this standard:

• Surface Imperfections, including:

Scratches Pits Broken Bubbles

Sleeks Scuffs Fixture Marks
Gray Spots Color Sites

• Long Scratches

• Edge Chips

Other Applicable Standards

The ISO 14997 standard is closely related to the ISO 10110-7 standard. While the ISO
10110 family concentrates on notation and drawing conventions, ISO 14997 covers the
test methods associated with ISO 10110 specifications. The standard includes the test
methods and descriptions of the apparatus that may be used to verify a part’s compliance
to the ISO 10110-7 defect specification tolerances.

Obtaining the Standard

This guide provides a reference for using the DA074, DA075, and DA078 artifacts
according to ISO10110-7 and ISO 14997. It is not intended to be used in lieu of these
standards. A full copy of the ISO 10110-7 standard is required to properly interpret
drawing notations.

All parts of the ISO 10110 standard are available for purchase from the International
Organization for Standardization website at

www.iso.org

The standard is protected by copyright and may not be reproduced without permission
from the publisher.

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Test Methods

ISO 10110-7 and ISO 14997 list two methods for comparing defects to a reference
standard, named simply Method 1 and Method 2.

Method 1 involves the direct comparison of defects to a known reference standard. The
DA074, DA075, and DA078 artifacts were designed specifically for use with this
method. The features on the targets meet the requirements of ISO 10110-7 Annex E
(Recommended Dimensions of Artifacts on a Scale Comparison Plate for Method I) and
ISO 14997 Annex B with the same title.

ISO 14997 lists different apparatus which may be used to aid in a Method I inspection.
The choice of pattern orientation – whether it is DA074, DA075, or DA078 – depends on
the intended inspection method. For direct contact measurement, the DA074 with its
second surface pattern is preferable. For reflective testing or tests involving a
comparator, the DA075 and DA078 are better suited. Complete test method details are
available in ISO 14997:2003 Section 5.

Method 2 is a visibility method designed to measure the conditions at which defects

become visible. A special test apparatus is required for this testing. In addition, there is
no direct comparison standard. For this reason, the DA074, DA075, and DA078
Standards are not suited to this test method.

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3. Usage Guide

General Description

The ISO target kits consist of a single sheet of glass surrounded by an anodized
Aluminum frame. The frame serves two main purposes: to aid in handling the target and
to protect the edges of the glass.

The target pattern is formed in a thin layer of Chromium metal either on the top or
bottom surface of the glass. The pattern is very durable if handled correctly. However,
the pattern is not protected by any additional layers and may be damaged if treated
incorrectly. Be sure to follow the safe handling and cleaning procedures listed below.

Handling

When moving the target, be sure to handle it by the edges. The target should always be
held by its frame.

Avoid sliding or dragging the target on hard surfaces. Small debris particles on the
surface may scratch the glass or pattern if slid. To move the target, lift it up and then
place it back down against the surface.

Cleaning

The durable target pattern will last for hundreds of cleanings if cleaned properly. Follow
the general guidelines for cleaning sensitive optical components when cleaning this
target. Always be sure to follow these guidelines:

• Be sure to blow off any loose debris with a dry air source before cleaning
• Wipe the surface only with lint free wipers or lens tissue soaked in solvent
• Isopropyl alcohol or acetone are the preferred cleaning solvents.

Note: Never wipe the target with a dry or abrasive wipe.

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General Usage Procedure

Direct Measurement Method (Transmission)

OPTIC UNDER REFERENCE

TEST ARTIFACT

LIGHT
SOURCE

The DA074 and DA075 may be used for the direct measurement of defects on a surface.
These targets are patterned on the back surface of the glass, such that the reference
artifacts are in direct contact with the defects under test.

Procedure:

1. Test the spatial resolution of the system by placing the inspection apparatus over
the Ronchi ruling for the desired Grade Number. The inspection system must be
able to resolve the lines within the ruling to provide an accurate measurement. If
the inspection system cannot resolve the ruling, a higher magnification or higher
resolution system must be used.
2. Clean the reference artifact and surface to be tested using a compressed air blow
off gun.
3. Place the artifact in contact with the defect to be tested.
4. Examine the size of the defect within the various features (circle, scratch, and
grid). If the defect is longer than 2mm in length, it should be classified as a long
scratch, in which case only the width should be measured using the scratch
artifacts.
5. Compare the defect to the feature on the reticle. If the defect falls within the
feature (circle, scratch, or grid), then it falls within the requirements for that ISO
10110-7 Grade Number. Refer to Table 4.2 for details on Grade Numbers.

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Method for Viewing in Reflection

OPTIC UNDER REFERENCE

TEST ARTIFACT
BEAM
SPLITTER

LIGHT
SOURCE

ISO 14997 defines a test method for part inspection in reflection. The DA078 artifact is
ideally suited to this type of measurement. Full details on this test method are available
in ISO 14997(2003) Figure 1b, Page 4.

The reflective method requires that the pattern have negative polarity (clear features on
an opaque background). Using a beam splitter, light source, and reflecting mirror, the
DA078 reference artifact may be placed in front of a reflecting mirror such that the light
passing through the clear features of the reference passes through a beam splitter and
through to the observer.

Method of Classification

Standard Defects

ISO 10110-7 classifies all types of defects according to the surface area they obscure. All
defects, regardless of their shape, fall into a size classification. The exception is for long
scratches, defined as a thin imperfection longer than 2mm in length.

Although the drawing conventions do not differentiate between circular defects and
scratches, the reference standard proposed by ISO 10110-7 does provide separate features
for these two defects. This differentiation expedites the classification process; instead of
having to measure all sides of a defect and calculate the surface area, the user can simply
compare the defect to a comparable artifact on the reference standard.

Long Scratches

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In the case of long scratches, these are identified only by their width. In identifying long
scratches, it is only necessary to compare the width of the long scratch to the width of a
scratch on the reference standard. For future reference, the length of the scratch may be
measured with the linear scale.

Coating Blemishes

Coating blemishes principly concern optical coatings on elements. These coatings may
be Anti-Reflective (AR), bandpass, neutral density, masks, and other types of coatings
applied to an optical surface. Delineated patterns fall into this classification as well. If
no indication is specified for coating blemishes, then the coating is to be inspected
according to the standard surface imperfection tolerances.

Coating Blemishes are classified in a similar manner to standard surface imperfections

such as scratches and digs. However, these imperfections may be toleranced separately
by precedirng the specification with the code “C.” A full explanation is available in
Table 4.1.

Edge Chips

An edge chip is any type of defect that extends from the edge of an optical surface. Edge
chips are usually caused by the manufacturing process or from improper handling.

Edge chips are classified independently of the other types of surface imperfections. Edge
chips are not classified according to surface area as the rest of ISO 10110-7 features are.
Instead, only the extent of the edge chip from the physical edge of the element is
measured. This extent is specified in millimeters.

Note the measurement must be parallel to the surface of the element and that any number
of edge chips are permissible as long as they do not extend past the specified distance
from the edge of the optic.

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4. Conventions of the Standard

Notation

The ISO 10110 group of standards defines a syntax for the description of all types of
defects in optical surfaces and components. The ISO 10110-7 standard covers only
surface imperfections and coating blemishes. This notation is explained below.

Note: The following notation and all references in this manual apply only to Method 1
inspection as defined by the Standard.

Surface Imperfection Tolerances (Method 1)

General Format:

5/N X A ; CN’ X A’ ; LN’’ X A’’ ; EA’’’

Legend:

Symbol Interpretation Notes

5/ Numerical Symbol for Surface Precedes all ISO 10110-7
Imperfections specifications
N Number of Imperfections allowed Mandatory
A Size grade number Mandatory
C Coating Blemishes Specifier Optional, separated by semicolon
N’ Number of allowed coating blemishes
A’ Size grade number for coating blemishes
L Long Scratches Specifier Optional, separated by semicolon
N’’ Number of long scratches allowed
A’’ Maximum width of long scratch Expressed in millimeters
E Edge Chips Specifier Optional
A’’’ Maximum extent of edge chips from Expressed in millimeters
physical edge
Table 4.1 Surface Imperfection Tolerance Notation

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Standard Surface Imperfection Artifacts

The DA074, DA)75, and DA078 ISO 10110-7 Scratch/Dig Artifacts are fully compliant
to the suggested artifact sizes for Annex E of ISO 10110-7:1996 (Recommended
dimensions of artifacts on a scale comparison plate for Method 1). The actual sizes of
these artifacts are listed below in Table 4.2.

Grade Diameter of Circular Defect Dimension of Scratch

Number
(Microns) (Microns x Microns)
0.004 4.5 1 x 16
0.006 7 1.6 x 25
Plate No. 1

0.010 11 2.5 x 40
0.016 18 4.0 x 63
0.025 28 6.3 x 100
0.040 45 10 x 160
0.040 45 10 x 160
0.060 70 16 x 225
Plate No. 2

0.100 110 25 x 400

0.160 180 40 x 630
0.250 280 63 x 1,000
0.400 450 100 x 1,600
Table 4.2 Surface Imperfection Artifact Feature Sizes

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Additional ISO 10110 Drawing Codes

The following table shows a summary of ISO 10110 codes used to define tolerances on
drawings.

Code Property Data

Number
0 Stress birefringence 0/A
A = Maximum optical path difference (nm/cm)
1 Bubbles and inclusions 1/NxA
N= Number of bubbles
A= Bubble grade number
2 Inhomogeneity and striae 2/AB
A = Homogeneity class
B = Striae class
3 Surface form tolerance 3/A(B/C) –or-
3/A(B/C) RMSx < D –or-
3/- RMSx < D
A= Maximum sagitta error
B = Peak-to-valley irregularity
C = Non-spherical, rotationally symmetric error
D = Maximum RMS tolerance
t = Total RMS deviation from nominal surface
i = RMS irregularity
a = RMS asymmetry after removal of spherical and
rotationally symmetric irregularity
4 Centering tolerance 4/σ
σ = Surface tilt angle (minutes or seconds)
5 Surface imperfection tolerance 5/N x A; CN’ x A’; LN’’ x A’’; EA’’’
N = Number of allowed scratches
A = Grade number
N’ = Number of coating blemishes
A’ = Coating blemish Grade number
N’’ = Number of long scratches
A’’ = Maximum width of scratch (mm)
A’’’ = Maximum extent of edge chips (mm)
6 Laser damage threshold 6/Hth; λ ; pdg; fp ; nts x np (pulsed) –or-
6/Eth ; λ ; nts (cw)
Hth = Energy density threshold (J/cm2)
Eth = Power density threshold (W/cm2)
λ = Laser wavelength
pdg = Pulse duration group
fp = Pulse repetition frequency
nts = Number of test sites
np = Number of pulses per site
Table 4.3 ISO 10110 Drawing Codes

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5. A Comparison to MIL STD Scratch Dig
MIL-PRF-13830B defines the criteria for evaluation of surface defects in optical
elements. The standard established the familiar “Scratch/Dig” notation. Although there
are several qualifiers, the general notation of the specification is straightforward.
Although there are some similarities to ISO 10110-7, calculations are required to convert
between the Scratch/Dig number and a corresponding ISO Grade Number. For reference,
the basic definition of Scratch and Dig follow.

Scratch: Any mark or tearing of the part surface. The Sratch number is listed as the
width of an allowed scratch in microns.

Dig: A small spot similar to a pit in appearance. The Dig number is specified as the
maximum diameter of a dig in hundredths of a millimeter.

Scratch and Dig are considered separately in classifying defects because the scale factors
are different by an order of magnitude. However, there are certain standard Scratch/Dig
specifications used in industry such as “40/20”, “20/10”, and others. Tables 5.1 and 5.2
list the dimensions specified by common Scratch/Dig Numbers, respectively.

Scratch # Max Scratch Dig # Max. Dig

Width (mm) Diameter (mm)
120 0.120 120 1.200
80 0.080 80 0.800
60 0.060 60 0.600
50 0.050 50 0.500
40 0.040 40 0.400
30 0.030 30 0.300
20 0.020 20 0.200
15 0.015 15 0.150
10 0.010 10 0.100
5 0.005 5 0.050
3 0.003 3 0.030
Table 5.1 Scratch Numbers Table 5.2 Dig Numbers

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MIL-PRF-13830B to ISO 10110-7 Comparison Guide

Comparisons to ISO 10110-7 Method 1 Artifact, p.12

DIG Designation

MIL-PRF-13830B Scratch/Dig ISO 10110-7

Dig Diameter (mm)

Circular Defect
Diameter
Grade #
Dig #

(mm)
120 1.20 0.400 0.45
80 0.80 0.250 0.25
60 0.60 0.160 0.18
50 0.50 0.100 0.11
40 0.40 0.060 0.07
30 0.30 0.040 0.045
20 0.20 0.025 0.028
15 0.150 0.016 0.018
10 0.100 0.010 0.011
5 0.050 0.006 0.007
3 0.030 0.004 0.0045

SCRATCH Designation

MIL-PRF-13830B Scratch/Dig ISO 10110-7

Dimension (mm)
Max. Scratch
Scratch #

Grade #

Scratch
Width
(mm)

120 0.12 0.400 .1x1.6

80 0.08 0.250 .063x1
60 0.06 0.160 .04x.630
50 0.05 0.100 .025x.400
40 0.04 0.060 .016x.225
30 0.03 0.040 .010x.160
20 0.02 0.025 .0063x.100
15 0.015 0.016 .004x.063
10 0.01 0.010 .0025x.040
5 0.005 0.006 .0016x.025
3 0.003 0.004 .0010x.016

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 The MLA catalog features a full selection of optical
testing and dimensional calibration artifacts.

Visit us online at

www.maxlevy.com

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