M Vision Measuring Systems

INDEX
Vision Measuring Systems
Vision Measuring Quick Scope Series 359 — Manual Vision M-2
Systems Measuring System
Quick Image Series 361 — Non-contact 2D Vision M-3
Measuring System
QV Active Compact CNC Vision Measuring Systems M-4
QV Apex Series 363 — CNC Vision Measuring System M-5
QV Stream Plus Series 363 — CNC Vision M-6
Measuring System
QV Hyper Series 363 — High-Accuracy CNC Vision M-7
Measuring System
QV Hybrid Type 1, Type 4 Series 365 — CNC M-8
Vision Measuring System with a Non-contact
Displacement Sensor
QV- WLI Series 363 — CNC Video Measuring System M-9
with White Light Interferometry
ULTRA QV Series 363 — Ultra-High Accuracy CNC M-10
Vision Measuring System
UMAP Vision System TYPE2 Series 364 — Micro- M-11
Form Measuring System
QV ACCEL Series 363 — Large-Format CNC Vision M-12
Measuring System
Quick Vision with Touch-Trigger Probe M-13
Accessories for Quick Vision M-14
OPTI-FIX Kits — Modular Clamping System M-15-17
for Vision Measuring Systems
Quick Guide to Precision Measuring Instruments M-18,19

QV H4 606

QV Active 202

QV WLI

M-1
Quick Scope
SERIES 359 — Manual Vision Measuring System

FEATURES • The quick release system on the stage enables ■ Illumination

• Surface, contour and fiber-optic ring instant switching between coarse and fine
light illumination options enable users to movements.
configure the QS lighting to meet a variety of • Quick Navigation function enables the user to
measurement needs. repeat measurements quickly.
• Powerful, Windows®-based QSPAK software During automatic
offers a spectrum of measuring and analysis measurement the
part program provides
capabilities. Contour (stage) illumination automatic control
• Functions include auto-focus, measurement over the illumination
playback, one-click edge detection, graphic system, thus providing
display, 48 different macros and a pattern the necessary balance
between user-
matching function for several common part friendliness and high
features. efficiency.
• Excellent surface observation model for a
variety of workpieces.
Surface (coaxial) illumination
• 0.1µm resolution and 150mm Z-axis range.
• Power zoom enables quick magnification
changes.
• Fine illumination capability enables lighting
changes to match workpiece requirements.

Fiber-optic ring illumination

SPECIFICATIONS
Model No. QS-L2010ZB QS-L3017ZB QS-L4020ZB
Range (X-axis / Y-axis / Z-axis) 8” x 4” x 6” / 200 x 100 x 150mm 12" x 6.7" x 6" / 300 x 170 x 150mm 15.7" x 8" X 6" / 400 x 200 x 150mm
Resolution 0.1μm
Scale type Linear encoder
Measuring accuracy (at 20°C XY: (2.5+20L/1000)μm
and 3.0x magnification) Z: (5+40L/1000)μm
Image detecting unit 1/2" 3 MP Color CMOS camera
Illumination (Halogen) Co-axial light, fiber-optic ring light, stage light
Stage glass size 9.84 x 5.91"(250 x 150 mm) 14.57 x 9.45"(370 x 240 mm) 17.32 x 9.45"(440 x 240 mm)
Max. workpiece height 6” / 150mm
Max. stage loading 22 lbs / 10 kg 44 lbs / 20 kg 33 lbs / 15 kg
Dimensions (W x D x H) 25" x 30" x 28" / 624 x 769 x 722 mm 27" x 33" x 36" / 682 x 837 x 916 mm 30" x 33" x 37" / 757 x 837 x 930 mm
Mass (main unit) 158.7 lbs / 72 kg 308.6 lbs /140 kg 321.9 lbs / 146 kg

Peripheral options
■ System diagram
• Foot switch - standard type (937179T)
Software options • Calibration chart (02AKN020) ■ Control Box
• Measurement support software: QS-CAD I/F
QS-LZB
• Shape evaluation and analysis software: FORMPAK-QV
• Statistical process control software: MeasurLink Stage accessory options
PC Set • Rotary table
Standard software
·Rotary table with fine-feed knob (A) (176-305)
QSPAK For 2010 size stages
*1 Adapter B (176-310) is required for 2010 models. ·Rotary table with fine-feed knob (B) (176-306)
Adapter (176-304) is required for 3017 and 4020 models. For 3017 or 4020 size stages
*2 Can be installed on rotary table with fine-feed knob (A). For QS-LZB
• Swivel center support (172-197)
Cannot be installed on rotary table with fine-feed knob (B). • Holder with clamp (176-107)
• V-block with clamp (172-378)

■ Optical system magnification ratios available for QS-LZB

Total magnification 29X 38X 49X 58X 87X 116X 145X 202X
Field of View (mm) 8.8×6.6 6.8×5.1 5.2×3.9 4.4×3.3 2.9×2.2 2.2×1.6 1.7×1.3 1.2×0.9

QS-LZB 0.75X 0.98X 1.28X 1.5X 2.25X 3X 3.75X 5.25X

Working distance (mm) 55
* Total magnification shown in the above table is a reference value displayed in the default window state when using 22-inch LCD.

M-2
 Quick Image
SERIES 361 — Non-contact 2-D Vision Measuring System

Double-telecentric optics enable Quick Image is a new concept in 2-D vision measuring instruments. It provides unique
efficient measurement with a features for improving measurement efficiency.
wide field of view
FEATURES
Batch measurement with a wide field of view
1.259” x 0.945”(32 x 24mm) realized using • Long focal depth and wide field of view • Single-click measurement execution
a 0.2X magnification model can substantially • Telecentric optical system • Displays measurement results on video
improve measurement efficiency. • 3 mega-pixel color CCD camera window
With a 0.5X magnification model, dimensions • Large quadrant LED ring light • Orientation of part is automatically detected
of very small workpieces and stepped
workpieces easily can be measured.

Color camera

Image-space
telecentric lens

Object-space
telecentric lens

Workpiece to be
measured

Actual image acquired with a 0.2X QI-A2010D

magnification model QI-C2010D

SPECIFICATIONS Manual stage model Motorized stage model

0.2X Model QI-A1010D QI-A2010D QI-A2017D QI-A3017D QI-A4020D QI-C2010D QI-C2017D QI-C3017D
0.5X Model QI-B1010D QI-B2010D QI-B2017D QI-B3017D QI-B4020D
3.94" x 3.94" 7.87" x 3.94" 7.87" x 6.69" 11.8" x 6.69" 15.7" x 7.87" 7.87" x 3.94" 7.87" x 6.69" 11.8" x 6.69"
Measuring range (X×Y)
100×100mm 200×100mm 200×170mm 300×170mm 400×200mm 200×100mm 200×170mm 300×170mm
6.69" x 6.69" 9.53" x 5.51" 10.2" x 9.06" 14.2" x 9.06" 17.3" x 9.13" 9.53" x 5.51" 10.2" x 9.06" 14.2" x 9.06"
Effective stage glass size
170×170mm 242×140mm 260×230mm 360×230mm 440×232mm 242×140mm 260×230mm 360×230mm
Approx. 33 lbs. Approx. 22 lbs.
Maximum stage loading *1 Approx. 22 lbs.(10kg) Approx. 44 lbs.(20kg) Approx. 44 lbs.(20kg)
(15kg) (10kg)
Approx. 143 lbs. Approx. 152 lbs. Approx. 330 lbs. Approx. 348 lbs. Approx. 361 lbs. Approx. 158 lbs.
Approx. 337 lbs. Approx. 354 lbs.
Main unit mass
65kg 69kg 150kg 158kg 164kg 72kg 153kg Approx. 161kg
*1 Does not include extremely offset or concentrated loads
QI-A / QI-C QI-B
View field 1.26" x 0.94" (32×24mm) 0.50" x 0.378" (12.8×9.6mm)
Measurement mode High resolution mode / Normal mode *4
Travel range (Z axis) 3.94"(100mm)
Measurement accuracy High resolution mode ±2µm ±1.5µm
within the screen *1 Normal mode ±4µm ±3µm
Accuracy Repeatability within the High resolution mode ±1µm ±0.7µm
screen (±2σ) *2 Normal mode ±2µm ±1µm
Measurement accuracy (E1xy) *1 ±(3.5+0.02) µm L: arbitrary measuring length (mm)
Monitor magnification *3 7.6X 18.9X
Magnification (Telecentric Optical System) 0.2X 0.5X
High resolution mode ±0.6mm ±0.6mm
Optical system Depth of focus
Normal mode ±11mm ±1.8mm
Working distance 3.54"(90mm)
Camera 3 million pixels, 1/2", full color
Transmitted light: Green LED telecentric illumination
Illumination Co-axial light: White LED
Ring light: 4-quadrant white LED
Power supply 100-240VAC 50/60Hz
Accuracy guaranteed temperature range 19-21ºC
*1 Inspected to Mitutoyo standards by focus point position.
*2 The measuring accuracy is guaranteed to be accurate within the depth of focus.
*3 For 1X digital zoom (when using the 22-inch-wide monitor)
*4 Patent registered (Japan)

M-3
QV Active
Compact CNC Vision Measuring Systems

FEATURES
• High-quality zoom optics with
interchangeable lenses
• High-resolution and high-speed color camera
• Compact design saves significant space—
available in two sizes
• Powerful QVPAK 3D vision software
• Contact and noncontact measurement
• Touch-probe retrofittable
• Programmable LED stage, coaxial and Touch-Probe System
The QV touch-probe system is available on all the models.
4-quadrant ring light All touch-probe systems include probes, modules, calibration
articles and installed software. (See page M-13)

74mm

1X, 1.5X and 2X interchangeable lens Long working distance 74mm

*when using Z-objective 1X
QV Active 202

Optical magnification 0.5X 0.65X 0.75X 0.85X 0.98X 1X 1.28X 1.3X 1.5X 1.7X 2X 2.25X 2.5X 3X 3.5X 3.75X 4X 5X 5.25X 7X
View field Horizontal (H) 13.60 10.46 9.07 8.00 6.94 6.80 5.31 5.23 4.53 4.00 3.40 3.02 2.72 2.27 1.94 1.81 1.70 1.36 1.30 0.97
(mm) Vertical (V) 10.80 8.31 7.20 6.35 5.51 5.40 4.22 4.15 3.60 3.18 2.70 2.40 2.16 1.80 1.54 1.44 1.35 1.08 1.03 0.77
Objective 1X ● ● ● ● ● ● ● ●
Working distance 74mm
0.75X
Objective 1.5X ● ● ● ● ● ● ● ●
Working distance 42mm
Objective 2X ● ● ● ● ● ● ● ●
Working distance 42mm

SPECIFICATIONS
1.28X
Name Quick Vision Active
Model No. QV Active 202 / QV Active 202 TP QV Active 404 / QV Active 404 TP
9.84“ x 7.87“ x 5.91“ 15.75“ x 15.75“ x 7.87“
Range (X,Y,Z-axis) with vision head 250 x 200 x 150 mm 400 x 400 x 200 mm
Resolution 0.1 µm
E1(X,Y) = (2+3L/1000) 2.25X
Accuracy (µm)* E1(Z) = (3+5L/1000)
E2(X,Y) = (2.5+4L/1000)
Max. stage loading 22 lbs. (10 kg) 44 lbs. (20 kg)
8 steps high
Mass 265 lbs. (120 kg) 606 lbs. (275 kg) speed zoom
(White LED)
Illumination Contour / Coaxial / 4-quadrant ring light
Zoom optical system with 8 positions
Magnification change system (Standard 1.5X magnification lens)
Sensor type High-resolution CMOS color camera 5.25X

Optional objective lenses 1X and 2X magnification

Factory option Series 364 (TP) Touch-Probe option (Page M-13)
* L is arbitrary length in mm

M-4
 Image Multi-AutoFocus
The optimal focus can be selected
QV Apex
for each surface texture and
measured feature, realizing high
SERIES 363 — CNC Vision Measuring System
reproducibility and reliable edge
detection.

Pattern
focus

Surface focus Edge focus

Programmable Ring Light (PRL)

Fine control of obliquity and direction provides illumination
optimal for measurement. Obliquity can be arbitrarily set in the Optional Index Table*
range from 30° to 80°. This type of illumination is effective for Automatic multi-plane
enhancing the edge of inclined surfaces or very small steps. measurement is possible with
Illumination can be controlled independently in every the optional index table. Refer
direction, front and back, right and left. Measurement with to page M-14 for more details.
edge enhancement is possible by forming a shadow with *Not available with QV ACCEL models
lighting from only one direction.
QV Apex 302 PRO
Four-quadrant
Parabolic LED light
mirror
Toroidal mirror QV Apex 606 PRO

Workpiece
surface
30° 60° 80°

Tracking Auto Focus (TAF)

The TAF feature focuses continuously, adjusting to chan-
ges in the height of the object being measured. Automatic SPECIFICATIONS
tracking of surface waves and warpage (in the Z axis Name Quick Vision Apex
height direction) improves measurement throughput.
The feature also eliminates the hassle of focusing during QV Apex 302 PRO QV Apex 404 PRO QV Apex 606 PRO
manual measurement. QV Apex 302 QV Apex 404 QV Apex 606
Model No. (ISO10360-7) (ISO10360-7) (ISO10360-7)
QV Apex 302 (w/TAF) QV Apex 404 (w/TAF) QV Apex 606 (w/TAF)
X-axis 11.81” / 300mm 15.75” / 400mm 23.62” / 600mm
Measuring Y-Axis 7.87” / 200mm 15.75” / 400mm 25.59” / 650mm
Automatic Z-axis tracking Objectives Range
Z-Axis 7.87” / 200mm 9.84” / 250mm 9.84” / 250mm
Resolution / Scale Unit 0.1µm / Reflective-type Linear Encoder
Resolution Z Scale Using 0.3 µm
Tracking Autofocus (TAF)
Parfocal Laser Auto Focus repeatability s ≤ 0.8 µm
Parfocal
CCD camera B&W
Surface White LED
Surface of workpiece Illumination Contour White LED
Unit (LED)
Programmable Ring Light White LED
Max. Drive X/Y Axis 300 mm/s 400 mm/s
Tracking Auto Focus (TAF) Speed Z-Axis 300 mm/s 300 mm/s
AF principle Objective coaxial autofocusing (knife-edge method)
Suitable objectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x E1X,E1Y (1.5+3L/1000)µm
6.3mm 6.3mm 1mm 1mm 0.25mm E1Z
Tracking range*2
(±3.15mm) (±3.15mm) (±0.5 mm) (±0.5 mm) (±0.125mm) (1.5+4L/1000)µm
Spot diameter* 3
5.2μm 8.0μm 2.1μm 3.1μm 1.5μm Measuring E2XY
Accuracy* (2+4L/1000)µm
Laser source Semiconductor laser (peak wavelength: 690nm)
Laser power 0.9mW EU,MPE (ISO10360-7:2011) 3+5.5L/1000, 3+6L/1000**
Laser safety Class 2 (JIS C6802:2011, EN/IEC 60825-1:2007) PF2D,MPE (ISO10360-7:2011) 2.3µm
*2 Varies according to workpiece surface texture and reflectance.
*3 These are design values. Magnification Change System Programmable Power Turret (1x, 2x, 6x)
15.71” x 10.67” 19.41” x 21.69” 27.44” x 29.84”
Stage Glass Size (399 x 271mm) (493 x 551mm) (697 x 758mm)
Optional Accessories: Refer to page M-14. Maximum Stage Loading 44 lbs. (20kg) 88 lbs. (40kg) 110 lbs. (50kg)
37.44” x 33.82” x 41.06” 55.39” x 40.43” x 54.37” 78.15” x 51.54” x 61.81”
Dimensions of Main Unit ( 951 x 859 x 1043mm) ( 1407 x 1027 x 1381mm) ( 1985 x 1309 x 1570mm)
Mass of Main Unit
(Including Machine Stand) 794 lbs. (360kg) 1276 lbs. (579kg) 3197 lbs. (1450kg)
*The measuring accuracy defined under the following conditions:
Programmable Power Turret: 2x Position; Objective Lens: 2.5x (HR or SL); L=Dimension between two arbitrary points (mm)
**Accuracy 3.5+5.5L/1000 for 20 ± 2°C, Accuracy 3+6L/1000 from 18 to 23°C

M-5
QV Stream Plus FEATURES
SERIES 363 — CNC Vision Measuring System

QV Stream Plus 606 PRO Non-stop Vision Measurement

Extreme Improvement in Throughput*
Conventional vision measuring systems endlessly repeat
the cycle of stage displacement, stage stop, measurement,
stage start and stage displacement. This mode of operation
is a fundamental limitation on improving measurement
throughput.
In contrast, the Quick Vision Stream system uses an
innovative image capture technique that avoids the need to
repeatedly stop the stage, thereby allowing for continuous
measurement while still maintaining accuracy.
Measurement Throughput Comparison between QV
STREAM and the Conventional System
STREAM PLUS series: more than 5 times faster
* Comparison of measurement throughput using a Mitutoyo sample workpiece
with that of conventional Mitutoyo systems.

Newly Developed Stroboscopic Illumination System

High-density mounting of The development of a high-intensity LED flash illuminator
ultra-high intensity LED elements makes non-stop vision measurement possible. At the precise
moment the stage reaches a measurement point, the
Collimator lens array Collimator lens array
Camera Moves & processes Camera illuminator creates an extremely short, high-intensity flash
images continuously Dichroic Red LED
mirrors that effectively freezes all motion. The illuminator turns on
Green LED Dichroic and off so quickly that no image blur occurs, and the image
Blue LED mirrors
LED is captured in full and accurate detail.
(Flash & Capture) (Flash & Capture) (Flash & Capture) (Flash & Capture) elements Mirror-2 This innovative design takes full advantage of high-density,
Syn Mirror-1
the high-intensity LED arrays aided by collimating lenses and
Reflection tic dichroic mirrors to produce ultra bright, directional and
cya
mirrors n
Stage efficient illumination.
SPECIFICATIONS
Name Quick Vision Stream Plus
Tracking Auto Focus (TAF)
QV Stream Plus 302 PRO QV Stream Plus 404 PRO QV Stream Plus 606 PRO
Model No. The TAF feature continuously focuses, adjusting to chan-
QV Stream Plus 302 (w/TAF) QV Stream Plus 404 (w/TAF) QV Stream Plus 606 (w/TAF) ges in the height of the object being measured. Automatic
X-axis 11.81” / 300mm 15.75” / 400mm 23.62” / 600mm tracking of surface waves and warpage (in the Z axis
Measuring Range Y-Axis 7.87” / 200mm 15.75” / 400mm 25.59” / 650mm
height direction) improves measurement throughput. The
feature also cuts out the hassle of focusing during manual
Z-Axis 7.87” / 200mm 9.84” / 250mm 9.84” / 250mm measurement, reducing the work burden for measuring
Resolution / Scale Unit 0.1µm / Reflective-type Linear Encoder system operators.
Resolution Z Scale Using
0.3 µm
Tracking Autofocus (TAF)
Automatic Z-axis tracking Objectives
Laser Auto Focus repeatability s ≤ 0.8 µm
CCD camera B & W, Progressive Scanning CCD
Surface (C) Red, Green, Blue & White (LED)
Illumination Unit Surface (S) Blue (LED) Parfocal
(C: Continuous; Contour (C) Blue (LED) Parfocal
S: Stroboscopic;
PRL: Programmable Contour (S) Blue (LED) Surface of workpiece
Ring Light) PRL (C) Red, Green, Blue & White (LED)
PRL (S) Blue (LED)
Tracking Auto Focus (TAF)
Max. Drive Speed X/Y/Z Axis 300 mm/s AF principle Objective coaxial autofocusing (knife-edge method)
E1X,E1Y (1.5+3L/1000)µm Suitable objectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x
Measuring 6.3mm 6.3mm 1mm 1mm 0.25mm
E1Z (1.5+4L/1000)µm Tracking range*2
(±3.15mm) (±3.15mm) (±0.5 mm) (±0.5 mm) (±0.125mm)
Accuracy* Spot diameter*3 5.2μm 8.0μm 2.1μm 3.1μm 1.5μm
E2XY (2+4L/1000)µm Laser source Semiconductor laser (peak wavelength: 690nm)
Magnification Change System Programmable Power Turret (1x, 2x, 6x) Laser power 0.9mW
Laser safety Class 2 (JIS C6802:2011, EN/IEC 60825-1:2007)
15.71” x 10.67” 19.41” x 21.69” 27.44” x 29.84”
Stage Glass Size *2 Varies according to workpiece surface texture and reflectance.
(399 x 271mm) (493 x 551mm) (697 x 758mm) *3 These are design values.
Maximum Stage Loading 44 lbs. (20kg) 88 lbs. (40kg) 110 lbs. (50kg)
37.44” x 33.82” x 41.06” 55.39” x 40.43” x 54.37” 78.15” x 51.54” x 61.81”
Dimensions of Main Unit
(951 x 859 x 1043mm) (1407 x 1027 x 1381mm) (1985 x 1309 x 1570mm)
Mass of Main Unit (Including
794lbs. (360kg) 1276 lbs. (579kg) 3197 lbs. (1450kg)
Machine Stand)
*The measuring accuracy defined under the following conditions:
Programmable Power Turret: 2x Position; Objective Lens: 2.5x (HR or SL); L=Dimension between two arbitrary points (mm)

M-6
Programmable Power Turret (PPT)
The three tube lens selection provides three magnification
QV Hyper
levels with the same objective lens. Replacement objective SERIES 363 — High-accuracy CNC Vision Measuring System
lenses allow a wide range of magnifications to support a
variety of measurements.

1X tube lens x 2.5X objective 2X tube lens x 2.5X objective

View field: 2.5 x 1.88 mm View field: 1.25 x 0.94 mm

6X tube lens x 2.5X objective

View field: 0.41 x 0.31 mm

Four-quadrant
Parabolic LED light
mirror
Toroidal mirror

Workpiece QV Hyper 404 PRO

surface
30° 60° 80°

Programmable Ring
Light (PRL) SPECIFICATIONS
Fine control of obliquity and Name Quick Vision Hyper
direction provides illumination
optimal for measurement. QV Hyper 302 PRO QV Hyper 404 PRO QV Hyper 606 PRO
Obliquity can be arbitrarily set Model No. QV Hyper 302 (ISO10360-7) QV Hyper 404 (ISO10360-7) QV Hyper 606 (ISO10360-7)
in the range from 30° to 80°. QV Hyper 302 (w/TAF) QV Hyper 404 (w/TAF) QV Hyper 606 (w/TAF)
This type of illumination is
effective for enhancing the X-axis 11.81” / 300mm 15.75” / 400mm 23.62” / 600mm
edge of inclined surfaces or Measuring Range Y-Axis 7.87” / 200mm 15.75” / 400mm 25.59” / 650mm
very small steps.
Illumination can be Z-Axis 7.87” / 200mm 9.84” / 250mm 9.84” / 250mm
controlled independently Resolution / Scale Unit 0.02µm / Reflective-type Linear Encoder
in every direction, front
Resolution Z Scale using Tracking Autofocus (TAF) 0.26 µm
and back, right and left.
Measurement with edge Laser Auto Focus repeatability s ≤ 0.8 µm
enhancement is possible CCD Camera B&W
by forming a shadow by
lighting from only one Surface White LED
direction. Illumination Unit (LED) Contour White LED
Programmable Ring Light White LED
Max. Drive Speed X/Y/Z-Axis 200mm/s
E1X,E1Y (0.8+2L/1000)µm
E1Z (1.5+2L/1000)µm
Measuring Accuracy* E2XY (1.4+3L/1000)µm
EU,MPE (ISO10360-7:2011) 2.5+4L/1000, 2.5+4.5L/1000**
PF2D,MPE (ISO10360-7:2011) 1.7µm
Magnification Change System Programmable Power Turret (1x, 2x, 6x)
Stage Glass Size 15.71” x 10.67” (399 x 271mm) 19.41” x 21.69” (493 x 551mm) 27.44” x 29.84” (697 x 758mm)
Maximum Stage Loading 44 lbs. (20kg) 88 lbs. (40kg) 110 lbs. (50kg)
37.44” x 33.82” x 41.06” 55.39” x 40.43” x 54.37” 78.15” x 51.54” x 61.81”
Dimensions of Main Unit
( 951 x 859 x 1043mm) ( 1407 x 1027 x 1381mm) ( 1985 x 1309 x 1570mm)
Mass of Main Unit (Including Machine Stand) 794 lbs. (360kg) 1276 lbs. (579kg) 3197 lbs. (1450kg)
*The measuring accuracy defined under the following conditions:
Programmable Power Turret: 2x Position; Objective Lens: 2.5x (HR or SL); L=Dimension between two arbitrary points (mm)
**Accuracy 2.5+4L/1000 for 20 ± 2°C, Accuracy 2.5+4.5L/1000 from 18 to 23°C

M-7
QV Hybrid Type 1, Type 4
SERIES 365 — CNC Vision Measuring System with Non-contact FEATURES: Hybrid Type 1
• The focusing point method minimizes the difference in the
Displacement Sensor measuring face reflectance and realizes high measurement
reproducibility.
• The double pinhole method (less directivity) is employed as
FEATURES Vision head
Non-contact
displacement
the measurement principle.
The Quick Vision Hybrid is an sensor

advanced machine that allows

vision measurement with both Type 4 Displacement Sensor
a CCD camera and high-speed
Laser head
scanning by applying a vision Vision head
measurement unit in
parallel with a non-contact CLASS 1 LASER PRODUCT
displacement sensor.
Safety precautions regarding laser autofocus system
(factory-installed option)
This product uses a low-power visible laser (690nm) for
measurement. The laser is a CLASS 1 EN/IEC60825-1 (2007)
device. A warning and explanation label, as shown above, is
QVH4 606 attached to the product as appropriate.
SPECIFICATIONS
Name Quick Vision Hybrid 302 Quick Vision Hybrid 404 Quick Vision Hybrid 606
QVH Apex 302 QV Hyper 302 QVH Apex 404 QV Hyper 404 QVH Apex 606 QV Hyper 606
Model No. QV Apex 302 QV Hyper 302 QVH Apex 404 QV Hyper 404 QVH Apex 606 QV Hyper 606
(ISO10360-7) (ISO10360-7) (ISO10360-7) (ISO10360-7) (ISO10360-7) (ISO10360-7)
QVH STREAM 302 QVH STREAM 404 QVH STREAM 606
Measuring Vision 11.81” x 7.87” x 7.87” (300x200x200mm) 15.75” x 15.75” x 9.84” (400x400x250mm) 23.62” x 25.59” x 9.84” (600x650x250mm)
Range Non-contact TYPE1 7.09” x 7.87” x 7.87” (180×200×200mm) 11.02” x 15.75” x 9.84” (280×400×250mm) 18.90” x 25.59” x 9.84” (480×650×250mm)
(XxYxZ) Displacement
Sensor TYPE4*1 6.92” x 7.87” x 7.87” (176×200×200mm) 10.87” x 15.75” x 9.84” (276×400×250mm) 18.74” x 25.59” x 9.84” (476×650×250mm)
E1X, E1Y (1.5+3L/1000)μm (0.8+2L/1000)μm (1.5+3L/1000)μm (0.8+2L/1000)μm (1.5+3L/1000)μm (0.8+2L/1000)μm
(Vision)*2*3 E1Z (1.5+4L/1000)μm (1.5+2L/1000)μm (1.5+4L/1000)μm (1.5+2L/1000)μm (1.5+4L/1000)μm (1.5+2L/1000)μm
E2XY (2.0+4L/1000)μm (1.4+3L/1000)μm (2.0+4L/1000)μm (1.4+3L/1000)μm (2.0+4L/1000)μm (1.4+3L/1000)μm
Measuring (Displacement
Accuracy Sensor)*2*3 E1Z (1.5+4L/1000)μm (1.5+2L/1000)μm (1.5+4L/1000)μm (1.5+2L/1000)μm (1.5+4L/1000)μm (1.5+2L/1000)μm
3+5.5L/1000*4 2.5+4L/1000*4 3+5.5L/1000*4 2.5+4L/1000*4 3+5.5L/1000*4 2.5+4L/1000*4
(ISO10360- EU,MPE
3+6.0L/1000*5 2.5+4.5L/1000*5 3+6.0L/1000*5 2.5+4.5L/1000*5 3+6.0L/1000*5 2.5+4.5L/1000*5
7:2011)
PF2D,MPE 2.3µm 1.7µm 2.3µm 1.7µm 2.3µm 1.7µm
Scale Resolution 0.1µm 0.02µm 0.1µm 0.02µm 0.1µm 0.02µm
Max. Drive Speed X/Y/Z Axis 300 mm/s 200 mm/s 300 mm/s 200 mm/s 300 mm/s 200 mm/s
Stage Glass Size 15.71” x 10.67” (399 x 271mm) 19.41” x 10.67” (493 x 551mm) 27.44” x 29.84” (697 x 758mm)
Maximum Stage Loading 44 lbs. (20kg) 88 lbs. (40kg) 110 lbs. (50kg)
37.44” x 33.82” x 41.06” 55.39” x 40.43” x 54.37” 78.15” x 51.54” x 61.81”
Dimensions of Main Unit
( 951 x 859 x 1043mm) (1407 x 1027 x 1381mm) (1985 x 1309 x 1570mm)
Mass of Main Unit
794 lbs. (360kg) 1276 lbs. (579kg) 3197 lbs. (1450kg)
(Including Machine Stand)

Name Quick Vision ACCEL *1

TYPE 4 is not supported by QVH STREAM
Model No. QVH ACCEL808 QVH ACCEL 1010 QVH ACCEL 1212 QVH ACCEL 1517 *2
L = arbitrary measuring length (mm)
31.50x31.50x5.91” 39.37x39.37x5.91” 49.21x49.21x3.94” 59.06X68.90X3.94”
*3
Inspected by Mitutoyo standard
Vision *4
Accuracy for 20 ± 2°C
Measuring (800x800x150mm) (1000x1000x150mm) (1250x1250x100mm) (1500x1750x100mm)
Range Non-contact
*5
Accuracy from 18 to 23°C
(XxYxZ) 26.77x31.50x5.91” 34.65x39.37x5.91” 44.49X49.21X3.94” 54.33x68.90x3.94”
Displacement TYPE1
(680x800x150mm) (880x1000x150mm) (1130x1250x100mm) (1380x1750x100mm) FEATURES: Hybrid Type 4
Sensor
E1X, E1Y (1.5+3L/1000)μm (2.2+3L/1000)μm
• Enables detection of high inclination angles for both
(Vision)*2*3 E1Z (1.5+4L/1000)μm (2.5+5L/1000)μm mirror and diffused surfaces.
Measuring
Accuracy E2XY (2.5+4L/1000)μm (3.5+4L/1000)μm • The automatic lighting adjustment function allows for
(Displacement high-accuracy measurements.
E1Z (2.5+4L/1000)μm (3.5+5L/1000)μm
Sensor)*2*3
Scale Resolution 0.1µm •Thickness measurement of thin and transparent objects
Max. Drive X/Y Axis 400 mm/s 300 mm/s such as film.
Speed Z Axis 150 mm/s 150 mm/s
34.76”x 37.72” 46.69” x 46.69” 56.69”x56.69” 67.48” x 77.48”
Stage Glass Size
(883x958mm) (1186x1186mm) (1440x1440mm) (1714x1968mm)
Maximum Stage Loading 22 lbs. (10kg) 66 lbs. (30kg)
58.07” x 73.23” x 62.13” 75.28” x 84.29” x 63.11” 85.28” x 93.31” x 61.18” 96.06” x 114.09” x 61.18”
Dimensions of Main Unit
(1475 x 1860 x 1578mm) (1912 x 2141 x 1603mm) (2166 x 2370 x 1554mm) (2440 x 2898 x 1554mm)
Mass of Main Unit 4519lbs. (2050kg) 6504 lbs. (2950kg) 7937 lbs. (3600kg) 9921 lbs. (4500kg)

Common Specifications QV Apex QV Hyper QV Accel QV Stream

CCD camera Black & White Black & White; Progressive
Scanning
Magnification Change System Programmable Power Turret (1x, 2x, 6x)
Guide Method Linear Motion Hard Bearing 3-dimensional topographical result, data of
Illumination (Catalog Page Number M-5 M-7 M-12 plastic package by MCubeMAP
Reference) M-6
* Specification of QVH1 ACCEL

M-8
 QV WLI
SERIES 363 — CNC Video Measuring System with White Light Interferometry

• QV WLI can measure coordinates and • Large work stage accurately handles over-
dimensions and assess micro-3D forms sized work pieces such as a PCB.
without contact.
• High-accuracy, dual-head vision measuring
QV WLI QV WLI QV WLI
5x objective 10x objective 25x objective system equipped with a white light
interferometer.
• The white light interferometer uses a high
aspect ratio to accurately measure shapes.
• The standard vision measuring function can
diam continuously perform coordinate,
eter
dimension and 3D shape measuring.

depth

Application view of nano hole

QV objective WLI objective

Projected image using Projected image using

the Quick Vision the WLI
measurement sensor. measurement sensor.

width

depth

Application view of surface trace SPECIFICATIONS

Name QV Hyper WLI 302 QV Hyper WLI 404 QV Hyper WLI 606
QV Hyper WLI 302 QV Hyper WLI 404 QV Hyper WLI 606
Model No.
(ISO10360-7) (ISO10360-7) (ISO10360-7)
11.81” x 7.87” x 7.48” 15.75” x 1575” x 9.45” 23.62” x 25.59” x 8.66”
Vision Measuring Area
Measuring (300×200×190mm) (400×400×240mm) (600×650×220mm)
Range (X×Y×Z) 8.46” x 7.87” x 7.48” 12.40” x 15.75” x 9.44” 20.58” x 25.59” x 8.66”
WLI Measuring Area*1
(215×200×190mm) (315×400×240mm) (515×650×220mm)
WLI Optical Head Unit
5X lens: approx. 0.64x0.48mm / 10X lens: approx. 0.32×0.24mm / 25X lens:
Field of View (H×V)
FormTracePak AP approx. 0.13×0.10mm
Illumination Co-axial Light Halogen
Repeatability 2σ ≤ .08μm
Z-axis Scanning Range*2 170μm
Vision Optical Head Unit
Magnification Change System Programmable Power Turret (1X-2X-6X)
Image Detection Method B&W CCD camera
Co-axial Light White LED
Illumination Transmitted Light White LED
Programmable Ring Light White LED
Region of interest evaluation
E1X, E1Y (0.8+2L/1000)μm
E1Z (1.5+2L/1000)μm
Measuring E2XY (1.4+3L/1000)μm
Accuracy
EU,MPE (ISO10360-7:2011) 2.5+4L/1000
PF2D,MPE (ISO10360-7:2011) 1.7µm
Main Unit
Resolution 0.01μm
Max. Stage Loading 33 lbs. (15kg) 55 lbs. (25kg) 77 lbs. (35kg)
Guidance System Linear Motion Hard Bearing
3-dimensional topographical result, data 33.82” x 37.40” x 63.23” 40.43” x 55.39” x 70.11” 51.54” x 78.15” x 70.55”
Dimensions (W×D×H)
of micro-circuit (859×950×1606mm) (1027×1407×1781mm) (1309×1985×1792mm)
Mass (Vibration Isolator Stand Included) Approx. 1080 lbs. (490kg) Approx. 2557 lbs. (1160kg) Approx. 2275 lbs. (1031kg)
*1: WLI head is moveable. Multiple fields of view can be stitched together.
*2: In standard mode. Applicable to max. 200μm by modifying scan pitch.

M-9
ULTRA QV
SERIES 363 — Ultra-high Accuracy CNC Vision Measuring System Self-Suction Air Pad
If a normal air pad is used for the Y axis, it is necessary to
increase the mass of the work stage to obtain appropriate
FEATURES rigidity. ULTRA QV (Quick Vision) employs a special air
pad called a self-suction type that floats the air pad using
• Minimizes straightness errors through the •In order to minimize error caused by compressed air and also generates an absorption power with a
use of a precision air-bearing linear guide temperature fluctuations, the linear encoder vacuum zone provided under negative pressure at the center of
system. scale is made of special crystallized glass with the pad. This achieves greater Y-axis rigidity and stage weight
reduction concurrently, thus enabling
• Utilizes a 0.01μm resolution glass scale an expansion coefficient that is almost zero. stable stage drive.
manufactured at an ultra-precision facility • Optimizes the mechanical structure of the
located 11 meters underground. main unit in Finite Element Method analysis. Compressed air Compressed air
• Stabilizes the geometrical accuracy Suction
Guide plane
(i.e. straightness of each axis and Air pad
perpendicularity) to lessen thermal effects.

Vacuum suction
region

Ball Screw Floating Mechanism

ULTRA QV employs high-reliability ball screws in the floating
mechanism. This floating mechanism will minimize the
error due to axial fluctuation that adversely affects kinetic
performance, such as straightness, and improves the driving
speed. Ball Screw Pulse Generator

Servomotor

Floating Mechanism
Guide Block

ULTRA QV 404 PRO Nut

SPECIFICATIONS
ULTRA QV 404 PRO Standard glass scale
ULTRA QV 404 PRO
w/ TAF
Model No.
ULTRA QV 404 PRO ULTRA QV 404 PRO
(ISO10360-7:2011) w/ TAF (ISO10360-7:2011) Ultra-high accuracy crystallized
Range XxYxZ 16” x 16” x 8” (400x400x200mm) glass scale with virtually zero
thermal expansion
Programmable Power Turret
Magnification Change System
(Selectable from Magnifications of 1X, 2X and 6X)
Resolution / Scale Unit 0.01µm / Linear Encoder*4 The ULTRA Quick Vision is equipped with a crystallized glass
Resolution of Z-Scale Using TAF – 0.25µm scale having a resolution of 0.01µm and linear expansion
High-sensitivity CCD Camera B&W coefficient of ±0.02x10-6/K. Virtually zero thermal expansion
means the ULTRA Quick Vision can minimize accuracy
Illumination Surface Halogen
fluctuation resulting from thermal changes.
(PRL: Programmable Ring Contour Halogen
Light) PRL Halogen
E1XY (0.25+L/1000)µm
E1Z (50mm Stroke)*2 (1.0+2L/1000)µm Tracking Auto Focus (TAF)
E1Z (Full Stroke) (1.5+2L/1000)µm The TAF feature focuses continuously, adjusting to chan-
Accuracy*1 (20˚C±0.2˚C) ges in the height of the object being measured. Automatic
E2XY Plane (0.5+2L/1000)µm
EU,MPE (ISO10360-7:2011) 1.3+3L/1000, 1.3+3.5L/1000*5 tracking of surface waves and warpage (in the Z axis)
improves measurement throughput. The feature also cuts
PF2D,MPE (ISO10360-7:2011) 1.0µm out the hassle of focusing during manual measurement
Temperature Range 20±0.2˚C and reduces the burden for the operator.
Accuracy Assurance
Temperature Variation 0.5˚C/1H
Environments *3

Temperature Gradient 1˚C/m Automatic Z-axis tracking Objectives

Repeatability within the Visual Field 3s=0.2µm
Repeatability of Auto-focus s=0.4µm
Stage Glass Size 19.4” x 21.7” (493x551mm)
Max. Stage Loading 88lb (40kg) Parfocal

Dimensions (W x D x H) 46” x 68” x 75.2” (1172x1735x1910mm) Parfocal

Mass 4464 lb (2025kg) Surface of workpiece

Used Air Pressure 0.4MPa*6

Supplied Air Flow Rate 150L/min*7
*1: Accuracy when measured at the center of the video Those in the case where temperature compensation is *5: Accuracy 1.3+3L/1000 for 20 ± 2°C, Accuracy
screen and in the middle of measuring stroke on a plane performed are as follows. 1.3+3.50L/1000 from 18 to 23°C
using the 5X objective and 1X tube lens – Accuracy-assured temperature range: 20±2˚C *6: An air source is required to maintain the original air
*2: Specified only for factory shipping inspection. – Temperature variation: 0.5˚C/H pressure between 0.5 and 0.9MPa.
*3: Accuracy assurance environments in the case where – Temperature gradient: 1˚C/m *7: Indicates the flow rate under normal conditions.
no temperature compensation is performed. *4: Thermal expansion coefficient: (0±0.02)X10-6/K

M-10
 UMAP Vision System TYPE2
SERIES 364 — Micro-form Measuring System

FEATURES
• Ultrasonic micro probe, UMAP
The ultrasonic micro probe (UMAP) has the ability to sense the amplitude variability in a
micro area, and the optional contact points (15 to 300μm diameter) provide high-accuracy
measurements to meet a variety of specifications.
• High-accuracy contact and non-contact measurement capabilities in one system
HYPER UMAP Vision System 302 TYPE2
This unit includes the UMAP and the non-contact type vision head. Until now, it was
difficult to measure minute areas, but it is now possible to do both contact and non-contact
measurement on a single platform.

16mm
10mm
0.2mm

5mm
2mm
ø15 µm ø30 µm ø70 µm ø100 µm ø300 µm
ULTRA UMAP Vision System 404 TYPE2
UMAP101 UMAP103 UMAP107 UMAP110 UMAP130
Stylus Stylus Stylus Stylus Stylus
Application examples
Micro probe, UMAP ø15 µm
ø30 µm
ø70 µm

ø100 µm

Detection of Surface Principle ø300 µm

Amplitude ①
Stylus

Contour measurement of a ø0.125 hole

Duration

Workpiece
Detection signal before workpiece contact
① In this drawing, the stylus is vibrating
with a micro amplitude. When it does not
Amplitude Amplitude reduction ② come into contact with the workpiece, the
Stylus vibration state is maintained.
② As the stylus comes into contact with
the workpiece, the vibration amplitude
Measuring form of micro gear teeth Duration decreases as the contact increases. When
the decreasing amplitude falls below a
Workpiece certain level, a touch-trigger signal is
Detection signal after workpiece contact
generated.

SPECIFICATIONS
TYPE2
Hyper UMAP302 ULTRA UMAP404
Measurement of a fuel injection nozzle
hole’s shape X-axis × Y-axis 7.28 x 7.87” (185×200mm) 11.22 x 15.75” (285×400mm)
Measuring range
6.89” (175mm): UMAP101/103
(common to vision
Z-axis 7.07” (180mm): UMAP107/110
and UMAP)
7.28” (185mm): UMAP130
Measuring accuracy E1X , E1Y (0.8+2L /1000) µm (0.25+L /1000)µm
(Vision) E1Z (1.5+2L /1000) µm
UMAP 101/103/107 σ = 0.1 µm σ = 0.08 µm
Repeatability
UMAP 110/130 σ = 0.15 µm σ = 0.12 µm

Measurement of a lens barrel’s shape

M-11
QV ACCEL
SERIES 363 — Large-format CNC Vision Measuring System

FEATURES Image Multi-AutoFocus

The optimal focus can be selected
Moving-bridge type structure The moving-bridge type structure eliminates for each surface texture and
Designed with primary focus on the need for a moving stage. This facilitates measured feature, providing high
reproducibility and reliable edge
measurement efficiency, the machine a more simplified design of the workpiece detection. Pattern
drives the X and Y axes at 400mm/s (QV fixture, resulting in a significant reduction focus

ACCEL808, ACCEL1010). in the man-hours required for fixture

fabrication and inspection.

Surface focus Edge focus

Programmable Ring Light (PRL)

Fine control of obliquity and direction provides illumination
optimal for measurement. Obliquity can be arbitrarily set in the
range from 30° to 80°. This type of illumination is effective for
enhancing the edge of inclined surfaces or very small steps.
Illumination can be controlled independently in every
direction, back and forth, right and left. Measurement with
edge enhancement is possible by forming a shadow with
lighting from only one direction.
QV ACCEL 808 PRO Four-quadrant
Parabolic LED light
mirror
Toroidal mirror

Workpiece
surface
30° 60° 80°

Tracking Auto Focus (TAF)

The TAF feature focuses continuously, adjusting to changes in
the height of the object being measured. Automatic tracking
QV ACCEL 1212 PRO of surface waves and warpage (in the Z axis) improves measu-
rement throughput. The feature also removes the hassle of
focusing during manual measurement.

SPECIFICATIONS
Model No. QV ACCEL 808 PRO QV ACCEL 1010 PRO QV ACCEL 1212 PRO QV ACCEL 1517 PRO Automatic Z-axis tracking Objectives
Range X-axis 32” / 800mm 40” / 1000mm 50” / 1250mm 60” / 1500mm
Y-axis 32” / 800mm 40” / 1000mm 50” / 1250mm 70” / 1750mm
Z-axis 6” / 150mm 6” / 150mm 4” / 100mm 4” / 100mm
Resolution 0.1µm Parfocal

Resolution of Z Scale Parfocal

0.3µm
using TAF Surface of workpiece
High-sensitivity CCD camera B&W
Accuracy* E1XY (1.5+3L/1000)µm (2.2+3L/1000)µm
E1Z (1.5+4L/1000)µm (2.5+5L/1000)µm
E2XY (2.5+4L/1000)µm (3.5+4L/1000)µm
Tracking Auto Focus (TAF)
Max. Drive Speed X/Y-axis 400mm/s 300mm/s
AF principle Objective Coaxial Autofocusing (Knife-edge method)
Z-axis 150mm/s 150mm/s
Suitable QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x
Illumination Surface LED, white Objectives
(PRL: Programmable
Ring Light) Contour LED, white 6.3mm 6.3mm 1mm 1mm 0.25mm
Tracking Range*2
PRL LED, white (4 divisions) (±3.15mm) (±3.15mm) (±0.5 mm) (±0.5 mm) (±0.125mm)
Magnification Change System Programmable Power Turret (1X, 2x, 6x) Spot Diameter*3 5.2μm 8.0μm 2.1μm 3.1μm 1.5μm
Stage Glass Size 34.8” x 37.7” 46.7” x 46.7” 56.7” x 56.7” 67.5” x 77.5” Laser Source Semiconductor laser (peak wavelength: 690nm)
883 x 958mm 1186 x 1186mm 1440 x 1440mm 1714 x 1968mm Laser Power 0.9mW
Dimensions (W x D x H) 58 x 67.5 x 62” 75.3 x 82 x 63” 85.3 x 92 x 61” 96 x 113 x 61” Laser Safety Class 2 (JIS C6802:2011, EN/IEC 60825-1:2007)
1475x1716x1578mm 1912x2086x1603mm 2166x2340 x1554mm 2440 x 2868 x 1554mm *2 Varies according to workpiece surface texture and reflectance.
*3 Design values.
Max Stage Loading 22 lbs / 10kg 66.1 lbs / 30kg 66.1 lbs / 30kg 66.1 lbs / 30kg
Mass 5666 lbs / 2570kg 6504 lbs / 2950kg 7937 lbs / 3600kg 9921 lbs / 4500kg
* The measuring accuracy is defined at the following conditions, Programmable power turret: 1X, Objective lens: 2.5X (HR or SL),
L = Dimension between two arbitrary points (mm)

M-12
 Quick Vision with Touch-Trigger
Probe
QV3DCAD-Online
QV3DCAD-Online uses 3D CAD models to easily create
Non-contact and contact measurement with one machine
QVPAK part programs. QV measurements can be performed QV touch probe allows both vision measurement and touch-probe measurement.
by specifying an element in the CAD data. This improves
program creation efficiency more than using a joystick to 3D workpiece measurement
perform teaching. Measures three-dimensional workpieces such as molded products, resin-molded products, machined
products and more.
Module change rack available
Easily change between vision and touch-probe measurement with a module change rack.

PH6

TP20

Master ball
Calibration block

Module change rack, MCR20

The interference check function can be used to prevent QV Active with optional Opti-fix
problems caused by the probe or objective lens colliding clamping system
with the workpiece.

Specifications with Touch-Probe Option

Supported CAD Formats QV TP Apex 302 QV TP Apex 404 QV TP Apex 606
QV TP Active 202 QV TP Active 404
• SAT Hyper QV TP302 Hyper QV TP404 Hyper QV TP606

• IGES* Measuring Range*1 Vision 250×200×150mm 400×400×200mm 300×200×200mm 400×400×250mm 600×650×250mm

†
(X×Y×Z) Touch Probe 131×200×150mm 284×400×200mm 234×200×200mm 334×400×250mm 534×650×250mm
• STEP*
Measuring accuracy*2 QV TP Apex: (1.8+3L/1000)µm
• Parasolid* (Touch Probe)
E1X , E1Y, E1Z (2.4+3L/1000)μm (2.4 + 3L/1000)μm
Hyper QV TP:(1.7+3L/1000)µm
• SolidWorks*
• Unigraphics* QV TP ACCEL 808 QV TP ACCEL 1010 QV TP ACCEL 1212 QV TP ACCEL 1517
• CATIA* Measuring Range* 1 Vision 800×800×150mm 1000×1000×150mm 1250×1250×100mm 1500×1750×100mm
* optional (X×Y×Z) Touch Probe 734×800×150mm 934×1000×150mm 1184×1250×100mm 1434×1750×100mm
Measuring Accuracy*2
E1X , E1Y, E1Z (1.8+3L/1000)μm (3+4L/1000)μm (6+7L/1000)μm
(Touch probe)
*1: When a module change rack, a master ball and a calibration ring are mounted, the measurement ranges are smaller than
those in the table. Other specifications are the same as those of QV ELF, QV Apex, Hyper QV, and QV ACCEL.
Please contact our sales office for more details.
*2: Inspected by Mitutoyo standard. L = length between two arbitrary points (mm)
†
: With calibration ring removed.

M-13
Accessories for Quick Vision
Tracking Auto Focus (TAF) Objectives
The TAF feature focuses continuously, adjusting to changes in the height Automatic Z-axis tracking Objectives
of the object being measured. Automatic tracking of surface waves and
warpage (in the Z axis) improves measurement throughput. The feature
eliminates the hassle of focusing during manual measurement.

Tracking Auto Focus (TAF) Parfocal

AF principle Objective Coaxial Autofocusing (Knife-edge Method)
Suitable Objectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x Parfocal

Tracking Range*2 6.3mm 6.3mm 1mm 1mm 0.25mm

Surface of workpiece
(±3.15mm) (±3.15mm) (±0.5 mm) (±0.5 mm) (±0.125mm)
Spot Diameter*3 5.2μm 8.0μm 2.1μm 3.1μm 1.5μm
Laser Source Semiconductor laser (peak wavelength: 690nm)
Laser Power 0.9mW
Laser Safety Class 2 (JIS C6802:2011, EN/IEC 60825-1:2007)
*2 Varies according to workpiece surface texture and reflectance. Objective mag. Turret lens Monitor Field of View
*3 Design values. mag. mag.
0.5X 1X 16X 12.54 x 9.40
2X 32X 6.27 x 4.70
PFF (Points from Focus) 6X 96X 2.09 x 1.56
Mitutoyo-developed optical data collection method that stitches images together with high-resolution 1X 1X 32X 6.27 x 4.70
Z axis data. 2X 64X 3.13 x 2.35
6X 192X 1.04 x 0.78
2.5X 1X 80X 2.50 x 1.88
2X 160X 1.25 x 0.94
6X 480X 0.41 x 0.31
5X 1X 160X 1.25 x 0.94
2X 320X 0.62 x 0.47
6X 960X 0.20 x 0.15
Measuring Bone Scan for Z Form Data
Screw Thread 10X 1X 320X 0.62 x 0.47
Acquire Continuously 2X 640X 0.31 x 0.23
6X 1920X 0.10 x 0.07
25X 1X 800X 0.25 x 0.18
2X 1600X 0.12 x 0.09
Calibration Glass Chart Compensation Chart 6X 4800X 0.04 x 0.03
No. 02AKN020 † No. 02AKU400*
Objective †
A calibration chart is used to compensate for the A compensation chart is used to decrease
pixel size of the CCD chip, autofocus accuracy optical distortion and errors caused by Objective Order No. Working
Distance
and the optical axis offset at each magnification difference of the pattern and texture on the
QV-SL0.5X 02AKT199 30.5mm
of the variable magnification unit (PPT). workpiece surface.
QV-HR1X 02AKT250 40.6mm
QV-SL1X 02ALA150 52.5mm
QV-HR2.5X 02AKT300 40.6mm
QV-SL2.5X 02ALA170 60mm
QV-5XHR 02AWD010 20mm
QV-10XHR 02AKT650 20mm
QV-25X 02ALG020 13mm
The monitor magnification and field of view values
are for the PRO machine.
QV-Index Head* Capable of Supporting ISO10360-7 QV-10X, QV-25X: Depending on a workpiece of
illumination may be insufficient at a turret lens
Automatic multi-plane measurement is possible Guaranteed Accuracy magnification of 2X and 6X.
QV-25X: The PRL illumination is restricted in its
with the optional index table. Some models in the Quick Vision Series support the usable position.
ISO10360-7 guaranteed accuracy specifications.
Contact Mitutoyo for details on applicable models.
Multi-Function Control Box
Guaranteed accuracies
• Length measurement error EU,MPE Emergency-stop button
• Probing error PF2D,MPE
Variable speed control
Length measurement error E

Max. workpiece diameter 5.51” / 140mm

Max. workpiece mass 4.41 lbs / 2kg
Min. rotation angle 0.1°
Positioning accuracy ±0.5° 4-digit status LED
Max. rotation speed 10rpm

M-14
 OPTI-FIX Kits
Modular Clamping System for Vision Measuring Systems

The modular opti-fix clamping system has been developed specifically for optical coordinate
measuring systems.
Opti-fix guarantees safe part fixturing during measurement. This functional configuration also
makes multiple part measurements considerably easier.
In order to reduce errant reflections of lighting systems and ambient light effects to a
minimum, all important construction elements are anodized in flat-black or matte finish.

For mounting workpieces on the glass stage,

different fixturing methods are available.
In the case of measuring methods using reflected,
as well as transmitted light, for measurement
of cubic, rotationally symmetrical and flat
workpieces, the use of Opti-fix is a practical
solution.
Furthermore, the spring clips and centering pins
are integrated into the system to allow for tactile
measuring. Opti-fix offers a large number of
configurations for part fixturing, from clamping
tweezers for miniature parts to a precision vice
for large parts.
Fastening brackets, vacuum plates or magnetic
holders for mounting the clamping system on the
measuring machine, can be ordered separately.

M-15
OPTI-FIX Kits
Opti-Set Start

K551056

For construction of a simple rail system with a length of 250 mm and for fixturing parts with simple part
geometry. 16 parts.

Opti-Set Basic

K551057

For construction of a basic frame with the dimensions of 200 mm x 100 mm and for fixturing parts with
simple part geometry. 26 parts.

Opti-Set Rotation

K551058

For construction of a basic frame with the dimensions of 250 mm x 200 mm and for fixturing parts that
are rotationally symmetric with and without center holes. 23 parts.

M-16
OPTI-FIX Kits
Opti-Set Advanced

K551059
For construction of a basic frame with the dimensions of 400 mm x 250 mm and for fixturing parts with
slightly more complex part geometry. 51 parts.

Opti-Set Professional

K551060
For construction of a basic frame with the dimensions of 400 mm x 250 mm and for fixturing parts
with complex part geometry. The fixturing of parts with a rotational part geometry is also available. 115
parts.

Opti-Set Round

K550298

With locating and clamping elements, included adaptor plates for adaptation to the basic frame of the
rail system. 18 parts.

M-17
Quick Guide to Precision Vision Measuring Machines
Measuring Instruments
■ Vision Measurement ■ Difference in Image Quality
Vision measuring machines provide the following processing Difference between 2-level and 256-level gray-scale images
capabilities.
■ Edge detection
Detecting/measuring edges in the XY plane

Sample image displayed in 2-level gray scale Sample image displayed in 256-level gray scale

■ Variation in Image Depending on Threshold

■ Auto focusing
Level
Focusing and Z measurement

These three pictures are the same image displayed as 2-level gray scale
at different slice levels (threshold levels). In a 2-level gray-scale image,
different images are provided as shown above due to a difference in
slice level. Therefore, the 2-level gray scale is not used for high-precision
■ Pattern recognition vision measurement since numeric values will change depending on the
Alignment, positioning, and checking the presence of a feature threshold level that is set.

■ Image Storage ■ Dimensional Measurement

Display
screen An image consists of pixels. If the number of pixels in a section to be
measured is counted and multiplied by the size of a pixel, then the
CCD Video signal High-speed
PC section can be converted to a numeric value in length. For example,
camera assume that the total number of pixels in the lateral size of a square
lens A/D converter Frame grabber
Amplifier workpiece is 300 pixels as shown in the figure below. If a pixel size is
10μm under a specific imaging magnification, the total length of the
640 pixels workpiece is given by 10μm x 300 pixels = 3000μm = 3mm.
10µm
300 pixels
480 pixels

An image is comprised of a regular array of pixels, similar to the process

that produces a printed image picture on fine plotting paper with each
square solid-filled.
■ Edge Detection
■ Gray Scale How to detect a workpiece edge in an image is described using the
A PC stores an image after internally converting it to numeric values. following monochrome picture as an example. Edge detection is
A numeric value is assigned to each pixel of an image. Image quality performed within a given domain. A symbol that visually defines this
varies depending on how many levels of gray scale are defined by the domain is referred to as a tool. Multiple tools are provided to suit
numeric values. The PC provides two types of gray scale: two-level and various workpiece geometries or measurement data.
multi-level. The pixels in an image are usually displayed as the 256-level The edge-detection system scans within the tool area
gray scale. Tool as shown in the figure at left and detects the boundary
between light and shade.
2-level Multi-level 244 241 220 193 97 76 67 52 53 53
gray scale gray scale 255
243 242 220 195 94 73 66 54 53 55
White White
1 244 246 220 195 94 75 64 56 51 50
Gray Gray 127 Example of numeric values assigned to pixels on the tool
255
Gray scale

0
Black Black 0 127
0 (1) Scan start position
Pixels in an image brighter than a given level Each pixel is displayed as one of 256 levels Tool position (2) Edge detection position
are displayed as white and all other pixels are between black and white. This allows high- (3) Scan end position
displayed as black. fidelity images to be displayed. (1) (2) (3)

M-18
■ High-resolution Measurement ■ Composite Coordinates of a Point
Machine coordinate system Vision coordinate system
When enlarged...
M

Mz Vx
My V
Vy
Gray scale

Gray scale
Tool position Tool position Mx

A position the system recognizes as an edge Measuring machine stage Detected edge position (from
may be in error by up to one pixel width using position the center of vision)
normal image processing. This will prevent the
execution of high-resolution measurement. M = (Mx, My, Mz) V = (Vx, Vy)

Actual coordinates are given by X = (Mx + Vx), Y = (My + Vy),

To increase the accuracy in edge detection, sub-pixel image processing and Z = Mz, respectively.
is used.
An edge is detected by determining an interpolation curve from Since measurement is performed while individual measured positions
adjacent pixel data as shown below. are stored, the system can measure dimensions that cannot be included
As a result, it allows measurement with a resolution higher than 1 pixel. in one screen.

■ Principle of Auto Focusing

Gray scale

Tool position
The system can perform XY-plane measurement, but cannot perform
height measurement using only the CCD camera image. The system
Image signal without The image signal profile
approaches an analog
is commonly provided with the Auto Focus (AF) mechanism for height
sub-pixel processing
waveform like this. measurement. The following explains the AF mechanism that uses a
common image, although some systems may use an AF laser.
Gray scale

Tool position
Z
The AF system analyzes an image while coordinate
moving the CCD in the Z axis. In the
Image signal with sub-pixel processing analysis of image contrast, an image in CCD
sharp focus will show a peak contrast
and one out of focus will show a low In-focus
contrast. Therefore, the height at height
which the image contrast peaks is the
just-in-focus height.
■ Measurement along Multiple Portions of an Contrast
Image
Large features that cannot be contained on one screen have to be
measured by precisely controlling the position of the CCD sensor and
stage so as to locate each reference point within individual images. ■ Variation in Contrast Depending on the Focus
By this means, the system can measure even a large circle, as shown Condition
below, by detecting the edge while moving the stage across various Edge contrast is low due to Edge contrast is high due to
parts of the periphery. out-of-focus edges. sharp, in-focus edges.

High High

Low Low
Contrast in the scanning direction Contrast in the scanning direction

M-19