G28V5 GaN on SiC 0.

15µm mmWave Foundry Process

Enabling 28 V designs through Ka band

FEATURES
• 0.15µm Gate Length
• VP ~ - 2V
• 28V bias with >84V breakdown
• FMAX > 120GHz
• 12dB gain @ 30GHz
• 3.75W/mm @ 30GHz
• PAE > 40% @ 30GHz
• Metal1 = 3µm; Metal2 = 3µm
• MIM cap 180pF/mm2
PROCESS DESCRIPTION • HD cap 305pF/mm2

The G28V5 is a high performance 28V mm-wave process targeting high

• TFR 12 Ω/

frequency applications as well as lower frequency operation for the highest • GaN Resistors: 66 and 410 Ω/
efficiency or wide bandwidth requirements. The process has been fully qualified
with the qualification report available upon request. The mean-time-to-failure is APPLICATIONS
greater than 1 million hours at 225 °C and drain voltage of 28V. • Satcom
• RADAR
The process features two gold RF interconnect layers, two varieties of capacitors,
• Telecom
thin film and bulk GaN resistors, and dielectrically supported bridges for
• Point-to-Point Radio
connections to circuit elements such as capacitors and inductors. The SiC
• Ultra-wide band EW
substrate thickness is 75 microns and has the smallest substrate via sizes available
in a GaN on SiC MMIC process, which enables very compact FET footprint for mm-
wave applications. Process Design Kits (PDKs) with scalable, accurate models of CIRCUIT TYPES
the G28V5 devices are available for Microwave Office (MWO) or Advanced Design • High Power Amplifiers
System (ADS) simulators. The PDKs have been vetted for both small signal and • Low Noise Amplifiers
large signal accuracy and model validation reports are available upon request. • RF Switches
• Phase-Shifters
The G28V5 process is offered through the foundry services through
• Attenuators
dedicated or shared wafer runs.

MACOM Technology Solutions Inc. (MACOM) and its affiliates reserve the right to make changes to the product(s) or information contained herein without notice.
Visit www.macom.com for additional data sheets and product information.
For further information and support please visit:
https://www.macom.com/support
FOUNDRY SERVICES DESIGN TOOLS
Customers can design and fabricate circuits through the foundry using either a • Design Manual
dedicated or shared mask option. The dedicated mask provides the greatest • Device Library of Circuit Elements:
flexibility and die count since the dedicated foundry run is completely FETs, thin film resistors, bulk
composed of customer content. Shared masks are run quarterly. With this resistors, capacitors, inductors
option, multiple customers share a single run with each customer purchasing • Design Kit for ADS Design
a portion of the mask reticle into which their circuits must fit. In all cases, Environment
extreme care is taken to protect customer IP on shared masks or dedicated • Design Kit for AWR Microwave
masks – your information is always protected. If you choose shared mask or Office
dedicated mask options for your development, your designs are easily ported to • Design Rule Check
production mask sets for volume production. The foundry is a high volume • Thermal Reference Designs
manufacturer and can handle your production needs.

SUPPORT FEATURES
GMAX vs IDS, VDS = 28V, 6x50µm • PDK Kits
40 • Design Rule Check

35
• Tiling of GDSII Stream Files
• On-wafer Test Development
30
• Failure Analysis
GMAX(dB)

25 • Mask Procurement
20
• Production 100mm wafer
• Wafer Thinning
15
• Wafer Singulation
10 • Substrate Vias
0.3 1 10 60
Frequency (GHz) • DC Test
• RF On-wafer Test
• Custom Design Services
• Die pick
Load Pull Power, 28V 45mA 30GHz, 6x50µm • Wafer delivery on tape
50 20

40 16

30 12
Gain (dB)
PAE (%)

20 8

10 4

0 0
11 13 15 17 19 21 23 25 27 29 31 33
Pout (dBm)

MACOM Technology Solutions Inc. (MACOM) and its affiliates reserve the right to make changes to the product(s) or information contained herein without notice.
Visit www.macom.com for additional data sheets and product information.
For further information and support please visit:
https://www.macom.com/support
Notes & Disclaimer

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MACOM Technology Solutions Inc. (MACOM) and its affiliates reserve the right to make changes to the product(s) or information contained herein without notice.
Visit www.macom.com for additional data sheets and product information.
For further information and support please visit:
https://www.macom.com/support