RT-1000 Manual
RT-1000 Manual
®
OHM-STAT RT-1000
OWNERS MANUAL & OPERATION GUIDE
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TABLE OF CONTENTS
Contents Page.
Cover
Table of contents
Test Procedures 1
Specifications 5
Warranty 6.
Calibration Procedure 11
Test Procedures
Specific industries, which
require accurate
measurements, will dictate
the correct test procedures.
The procedure outlined in
the Product Test Bulletin is
Static Solutions , Inc.
specifically used in the
Ohm-Stat RT-1000 Megohmmeter electronics industry where
Meter Test Kit Contents: the EOS/ESD and CECC
procedures predominate. It
1 Ohm-Stat RT-1000Resistance-Resistivity- is recommended that the
Humidity-Temperature Meter other industry procedures
1 Blow Molded, Foam Lined Travel Case may be more appropriate
1 Concentric Ring Probe. (Optional) for your industry. These
2 5 lb. 2.5 inch Diameter Test probes. include UL, ASTM, ,
1 Chair Probe specifications such as MIL-
2 Smock Probes HDBK-263, EIA-1S-5-A,
2 Coil cords. 6 foot Test Grounding Leads. ASTM D-257, and ASTM
1 Grounding Cord and Clip F-150. Failure to measure
1 9-volt battery relative humidity and
1 Ground Test Adapter temperature at the time of
1 Product Instruction Bulletin testing is in non-compliance
1 AC Power Adapter- positive center, 120- with ANSI/ESD-S7.1.
volt input, and 9-12 volt 200 mA output. Figure 1
Miniature, 220 volts adapter, hand and
Ohm-Stat RT-1000
floor probes are available as options. Megohmmeter
Insert both coil cords using the monaural plugs into the 3.5
mm meter jacks on the top right of the RT-1000 meter . Attach
the banana plug coil cord terminations into the concentric
ring probe. Place the probe onto the surface to be tested.
Press the test button and wait until the values appear in
approximately 15-20 seconds. The correct temperature,
humidity, and resistivity will be displayed on the LCD screen.
The resistivity value displayed MUST be multiplied by a
factor of 10 to achieve the correct test value. These values
will read in ohms/sq. e.g. 3.5 X10 4 ohms/sq. (displayed
value.) .The actual resistivity value will be 3.5 X 10 5 ohms/
sq.
A. Meter setup. With both test leads connected to the meter attach the
alligator clip to one banana plug and the other end to the 2.5 inch,
5 pound weight probe.
B. Attach the alligator clip to a known electrical ground such as a ground
snap on the mat or the electrical ground of the building. Position the
probe on the surface to be tested in accordance with the desired test
procedure.
C. Press the test button until the resistivity, humidity, and temperature
test values are displayed on the LCD screen. These readings will
conform to: EIA, EOS/ESD, ANSI, IEC-93, CECC, and ASTM test
procedures. When performing tests, especially with higher resistance
materials, be sure the test lead wires do not touch each other or overlap
and that your hands are not in contact with the probes or wires during
the actual touching of the materials. This will ensure accurate readings
and prevent interference cross talk.
OPTIONAL
ACCESSORIES.
The foregoing express warranty is made in lieu of other product warranties express and implied, including merchantability
and fitness for a particular purpose which are specifically or directly disclaimed.
The express warranty will not apply to defects or damage due to neglect misuse, accidents, altercations, operator failure to
properly maintain, follow instructions, or failure to clean or repair products.
Limit of Warranty:
In no event will Static Solutions, Inc. or seller be responsible or liable for special, incidental or consequential losses or
damages , whether based on tort, contract, or the use or inability to use the product.
Before using, the product users shall determine the suitability of the product for their intended use. The users assume all
risk and liability whatsoever in connection therewith.
Fulfillment of Static Solutions, Inc.’s warranty obligations will be the customer’s exclusive remedy and Static Solutions, Inc.
and seller’s limit of liability for any breach of warranty or otherwise.
Any questions regarding these procedures or other questions should be directed to our Engineering staff or customer
service representative by calling 508.480.0700. Static Solutions Inc. Static Solutions Inc. 331 Boston Post Road-East
Marlboro. MA. 01752.
Static Solutions Inc. - Ohm - Stat RT - 1000 Information 6 www.staticsolutions.com
Information Solutions Strategies and Innovations Static Solutions Inc.
Answer- The humidity and temperature affect the electrical properties of the material being tested. The combination of low humidity
and low temperature will give the highest electrical resistance results or slowest dissipation times. At high humidity a thin layer of
water is condensed or absorbed on or in the material being tested. This is true of hydroscopic additives added to a material to
increase the electrical conductivity which is moisture absorbable. At elevated temperatures the mobility of free electrons is increased
thereby increasing the materials conductivity. This is especially true for carnon black , metallic oxides, metals, and other materials
added to a material which must be mobile or in close proximity. When the material is at a lower temperature built in stresses occur
which might increase the resistance due to increased distance between the conductive additives. Thus, humidity and temperature
must be known. It is possible to test or manufacture a material at high humidities and pass all the test specifications. But, when the
customer receives the material and uses it at a lower humidities, or temperature the material fails to pass the specifications.
Thus,causing rejects and loss of product. Another reason why one must measure and record this data is that ANSI/ESD Association
and European CECC recognizes the environmental affects and specifies in their standards that they measured and recorded.
For example both ESD S4.1 ESD Protective Worksurfaces section 6.2.4 and ESD S7.1-1994 Resistaive Characterization of Materials
Floor Materials sections 5.2.4 and 5.3.3 “Also report temperature and relative humidity at the time of testing”. ANSI/EOS/ESD-
S11.11-1993 Surface resistance measurement of Static Dissipative Planar Materials section 11.0 B. “report the conditioning period,
relative humidity, and temeperature.”
All parties must test and record the data using the same parameters in order to avoid problems. The manufacturer, distributor, sales
person, and customer must understand the environmental humidity and temperature parameters in order to not accept out of
specification materials or reject in specification materials. Both of these situations will cost money to rectify.
Answer: In previous years people desiring to measure resistivity or resistance had to follow either the ASTM- D 264, ASTM- 991,
or NFPA 56A or NFPA 99. In these procedures people had to test at either 500 or 1000 volts. This caused concern regarding safety
to the person doing the tests. People wanting a smaller low cost meter measured the surface at 9 volts. 9 volts WILL NOT give the
accuracy that you need to perform the tests. In addition a 9 volt meter does not conform to EOS and 20/20 specifications.. At 9 volts
it is impossible to achieve accuracy at values higher than 10 7 ohms. These specifications require to measure both the humidity and
temperature. What resulted was confusion. Everybody was doing their own tests.Finally the ESD Association got together to
standardize the test procedures with all the organizations.
What was decided was at values higher than 10 6 ohms/square one must test at a constant 100 volts. At values lower than
10 6 ohms/sq. one must use 10 volts. This is explained in ANSI/EOS/ESD standards -S4.1,S7.1 and S11.11
Answer: Have you ever tried to interpret a value on an analog scale at high values, especially if your age is over 50 years old and
need glasses. It is very difficult to see and read !! The problem with LED displays are that it is difficult to determine where you are
on a specific decade. The advantage of a digital alpha-numeric display is that you can observe and track trends of a material over
time and it is easy to read and interpret.
Answer: Yes, the adapter is both a converter and a in meter re-charger. It is recommended to use only a rechargeable battery with
the power supply and do not use the power supply when using a conventional alkaline battery. It might cause leakage .
Answer: Yes. The meter can be used with the built in parallel probes attached at the bottom the meter. This resistivity reading is in
ohms/square. This is a fast and quick way to measure the surface resistivity. This is a good simulation of the ASTM D-257 test
method with the meter power switch activated at a force of 5 pounds of pressure onto the built in parallel probes. Always remove
the coil cords from the meter when not using the external probes or when you use the bottom parallel resistivity probes. Because
there is no such thing as surface resistivity of two layer materials one can do a quick test for immediate evaluations.
6. When the button is released and the value continues to display will this wear down the battery ?
Answer: No. Once the button is released the display is saved by a capacitor on the screen for a short time. No additional
power is used.
9. What is RTT, RTG, volume resistance, resistivity ,concentric ring and bottom of meter parallel resistivity probes.) ?
Answer: RTT is resistance between two points. The values are in ohms. The procedure must conform
to EOS specifications. The humidity and temperature must be recorded. RTG is resistance between
ground and one point. The ground can be the common point ground which is on the mat or another
common ground connected to the wrist straps. Resistance is a better way to determine if the product
will work in actual usage, by actually duplicating the dissipation of static electricity from the worker
or product to the earth ground. Resistance, either surface or volume is a better incoming quality
control test since most of the products being tested is two layers and resistivity does not relate to two
layer mat products. In a two layer mat material the path to ground goes from the surface down to the
conductive layer across then up through the dissipative layer.
Volume resistance tests through the material layers –from the top through the bottom layer.
Resistivity is measured in ohms/square. The test are is usually a small square. The parallel probes on
the bottom measures ohms/square. The concentric ring or guarded electrode does the same but it
avoids stray readings around the ends of the probes and measure inside the two rings. To calculate
the resistivity from resistance multiply the resistance measurements by 10. The conversion factor of
10 is derived from the geometry of the electrode assembly.
10. When is the concentric ring electrode used to measure the resistivity values.
Answer: Because there was a possibility of the applied voltage (either 10 or 100 volts) going
around the parallel probes and giving an incorrect answer a concentric ring probe was developed
and explained in EOS/ESD-S11.11-1993 part 6.1.2. When the concentric ring probe is used a
multiplying factor of 10 must be used. Thus, one takes the reading in ohms (resistance) and
multiply by 10 in order to derive the desired correct answer in ohms/square. (resistivity).
Resistivity is usually perfomed as a quick quality control measurement for smaller dimensions.
Special miniature probes are available for really small limited space dimensions..
11. When the battery gets low can I still use the meter ?
Answer: Yes. The meter will display “low battery” if the battery gets low in power. But even in this situation
the meter will still perform and will still display accurate results. The meter has incorporated a “cut-out” level
in which the meter will stop functioning completely when the power level gets too low to maintain a constant
10 or 100 volts output. Yes, there will be power left in the battery due to a regulator to maintain this correct
level.
12. If I measure high resistance materials will the applied voltage drop below 100 volts ?
Answer: No ! We are using a voltage converter which maintains constant 100 or 10 volts voltage over the
complete
resistance range. The EOS 20/20 specification says when measuring under 10 6 ohms use 10 volts and when
you test materials over 10 6 ohms use 100 volts.
Answer: Yes. For a nominal charge they can be replaced. When cleaning use a soap and water solution.
14. In order to satisfy companies achieving ISO-9000 certification are our meters NIST and CE mark traceable ?
Answer: The meters come with a NIST certificate when ordered. After one year the meters can be sent back to Static Solutions
for recalibration. The meters are CE mark tested.
15. I have to use the meter overseas . Can the meter be used with a 220-240 volts power supply ?
Answer: Yes. We supply a 120 volts adapter with the meter. In order to use 220 volts an easily purchased 12 volts DC 220 volt AC
adapter can be purchased and used with the meter. Static Solutions can supply this adapter at a nominal charge. Be sure to use a
100-150 milliamp female 2.5 mm wide, 5.5 mm lonmg positive center plug. Also make sure the wall plug will fit in the recepticle of the
country where the meter will be used. It might make sense to use 9 volts alkaline batteries overseas in order to avoid problems. Do
not use a power adapter when using a alkaline battery. It might leak or explode. When using a power adapter use a rechargeable
battery.
Answer: Under one year the meter is fully warranted and will be fixed at no charge as long as the meter was not abused or
dropped. Contact the company at 508.480.0700 regarding a return authorization number after the warranty period expires.
Answer: The meter can be used in all facets of material production including engineering, maintenance, quality
control, incoming inspection, manufacturing, research, or sales departments.
Answer: Photographic , medical, cleanroom, electronics, automotive, pharmaceutical, research and coatings industries.
Answer: Any and all materials that are electrically conductive , dissipative, or antistatic between 1000 ohms and 10 13 ohms.
Items include floor mats, table mats, conductive floor tiles, coatings, floor finishes, bags, containers, smocks, footwear, heel
grounders, wrist straps, and grounding straps.
Answer: The meter can test to the following standards: EOS/ESD-S4.1, S11.11, S7.1, NFPA-99A, ANSI, UL, ASTM-D-257,
ASTM-F150, Military, EIA-541, and CECC (European)
21. I noticed when I brought the meter in from the cold car the temperature and humidity seemed to be incorrect. Why ?
Answer: It takes approximately ½ hour for the meter to climatize to different environmental conditions before taking a
measurement. Allow the meter to stabilize to ensure the correct reading.
22. What precautions should I take to ensure correct readings especially at high resistances i.e. 10 11 ohms, 10 12 ohms.
Answer: Do not touch the coiled cords or external probes when taking a reading at high resistance values. In addition do not
have the cords touch each other . The teadings may be higher than the resistance of the wire or probe paint insulation.
Answer: Use a mild detergent water solution. Stronger solvents will attack the meter case and or probe rubber.
Answer: When you are in an electric field (60 cycles AC) or at a potential higher higher than ground it helps to bring the meter
and circuit board to the same potential as the grounded material which is tested. The two cords act like an aerial and will receive
this electrical magnetic and radio interference and cause errors in the measurement. Grounding will eliminate this interference.
25. The meter did not work when I removed the cords from the external probes and tried to measure resistivity. Why ?
Answer: You must remove the cords from the meter to activate the probes on the bottom of the meter. The cords must also be
removed from the meter case. Merely detaching the cords from the probes will not activate the bottom parallel probes. Do not keep
the coil cords in the meter when not using the external probes. Occasionally due to stress the jack will not return to the original
position and the internal probes will not work and a code 20 or other error message will be displayed.
26. The external black rubber probes have tendency to mark white surfaces. What can I do to clean the surfaces
especially in clean rooms.
Answer: Place the probes on the surface and not move them while testing. If the meters are going into as clean room cleaning
off the surface after usage with alcohol is suggested.
Answer: There are two safety locks on the case which must be fully latched in order to prevent premature opening during
travel. Always check the case before carrying it offsite.
Answer: Yes and no. You can charge the battery in the case only if you use a rechargeable battery. You CANNOT use an
alkaline battery with the AC adapter. It might cause problems and negates the warranty.
Answer: First read the EOS specifications 12.1 and 2.1 . This will explain the procedures. You must use the correct probes
which are available from Static Solutions and are enclosed in the RT-1000 case.
Answer: Probes to measure miniature or small size parts, probes to measure shoes, probes to measure wrist straps, and probes to
measure resistivity by the concentric ring procedure. We also enclose a probe to test whether the electrical ground is accurate.
A calibration box is also available. This CB-9000 is available from an authorized distributor of Static Solutions. The meter can
be sent back to Static Solutions in order to be calibrated and issued a NIST certificate.
Any questions regarding these procedures or other questions should be directed to our Engineering staff or customer service
representative by calling 508.480.0700. Static Solutions Inc.331 Boston Post Road-East Marlboro. MA. 01752.
There is a conformal coating applied to the circuit board after calibration in order
to prevent inaccurate readings due to high humidity. Turning the adjustment screw
might be difficult. It will not hurt the meter.
***Should calibration traceable to the NIST be required, please call Static Solutions
Inc. directly to arrange for calibration.
For additional information please contact:
ANSI/ESD S20.20-1999
Electrostatic Discharge Association
7900 Turin Road, Bldg 3, Ste 2
Rome, NY 13440-2069
ANSI/ESD-S20.20-1999
Published by:
ISBN: 1-58537-006-1
Foreword
This standard covers the requirements necessary to design, establish, implement, and maintain an
Electrostatic Discharge (ESD) Control Program for activities that: manufacture, process, assemble, install,
package, label, service, test, inspect or otherwise handle electrical or electronic parts, assemblies and
equipment susceptible to damage by electrostatic discharges greater than or equal to 100 volts Human
Body Model (HBM). When handling devices susceptible to less than 100 volts HBM, more stringent ESD
Control Program Technical Requirements may be required, including adjustment of program Technical
Element Recommended Ranges. This document covers the control program requirements and offers
guidance to protect and handle ESD sensitive (ESDS) items, based on the historical experience of both
military and commercial organizations. References include, ESD Association, US Military and ANSI
approved standards for material properties and test methods. The fundamental ESD control principles
that form the basis of this document follow:
Any relative motion and physical separation of materials or flow of solids, liquids, or particle-laden gases
can generate electrostatic charges. Common sources of ESD include personnel, items made from
common polymeric materials, and processing equipment. ESD can damage parts by direct contact with a
charged source or by electric fields emanating from charged objects that induce a charge on grounded or
capacitively coupled to ground sensitive items. It is possible to determine device and item susceptibility
by exposure to simulated electronic equivalent discharge circuits. The level of sensitivity determined by
test using these models may not necessarily relate to the level of sensitivity in a real life situation.
However, they are used to establish a baseline of susceptibility data for comparison of devices with
equivalent part numbers from different manufacturers. Three different models are used for
characterization of electronic components - Human Body Model (HBM), Machine Model (MM), and
Charged Device Model (CDM). It is important to recognize that these models, if used alone, are difficult to
apply in terms of specification setting activities. Examples of ESDS parts are microcircuits, discrete
semiconductors, thick and thin film resistors, hybrid devices and piezoelectric crystals.
Beneficial comments (recommendations, additions, deletions) and any pertinent data which may be of
use in improving this document should be addressed to:
ESD Association
7900 Turin Road, Bldg 3, Ste 2
Rome, NY 13440-2069
Committee Members:
Thomas Mohler,
Raytheon Systems Corporation
ii
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Information Solutions Strategies and Innovations Static Solutions Inc.
Table of Contents
1. PURPOSE .................................................................................................................................................1
2. SCOPE .................................................................................................................................................... 1
.
3. REFERENCED PUBLICATIONS.............................................................................................................1
4. DEFINITIONS ............................................................................................................................................2
5. PERSONNEL SAFETY............................................................................................................................ 2.
6. ESD CONTROL PROGRAM................................................................................................................... 2 .
6.0.1. ESD Control Program Requirements ..............................................................................................2
6.0.2. ESD Control Program Guidance .....................................................................................................3
6.0.3. Tailoring ...........................................................................................................................................3
6.1. ESD CONTROL PROGRAM ADMINISTRATIVE REQUIREMENTS .......................................................3
6.1.1. ESD Control Program Plan .............................................................................................................3
6.1.1.1. ESD Control Program Plan Requirement ................................................................................................. 3
6.1.1.2. ESD Control Program Plan Guidance ...................................................................................................... 3
6.1.2. Training Plan ...................................................................................................................................3
6.1.2.1. Training Plan Requirement ....................................................................................................................... 3
6.1.2.2. Training Plan Guidance ............................................................................................................................ 3
6.1.3. Compliance Verification Plan ..........................................................................................................3
6.1.3.1. Compliance Verification Plan Requirement .............................................................................................. 3
6.1.3.2. Compliance Verification Plan Guidance ................................................................................................... 4
6.2. ESD CONTROL PROGRAM PLAN TECHNICAL REQUIREMENTS ......................................................4
6.2.1. Grounding / Bonding Systems ........................................................................................................4
6.2.1.1. Grounding / Bonding Systems Requirements ........................................................................................... 4
6.2.1.2. Grounding / Bonding Systems Guidance .................................................................................................. 4
6.2.2. Personnel Grounding ......................................................................................................................4
6.2.2.1. Personnel Grounding Requirements ........................................................................................................ 4
6.2.2.2. Personnel Grounding Guidance ............................................................................................................... 4
6.2.3. Protected Areas ...............................................................................................................................4
6.2.3.1. Protected Areas Requirement .................................................................................................................. 4
6.2.3.2. Protected Areas Guidance ....................................................................................................................... 5
6.2.4. Packaging ........................................................................................................................................5
6.2.4.1. Packaging Requirements ......................................................................................................................... 5
6.2.4.2. Packaging Guidance ................................................................................................................................ 5
6.2.5. Marking ............................................................................................................................................6
6.2.5.1. ESDS Assemblies and Equipment ........................................................................................................... 5
6.2.5.2. Packaging................................................................................................................................................. 5
6.2.6. Equipment .......................................................................................................................................5
6.2.6.1. AC Powered Tools ................................................................................................................................... 5
6.2.6.2. Battery Powered and Pneumatic Hand Tools ........................................................................................... 6
6.2.6.3. Automated Handlers ................................................................................................................................. 6
6.2.7. Handling ..........................................................................................................................................6
6.2.7.1. Handling Procedure Requirements .......................................................................................................... 6
6.2.7.2. Handling Procedure Guidance ................................................................................................................. 6
7. APPENDIX A- SENSITIVITY TESTING......................................................................................9..
7.1. ESD SENSITIVITY TESTING.................................................................................................................................................. 9
7.1.1. Human Body Model Sensitivity: ......................................................................................................9
7.1.2. Machine Model Sensitivity: ..............................................................................................................9
7.1.3. Charged Device Model Sensitivity: .................................................................................................9
7.2. ASSEMBLY, EQUIPMENT AND DESIGN HARDENING ........................................................................................................ 10
7.2.1. Assembly, Equipment and Design Hardening Guidance: ............................................................ 10
7.2.2. Direct Contact, Non-Operating Assembly, Body/Finger or Hand/Metal Tests: ............................ 10
7.2.3. Direct Contact Operating Equipment Hand/Metal Test: ............................................................... 10
7.2.4. Indirect Contact, Operating Equipment Furniture Model Test:..................................................... 10
Table of Tables
TABLE 1 ESD CONTROL PROGRAM TECHNICAL REQUIREMENTS SUMMARY ....................................................................... 7
TABLE 2 ESD SUSCEPTIBILITY TEST REFERENCES FOR DEVICES ......................................................................................... 9
TABLE 3 ESD SUSCEPTIBILITY TEST REFERENCES FOR ASSEMBLIES AND EQUIPMENT.................................................. 10
ESD Associatoi n Standard for the ANSI EOS/ESD S 3.1 EOS/ESD Association
Development of an Electrostatic Discharge Standard for the Protection of Electrostatic
1
Control Program for Discharge Susceptible Items - Ionization
EOS/ESD ADV 1.0 EOS/ESD Association Glossary EOS/ESD S 8.1 EOS/ESD Association Standard for
of Terms
1 the Protection of Electrostatic Discharge Susceptible
1
Items - Symbols - ESD Awareness
ESD S1.1 ESD Association Standard Test Method
for the Protection of Electrostatic Discharge ESD S 9.1 ESD Association Standard Test Method
Susceptible Items - Wrist Straps
1 for the Protection of Electrostatic Discharge
Susceptible Items - Footwear - Resistive
1
ESD ADV 2.0 ESD Association Advisory for the Characterization
Protection of Electrostatic Discharge Susceptible
Items – Handbook
1 ESD DSP 10.1 ESD Association Draft Standard for
Protection of Electrostatic Discharge Susceptible
ESD STM 2.1 ESD Association Standard Test Items – Automated Handling
Method for the Protection of Electrostatic Discharge
Susceptible Items – Garments
1 ANSI/EOS/ESD S 11.11 EOS/ESD Association
Standard for the Protection of Electrostatic
Discharge Susceptible Items - Surface Resistance
1
Measurement of Static Dissipative Planar Materials
1
ESD Association, 7900 Turin Road, Bldg 3, Ste 2,
Rome, NY 13440-2069, 315-339-6937
ESD DS 11.12 ESD Association Standard for the MIL-STD-883 Method 3015, Department of Defense,
Protection of Electrostatic Discharge Susceptible Test Method Standard, Microcircuits, Electrostatic
2
Items - Volume Resistance Measurement of Static Discharge Sensitivity Classification
1
Dissipative Planar Materials
MIL-STD-2073-1 Department of Defense, Standard
2
ESD ADV 11.2 ESD Association Advisory for the Practice for Military Packaging
Protection of Electrostatic Discharge Susceptible
1 MIL-PRF-19500 Performance Specification, General
Items - Triboelectric Charge Accumulation Testing 2
Specification for Semiconductor Devices
ANSI/ESD S 11.31 ESD Association Standard for
Evaluating the Performance of Electrostatic QML-19500 Qualified Manufacturers List of Products
1 Qualified Under Military Specification MIL-PRF-
Discharge Shielding Materials - Bags
19500, General Specification for Semiconductor
2
ESD STM 12.1 ESD Association Standard Test Device
Method for the Protection of Electrostatic Discharge
Susceptible Items - Seating - Resistive MIL-PRF-38535 Performance Specification, General
1 Specification for Integrated Circuits (Microcircuits)
Characterization 2
Manufacturing
ESD DS 13.1 ESD Association Standard for
Measuring Electrical Potential from Soldering/ QML-38535 Qualified Manufacturers list of
1 Advanced Microcircuits Qualified Under Military
Desoldering Hand Tools
Specification MIL-PRF-38535, General
2
ESD ADV 53.1 ESD Association Advisory for the Requirements for Microcircuits Manufacturing
Protection of Electrostatic Discharge Susceptible 3
1 VZAP, Electrostatic Discharge Susceptibility Data
Items - ESD Protective Workstations
4. DEFINITIONS
ESD STM 97.1 ESD Association Standard Test
Method for the Protection of Electrostatic Discharge The terms used in the body of this document are in
Susceptible Items - Floor Materials and Footwear - accordance with the definitions found in EOS/ESD
Resistance Measurement in combination with a Association Glossary of Terms, EOS/ESD ADV 1.0.
1
Person
5. PERSONNEL SAFETY
ESD STM 97.2 ESD Association Standard Test The Procedures and equipment described in this
Method for the Protection of Electrostatic Discharge document may expose personnel to hazardous
Susceptible Items - Floor Materials and Footwear - electrical conditions. Users of this document are
1
Voltage Measurement on a Person responsible for selecting equipment that complies
with applicable laws, regulatory codes and both
ANSI C63.16 "American National Standard Guide for
external and internal policy. Users are cautioned
Electrostatic Discharge Test Methodologies and
that this document cannot replace or supersede any
Criteria for Electronic Equipment"
requirements for personnel safety.
IEC 1000-4-2, "Electromagnetic Compatibility for
Ground fault circuit interrupters (GFCI) and other
Industrial Process Measurement and Control
safety protection should be considered wherever
Equipment, Part 2; Electrostatic Discharge
personnel might come into contact with electrical
Requirements"
sources.
IEEE STD C62.38, "IEEE Guide on ESD: ESD
Electrical hazard reduction practices should be
Withstand Capability Evaluation Methods (for
exercised and proper grounding instructions for
Electronic Equipment Subassemblies)"
equipment must be followed.
MIL-STD-750 Method 1020, Military Standard, Test 6. ESD CONTROL PROGRAM
Methods for Semiconductors Devices, Electrostatic
2 6.0.1. ESD Control Program Requirements
Discharge Sensitivity (ESDS) Classification
The Program shall include both Administrative and
Technical Requirements as described herein. The
2
Defense Printing Service Detachment Office, Bldg
3
4D (NPM-DODSSP), 700 Robbins Ave., IIT Research Institute, 201 Mill, Rome, NY 13440,
Philadelphia, PA 19111-5094, 215-697-5164 315-336-2359
ANSI/ESD-S20.20-1999
most sensitive level of the items to be handled in above a specified sensitivity level; identify
accordance with the Program shall be documented. organizational responsibilities for the tasks and
The Organization shall establish, document, activities; and list directive or supportive documents
implement, maintain and verify the compliance of used in the Program. The Plan should include a
the Program in accordance with the requirements of listing of the specific type of ESD protective
this document. materials and equipment used in the Program. A
major element in an effective Plan is the assessment
6.0.2. ESD Control Program Guidance
of the ESD susceptibility of parts, assemblies and
The primary objective of a Program is to provide equipment and their required protection levels. A
continuous ESD protection. Electrostatic control and common method for establishing ESD sensitivity
protection entails implementation of Program limits is to use one or more of the three ESD models
requirements during design, production, inspection, used for characterization of electronic items. These
test, storage, shipment, installation, use, are HBM, MM, and CDM (see Appendix A). The
maintenance, replacement and repair functions. selection of specific ESD control procedures or
6.0.3. Tailoring materials is at the option of the Plan preparer and
should be based on risk assessment and the
This document, or portions thereof, may not apply to established electrostatic discharge sensitivities of
all applications. Tailoring is accomplished by parts, assemblies, and equipment. The Plan should
evaluating the applicability of each requirement for ensure that the Organization and suppliers of ESD
the specific application. Upon completion of the sensitive items have established and implemented a
evaluation, requirements may be added, modified or Program in accordance with this document.
deleted. Tailoring decisions, including rationale,
shall be documented in the ESD Control Program 6.1.2. Training Plan
Plan (hereafter referred to as the “Plan”).
6.1.2.1 Training Plan Requirement
6.1 ESD CONTROL PROGRAM ADMINISTRATIVE Initial and recurrent ESD awareness and prevention
REQUIREMENTS training shall be provided to all personnel who
6.1.1 ESD Control Program Plan handle or otherwise come into contact with any
ESDS items. The type and frequency of ESD
6.1.1.1. ESD Control Program Plan Requirement training for personnel shall be defined in the Training
The Organization shall prepare an ESD Control Plan. The Training Plan shall document the
Program Plan that addresses each of the procedures for recording this training in personnel
requirements of the Program. Those requirements training records. Training methods and the use of
are: The Plan, Training, Compliance Verification and specific techniques are of the Organization’s option.
ESD Control Program Plan Technical Requirements. The option that is selected shall include an objective
The Plan is the principal document for implementing evaluation technique to ensure trainee
and verifying the Program. The goal is a fully comprehension and training adequacy.
implemented and integrated Program that conforms 6.1.2.2. Training Plan Guidance
to internal quality system requirements. The Plan
Recurrent ESD training for personnel is an integral
shall address the requirements as described herein part of the Program. ESD training includes initial
and shall apply to all applicable facets of the and recurrent training required to reinforce program
Organization’s work. The Plan shall contain the
requirements and modifications based upon
specific requirements for the organization and be
lessons-learned. New technologies and correction
evolutionary as technologies, processes or
of deficiencies identified during reviews and audits
procedures change. If there is a contractual
should also be part of the training process. The
requirement for device or assembly testing, options training requirements should be developed in
for determining ESD Sensitivity include QPL-19500, conjunction with the Organization’s handling
QML-38535, VZAP data or manufacturer’s data
procedures for ESDS parts, assemblies and
sheets. Efforts to identify and eliminate defects, and
equipment.
prevent their introduction, shall be a component of
the Plan to reduce the cost and risk associated with 6.1.3. Compliance Verification Plan
ESD damage. 6.1.3.1 Compliance Verification Plan Requirement
6.1.1.2. ESD Control Program Plan Guidance A Compliance Verification Plan shall be established
The Plan should describe the scope of the Program; to ensure the organization’s compliance with the
describe the tasks, activities, and procedures requirements of the Plan. Formal audits or
necessary to protect ESD sensitive items at or certifications shall be conducted in accordance with
a Compliance Verification Plan that identifies the electrical potential. As a minimum, ESDS items,
requirements to be verified, and the frequency at personnel and other related conductors shall be
which those verifications must occur. Test bonded or electrically interconnected.
equipment shall be selected to make measurements 6.2.1.2. Grounding / Bonding Systems Guidance
of appropriate properties of the technical
In most cases, the third wire (green) AC equipment
requirements that are incorporated into the ESD 4
ground is the preferred choice for ground . When
program plan.
the third wire AC equipment ground is not available
6.1.3.2. Compliance Verification Plan Guidance or impractical to use, personnel should be bonded or
In addition to internal audits, external audits electrically connected to a conductive element of the
(Organization and supplier of ESDS items) should ESDS item using a wrist strap or other grounding
be performed to ensure compliance with planned system to ensure that all elements are at the same
requirements. Verifications should include routine electrical potential.
checks of the Technical Requirements in the Plan.
6.2.2. Personnel Grounding
The frequency of verification checks should be
based on the control item usage, its durability and 6.2.2.1. Personnel Grounding Requirements
associated risk of failure. All personnel shall be bonded or electrically
6.2. ESD CONTROL PROGRAM PLAN connected to ground or contrived ground when
TECHNICAL REQUIREMENTS handling ESD sensitive items. When personnel are
seated at ESD protective workstations, they shall be
Table 1 identifies and describes key Technical connected to the common point ground via a wrist
Requirements used in the development of a strap system.
Program and Plan. Note that for each Technical
Requirement there are required or optional NOTE: The Organization must be aware of
implementing processes or methods (shown with an local safety laws and/or codes when
“R” or “O” in Table 1) from which to fulfill each grounding personnel while working with
Technical Requirement. In a case where there is a energized equipment.
required implementing process or method within the
Technical Requirements, the implementing process 6.2.2.2 Personnel Grounding Guidance
or method shall be used. If there are additional The personnel grounding system in all cases
optional elements, they may or may not be includes the person, the control item(s) and
implemented in the Plan. If a Technical connection to ground. A log should be maintained
Requirement only contains optional elements, which verifies that personnel have tested their
(shown with an “O”) then at least one of the options personal grounding devices. Personnel should
must be implemented by the Plan. The Plan shall check constant monitoring devices (when used) to
include test methods, acceptance limits and periodic ensure that they are functional and operating before
testing intervals. Area 1 shown on Table 1 is ESDS products are handled. In addition, constant
intended to designate permanent ESD controlled monitoring devices should be functionally checked
areas such as manufacturing, production or periodically to ensure that they are operating as
distribution facilities. Area 2 shown on Table 1 is designed. ESD protective flooring, used with
intended to designate temporary ESD controlled approved footwear, may be used as an alternative to
areas such as field service or other remote locations the wrist strap system for standing operations.
that are not normally equipped as a Protected Area. Footwear includes foot grounders, shoes or booties.
Test methods used by the organization that differ When equipment ground or auxiliary ground
from the test method or reference in Table 1 shall be systems are not available, bonding or electrical
documented. Additional guidance may be obtained connections (contrived ground) may be used.
in ESD ADV 2.0 ESD Association Advisory for the
Protection of Electrostatic Discharge Susceptible 6.2.3. Protected Areas
Items – Handbook 6.2.3.1. Protected Areas Requirement
6.2.1. Grounding / Bonding Systems Handling of ESDS parts, assemblies and equipment
without ESD protective covering or packaging shall
6.2.1.1. Grounding / Bonding Systems be performed in a Protected Area. Caution signs
Requirements indicating the existence of the Protected Area shall
Grounding/Bonding Systems shall be used to ensure
that ESDS items, personnel and any other 4
The color of third wire equipment ground can vary
conductors (e.g. mobile equipment) are at the same with local, national or international electric codes.
ANSI/ESD-S20.20-1999
Seated Operations R R
Standing Operations O O
Flooring – Footwear O O ESD STM 97.1 < 35 X 10 ohm
6 6
System or or
ESD STM 97.2 < 100 Volts
6
ESD STM4.2 6
< 200 Volts
Wrist Strap Cord O O ESD S 1.1 6
0.8 X 10 to
6
1.2 X 10 ohm
9 7
Footwear O O ESD S 9.1 < 1 X 10 ohm
ANSI ESD S 7.1 9 7
Flooring O O < 1 X 10 ohm
Seating O O ESD STM 9 7
< 1 X 10 ohm
12.1
Ionization (other than O O ANSI EOS/ESD < 50 Volts
6
room systems) S 3.1 Voltage Offset
Ionization (room O O ANSI EOS/ESD < 150 Volts
5
systems) S 3.1 Voltage Offset
Shelving O O ESD ADV 9 7
< 1 X 10 ohm
53.1
9 6
Mobile Equipment O O < 1 X 10 ohm
Continuous Monitors O O Manufacturer N/A
Specification
5
The values in the Recommended Range are obtained by using the Test Method, Standard or Advisory
provided in this table. See paragraph 6.2 for further guidance regarding alternate test methods.
6
This is a proposed value that has not been substantiated by any standard.
7
This value differs from the value in current standards. There is work in progress to harmonize the value.
ANSI/ESD-S20.20-1999
S11.11 11
< 1 X 10 ohms
ESD DS11.12
6
Shielding O O ESD S11.31 < 50 nJ
Low Charging O O ESD ADV 11.2
Protective Material O O EOS/ESD S8.1
Marking
MIL-E-17555, "Electronic and Electrical Equipment, Accessories, and Provisioned Items (Repair
Parts): Packaging of"