Hemt Devices and Background
Hemt Devices and Background
2.1 Overview
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(MISFET). However, instead of carrying current in a thick channel, a HEMT
relies on the formation of a two dimensional electron gas at the heterojunction
interface.
AlxGa(1-x)N Barrier
Buffer Layer
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2.3 HEMT Operation
In the most common HEMT structures, the wide bandgap barrier is doped
n-type while the narrow bandgap channel remains undoped. As a result, electrons
diffuse from the wide bandgap material into the narrow bandgap material to
minimise their energy. This process continues until a balanced Fermi level is
formed in the two materials and equilibrium is established. Because of the
resulting electrostatics, a new triangular well forms on the narrow bandgap side
of the heterojunction. Which we call it as two dimensional quantum well and the
electrons confined inside the well is called Two Dimensional Electron Gas
(2DEG).
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2DEG. As the narrow gap material is undoped and these electrons are away from
the interface, the electron mobility can be simultaneously increased with high
concentration of carriers.
Figure 2.3 shows the polarization vectors in the AlGaN and underlying
GaN. Within the AlGaN layer there are two polarization vectors Ppe, AlGaN and
Psp, AlGaN for the piezoelectric and spontaneous polarizations respectively. The
polarization in the AlGaN causes dipole charges to form at the borders of the
material with a negative sheet charge at the surface and an equal positive sheet
charge at the AlGaN/GaN junction. The polarization in the GaN layer causes a
negative sheet charge at the AlGaN/GaN junction and an equal positive sheet
charge on the bottom surface. Since the total polarization in the AlGaN is larger,
the overall result is a net positive sheet charge at the AlGaN/GaN interface.
Psp, GaN
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Notice that the bottom GaN and AlGaN/GaN interfaces are both positive
while the charge density at the top AlGaN interface is negative. The critical point
to remember is that the interface sheet charges here are not free carriers. They are
induced charges as in a typically polarised dielectric. However, it is the presence
of these charges and the polarization induced electric field in the AlGaN which
allows for 2DEG formation without barrier doping.
There are different effects present in the operation of HEMT devices such
as Polarization effects and Trapping Effects. The following section describes
more details about various effects in the HEMT devices.
Spontaneous Polarization: Al-N and Ga-N bonds are highly ionic and each
carries a strong dipole. For example, because the electronegativity of N is much
higher than that of Ga, the electron wave function around the Ga-N pair is offset
to the nitrogen side. The effect is even more exaggerated in the Al-N pair. This is
a special feature of the III-nitrides as the degree of spontaneous polarization is
more than five times greater than in most III-V semiconductors.
Figure 2.4 shows GaN grown in the Ga-face and N-face orientation which
is the norm for high performance AlGaN/GaN heterostructures. The c-axis
polarization vector points from the nitrogen to the Gallium, as indicated, and
creates an internal electric field pointing in the opposite direction, this is referred
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to as “spontaneous polarization”. In an AlGaN/GaN HEMT both the GaN and
AlGaN layers have spontaneous polarization vectors which point in the same
direction, from the N to the Ga(Al) towards the substrate (Figure 2.3).
Piezoelectric Polarization: The lattice constants a0 and c0 for GaN are slightly
larger than those for AIN. As a result, thin AlGaN layers grown on GaN are
tensile strained (the GaN is relaxed due to the thick buffer grown on the chosen
substrate). In the nitride system the piezoelectric constants are more than ten
times greater than those typical in most III-V semiconductors and this creates
very large polarizations. In Ga-faced material under tensile strain the
piezoelectric polarization due to the deformation of the AlGaN layer points
parallel to the spontaneous polarization vectors, e.g. towards the substrate in
Figure 2.4 A thorough treatment calculating the size of the spontaneous and
piezoelectric polarizations in the AlGaN and GaN systems is given by Ambacher
et al.
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in AlGaN/GaN HEMTs. Aside from surface effects, traps may also be formed by
dislocations, point defects or impurities.
The next type of contact present in the device is ohmic contact. In general,
an ohmic contact is referred to a non-injecting contact in which the current-
voltage relationship under both reverse- and forward-bias condition is linear and
symmetrical. However, in reality, a contact is considered ohmic if the voltage
drop across the metal semiconductor interface is negligible compared to the
voltage drop across the bulk semiconductor. It is difficult to make ohmic contact
to wide-gap semiconductor (e.g. III-group nitrides), because it does not generally
exist in metal with low-enough work function to yield a low barrier. Therefore
the practical way to obtain a low resistance ohmic contact is to increase the
doping level near the metal-semiconductor interface to very high level. So in
some cases a highly doped GaN layer is placed at the top of AlGaN/GaN
heterostructure in effort to lower the barrier.
Ohmic contacts allow current to pass into and out of the underlying
semiconductor with ease. Formation of ohmic contacts with low resistivity is
critical for optimal device performance. The cut-off frequency of a FET is
strongly determined by the transconductance, gm, of the device.
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The transconductance in equation (2.1) is the extrinsic transconductance,
that is, the overall transconductance offered by the device, including the parasitic
ohmic contacts. The transconductance, and thus ft, in equation (2.1) can be
increased by reducing the resistivity of the ohmic contacts.
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the semiconductor conduction-band edge of the interface and the Fermi level in
the metal.
For undoped semiconductor the electrons cross through the barrier mainly
by passing over the barrier, by thermionic emission. In the case of doped
heterostructure, electrons also tunnel through the barrier at some elevated
energies, by thermionic field emission. In the case of very high doping the
depletion region is very thin and electrons tunnel through the barrier. The IV
characteristic gets linear, when the resistance is low and the contact becomes
ohmic. The value of barrier height depends on the difference between the
electron affinities for the metal and the semiconductor. This is more or less only
a theoretical case. In reality the deposition of metal to semiconductor gives a
large number of interface states at the metal-semiconductor interface. High
interface state density causes that Fermi level is pinned at certain level in the
energy gap. Then the calculation of Schottky barrier requires detailed
information on the distribution of interface states. The Schottky- barrier height is
normally determined from experimental current voltage characteristics.
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structure, Metal–Organic Chemical Vapor Deposition (MOCVD) is used. To
create a negative polarization in the junction 1-nm InAlN/1-nm AlN barrier stack
is capped with a 2-nm-thick undoped GaN. Negative polarization charge at the
GaN/InAlN junction depletes the channel below the gate and reduces the gate
leakage. After removing the GaN cap at access regions, electrons populate the
channel.
The relationship between Schottky gate leakage current and the breakdown
voltage of AlGaN/GaN HEMT is based on the surface defect charge model. The
leakage current caused by the positive charge in the surface portion of AlGaN
layer induced by process damage such as nitrogen vacancies are represented in
this model. To effectively suppress this surface charge influence, a field plated
structure is effective. The gate leakage current increases with the defect charge
due to thinning of the Schottky barrier and the field plated device structure
reduces the electric field concentration at the gate edge. This will effectively
increase the device breakdown voltage. To suppress the surface damage at the
AlGaN layer, a low-damage fabrication process is most important point
regarding development of the AlGaN/GaN-HEMT for the power electronics
application due to low leakage current and high breakdown voltage. To further
enhance the power performance of the device, the drain region design should be
optimized.
Figure 2.5 shows the research flow diagram followed in this thesis. The
three different technique is designed and simulated using Sentauraus TCAD
simulator and comparison has been made to analyse the performance and
characteristics of each technique. The following section explains more details
about the current high power HEMT techniques.
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Gallium Nitride (GaN) Based High Power High Electron
Mobility Transistor (HEMT)
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2.5.2 Breakdown voltage improvement techniques in AlGaN/GaN HEMT
High gate electric field, due to the schottky contact leakage current or
through surface related conduction.
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effectively suppress the source carrier injection since the smooth Schottky
metallization produces a more uniform electric-field distribution in GaN buffer.
Figure 2.6 shows a GaN/AlGaN schottky source/drain contact HEMT.
Source Drain
(Ni/Au) Gate (Ni/Au)
Passivation Passivation
Al0.15Ga0.85N Undoped
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thickness of the dielectric material are the key factors for the improvement in the
breakdown voltage. It has been found that by increasing the permittivity or by
increasing the thickness of the passivation layer, the breakdown voltage also
increases because of the weakening of the electric field at the drain edge of the
gate. Thus by using high-k material and thick passivation layer, breakdown
voltage can be increased.
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Figure 2.8 Schottky with High-k Passivation in the GaN/AlGaN HEMT.
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physical partial differential equations, such as diffusion and transport equations,
to model the structural properties and electrical behavior of a self-designed
device structure. Sentaurus TCAD is one such software provided by Synopsys
for design and analysis of the devices. Technology CAD (TCAD) tools are
widely used today in the semiconductor industry and academic research. TCAD
simulation and modelling can be used to predict the device performance and
expedite the device development / optimization process for new technology.
They can also help us to understand device physics and operation mechanisms.
The TCAD tool used in this work is Sentaurus, advanced 1D, 2D, and 3D
device simulator capable of simulating the electrical, thermal, and optical
characteristics of silicon and compound semiconductor devices from Synopsis.
The TCAD simulation work consists of the following steps:
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on the device under investigation and the level of modelling accuracy required,
you can select four different transport models:
Drift-diffusion
Thermodynamic
Hydrodynamic
Monte Carlo
The main feature of the HEMT is its high carrier mobility and polarization
effect. So in order to simulate a high mobility device with polarization effect
sentaurus device uses a physics model for piezoelectric polarization.
Semi classical transport models such as the Drift-Diffusion (DD) and the
Hydro-Dynamic (HD) model cannot be applied directly to the simulation of
quantum devices. The Hydrodynamic Density Gradient model (HDG) including
the Poisson equation, the electron continuity equation, the quantum potential
equation, hot carrier effects, scattering and energy balance equation is used along
with polarization model to simulate GaN/AlGaN HEMT devices.
Thermodynamic Model: The model differs from drift-diffusion when the lattice
temperature equation is solved. It accounts for self-heating. Suitable for devices
with low thermal exchange, particularly, high-power density devices with long
active regions.
Hydrodynamic Model: Accounts for energy transport of the carriers. Suitable for
devices with small active regions. This model takes into account the contribution
due to the spatial variations of electrostatic potential, electron affinity, and the
band gap etc..
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Monte Carlo Model: Solves the Boltzmann equation for a full band structure.
Piezoelectric_Polarization (stress) }
The piezoelectric polarization vector and the piezoelectric charge can be plotted
by:
Plot {PE_Polarization/vector
PE_Charge }
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PORT 1 PORT 2
HEMT
by,
(2.3)
(2.4)
(2.5)
(2.6)
where and are incident and reflected waves at input and output of
the transistor. S-parameters are measured as the function of the frequency. The
is called the input reflection coefficient, the reverse transmission
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Maximum Stable Gain MSG: MSG gives power gain of transistor at the stability
border, at K=1. K is called stability factor, speaks about stability of the transistor
in frequency range
Maximum Stable Gain MSG: MSG gives power gain of transistor at the stability
border, at K=1.
For the practical application of transistor the figures of merit are unity current
gain frequency fT and unity power gain fmax.
fT :h21(fT) = 1 (2.7)
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voltage gain. Practically, to estimate fT, S-parameters are converted into the h-
parameters and current gain is plotted versus frequency. fmax is then estimated by
extrapolation of the measured unilateral power gain versus frequency.
2.6 Conclusion
In this chapter the HEMT devices and its background are discussed. The
device simulation tools and its physical model are also explained in detail. In the
coming chapters the design and analysis of various techniques in AlGaN/GaN
HEMT devices is discussed. The different techniques used in the design and
analysis are schottky source/drain contact technique, different high-k passivation
technique and field plate engineering Technique. The next chapter discusses the
schottky source/drain contact technique in AlGaN/GaN HEMT device for high
power applications.
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