e2v CC

CD and CMOS sensors

s aand systems desiigned fo r astron
nomical
appplicatio
ons
Paul Jordden*, Paul Jerram,
J Douug Jordan, Jérôme
J Prattlong, Markk Robbins
e2v techhnologies, 106
1 Waterhoouse Lane, Chelmsford d, Essex, CMM1 2QU

A
ABSTRACT
T

e2v continues to evolve itts product ran

nge of sensorss and systems, with CCD and a CMOS seensors. We described recennt
developmentss of high performance imaage sensors aand precision system comp ponents. Seveeral low noise backthinnedd
CMOS sensoors have beenn developed for f scientific aapplications. CCDs have become
b largerr whilst retain
ning very loww
noise and higgh quantum effficiency. Exaamples of senssors and sub-ssystems are prresented includding the recen
ntly completedd
1.2 GigaPixell J-PAS cryoggenic camera.

Keywords: C
CCD, CMOS, sensor, EMCCD, backthinnned, FPA, cry
yogenic camerra system

1. IN
NTRODUC
CTION
In this paper we describe progress
p on seeveral importaant developm
ments of both sensors
s and syystems for asttronomy. Thee
common them me is that of high
h performan ure. In a previious paper1 wee described seelected sensorss
nce and reliabble manufactu
and many of these have noow completed d developmennt. The e2v web w site2 proviides datasheetts for those seensors that aree
considered prroduction devvices; in otherr cases sensorrs are provideed to custom order.
o In all cases e2v executes designn,
manufacture, assembly andd test in-housee (only using ooutside foundries for its CM
MOS productss).

2. CM
MOS SENSO
ORS ACHIIEVE MAT
TURITY
e2v designs and manufacctures CMOS S sensors for space, astron nomy, and commercial m markets. Mostt of these aree
backthinned aand have low noise for high sensitivity. The followin ng sections illu
ustrate some rrecently developed sensorss,
many of whicch are now givven identifyin
ng names (rathher than just paart numbers).

2.1 CIS113 ((Vega)

The TAOS-III project requuires a large arrea mosaic seensor capable of 20 fps reaadout with muultiple regionss-of-interest inn
order to detect Trans-Nepttunian-Objectts by occultattion. The Veg ga device is a 3-side buttabble CMOS (A APS) sensor too
allow a large focal plane capable
c of the required readdout rate. Ten n sensors will form the com
mplete focal plane assemblyy
3
(FPA) and thrree telescopess each with their own FPA will be built. Another papeer describes thhe prototype cameras
c . Thee
figures below
w illustrate thee device and th
he spectral ressponse (of the backthinned sensor).

Figure 1. Backthinned Veega sensor in buttable pacckage Figure 2.

2 Spectral reesponse of Veega

The developm ment phase is i now comp plete and the production phasep (for thee set of 40 ssensors is unnderway) withh
completion exxpected earlyy in 2017. Outtline details ar
are presented below
b and mo ore details of the sensor are presented inn
another paperr4.

Proc SPIIE 9915-3, 20166, High Energy, Optical and Innfrared Detecto
ors for Astronom
my VII, AS16 cconference P1
Table 1. Summary information

Number of pixels 1920 (H) × 4608 (V)

Pixel size 16.0 µm square
Image area 73.728 mm × 30.72 mm
Output ports (each with REF and SIG) 8
Package size 82.39 mm × 31.7 mm
Package format 76 pin ceramic pin grid array attached to invar block
Focal plane height, above mounting surface 14.0 mm
Flatness < 30 µm (peak to valley)
Conversion gain 75 µV/e−
Readout noise 3 e− at 2 MP/s per channel
Maximum pixel data rate 2 MP/s per channel
Maximum charge per pixel 22,000 e−
Dark signal 70 e−/pixel/s (at 21 °C)
Frame rate 2 fps in full frame mode; 20 fps with multiple ROI’s

2.2 CIS112 (NGSD)

Adaptive optics for the new generation of extremely large telescopes requires correspondingly large sensors together
with high frame rate. Since only CMOS architecture (rather than CCD) can provide a large number of pixels and high
frame rate e2v has developed a high performance backthinned CMOS sensor designed originally for Natural Guide Star
use. This sensor is the precursor of an intended larger device of four times the area. The sensor has very low read noise
for high sensitivity.
The “NGSD” CIS112 sensor is illustrated below.

Figure 3. 880 X 840 CIS112

Only minimal information is presented here, since another paper5 describes the sensor more fully.
Table 2. Summary information

Number of pixels 880 X 840

Pixel size 24.0 µm square
Image area 21.12 mm × 20.16 mm
Output Digital; multiple parallel ADCs
Package format Ceramic PGA
Readout noise 3 e−
Variants > 85% at 589 nm
Maximum charge per pixel 4,000 e−

Proc SPIE 9915-3, 2016, High Energy, Optical and Infrared Detectors for Astronomy VII, AS16 conference P2
2.3 Onyx EV
V76C664
This sensor iss sold by e2v as a standard
d product for ccommercial ap pplications. However
H sincee it has low noise
n can be of
interest for asstronomical use.
u gital sensor arre available onn the datasheeet2. Summaryy
Full details of this sopphisticated dig
information is shown below w.

Figure 4. On
nyx 1.3 MegaP
Pixel sensor

mmary descriiption of Ony

Table 3. Sum yx sensor

Number of pixels 128 0 X 1024 (1.3 3 Megapixel)

Pixel sizze 10.00 µm square
Shutter modes
m Globbal and Rollin ng
Output 8, 1 0, 12, 14 bit LVDS
L
Package format Ceraamic 67-pin PGAP
Readout noise 6 e− (min, depending on modee)
Quantum
m Efficiency Monnochrome or sparse
s colour (with microleens)
Maximuum charge per pixel 16,0000 e−

2.4 CIS115 ((Sirius)

This sensor iss also backthinnned, offers lo
ow read noisee, and has been developed for f space appllications, incluuding the ESAA
JANUS (Juicce) mission. Itt is currently being
b qualifieed for space usse. Initially saample quantitties are being supplied, withh
further quanttities of Flight Models to follow,
f with pparameters as presented beelow. Radiatioon tests, endu urance, storagee
temperature, thermal cyclinng, and shock k & vibration ttests are underrway with resu ults expected by end-2016.

Figure 5. Sirrius sensor

Proc SPIIE 9915-3, 20166, High Energy, Optical and Innfrared Detecto
ors for Astronom
my VII, AS16 cconference P3
Table 4. Sum
mmary of Siriius features

Number off pixels 1504(H) × 200 00(V)

Pixel size 7.0 µm square
Number off output ports (reset and signnal pins) 4 pairs of analo
ogue outputs
Package size 48.26 mm squaare
Package foormat 140 pin ceramiic pin grid arraay
Flatness < 10 µm (peak to valley)
Conversionn gain 35 µV/e−
Readout nooise 7 e− (Rolling sh
hutter)
Maximum pixel data rate 8 MP/s per chaannel
Maximum charge per pixel 55,000 e−
Frame ratee Up
U to 10 Hz
Minimum time
t to read and
a readout onne line at
66.25 µs
6·2 MP/s
Frame ratee at full resoluttion Up
U to 7.5 fps

2.5 TDI CM
MOS developm
ment
As another sttrand of CMO OS imager dev
velopment, e2vv is in the pro
ocess of building such senssors with TDI (Time-Delay-
Integrate) arcchitectures. TDI
T CCDs are commonly uused for scann ning applicatio
ons in space suuch as the GA AIA telescopee.
The addition of TDI to a CMOS
C imager allows increaased sensitivity
y together witth the advantaages of a digittal architecturee
and low pow wer consumptiion. See IISW W 2015 paperr “CMOS Charge transfer TDI with froont side enhan nced quantum m
efficiency” byy F Mayer on e2v web site2.
Several technniques have beeen reviewed and the most promising tecchnique appeaars to be makking a CCD-lik ke structure too
allow charge summation allong the track k. An importannt issue is achhieving good charge
c transferr especially affter irradiationn
(as required ffor space use)). Small test devices have been manufaactured and ch haracterized aafter irradiatio
on; these show w
good promisee and the next step will be to design a fulll-sized devicee (including hiigh-speed AD DC). See figurees below.

ADC ADC
C ADC ADC

Figure 6. Ch
harge summaation along piixel

Proc SPIIE 9915-3, 20166, High Energy, Optical and Innfrared Detecto
ors for Astronom
my VII, AS16 cconference P4
Figure 7. Concept of TDII CMOS (testt device)

2.6 CIS111 ((MTG FCI)

This is an exaample of a CM
MOS imager designed
d for eearth observatiion where it offers
o higher fr
frame rate and
d less crosstalkk
than an equivvalent CCD.
The CIS111 is to be usedd on the Meteosat Third Geeneration Flex xible Combin ned Imager. Itt has 5 indepeendent imager
blocks with iin-package fillters. Outer blocks
b have rhhombus-shapeed pixels. CVVF values varyy from 0.8- 8 µV/e- to suiit
illumination level. Chargee transfer path
hs are optimizzed to speed transfer throu
ugh the largee pixels and avoid
a lag. Seee
figure below.

S111 architeccture
Figure 8. CIS

2.7 CIS116 ((Metimage)

Another custoom test vehiclle is the CIS116 which hass 250 µm squaare pixels each
h one of whicch has 8 photo
odiodes with a
common sensse node. The main target iss to optimize lag and CVF with variantss of transfer ggates and phottodiode shapee.
Peak signal is 2.5 Me- withw 84 dB dynamic
d rangee. Designed for
f backthinn ning. The testt device has recently beenn
characterizedd. See illustrattion of pixel below.
b

Proc SPIIE 9915-3, 20166, High Energy, Optical and Innfrared Detecto
ors for Astronom
my VII, AS16 cconference P5
 S116 pixels
Figure 9. CIS

3. C
CCD SENS
SORS
In this sectioon we illustraate selected seensors with pparticular featu
ures of curren
nt interest to astronomers.. Many other
2
sensors can bbe seen on thhe e2v web pages p . Heree we describee several EMCCDs offerinng exceptionaally low noisee
together withh traditional CCD
C performaance in terms of uniformity y and high speectral responsee. e2v also manufactures
m a
range of stanndard backthinnned sensors with very low w noise and formats
f rangin
ng from 1K X 1K up to 9K K X 9K. e2vv
continues to specialize in design and manufacture
m off a wide rangge of custom sensors desiggned for spacee applicationss;
w illustrateed in a previouus paper1.
many of thesee recent ones were

3.1 CCD2011
This sensor iis an e2v stanndard productt. It is used wwidely for commmercial applications, inclluding life sciience imagingg
cameras at veery low light level.
l It utilizes the e2v L3 Vision or EM
MCCD technology to achievve sub-electron n noise in a 1kk
X 1k backthinnned format sensor.
s Thesee sensors havee also been ussed for astrono omical applicaations either for
f high framee
rate (with low
w noise) or foor very low signal
s applicattions. In partticular, it has been evaluatted for potenttial use on thee
NASA WFIR RST coronagraaph6, 7. Furtheer informationn is available on
o the datasheeet2.

3.2 CCD2822
This sensor hhas been develloped with thee EMCCD arcchitecture for very
v low noise photon counnting and is th
he largest suchh
ously8 and is illlustrated beloow.
device manuffactured to datte. The sensor has been desscribed previo

Figure 10. CCD282

The sensor ooffers a 4K X 4K image fo ormat, in fram

me-transfer arcchitecture witth eight outpuuts for rapid read-out.
r It iss
backthinned aand optimizedd for photon counting
c with very low leveels of parallell clock-induceed charge; thiss latter featuree
can be a perfoormance limittation for such
h applications.. Its developm
ment is complete.

Proc SPIIE 9915-3, 20166, High Energy, Optical and Innfrared Detecto
ors for Astronom
my VII, AS16 cconference P6
3.3 CCD3511
This sensor is the latest inn the suite of e2v L3Visionn commercial sensors, whicch has recentlly been develo oped. It offerss
backthinned spectral respoonse, very low w noise, togetther with large area and video-rate readoout. This sen
nsor is now inn
production, w
with datasheet due for publication immineently. See illu ustration and ty
ypical perform
mance below.

Figure 11. Paackage illustrration of CCD

D351 (not fin
nal version)

Table 5. CCD
D351 Typicall performancce

Image sectionn 1024 x 1024

Pixel size 10 µm × 10 µm
Active imagee area 10.24 × 10.24 mm
Package size 22.86 × 28.00 mm
Amplifier ressponsivity 3.5 µV//e−
Readout noise < 1 e- (with EM gainn)
Multiplicationn gain 100-100
00 typical
Output data rrate 37 MHzz
Active pixel ccharge storagee 35 ke-/p
pixel
Dark signal (18°C) 100 e-/p
pixel/s

4. PR
RECISION
N SYSTEM
M ASSEMB
BLIES
e2v continuees its developm
ment of sub-systems to coomplement itss suite of sen nsors. Such suub-systems arre supplied too
custom order and optimizeed for each app
plication. Herre we highligh
ht a few exam
mples.

4.1 WUVS
The WUVS ((World Spacee Observatory Ultra-Violet Spectrograph h) consists of high-resolutio
h on spectrograp
phs to be usedd
on a 2m spacce telescope. e2v is supply ying sensors coovering the UV
U (115-310 nm) n range witth three chann nels integratedd
into custom ssealed enclosuures together with flight eleectronics (asssociated with RAL Space) iin a three yeaar programmee.
The figures bbelow illustratee the custom enclosure
e conncept, and the triple detectorr system conceept.
Key features include: UV optimised
o sennsors, vacuum cryostat detecctor enclosurees, electronic ddrive moduless, interconnecct
cabling. Thee CCDs are maintained
m at -100ºC
- whilst contributing no more thann 3W. Outgasssing must be minimal for 9
years of use. The componnents are desig gned to withsstand shock and
a vibration of launch andd maintain aliignment. Thee
instrument is also described in a paper at this conferennce10.

Proc SPIIE 9915-3, 20166, High Energy, Optical and Innfrared Detecto
ors for Astronom
my VII, AS16 cconference P7
Figure 12. W
WUVS custom
m sensor enclo
osure and CC
CD272

Figure 13. W
WUVS triple detector
d layou
ut with cameera electroniccs units

4.2 KMTNeet (Ohio)

The Korea mmicro-lensing telescope nettwork consistss of three teleescopes each with its ownn camera for monitoring of
micro-lensingg events in thee galactic bulg
ge. Each cameera has four CCD290
C sensoors to form a 3340 megapixeel mosaic. e2vv
has designed, constructed and delivered d the three asssembled FPAAs as illustrateed below. Thhe FPAs are integrated
i intoo
cryogenic cammeras built byy Ohio State University.
U
The focal plaane flatness is m diameter. See a previoous paper forr some further
i better than 30 µm acrosss the 300 mm
information oon the assembly1 together with
w a paper at this meeting11.

Figure 14. K
KMTNet focall plane, with CCD290 scieence sensor an
nd CCD47 gu
uider

Proc SPIIE 9915-3, 20166, High Energy, Optical and Innfrared Detecto
ors for Astronom
my VII, AS16 cconference P8
4.3 JPAS Crryocam
e2v has just ccompleted thee manufacturee of a 1.2 Gigg pixel cryogeenic camera foor use on the OAJ telescoppe operated byy
CEFCA (Spaain). This JPA AS camera hass been describbed in outline previously12 and
a its perform
rmance (after completion)
c iss
fully detailedd in a paper at this meeting133.
Key features of the cryogennic camera are presented beelow together with figures illustrating
i thee camera.

Table 6. Keyy features of e2v

e J-PAS cry
yocam

450 mm focaal plane diameter -1

100ºC operatinng temperaturre Stable to +/- 00.5ºC
27 µm peak-vvalley flatnesss Measured
M at -1 00C Stable againsst gravitational flexure
14 science CC
CD290-99 sennsors 1..2 Gig pixels 9K X 9K sennsors
8 wavefront ssensors CCD44-82
C FT Custom packa
kages
4 guide sensoors CCD47-20
C FT Custom packa
kages
Integrated eleectronics 22
24 science chaannels < 5 e- read-nooise at 400 kH
Hz
Modular CCD
D drive units Sy
ynchronized rreadout of scieence CCDs Local frame sstores
Complete LN
N2 cooling sysstem In
ntegrated vacuuum system Post-deliveryy support
Cold light bafffle High
H QE/ minim
mum reflectio
on AR

Figure 15. J--PAS Cryocam (a) exploded view (b) p

photograph off camera

5. SUMMA
ARY
e2v has a siignificant herritage of supp plying high pperformance backthinned silicon CCD sensors to the t space andd
astronomy coommunity. Inn recent yearrs an increasinng number of CMOS senssors have beeen developed all with highh
specificationss and multiplee features for differing appplications. To
o complementt the supply oof sensors e2v
v has suppliedd

Proc SPIIE 9915-3, 20166, High Energy, Optical and Innfrared Detecto
ors for Astronom
my VII, AS16 cconference P9
various sub-system solutions with customized design and detector-limited high performance. These components form
building blocks for future supply of sensors and systems to well defined specifications and a strong in-house supply
chain.

REFERENCES

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[2] e2v web site, 2016, http://www.e2v.com (2016)
[3] Wang Shiang-Yu, et al, “The prototype cameras for trans-Neptunian automatic occultation survey,” Proc SPIE 9908,
(2016).
[4] Pratlong J, et al “A 9 megapixel large-area back-thinned CMOS sensor with high sensitivity and high frame-rate for
the TAOS II program,” Proc SPIE 9915, (2016)
[5] Downing M, et al, “LGSD/NGSD: High Speed Visible CMOS Imagers for E-ELT Adaptive Optics,” Proc SPIE
9915, (2016)
[6] Harding L, et al, “Technology advancement of the CCD201-20 EMCCD for the WFIRST-AFTA Coronagraph
Instrument…,” JATIS 011007, (2016).
[7] Bush N, et al, “Cryogenic Irradiation of an EMCCD for the WFIRST Coronagraph,” Proc SPIE 9904, (2016)
[8] Gach Jean-Luc, et al, “Development of a 4kx4k frame transfer electron multiplying CCD for scientific applications,”
Proc SPIE 9154, (2014).
[9] Dekany R, “The Zwicky Transient Facility observing system,” Proc SPIE 9908, (2016).
[10] Panchuk V, “Optical design of WUVS instrument:WSO_UV spectrographs,” Proc SPIE 9905, (2016).
[11] Moon Dae-Sik, “Supernovae and optical transient observations using ..KMTNet,” Proc SPIE 9906, (2016)
[12] Taylor K, et al, “JPCAM: a 1.2 GPixel camera for the J-PAS survey,” JAI vol3, no 1, (2014)
[13] Robbins M S, et al “Performance of the e2v 1.2 GPixel cryogenic camera for the J-PAS 2.5m survey telescope,”
Proc SPIE 9908, (2016).

Proc SPIE 9915-3, 2016, High Energy, Optical and Infrared Detectors for Astronomy VII, AS16 conference P10