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All-Silicon Terahertz Planar Horn Antenna

Article in IEEE Antennas and Wireless Propagation Letters · July 2021

DOI: 10.1109/LAWP.2021.3094310

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This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI 10.1109/LAWP.2021.3094310, IEEE
Antennas and Wireless Propagation Letters
IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS 1

All-Silicon Terahertz Planar Horn Antenna

Jie Liang, Weijie Gao, Harrison Lees Student Member, IEEE,
and Withawat Withayachumnankul, Senior Member, IEEE

Abstract—We propose an integrated all-silicon 2-D horn an- was implemented on a 2-D photonic crystal waveguide plat-
tenna operating over 220 to 330 GHz (WR-3 band). This endfire form made of only silicon to eliminate the ohmic loss with a
antenna is designed for full integration with a substrateless all- maximum realized gain of 10.6 dBi. However, due to the reso-
dielectric terahertz frontend. The antenna supports two orthog-
onal fundamental modes of guided waves with in-plane and out- nance nature of the antenna, its fractional bandwidth was only
of-plane polarizations. By introducing a 2-D effective-medium 6% over 311 to 331 GHz. To further enhance the bandwidth
dielectric lens on the same platform, the antenna realized gain and realized gain, an all-silicon rod antenna array [15] and
together with the free-space impedance matching is enhanced Luneburg lens [16] based on the same platform were reported.
allowing for a broadband operation with a fractional impedance There, measured realized gains above 20 dBi were achieved
bandwidth of 40% on a compact footprint. The fabricated
antenna is experimentally validated with measured realized gain across 315–390 GHz with a relative bandwidth of 21%. In
ranging from 11.2 to 14.2 dBi for the in-plane polarization and essence, all these antennas integrated with the photonic crystal
10.5 to 15.0 dBi for the out-of-plane polarization across the entire platform have relatively narrow bandwidth with high in-band
WR-3 band. We foresee that this all-dielectric horn antenna dispersion and can support only one polarization, rooted in the
together with the integrated highly efficient platform can be intrinsic properties of photonic bandgap structures [3].
adopted in beyond 5G communications.
To this end, all-silicon effective-medium-clad dielectric
Index Terms—2-D horn antenna, dielectric lens, effective waveguides together with various fundamental building blocks
medium, dielectric waveguide, terahertz communications have been proposed by our group as an integrated platform for
terahertz frontends [17], [18]. This substrateless platform fea-
I. I NTRODUCTION tures extremely low loss, low dispersion, and broad bandwidth,
while supporting two orthogonal fundamental modes, namely
R APIDLY growing data usage in various high-quality mul-
timedia has raised demands in wireless communications
with high channel capacities [1]–[3]. The terahertz spectrum
x
E11 or in-plane and E11y
or out-of-plane modes. The effective
medium that supports the waveguide is realized by periodically
perforating a silicon slab with subwavelength spacing. The
with vast available bandwidth exhibits great potentials to
relative permittivity of this effective medium can be flexibly
promote beyond 5G communications. However, due to the
controlled by adjusting the configuration of this subwavelength
limited source power and high free-space path loss, it is
hole array. With such benefits, various terahertz integrated
critical to develop highly efficient frontends for terahertz
devices can be built on this platform to inherit high efficiency
wireless applications. Importantly, antennas with high gain,
and broad bandwidth.
high efficiency, and broad bandwidth are critical for these
In this work, we propose a planar horn antenna implemented
terahertz frontends. To build such antennas, material properties
onto this terahertz integrated platform over 220 to 330 GHz.
and manufacturability must be considered. It is challenging
The proposed antenna consists of a flaring section to increase
to directly scale existing metallic microwave antennas up
the aperture size and an effective-medium lens to enhance the
to the terahertz frequencies due to their significant ohmic
antenna realized gain together with the impedance matching to
losses and increasing manufacturing complexity at terahertz
free space. The proposed all-silicon antenna has an extremely
frequencies [4]–[11]. Although metallic horn antennas feature
high efficiency nearly 100%. Compared to the rod-array an-
high efficiency due to the low current density in metal [12], the
tenna fed by a photonic crystal waveguide [15], the proposed
increasing manufacturing complexity and cost together with
design has a comparable efficiency but around a twofold
the bulky structures limit their integrability.
increase in the fractional bandwidth owing to the performance
To enable antenna integration, a terahertz H-plane horn of the feed waveguide. Importantly, the lens part synthesizes
antenna surrounded by metallic photonic crystal rod array was the functions of wavefront flattening together with impedance
proposed [13], despite its bandwidth limited by the photonic matching leading to a compact footprint. Compared to the
bandgap effect. Alternatively, an integrated dielectric resonator dielectric microstrip-line-based horn antenna [19] supporting
antenna with endfire radiation was reported [14]. This antenna only out-of-plane polarization due to the waveguide mode
x
This work was supported by the Australian Research Council Discovery restriction, the proposed antenna can support both E11 and
y
Project under Grant ARC DP180103561. E11 guided modes resulting in radiation with orthogonal
J. Liang was with the Terahertz Engineering Laboratory, and is currently polarizations promising applications that require polarization
with the School of Computer Science, The University of Adelaide, Adelaide,
SA 5005, Australia. diversity to increase wireless channel capacities.
W. Gao, H. Lees, and W. Withayachumnankul are with the Terahertz
Engineering Laboratory, School of Electrical and Electronic Engineering, The II. A NTENNA DESIGN
University of Adelaide, Adelaide, SA 5005, Australia. (Jie. Liang and Weijie.
Gao contributed equally to this work.) (Corresponding authors: Jie Liang; As shown in Fig. 1(a), the antenna consists of an effective-
Weijie Gao.) medium-clad waveguide as a feed, a flare section, and a

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Antennas and Wireless Propagation Letters
IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS 2

2-D effective-medium lens. The lens and the claddings are

realized by subwavelength perforation in hexagonal lattices,
as shown in Figs. 1(b–c), specifically chosen for mechanical
robustness. Accordingly, the relative permittivities of these
perforated components can be controlled by varying the hole
configuration, i.e., the perforation period a and hole diameter
d, based on the Maxwell-Garnet effective medium theory
[20]. By properly designing the lens with a spatially varying
effective permittivity, the cylindrical wavefront emerging from
the flaring section can be flattened, while a good impedance
matching between the antenna and free space can be achieved
allowing for broad gain and impedance bandwidths. To achieve
high efficiency, the whole structure is built into a 250-µm-
thick high-resistivity float-zone silicon wafer with a resistiv-
ity >10 kΩ-cm [17], [18]. This silicon exhibits a relative
permittivity of Si = 11.68 and loss tangent of 3×10−5 within
the operation frequency range. Float-zone silicon has much
higher purity than that fabricated with other techniques. This
is much needed for terahertz applications to minimize material
dissipation [21].
As shown in Figs. 1(b–c), the waveguide core width w
Fig. 1. Schematic of all-silicon 2-D horn antenna. All components are defined
is 225 µm, while the effective medium claddings is with a by through holes in a single silicon slab. (a) Antenna model. (b) Effective-
lattice period a = 100 µm, i.e., three times smaller than medium-clad dielectric waveguide as a feed. (c) Effective-medium cladding
the guided wavelength and a hole diameter d = 90 µm in hexagonal lattice. (d) Effective-medium lens. The taper is for matched
coupling from the hollow waveguide to the antenna in both simulation and
resulting in the relative permittivity tensor (x , y , z ) of (2.75, measurement. Here, lt = 3.00 mm, ls = 6.30 mm, lf = 2.88 mm,
3.83, 2.75) [18]. In this design, the horn antenna is in the ll = 1.39 mm, w = 0.225 mm, wf = 3.40 mm, wc1 = 0.69 mm,
form of an in-plane flare, to yield a large effective aperture wc2 = 0.78 mm, θf ≈ 60◦ , a = 0.1 mm, and d = 0.09 mm. The detailed
dimensions of the lens can be found in Table I.
and realized gain [13] [22]. However, enlarging the flaring
angle and aperture too much will exacerbate the cylindrical
wavefronts due to an increasing difference in the path lengths index towards free space. The subwavelength lattice period
[15]. Thus, the antenna realized gain will be degraded. On a is selected as 100 µm, while the minimum hole diameter
the other hand, increasing the length of the flaring section can dmin is chosen as 20 µm, which is determined by the deep
reduce the flaring angle hence maintaining a reasonably planar reactive ion-etching (DRIE) process. This configuration allows
wavefront but with the sacrifice of structural compactness. for a wide range of effective permittivity, resulting in a fine
Considering the trade-off between the antenna realized gain control for phase compensation and impedance matching. Our
and the structural compactness, the 2-D flaring section in this design goals include reflection coefficients below −10 dB and
work is designed as shown in Fig. 1, where the flaring length realized gains above 10 dBi with variations less than 3 dB
and width are selected as lf = 2.88 mm and wf = 3.40 mm, across the whole WR-3 band for both polarizations.
respectively, leading to a flaring angle of θf ≈ 60◦ . With To investigate the performance, the 3-D full-wave simula-
such a flaring angle, the transition between the feed waveguide tions are performed with CST Microwave Studio 2020, where
and the aperture is smooth with an aperture size about three a realistic loss tangent of 3 × 10−5 is employed for the silicon
wavelengths across. material. The simulated E-field distributions of the antenna
To further enhance the antenna realized gain and the free- for the two modes are shown in Fig. 2. It is observed that
space impedance matching while maintaining the structural the waves emerging from the feed waveguide diverge in the
compactness, a 2-D effective medium dielectric lens is intro- flaring region, and then are gradually flattened when passing
duced. The lens design is based on the principle discussed the effective-medium lens and being radiated into free space.
in [15]. Specifically, an array of small holes leads to a higher y
The wave front of the E11 mode is slightly over-corrected due
modal index, which can increase the phase delay, while an to the a small modal index difference between the two guided
array of larger holes can reduce the transit time. Therefore, modes, which is expected to slightly reduce the overall gain.
to equalize the phase delay of the emerging cylindrical wave-
front, as shown in Fig. 1(d), a gradient hole distribution is
III. FABRICATION AND MEASUREMENT
adopted along the x-axis, where the hole diameter is gradually
increased from the center to the edges of the lens. Due to As shown in Fig. 3(a), the antenna is fabricated on a single
the low dispersion of the air-silicon effective medium and high-resistivity float-zone silicon wafer with a thickness of
the guided modes, the lens can support broadband operation 250 µm. The fabrication is based on standard deep reactive
for both linear polarizations. Meanwhile, to achieve a good ion-etching (DRIE). The blind holes occur with the smallest
free-space impedance matching, the hole diameter is gradually holes around the center of lens. This is due to the achievable
increased along the z-axis leading to a decreased modal aspect ratio, i.e., the ratio between the hole depth and the

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This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI 10.1109/LAWP.2021.3094310, IEEE
Antennas and Wireless Propagation Letters
IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS 3

TABLE I
H OLE DIAMETERS FOR THE EFFECTIVE - MEDIUM DIELECTRIC LENS (d: H OLE DIAMETER WITH UNIT OF MICROMETER )

Row number d1 d2 d3 d4 d5 d6 d7 d8 d9 d10 d11 d12 d13 d14 d15 d16 d17
1&2 20 20 25 25 30 35 35 40 40 45 45 50 50 55 55 60 60
3&4 20 25 25 30 35 35 40 40 45 45 50 50 55 55 60 60 65
5&6 25 25 30 35 35 40 40 45 45 50 50 55 55 60 60 65 65
7&8 25 30 35 35 40 40 45 45 50 50 55 55 60 60 65 65 70
9 & 10 30 35 35 40 40 45 45 50 50 55 55 60 60 65 65 70 70
11 & 12 40 40 44 44 48 48 52 52 56 60 60 60 60 64 64 68 68
13 & 14 60 60 63 63 66 66 69 69 76 76 76 76 78 78 81 81 84
15 & 16 80 80 82 82 84 84 86 86 88 88 90 90 92 92 94 94 96

Fig. 2. Simulated instantaneous E-field amplitude distributions of the antenna.

x and (b) E y modes at
Amplitude distributions in linear scale for (a) E11 11
275 GHz. All the amplitude plots are normalized to the same scale.

width, which is limited to around 10:1 in this case. The Fig. 3. Fabricated sample and measurement setup. (a) Microscopic image of
the fabricated antenna. Antenna fed by (b) WR-3.4 straight waveguide and
measurements are carried out by using a Keysight vector net- x and E y modes.
(c) WR-3.4 twist waveguide for the E11 11
work analyzer (VNA) with Virginia Diodes WR-3.4 extension
modules spanning from 220 to 330 GHz. At the transmitter
side, a WR-3.4 hollow waveguide with opening dimensions
of 863.6 × 431.8 µm2 feeds the antenna sample through the
taper, while a WR-3.4 metallic horn antenna is adopted as
a receiver. Specifically, the taper structure is inserted into
the hollow waveguide for coupling, while an external holder
is introduced to support the sample. For precise alignment,
high-precision optical stages are used. It is noteworthy that
the simulated results show that, for a perfectly aligned case,
x
the coupling loss ranges from 1.3 to 0.2 dB for the E11
y
mode and from 0.8 to 0.2 dB for E11 mode over 220 to
330 GHz. The separation between the two antennas is 14 cm,
beyond the far-field distance of around 4 cm at 330 GHz.
As shown in Figs. 3(b–c), the sample is fed by a WR-3.4
x
straight waveguide for the E11 mode and a twist waveguide for x and (b)
Fig. 4. Simulated and measured reflection coefficients for (a) E11
y
the E11 mode. The yz-plane radiation pattern is measured by y
E11 modes. The simulation without lens is based on the model with absence
rotating the antenna in the yz-plane with a pivot at the antenna of the effective lens, while the other parts remain unchanged.
end point. Additionally, the xz-plane radiation patterns can be
measured by rotating the sample by 90◦ , while the straight
and twist waveguides are swapped for the two modes. To that the reflection levels are reduced by more than 5 dB with
measure the cross-polarized components in the two planes, a the effective lens.
twist waveguide needs to be added or removed at the receiver The simulated and measured radiation patterns for the two
in opposition to the twist involvement at the transmitter. modes are illustrated in Fig. 5. For both polarizations, the
Figure. 4 shows the simulated and measured reflection coef- measured 3-dB angular beamwidth in the xz-plane is less
y
x
ficients for the E11 and E11 modes, where the measurements than 20◦ , while it is around 85◦ in the yz-plane for both
reasonably agree with the simulations. For both polarizations, polarizations. The fan beam is due to the unequal aperture
the simulated and measured reflection coefficients are well dimensions in the two planes, where the in-plane aperture
below −10 dB across the whole WR-3 band. Discontinuities is much larger than the out-of-plane one that is determined
in conjoined waveguide sections and external reflections cause by the wafer thickness. The patterns for both modes are
rapid spectrum fluctuation in the measured results. It is shown reasonably stable across the frequency range of the interest.

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This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI 10.1109/LAWP.2021.3094310, IEEE
Antennas and Wireless Propagation Letters
IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS 4

mainly caused by the sample imperfections, i.e., the actual

wafer thickness is 5 µm less than the designated 250 µm
and the holes are over-etched by around 2.5 µm. These
imperfections have been verified in simulation to cause similar
effects in the radiation patterns.
As can be seen in Fig. 6, the measured realized gain
x
ranges from 11.2 to 14.2 dBi for the E11 mode and from
y
10.5 to 15.0 dBi for the E11 mode over 220 to 330 GHz.
y
It is observed that the measured gain for the E11 mode
fluctuates over the entire band. Based on the free spectral
range (FSR), the associated distance is approximately 1.2 cm,
while the distance between the antenna tip and the taper
structure is around 1.1 cm. In this case, we believe that the
standing waves are caused by the impedance mismatch due
to misalignment between the taper and the feed rectangular
y x
waveguide. Compared to the E11 mode, the E11 mode exhibits
a lower sensitivity to the misalignment due to a better mode
matching [18]. The increased realized gain with frequency
is due to the larger effective aperture. The measured 3-dB
x
realized gain bandwidth for the E11 mode is 110 GHz covering
the whole WR-3 band, while it is reduced to 107.8 GHz
y
from 222.2 to 330 GHz for the E11 mode with realized gain
ranging from 12.0 to 15.0 dBi. The results further show the
effectiveness of the lens in performance enhancement. As
x
Fig. 5. Simulated and measured antenna radiation patterns for (a–c) the E11 illustrated in Fig. 6, the average realized gains are improved
y
and (d–f) E11 modes at 220, 275, and 330 GHz. The simulated cross-polarized by around 6.0 dB for both polarizations compared with an
components are not presented, since they are negligible due to the perfect identical antenna with no lens. It is worth to mention that
symmetry of the antenna model. Due to the limited scanning angle of the
setup, the antenna radiation patterns are measured from −45◦ to 45◦ . confirmed by simulations, the blind holes around the center
of lens have a negligible impact on the antenna performance
attributed to the robustness of effective medium.

IV. C ONCLUSION
In conclusion, an all-silicon planar horn antenna built on
the effective-medium-clad dielectric waveguide platform has
been proposed. The antenna operates in the WR-3 band while
supporting two linear polarizations, resulting from the two or-
thogonal fundamental modes of guided waves. The efficiency
of this antenna is near to 100% due to negligible dissipation
of the float-zone intrinsic silicon. Attributed to the effective-
medium lens, the antenna realized gains and impedance match-
ing are significantly enhanced with a compact footprint. The
experimental validation confirms a 40% fractional bandwidth
x
for the E11 mode with reflection coefficient below −10 dB
and realized gain ranging from 11.2 to 14.1 dBi over 220 to
x and (b) E y
Fig. 6. Simulated and measured realized gains for (a) E11 11 330 GHz. Due to the fabrication and measurement tolerances,
modes. The simulated realized gains are discrete with a sampling frequency y
the 3-dB gain bandwidth for the E11 mode is slightly reduced
of 5 GHz, while the lines are for visual guidance. To mitigate the noise
introduced by misalignment, a smoothing function has been employed to with gain raging from 12.0 to 15.0 dBi. The overall antenna
process the measured gains with a sliding window covering 1 GHz. gain can be readily increased by scaling the aperture size
together with the effective lens. It can be foreseen that such
a dielectric horn antenna can be widely used in the next
The measured cross-polarization components below −10 dB generation communications with a high channel capacity.
are significantly higher than those in simulation. This cross-
polarization level is similar to that measured in an effective- ACKNOWLEDGMENT
medium-clad waveguide, and was confirmed via simulation to The authors would like to thank Dr Wendy S. L.
be from a small misalignment to the feed rectangular waveg- Lee for the assistances in the experiment. The samples
y
uide [17]. It is observed that for the E11 mode, the measured were fabricated by Silicon Sensing Systems Japan Ltd.
radiation patterns in the yz-plane at the edge frequencies have The Quadro P6000 GPU used for this research was con-
slightly larger discrepancies with the simulations. They are tributed by NVIDIA Corporation.

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Antennas and Wireless Propagation Letters
IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS 5

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