Scribd
Upload
3 views21 pages

Integrated Circuit 2

Uploaded by

saaalahmohamed355
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
3 views21 pages

Integrated Circuit 2

Uploaded by

saaalahmohamed355
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
You are on page 1/ 21

ECE 422: Integrated Circuits

Lecture 02: Clean Room

16/10/2021 DR. ENG. MOHAMED ISMAIL 1


Semiconductor
Fabrication Technology

Clean room
Clean Room
• 1-An IC fabrication facility requires a
clean processing room, especially in
the area used for lithography.
• 2-The need for such a clean room
arises because dust particles in the
air can settle on semiconductor
wafers and lithographic masks and
can cause defects in the devices,
which result in circuit failure
Operations done in Cleanroom
Cleanroom from inside
Cleanroom from outside
Cleanroom
• 1-A clean environment designed to reduce
the contamination of processes and
materials
• 2-Cleanroom used for the production of
microsystems.
• 3-The yellow (red-green) lighting is
necessary for photolithography, to prevent
unwanted exposure of photoresist to light of
shorter wavelengths.
Fabrication area with gowning ‫اللبس‬area, air
showers, and service aisle‫(خزائن(الممر‬
Cleanroom elements
1-Adhesive floor mats‫ السجاد الألصق‬At every entrance to
pull off and holds dirt adhered at the bottom of the
shoes
1. 2-Gowning area
– Buffer between cleanroom and the plant
– Always supply with filtered air from ceiling HEPA
filters
– Store cleanroom apparel‫ مالبس‬and change to
cleanroom garments
2. 3-Air pressure
– Highest pressure in cleanroom, second highest in
gowning area and the lowest in factory
hallways‫الممرات‬
– Higher pressure in cleanroom causes a low flow
of air out of the doors and blow airborne particle
back into the dirtier hall way
4. 4-Air showers
- Air shower is located between the governing
room and the cleanroom
- High velocity air jets blow off particles from the
outside of the garments
- Air shower possesses interlocking system to
prevent both doors from being opened at the
same time
5. 5-Service bay
- Semi-clean area for storage materials and
supplies
- Service bay has Class 1000 or class 10 000
- Bay area contains process chemical pipes,
electrical power lines and cleanroom materials
- Critical process machines are backed up to the
wall dividing the cleanroom and the bay 
allows technician to service the equipment from
the back without entering the cleanroom
6. 6-Double-door-pass-through
- Simple double-door boxes or may have a
supply of positive-pressure filtered air with
interlocking devices to prevent both doors from
being opened at the same time
- Often fitted with HEPA filters
Clean Room Classifications
Cause of contamination
Classes of contaminants

1. Particles
2. Metallic ions
3. Chemicals
4. Bacteria
5. Airborne molecular contaminants
(AMCs)
Relative size of airborne particles and wafer
dimensions
Typical cleanroom head garment
Typical cleanroom garments‫المالبس‬
HEPA and ULPA filters
• 1-Fabrication area consists of a large room with
workstations (called hoods) arranged in rows so
that the wafers could move sequentially through
the process without being exposed to dirty air

• 2-Use high-efficiency particulate‫الجسيمات‬


attenuation (HEPA) filters or ultra-low-particle
(ULPA) filters
– Allow passage of large volumes of air at low velocity
– Low velocity contributes to the cleanliness of the hood
by not causing air currents, and also for operators
comfort
– HEPA and ULPA filters efficiency: 99.9999+ % at
0.12micron particle size
– Typical flow 90-100 ft/min
Laminar at right vs turbo at left
Air flow pattern for "Laminar Flow Cleanroom"
Air flow pattern for "Turbulent Cleanroom"

You might also like

pFad - Phonifier reborn

Pfad - The Proxy pFad of © 2024 Garber Painting. All rights reserved.

Note: This service is not intended for secure transactions such as banking, social media, email, or purchasing. Use at your own risk. We assume no liability whatsoever for broken pages.


Alternative Proxies:

Alternative Proxy

pFad Proxy

pFad v3 Proxy

pFad v4 Proxy