Installation Guide

Agilent E3180 Semiconductor Process Evaluation Core Software

Agilent SPECS revision B.02.51/C.02.51

Agilent Part No. E3180-90657

Printed in Japan September 2001

Edition 2
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Printing History
Edition 1: June 2001
Edition 2: September 2001
for rev.C.02.51 support
In This Manual
This manual describes how to install the Agilent Semiconductor Process Evaluation
Core Software (SPECS) system software.
In this manual , 4070 Series or 4070 means Agilent 4071A Semiconductor
Parametric Tester, Agilent 4072A Advanced Parametric Tester, and Agilent 4073A
Ultra Advanced Parametric Tester.

Other Manuals
Also, the following manuals are available for SPECS.

• Agilent SPECS User’s Guide (Agilent part number E3180-90605)

• Agilent SPECS Measurement Algorithm Development Guide (Agilent part
number E3180-90615)
• Agilent SPECS Data Query Guide (Agilent part number E3180-90635)
• Agilent SPECS Framework Operation Guide (Agilent part number
E3180-90645)
• Agilent SPECS Linking IC-CAP (Agilent part number E3180-90665)
 Contents

1. Installation Guide
Required Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
To Check the Contents of the SPECS Package . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Computer Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Software Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
To Install SPECS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Installing the SPECS Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
To select the account name of the user acting as administrator . . . . . . . . . . . . 1-11
Creating new files for already existing files
(Upgrade from version B.02.50 or earlier). . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Executing Setup Program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
To select the format of the data file . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-31
To set up the SPECS user accounts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-32
To select the operation mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-33
Prober Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-34
Tokyo Electron TEL P8 Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-34
Tokyo Seimitsu TSK A-PM-90A Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-36
Electroglas EG 4090/4080 Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-39
Configuring SPECS Using the sysconf File . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-41
setup_ Command Syntax and SPECS Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-45
setup_file Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-46
setup_iccap Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-47
Structure of SPECS Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-48
1 Installation Guide

SPECS C.02.51/B.02.51 Installation Guide, Edition 2

 Installation Guide

This chapter provides procedures for installing SPECS, and consists of the
following sections:

• “Required Environment”
• “To Install SPECS”
• “Prober Setting”
• “Configuring SPECS Using the sysconf File”

NOTE RELEASE.NOTES files

Before using SPECS, read RELEASE.NOTES file in the /opt/SPECS directory.
The RELEASE.NOTES file contains information regarding new features, known
problems with the installed version of SPECS, and workarounds.

NOTE Before installing SPECS B.02.51, make sure you backup the currently installed
version of SPECS. Installing SPECS B.02.51 can overwrite your customized files.
For example:
# mkdir /opt/SPECS2.50
# cp -r /opt/SPECS/* /opt/SPECS2.50
Using the backup files, you can refer to your customized files or, in case of
problems, you can easily revert to the revision B.02.50 environment.

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SPECS C.02.51/B.02.51 Installation Guide, Edition 2
 Installation Guide
Required Environment

Required Environment
This section provides steps to be taken before installing SPECS.

• “To Check the Contents of the SPECS Package”

• “Computer Requirements”
• “Software Requirements”

To Check the Contents of the SPECS Package

Before you begin the installation process, make sure the following parts are included
in the SPECS package.

Agilent Part
Description Quantity
Number

Agilent SPECS software media a 1 N/A

LICENSE-TO-USE CERTIFICATE 1 N/A

User's Guide 1 E3180-90605

Creating Your Framework 1 E3180-90625

Measurement Algorithm Development Guide 1 E3180-90615

Data Query Guide 1 E3180-90635

Framework Operation Guide 1 E3180-90645

Installation Guide 1 E3180-90655

a. SPECS C.02.51 is provided on CD-ROM and SPECS B.02.51 is pro-

vided on either CD-ROM or DAT tape.

SPECS C.02.51/B.02.51 Installation Guide, Edition 2 1-3

 Installation Guide
Required Environment

Computer Requirements
The following tables lists the computer requirements for using SPECS rev.C.02.51
and B.02.51.
Table 1-1 Computer Requirements for SPECS C.02.51

Model HP Visualize Workstation C3600

Memory 64 MBytes minimum

Swap Space Determine using the following calculation:

128 MBytes + 50 Mbytes × N (sessions)

Disc Size 4 GBytes minimum

Display High resolution (1280× 1024) recommended.

Medium resolution (1024× 768) available.

Table 1-2 Computer Requirements for SPECS B.02.51

Model HP 9000 Series 700 Model 745/132L (recommended)

HP 9000 Series 700 Model 745i

HP Visualize Workstation C3600 (recommended)

Memory 64 MBytes minimum

Swap Space Determine using the following calculation:
100 Mbytes (reserved) + 50 Mbytes x N (sessions)

Disc Size 2 GBytes minimum

Display High resolution (1280× 1024) recommended.

Medium resolution (1024× 768) available.

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SPECS C.02.51/B.02.51 Installation Guide, Edition 2
 Installation Guide
Required Environment

Software Requirements
Before installing SPECS, make sure that compatible versions of HP-UX,
BASIC/UX, SICL, and system software (4070 Series) are installed on your
computer.
The following tables indicates which system software versions are compatible with
SPECS rev. C.02.51.
Table 1-3 Revision Mutching Table for SPECS C.02.51

Software Revision Number

HP-UX B.11.11
BASIC/UX C.08.04
SICL 11.11-1.0
Agilent 4070 Series C.03.01
Agilent SPECS C.02.51

The following tables indicates which system software versions are compatible with
SPECS B.02.51.

• For Agilent 4070 Series

Table 1-4 Revision Mutching Table for SPECS B.02.51 with Agilent 4070 Series

Software Revision Number

HP-UX B.10.20a
BASIC/UX C.08.03
SICL G.03.00
Agilent 4070 Series B.03.00
Agilent SPECS B.02.51
a. C3600 computer model supports revision ACE5, and computers
other than C3600 support revision ACE3.

SPECS C.02.51/B.02.51 Installation Guide, Edition 2 1-5

 Installation Guide
Required Environment

• For Agilent 4062 Series

Table 1-5 Revision Mutching Table for SPECS B.02.51 with Agilent 4062 Series

Software Revision Number

HP-UX B.10.20a
BASIC/UX C.08.02
SICL G.01.02b
Agilent 4062 Series X.08.00/F.08.00
Agilent SPECS B.02.51
a. C3600 computer model supports revision ACE5, and computers
other than C3600 support revision ACE3.
b. Computers other than 745/132L support HP SICL revision
G.01.02 and E.01.01.

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SPECS C.02.51/B.02.51 Installation Guide, Edition 2
 Installation Guide
Required Environment

To Set HP-UX Parameters

SPECS requires the HP-UX parameters be changed using the HP-UX SAM utility
(sam). To change this parameter, refer to "Constructing an HP-UX System" in the
System Administration Tasks HP-UX manual.

1. Set display parameter by selecting “Display” in the sam.

Set “Overlay, Depth 8, PseudoColor” in the “Action: Modify Default Visual”
menu in the “X Server Configuration” item.
2. Do not set the XMODIFIERS parameter in the /opt/SPECS/sys/config/envconf
file. You can remove the setup as following command:
# unset XMODIFIERS

NOTE Standalone System

SPECS decides that your computer is standalone when it cannot find the
/etc/resolv.conf file. If your computer is a standalone system, the
/etc/resolv.conf file must be renamed to:
# mv /etc/resolv.conf /etc/resolv.conf.bak

SPECS C.02.51/B.02.51 Installation Guide, Edition 2 1-7

Installation Guide
To Install SPECS

To Install SPECS
This section tells you how to install SPECS on your computer from the CD-ROM
provided. The following procedures are described in this section:

1. “Installing the SPECS Software”

2. “To select the account name of the user acting as administrator”
3. “Creating new files for already existing files (Upgrade from version B.02.50 or
earlier)”
4. “Executing Setup Program”
5. “To select the format of the data file”
6. “To set up the SPECS user accounts”
7. “To select the operation mode”

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SPECS C.02.51/B.02.51 Installation Guide, Edition 2
 Installation Guide
To Install SPECS

Installing the SPECS Software

To install the software, refer to the section appropriate for your hardware
environment.

• “Installing from a CD-ROM”

• “Installing from the DDS Tape (B.02.51 only)”

Installing from a CD-ROM

1. Log in as superuser.
2. Insert the CD-ROM into the CD-ROM drive.
3. To connect the CD-ROM drive to your file system, execute the command:
# mount device_file /SD_CDROM
where, [device_file] is the device file for your CD-ROM drive.
4. Start the installation using the following command in the terminal emulator
window:
# /usr/sbin/swinstall -s /SD_CDROM/SPECS.UPD\;1 SPECS
where, [device file] is the device file for your CD-ROM drive.
If SPECS is already installed, use the [-x reinstall=true] option.
5. After completing the swinstall utility, use the following command to review
the log file for any errors or warning messages:
# view /var/adm/sw/swagent.log
6. To disconnect the CD-ROM drive from your file system, execute the command :
# umount /SD_CDROM
7. Remove the CD-ROM and put it in a safe place.

SPECS C.02.51/B.02.51 Installation Guide, Edition 2 1-9

Installation Guide
To Install SPECS

Installing from the DDS Tape (B.02.51 only)

1. Log in as superuser.
2. Make sure the DDS tape is set to the write-protected state.
3. Insert the DDS tape into the DDS drive and wait until the BUSY indicator turns
off.
4. Start the installation using the following command in the terminal emulator
window:
# /usr/sbin/swinstall -s [device file] SPECS
where, [device file] is the device file for your DDS drive.
If SPECS is already installed, use the [-x reinstall=true] option.
5. After finishing the swinstall utility, use the following command to review
the log file for any errors or warning messages:
# view /var/adm/sw/swagent.log
6. Remove the DDS tape and place it in a safe place.

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SPECS C.02.51/B.02.51 Installation Guide, Edition 2
 Installation Guide
To Install SPECS

To select the account name of the user acting as

administrator
To select the account of the user you want to act as administrator, execute the
following procedure:
1. Login as a super user.
2. Specify account group name like “specsadm” except for “users”, when making a
user account for an administrator. The group must include only the administrator
user account for the file management security.
3. # /opt/SPECS/install/bin/setup_admin

==================== SPECS Administration User Setup ==============

Enter user name to administrate SPECS.
[quit = 'q']. :

4. Enter the account name of the user you want to act as administrator.
Only one administrator can be selected per license.
An administrator can:

• execute the -F option for the /opt/SPECS/install/bin/set_file command and the

setup_iccap command. This creates new files when doing backups so existing
files are not overwritten.
• modify and overwrite the following files:
/opt/SPECS/sys/config/envconf
/opt/SPECS/sys/config/envconflog
/opt/SPECS/sys/config/sysconf
/opt/SPECS/sys/config/sysconflog
/opt/SPECS/sys/config/usrconflog
/opt/SPECS/sys/config/xdb_pref
/opt/SPECS/sys/resource/home/csh.login
/opt/SPECS/sys/resource/home/profile
/opt/SPECS/sys/resource/X/C/SPECS
/opt/SPECS/sys/resource/X/ja_JP.SJIS/SPECS

SPECS C.02.51/B.02.51 Installation Guide, Edition 2 1-11

Installation Guide
To Install SPECS

/etc/opt/SPECS/config/limedit
/var/opt/SPECS/log/prober.log
/var/opt/SPECS/log/prtctf.log
/var/opt/SPECS/log/setuplog
/var/opt/SPECS/log/syslog
/var/opt/SPECS/log/tplexeclog
• terminate sessions and SPECS environment from Session Manager. Only an
administrator or a superuser can execute the terminate operation.

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SPECS C.02.51/B.02.51 Installation Guide, Edition 2
 Installation Guide
To Install SPECS

Creating new files for already existing files

(Upgrade from version B.02.50 or earlier)
If this is the first time you are installing SPECS, skip this section.
If you previously installed SPECS revision B.02.50 or earlier, the installation
procedure explained in the previous sections only creates the new files that the
earlier SPECS revision did not have. To create new files for already existing files,
the setup_ command must be executed.
To overwrite all of the files that are updated in SPECS revision B.02.51:

1. Make sure to backup the files you do not want to overwrite.

2. To overwrite all of the files, execute the following command:
# /opt/SPECS/install/bin/setup_file -F

Backup user customized file ?

Default = 'y'. [quit = 'q']. :

This command can be executed by a superuser or an administrator. If you

execute this command as an administrator, the command does not overwrite the
/opt/SPECS/lib/BASIC.* files. For more information about the setup_file
syntax, refer to “setup_file Command Syntax” on page 1-46.
3. (Optional) If you use the IC-CAP link function, execute the following
command:
# /opt/SPECS/install/bin/setup_iccap -F

Backup user customized file ?

Default = 'y'. [quit = 'q']. :

This command can be executed by a superuser or an administrator. For more

information about the setup_iccap syntax, refer to “setup_iccap Command
Syntax” on page 1-47.

SPECS C.02.51/B.02.51 Installation Guide, Edition 2 1-13

Installation Guide
To Install SPECS

Executing Setup Program

Configure SPECS using the following command in the terminal emulator window:
# /opt/SPECS/install/bin/setup_config
Setup program makes the following setup interactively.

1. “To setup the security license”

2. “To select the algorithm development language”
3. “To select the measurement and user libraries”
4. “To select the tester and the utility library”
5. “To select the prober library”
6. “To select the framework”
7. “To select the binning rule and limit”
When executing the setup_config, the following message displayed.

              

            

!  !        

!      !    
"    "   #

       


$%%&'()&%  % %* +,
-./  0$%%&'()&%  % %* +,
("*  

!. 0 ." 0 1 

2  344#

As described in the message, if you have not created backup for your B.02.50 or
earlier revision, follow the test step form 1 to 4.
Pressing the Return key goes to the license step.

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SPECS C.02.51/B.02.51 Installation Guide, Edition 2
 Installation Guide
To Install SPECS

To setup the security license

NOTE This procedure is applicable for SPECS revision 2.51 that is not updated from
revision 2.50 or earlier but newly purchesed. If your SPECS revision 2.51 is updated
product, refer to “To setup the security license for updated product from SPECS
revision 2.50 or earlier” on page 1-29 instead of this section.

To setup the SPEC security license, use the “/opt/SPECS/install/bin/setup_license”

command.

1. When the following message appears on the computer screen, press the Return
key to continue.

==================== SPECS Security License Setup =================

Type c (continue) or s (skip), then press Return.
Default = 'c'. :

2. When the following message appears on the computer screen, enter “L”.

Codeword format list

Codeword format type Description

--------------------- --------------------------------------------------
L(=LONG) XXXXXXXXXXXXXXXXXXXXXXXXX... (more than 25 chars.)
S(=SHORT) XXXX-XXXX-XXX-XXXX

Check codeword format on your license sheet.

Enter codeword format type.
Default = 'L'. [quit='q'] :

3. Enter the "Temporary CODEWORD" shown on the “LICENSE-TO-USE

CERTIFICATE" sheet.

: XXXXXXXXXXXXXXXXXXXXXXXXX...
Enter codeword. [quit='q'] :

SPECS C.02.51/B.02.51 Installation Guide, Edition 2 1-15

 Installation Guide
To Install SPECS

4. If your 30 days temporary security license is successfully configured, the

following messages are displayed.

Customizing /opt/SPECS/sys/config/sysconf...

OK. your security level is the following.

====> SPECS : Temporary License; Valid fo 30 days after installatio

To make this setup effective, restart the CDE session or the shell.
Customization completed.

You can retry the SPECS Security License Setup.

Type y (yes) or n (no), then press Return.
Default = 'n'. :

NOTE Note that this temporary security license is valid only for 30 days after this
installation. So you need to get a codeword for certified license and then execute
/opt/SPECS/install/bin/setup_license again to setup the ceritified security license.

• To get a certified codeword, refer to the document enclosed with the

“LICENSE-TO-USE CERTIFICATE" sheet.
• To setup the certified security license, repeat above steps but enter the gotten
certified codeword instead of a temporary codeword.

Here, press the Return key to go to the “To select the algorithm development
language” step. To go back to the “To setup the security license” step, enter "y".

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SPECS C.02.51/B.02.51 Installation Guide, Edition 2
 Installation Guide
To Install SPECS

To select the algorithm development language

To select the programming language used to develop algorithms in SPECS use the
/opt/SPECS/install/bin/setup_algtype” command.

1. When the following message appears on the computer screen, press the Return
key to continue.

==================== SPECS Algorithm Language Setup ===============

Type c (continue) or s (skip), then press Return.
Default = 'c'. :

2. To select the algorithm development language, enter either “BASIC” or “C” .

Algorithm language list

Algorithm language Description

------------------- --------------------------------------------
BASIC Language for BASIC algorithm library
C Language for C algorithm library

Enter desired language to use and hit return key.

Default = 'BASIC'. [quit='q'] :

3. Press the Return key to go to “To select the tester and the utility library” step.
To go back to the “To select the algorithm development language” step, enter
"y".

Checking ALGTYPE...
Customizing /opt/SPECS/sys/config/sysconf...

Customization completed.

You can retry the SPECS Algorithm Language Setup.

Type y (yes) or n (no), then press Return.
Default = 'n'. :

SPECS C.02.51/B.02.51 Installation Guide, Edition 2 1-17

Installation Guide
To Install SPECS

To select the measurement and user libraries

To select the measurement and user libraries, use the
“/opt/SPECS/install/bin/setup_library” command.

1. When the following message appears on the computer screen, press the Return
key to continue.

================ SPECS Measurement Library Setup ==================

Type c (continue) or s (skip), then press Return.
Default = 'c'. :

2. At the prompt, enter the measurement library name with a relative path from the
/opt/SPECS/usr/alg/measure or /opt/SPECS/usr/calg/measure directory.

Enter name of measurement library to use and hit return key

Default = 'DEMO'. [quit = 'q']:

3. At the prompt, enter the user library name with an absolute path. The path is set
to CUSRLIB and RMBLIBS in the /opt/SPECS/sys/config/sysconf file and in
the /opt/SPECS/usr/etc/TEMPLATE.mak files.

Customizing /opt/SPECS/sys/config/sysconf...
Previous sysconf was saved as sysconf.bak.

Enter name of user library to use and hit return key.

Just hit return key for no setting.
[quit = 'q']:

4. Press the Return key to complete the library setup and go to the next step.

Customization completed.

You can retry the SPECS Measurement Library Setup.

Type y(yes) or n(no), then press Return.
Default = 'n'.:

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 Installation Guide
To Install SPECS

To select the tester and the utility library

You set the tester library. This configuration can also be started using the
“/opt/SPECS/install/bin/setup_tester” command.

1. To select the tester library, use the “/opt/SPECS/install/bin/setup_tester”

command.

==================== SPECS Tester Library Setup ===================

Type c (continue) or s (skip), then press Return.
Default = 'c'. :

2. At the prompt, enter the tester name with a relative path from the
/opt/SPECS/usr/alg/tester or /opt/SPECS/usr/calg/tester directory.

Tester algorithm library list

Tester library Description

--------------- ----- --------------------------------------------
HP4073A Algorithm library for Agilent 4073A
HP4072A Algorithm library for Agilent 4072A
HP4071A Algorithm library for Agilent 4071A
HP4062UX Algorithm library for Agilent 4062UX
HP4062F Algorithm library for Agilent 4062F
NOTESTER Algorithm library for offline execution

Enter name of tester library to use and hit return key.

Default = 'HP4073A'. [quit='q'] :

3. At the prompt, enter the utility library name with a relative path from the
/opt/SPECS/usr/alg/utility or /opt/SPECS/usr/calg/utility directory.

Enter name of utility library to use and hit return key

Default = 'UTILITY'. [quit = 'q']:

4. After completing the customization, press the Return key to go to the “To Set
Prober Library” step. To go back to the “To Set Tester Library” step, enter “y”.

You can retry the SPECS Tester Library Setup.

Type y (yes) or n (no), then press Return.
Default = 'n'. :

SPECS C.02.51/B.02.51 Installation Guide, Edition 2 1-19

 Installation Guide
To Install SPECS

NOTE The setup_tester command must be executed, when you add common
parameters or user defined libraries for BASIC language.
Copy the BASIC.usrcom and the BASIC.usrlib files from the
/opt/SPECS/sys/lib directory to the /opt/SPECS/usr/lib
directory as your prefer name with .usrlib and .usrcom suffix.
After modifying the *.usrlib and *.usrcom files in the
/opt/SPECS/usr/lib directory, make sure to execute the setup_tester
command to link the definition in the *.usrlib and *.usrcom files.

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 Installation Guide
To Install SPECS

To select the prober library

To select the prober library, use the "/opt/SPECS/install/bin/setup_prober”
command.

1. When the following message appears on the computer screen, press the Return
key to continue.

==================== SPECS Prober Library Setup ===================

Type c (continue) or s (skip), then press Return.
Default = 'c'. :

2. At the prompt, enter the name of the prober.

Prober driver list for BASIC

Prober driver Description

--------------- ----------------------------
NOPROBER_HPSTD Driver for offline execution
EG4080_HPSTD Driver for EG 4080, 4090
TELP8_HPSTD Driver for TEL P-8
TSK90A_HPSTD Driver for TSK APM90A, UF200
(Others) User created driver

Enter name of prober driver to use and hit return key.

Default = 'NOPROBER_HPSTD'. [quit='q'] :

NOTE To use the HPSTD framework, select model NOPROBER_HPSTD,

TSK90A_HPSTD, TELP8_HPSTD, or EG4080_HPSTD.

NOTE The TSK90A, TSK80A, TSK60A, TEL80W, TEL80S, TEL78S, TEL20S and
EG2001 prober drivers are not supported for used with C language. To use these
drivers:

a. Copy the *.bas and *.lib files from the

/opt/SPECS/contrib/alg/prober directory to the
/opt/SPECS/usr/alg/prober directory.
b. Execute setup_prober command and specify the prober driver name.

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3. Enter the GPIB address.

Customizing /opt/SPECS/sys/config/sysconf ...

Previous sysconf was saved as sysconf.bak.

Checking framework configuration files...

Enter address of wafer prober (ex. 2501)
[quit='-1'] :

4. Press the Return key to go to the “To select the framework” step. To go back to
the “To select the prober library” step, enter "y".

Customizing /opt/SPECS/usr/fwk/HPSTD_EG4080.cf...
Customizing /opt/SPECS/usr/fwk/HPSTD_TELP8.cf...
Customizing /opt/SPECS/usr/fwk/HPSTD_TSK90A.cf...

Customization completed.

You can retry the SPECS Prober Library Setup.

Type y (yes) or n (no), then press Return.
Default = 'n'. :

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To Install SPECS

To select the framework

To select the framework, use the "/opt/SPECS/install/bin/setup_framework”
command.

1. When the following message appears on the computer screen, press the Return
key to continue.

==================== SPECS Framework Setup ===============

Type c (continue) or s (skip), then press Return.
Default = 'c'. :

2. To configure the framework so it starts automatically when ExeSys starts, enter

“ON”. If you select “ON”, enter the account name of the user who can
automatically execute a specified framework.

Enter the automatic start mode upon boot. (ON/OFF)

Default = 'OFF'. [quit='q'] :

3. Enter the name of the framework to be used. For details on each framework,
refer to the Agilent SPECS Framework Operation Guide.

Framework list

Framework Description
-------------- --------------------------------------------------------------
HPSTD_NOPROBER Standard framework for offline execution or plugin template
HPSTD_EG4080 Standard framework for EG 4080, 4090 prober
HPSTD_TELP8 Standard framework for TEL P-8 prober
HPSTD_TSK90A Standard framework for TSK APM90A, UF200 prober
(others) User created framework

Enter the framework for development and execution.

Default = 'HPSTD_NOPROBER'. [quit='q'] :

4. Press the Return key to continue.

This question is for Japanese users only.

Enter the language for operator instruction. (C/ja_JP.SJIS)

Default = 'C'. [quit='q'] :

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To Install SPECS

5. Press the Return key to complete the setup program. To go back to the “To select
the framework” step, enter "y".

Customization completed.

You can retry the SPECS Standard Framework Setup.

Type y (yes) or n (no), then press Return.
Default = 'n'. :

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To select the binning rule and limit

To select the binning rule and limit, use the “/opt/SPECS/install/bin/setup_limit”
command.

1. When the following message appears on the computer screen, press the Return
key to continue.

============ SPECS Binning Rule and Limit Setup ===========

Type c (continue) or s (skip), then press Return.
Default = 'c'. :

2. At the prompt, enter the desired raw binning rule.

Raw binning rule list for tpl execution

Raw binning rule Description

---------------- ------------------------------------------------
SMALL Makes value the same as list on the lower binning
LARGE Makes value the same as list on the higher binning

Enter desired raw binning rule to use and hit return key.
Default = ' SMALL'. [quit = 'q']:

3. At the prompt, enter the desired user binning rule.

User binning rule list for tpl execution

User binning rule Description

---------------- ------------------------------------------------
RAWBIN Uses binning rule
INSIDE Makes value the same as limit on the inside
OUTSIDE Makes value the same as limit on the outside

Enter desired user binning rule to use and hit return key.
Default = ' RAWBIN'. [quit = 'q']:

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To Install SPECS

4. At the prompt, enter a value for the maximum number of raw bin limits.

Enter the maximum number of raw bin limits. (0 - 10)

This value is effective only in the Limit Editor.
Default = '10'. [quit = '-1']:

5. At the prompt, enter a value for the maximum number of user limits.

Enter the maximum number of user limits. (0 - 6)

This value is effective only in the Limit Editor.
Default = '6'. [quit = '-1']:

6. At the prompt, enter a value for the maximum number of user flags.

Enter the maximum number of user flags. (0 - 4)

This value is effective only in the Limit Editor.
Default = '4'. [quit = '-1']:

7. Press the Return key to complete the setup program. To go back to the “To Set
Binning Rule and Limit Setup” step, enter “y”.

Customizing /opt/SPECS/sys/config/sysconf

Customizing completed.

You can retry the SPECS Binning Rule and Limit Setup.
Type y(yes) or n(no), then press Return.
Default = 'n':

Press the Return key to list the default parameters set by the
/opt/SPECS/sys/config/sysconf file in the setup_config procedure.

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==================== SPECS System Configuration =====================

Edit following configurable parameters optionally.

Consult System Administration Guide for more details.

Parameter Description Present set

---------------- ---------------------------------------- -----------
WORKSPECS Shared memory size 8000
ADTFORMAT Data format type 1
ADTLOGGING Data dump mode for measurement TRUE
YEARFORMAT The number of digit of the year 4
VERIFYTEST Undefined module ignore mode FALSE
VERIFYLIMIT Undefined limit ignore mode TRUE
CLEARONRETEST Data clearance mode on retest FALSE
CLEARONREJECT Data clearance mode on reject FALSE
ERRIGNORE Algorithm error ignore mode on tpl FALSE
RANGECHECK Algorithm range check mode on tpl TRUE
SMODE Operation panel screen mode engineer

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To Install SPECS

NOTE Following is summary of parameters shown in the SPECS System Configuration

menu. Refer to page 41 to modify these parameters.
WORKSPACE The recommended workspace is 8000, if you have
set a value for this parameter, the setup_config does
not overwrite the parameter. If the value shown in the
dialog in the previous step 7 is less than 8000, change
it to 8000 in the sysconfig file.
ADTFORMAT Refer to “To select the format of the data file” on
page 1-31.
YEARFORMAT If this parameter is “2”, a problem can occur after
the year 2000.
VERIFYTEST When “FALSE” is set, SPECS ignores the input if
you refer to a module which does not exist in a test
spec.
VERIFYLIMIT When “TRUE” is set, an error occurs when a limit
file does not depend on a test plan.
CLEARONREJECT If this parameter is “TRUE”, the REJECT command
clears the data for the specified unit. In this case, the
“REJECT WAFER” command clears the data for the
current wafer and then measures the next wafer.
CLEARONRETEST If this parameter is “TRUE”, the RETEST command
clears the data for the specified unit. In this case, the
“RETEST WAFER” command clears the data for the
current wafer and then measures the same wafer
again.
ERRIGNORE Specifies the action when an error occurs in an
algorithm
RANGECHECK If this parameter is TRUE, an error occurs when the
input value is outside the range specified in the
algorithm.
SMODE Refer to “To select the operation mode” on page 33.

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To Install SPECS

To setup the security license for updated product from SPECS

revision 2.50 or earlier
NOTE Before beginning the installation procedure, connect the security module to your
computer using the attached serial cable. The security module should be connected
to RS-232C port "1" (port "1" is recommended but port "2" can also be used). To
prevent stressing the cable, do not hang the security key from the serial port.

Tot setup the SPEC security license use the “/opt/SPECS/install/bin/setup_license”

command.

1. When the following message appears on the computer screen, press the Return
key to continue.

==================== SPECS Security License Setup =================

Type c (continue) or s (skip), then press Return.
Default = 'c'. :

2.
3. If you connected the security module to the RS-232C port "1", press the Return
key.
If you connected the security module to port "2", enter "B".

SPECS License Password Setup.

Checking system configuration file existence...

OK. Found the system configuration file.

License key module can be connected with serial port A(=1) or B(=2).
Enter the serial port number to connect license key module. (A/B)
Default = 'A'. [quit='q'] :

4. Enter the "SERIAL NUMBER" shown on the " LICENSE-TO-USE

CERTIFICATE” sheet.

OK. key module connection.

Enter license key module serial number;XXXX-XXXX [quit='q'] :

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To Install SPECS

5. Enter the "CODEWORD" shown on the “LICENSE-TO-USE CERTIFICATE"

sheet.

OK. key module connection.

Enter license key module serial number;XXXX-XXXX [quit='q'] :xxxxxxx..

Enter license key password; XXXX-XXXX-XXX-XXXX. [quit='q'] :

6. Press the Return key to go to the “To select the algorithm development
language” step. To go back to the “To setup the security license” step, enter "y".

Customizing /opt/SPECS/sys/config/sysconf...

OK. your security key level is the following.

====> SPECS : On-line Execution & Off-line Debug Mode.

To make this setup effective, restart the CDE session or the

Customization completed.

You can retry the SPECS Security License Setup.

Type y (yes) or n (no), then press Return.
Default = 'n'. :

NOTE If you lost the LICENSE-TO-USE CERTIFICATE included with your software,
please contact the nearest Agilent Technologies office. The ID module serial
number will be required. To access the serial number:
1. Login as superuser.
2. Execute the following command:
# /opt/SPECS/sys/bin/seckey_snumber

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To Install SPECS

To select the format of the data file

To select the format of the data file set the ADTFORMAT parameter in the
/opt/SPECS/sys/config/sysconf file to a value of 1, 2, or 3.
A summary of the available data formats is shown in the following table. To use the
latest SPECS features, change the ADTFORMAT parameter to 3. To maintain
compatibility with SPECS version 1.0, use the default ADTFORMAT parameter
value of 1.
Table 1-6 Available data formats
ADTFORMAT Description
a Maintains compatibility with SPECS rev.A.01.00
1 (.adt file)
This is the default setting of the “sysconf” file.
2 (.adt file) a Stores the SYSTEM User Tag variable as a STRING. You can
specify 2 or 4 as the number of characters for the recording year.
3 (.ad2 file) The data format type for SPECS rev.A.02.20 or later. The following
items are added to ADTFORMAT=2
- Die offset - Module name
- Center die index - Device name
- Wafer ID - Measurement algorithm name
- Die label - Output variable name
- Module location - Center data
- Test sequence number - Wafer slot number
- Test spec name - User bin information
- Die spec name - Yield information
4 (.ad3 file) The data format type for SPECS rev.B.02.40 or later. The following
items are added to ADTFORMAT=3
- Revision number of SPECS - Limit file name
- Library name - Parameters defined in sysconf
- Test plan name - SYS_PRBPRODID
- Framework name - SYS_SLOTID
Deletes the following items from ADTFORMAT=3
- Statistical data
- Bin data
The data format type for SPECS rev.B.02.50 or later, the following
items are added.
- contents of usrconflog file
- device parameter
- automatically generate limit files from Limit Editor.
a. Wafermap cannot be drawn when ADTFORMAT=1 or 2.

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To Install SPECS

To set up the SPECS user accounts

To set up the environment variables and resources use the following procedure.
Each SPECS user must set up their environment variables and resources correctly
before using SPECS.

1. Login as superuser.
2. To set up a new user account, execute the HP-UX SAM utility (sam).
For details regarding setting up a new user account, refer to the HP-UX manual.

NOTE To create a new SPECS directory, select the “Create Home Directory” check button.

3. Execute the setup_user utility as follows:

# /opt/SPECS/install/bin/setup_user user_account
user_account: user account name
When this command is executed except for superuser, this command can set
only the home directory for the user executing this command.
4. At the prompt, enter the subpanel type for SPECS.
SPECS User Environment Setup.

SPECS sub panel type list

SPECS sub panel type Description

-------------------- -------------------------------
SSMGR Executing SPECS session manager
TOOLS Executing each SPECS tool

Enter SPECS sub panel type in CDE main panel.

Default ='SSMGR'. [quit='q'] :

5. When the following prompt appears, enter the desired language name (C or
ja_JP.SJIS) or q, to quit.

Enter Environment Variable LANG; C or ja_JP.SJIS

Default = C. [quit='q'] :

6. The environment variables and resources for the account are configured
automatically.

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To select the operation mode

To select the operation mode set the SMODE parameter to either engineer or
operator in the /opt/SPECS/sys/config/sysconf file. The operation mode
defines the operating environment of the framework.

• SMODE=engineer : Engineer mode (default mode)

This mode provides an operation panel, and also makes other windows available
for use during the execution of the test.
• SMODE=operator : Operator mode
This mode provides an operation panel that occupies the entire screen. It is a
simple, easy-to-use operation panel. There are no other windows available in
this mode.
SPECS provides an auto-start function for the Operator mode. When this
function is enabled, the specified framework is automatically executed after
ExeSys start-up. This function is recommended when operator mode has been
set.

To select a language for the operation panel

The HPSTD framework can display messages in different languages. These
frameworks use the message file located in the
“/opt/SPECS/usr/fwk/HPSTD_xxxx/Lang” directory.
This section shows how to change the message language in the HPSTD framework
using the following example.
To change the message language:

1. Log in as superuser.
2. Execute the following commands:
# cd /opt/SPECS/usr/fwk/HPSTD_xxx
# cp -r C NtvLang
where, NtvLang is the desired language name.
3. Open the message files in the NtvLang directory using the text editor and change
the message to the desired language.
4. Open the “/opt/SPECS/sys/config/sysconf” file using the text editor.
5. Set NtvLang to the “OP_LANG” parameter in the text editor.
6. Save the sysconf file and exit the text editor.

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 Installation Guide
Prober Setting

Prober Setting
This section explains the settings required for the auto prober used with SPECS.

• “Tokyo Electron TEL P8 Settings”

• “Tokyo Seimitsu TSK A-PM-90A Settings”
• “Electroglas EG 4090/4080 Settings”

Tokyo Electron TEL P8 Settings

1. Set the GPIB parameters (Main menu/Diag/Adjust/Hard option) as shown in
Table 1-7.
2. Set the operation parameters as shown in Table 1-8.
Table 1-7 GPIB Parameter Settings (for TEL P8 Prober)
GPIB Parameter Prober Setting
GPIB address set the same value in framework
Terminator CRLF
I,J drive No a
Z position not used
Off wafer drive Yes
Count Pass/Fail with Q not used
Output T-start signal with Q not used
Process Q after T-COMP signal not used
Z SRQ 43(H)
Output SRQ 48 at Carrier End Yes
Initial Wafer SRQ 4A+46
Output SRQ of Command error Yes
T-START signal not used
Alignment error unload/reject: u,U b
Output SRQ 4E at Lot end Yes
a. When using TELP8_HPSTD driver, TEL P8 rev.11.0 or later can dis-
play a wafer map on the console correctly if this parameter is “No”. In
other case, prober console cannot display a wafer map correctly if this
parameter is “YES” or “NO”.

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Prober Setting

b. If you use TELP8 driver, do not set this parameter.

Table 1-8 Operation Parameter Settings (for TEL P8 Prober)

Index Step Unit: GPIB Prober Setting
GPIB Use
Stop at Reference Die No
Receive Parameters Noa
Random Wafer Testing Yes/No b
GPIB Timer 0sec
Contact Check No
Cassette Map Trans Yes c
a. Set to “Yes”, if you set to “ON” in the “Set Product FIle” in the Set
Prober window for HPSTD_TELP8.fwk framework. For details about
the Set Prober window, refer to Agilent SPECS Framework Operation
Guide.
b. Set “Yes” if you use “Selective Wafer Load” in the TELP8_HPSTD
framework. Set “No” if you don’t use it. If you use TELP8 driver, set
“No”.
c. If you use TELP8 driver, set “No”.

NOTE Use the TELP8_HPSTD driver to use the HPSTD_TELP8 framework.

NOTE In PROBER_HOME algorithm, "B" command (move to the reference die) is used,
and the internal current location registers (Prb_curr_dx, Prb_curr_dy, Prb_curr_mx
and Prb_curr_my) are re-initialized to the value of the Align Die/Mod
location(Prb_init_dx/dy/mx/my). So the following settings are required:
• Initial chip (most upper and left die in the wafer map), reference chip and
ALIGNDIEX,Y must set on the same location. Initial chip and reference chip
are set from the console of TEL P8. ALIGNDIEX,Y are parameters of Wafer
Spec.
• Pad entry, alignment module and ALIGNMODX,Y in Wafer Spec must be set
on the same location. Pad entry and alignment module are set from the console
of TEL P8. ALIGNMODX,Y are parameters of Wafer Spec.

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Prober Setting

Tokyo Seimitsu TSK A-PM-90A Settings

1. Set the GPIB interface as shown in Table 1-9.
2. Set the prober configuration and tester interface as shown in Table 1-10.

NOTE To Use HPSTD_TSK90A Framework

If you use HPSTD_TSK90A framework, use the TSK90A_HPSTD driver. Then
enable the following status code (STB code) of the prober, and disable another
status code.

Status STB Code

XY travel (absolute) 65
Test start (Z up) 67
Z DOWN 68
Loading complete 70
Unloading complete 71
An error has occurred 76
Alignment reject 84
Needle cleaning complete 89
Probing start 91
All lot finish 94
Process correct end 98
Process incorrect end 99

HPSTD_TSK90A framework clears the all status bytes when starting the
framework and SPOLLs all expected SRQs. Set “Perform STB Code Handshaking”
(refer to Table 1-9) to synchronize.)

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Prober Setting

Table 1-9 GPIB Interface Settings (for TSK A-PM-90A)

Menu Item Prober Settings

BASIC OPERATION PARAMETERS SETTINGS
EXTERNAL CONTROL SETTINGS
External Control Method 1: GPIB
GPIB Interface Settings
GPIB Text Delimitter 0:CR+LF
Perform STB Code Handshaking? 1:Yes a
STB Code Handshaking Time 0msec
Interrupt Handshaking Loop 0:No
Type of GPIB Test End Command not used
Perform Action Pending Except Test End? 0:No
Output STB For K Command at 0:ON<Start> b
Output EOI? 0:No
Wait for L command 1:Yes
Output STB Manual Unload? 0:Unconditionally Unload
Marking to Marking Die not used
Travel of Marking die by J Command not used
STB Output Delay Time 0:100msec
Perform STB Changing at Continuous not used
Fail Error ?
Fail Mark Inspection Result Transfer ? not used
Needle Inspection Result Transfer ? not used
Adding Basic Operation data When dd, du not used
Response to Request for Cassette Map 0: Wafer Transaction Status
b

SETUP SEQUENCE SETTINGS

X Coordinates Increment to the 1:Left
Y Coordinates Increment to the 0:Back
DEVICE PARAMETER SETTINGS
UNIT SYSTEM SETTINGS
Unit System 0: Metric
a. When using TSK90A driver, set “0: No” TSK90A.
b. This parameter is not used when using TSK90A driver.

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Prober Setting

Table 1-10 PROBER CONFIGURATION DATA SETTINGS (TSK A-PM-90A)

Menu Item Prober Settings

GPIB Command For Wafer ID 1: b
Allowed To Travel Out Of Probing Area By S 1: Yes
Command?
Prober GPIB Device Address Same value as SPECS
configuration

NOTE To Use PROBER_HOME Algorithm

In PROBER_HOME, TSK A-PM-90A prober "G" command (go to the first die) is
used, and the internal current location registers (Prb_curr_dx/dy/mx/my) are
re-initialized to the value of the Align Die/Mod location(Prb_init_dx/dy/mx/my).
That is, the first die position must be same to the position which is defined in the
Wafer Spec./Align DieX/Y and ModX/Y, or the probing point will drift when
PROBER_HOME is executed.

NOTE Status Code (STB Code) of TSK A-PM-90A Prober

When you do not use the HPSTD_TSK90A framework, if STB=82 (Cassette end)
or STB=94 (Lot end) is detected, PROBER_LOAD returns Status="END", which
causes for the framework to complete testing. Then, if you want to continue testing
sequentially for more than one cassette, disable STB=82 and enable STB=94 in the
prober setting.
Don’t enable both of STB=82 and STB=94, or you may have an error when the next
lot test starts.

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Prober Setting

Electroglas EG 4090/4080 Settings

1. Set SETUP/External Probe: to “Enabled"
2. In the SETUP/EXIO(External I/O) page,

a. Select Enhanced, GPIB_SP(Serial Poll)

b. Set “GPIB address” to the same value configured in your SPECS
c. Set “GPIB SRQ” to “Enable”
d. Set “Recieve timeout” to “>5000msec"
e. Set “Transmit timeout” to ">5000msec"
f. Set “SRQ timeout” to ">10msec”
3. In the SETUP/Enhanced External I/O mode page,set "Ugly Die report", “Map
cooed with TS", “Begin Cas/End Cas msg” and “Wafer Begin msg" to "disable”.
4. SETUP/Enhanced External I/O mode parameters are configured as follows
when PROBER_CNOFIG command of EG4080_HPSTD driver or
PROBER_INITIAL command of EG4080 driver is executed.

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Prober Setting

Table 1-11 SETUP/Enhanced External I/O Mode Setup

Setup by Setup by
PROBER_CONFIG PROBER_INITIAL
SETUP/External Probe Enabled not changed
Enhanced External I/O mode
MC/MF on XY motion Enabled Enabled
MC/MF on Z motion Enabled Enabled
MC/MF on optional dev Enabled Enabled
MC/MF on rest of cmd Enabled Enabled
Test Start msg Disabled Enabled
Test Complete msg Disabled Disabled
Pattern Complete msg Disabled Enabled
Pause/Continue msg Disabled Disabled
Alarm msg Disabled Disabled
Wafer Complete msg Disabled Disabled
Enhanced PC msg Disabled Disabled
Enhanced TC msg Disabled Disabled
Pause pending msg Disabled Disabled
Ugly Die report Disabled Not set
Map coord with TS Disabled Not set
Begin Cas/End Cas msg Disabled Not set
Wafer Begin msg Disabled Not set

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Configuring SPECS Using the sysconf File

Configuring SPECS Using the sysconf File

Table 1-12 shows the sysconf file parameters. To open the sysconf file, do one of the
following:

• Click on the “Sysconf” icon in the “SPECS Admin” subpanel. SPECS requires
the superuser’s password.
• Log in at a root directory and open the “/opt/SPECS/sys/config/sysconf” file
using a text editor.

NOTE This parameter has no default value if the value is not listed in the table below.

Table 1-12 Parameters in sysconf file

Parameter Description
ADMIN_GRP Specifies the user group name for administrator user. (Default: root)
ADMIN_USR Specifies the user account name set as the administrator. (Default: sys)
ADTFORMAT Specifies the data format type 1, 2, 3 or 4. For details of each type, refer to “To
select the format of the data file” on page 31. (Default:1)
ADTLOGGING TRUE: Stores the measurement data to the data file.
FALSE: Does not store the measurement data. (Default)
ALGTYPE Specifies the algorithm type, BASIC or C. This parameter is set by the
setup_algtype utility. (Default: BASIC)
ALTFORMAT Specifies the data name to be recorded in the data file if the output variable name
is specified in a test spec.
(%n$s: use the name, %n$.0s: does not use the name)
where, n is a number to specify the item as follows:
1: Test name, 2: Die name, 3: Module name,
4: Device name, 5: Algorithm name, 6: Output Parameter name, 7: Output
variable name
(Default: %1$.0s%2$.0s%3$.0s%4$.0s%5$.0s%6$.0s%7$s)
If the output variable name is not specified in a test spec, the data name is
determined by VARFORMAT parameter.
AUTOSTART ON: Starts the framework specified by the “FRAMEWORK” parameter
automatically when ExeSys is started. (Default: OFF)
AUTOSTART_USR Specifies user account name to execute a specified framework automatically.
AUTOSTART_GRP Specifies group name for user account set in the AUTOSTART_USR.

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Configuring SPECS Using the sysconf File

Parameter Description
BINDIR Specifies the directory to store the execution files.
(Default: /opt/SPECS/sys/bin)
CHKINTVL Interval time when checking the syslog file size. Units are in seconds. (Default:
3600)
CLEARONRETEST TRUE: Clears the current test data of retested unit on RETEST.
FALSE: Does not clear the current test data on RETEST. (Default)
CLEARONREJECT TRUE: Clears the current test data of rejected unit on REJECT.
FALSE: Does not clear the current test data on REJECT. (Default)
CSYSLIB Specifies the system shared library name for C language.
CTSTLIB Specifies the tester shared library name for C language.
CUSRLIB Specifies the user shared library name for C language.
DULIMIT Opens a warning dialog box when the available root disk capacity percentage has
been reached. (Default: 90)
ERRIGNORE Specifies the action when an error has occurred in the algorithm:
TRUE: Records the error information to the log file and goes to the next line.
FALSE: Stops the execution. (Default)
EXECFRAMEWORK Specifies the framework name to be executed when AUTOSTART is TRUE in
the sysconf file. (Default:HPSTD_NOPROBER)
FRAMEWORK Specifies the default framework name to be selected when Navigator or TPL
Editor opens. (Default: HPSTD_NOPROBER)
HOSTNAME A hostname for the system.
LICENSEKEY Specifies the codeword for the security key. This parameter is set by the
setup_license utility.
MAXLIMITS Specifies the maximum number of bin limits 0–10. This setting is effective only
in the Limit Editor. (Default: 10)
MAXLSIZE Opens a warning dialog box when the syslog file size is over the limit. Unit is in
Mbytes. (Default: 1)
MAXUSRBINS Specifies the maximum number of user bin limits 0–6. This setting is effective
only in the Limit Editor. (Default: 6)
MAXUSRFLAGS Specifies the maximum number of user flags 0–4. This setting is effective only in
the Limit Editor. (Default: 4)
MEASLIB Specifies the default measurement algorithm library name. This parameter can be
changed using the “Change Alg Lib” function in Navigator or TPL Editor. Use
relative directory path from “/opt/SPECS/usr/alg” or “/opt/SPECS/usr/calg”.
MINREAL, Maximum or minimum numeric value. (Default: -1E+99, +1E+99)
MAXREAL

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Parameter Description
OP_AUTOUPDATE TRUE: Updates the operation panel at the end of die and module. (Default)
FALSE: Does not update the operation panel automatically.
OP_LANG Language used in the operation panel. (C or Japanese can be used as a default)
(Default:C)
OP_STEP TRUE: Updates the widget by step function of RUNPANEL.
FALSE: Does not update the widget by step function. (Default)
OP_SW, OP_SH Width and height of the operation panel in pixels when SMODE is “engineer”.
(Default: OP_SW=660, OP_SH=550)
PROBERLIB Specifies the prober algorithm library name. This parameter is set by the
setup_prober utility. This parameter cannot be changed in Navigator or TPL
Editor. Use relative directory path from “/opt/SPECS/usr/alg” or
“/opt/SPECS/usr/calg”. (Default: NOPROBER_HPSTD)
RANGECHECK TRUE: Error occurs when the input value is out of the range specified in the
algorithm. (Default)
FALSE: Ignores the error.
RAWBINRULE SMALL: Makes the value the same as the limit value on the lower Bin (Default)
LARGE: Makes the value the same as the limit value on the higher Bin
For more details, see “User’s Guide, Creating a Limit File”.
RCPDIR Specifies the directory to store the recipe files which are used by Quick Report.
(Default: /opt/SPECS/usr/spool/recipe)
REMOTEDSPHOST1 Specifies the remote host name on which a session manage displays.
RMBLIBS Specifies the csub name to link in HP BASIC/UX.
RMBOPTS Specifies the options of BASIC/UX to be opened from SPECS.
(Default: -w16M -geometry=96x40)
RMBREV Specifies the version of HP BASIC/UX (Default: 8_03)
SMODE engineer: Operation panel opens in multi-window mode. (Default)
operator: Operation panel opens in full-screen mode.
SPECSTERM Terminal type for SPECS environment. (Default: hpterm)
TESTERLIB Specifies the tester algorithm library name. This parameter is set by the
setup_testername utility. This parameter cannot be changed in Navigator or TPL
Editor. Use relative directory path from “/opt/SPECS/usr/alg” or
“/opt/SPECS/usr/calg”.(Default: NOTESTER)
USE_SESSIONID TRUE: Replaces the “PCS_SESSION_ID” with SessionID of SPECS.
FALSE: Uses the “PCS_SESSION_ID” without changes.
USE_TPLLOGFILE TRUE: Records the TPL error message in the “/var/SPECS/log/tplexeclog” file.
(Default)
FALSE: Records the TPL error message in the “/var/opt/SPECS/log/syslog” file.

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Parameter Description
USRBINRULE RAWBIN: Uses the BIN result. (Default)
INSIDE: Makes the value the same as the limit value on the inside of the User
Bin
OUTSIDE: Makes the value the same as the limit value on the outside of the
User Bin
For more details, see “User’s Guide, Creating a Limit File”.
UTILLIB Specifies the utility library name. This parameter cannot be changed in Navigator
or TPL Editor. Use relative directory path from “/opt/SPECS/usr/alg” or
“/opt/SPECS/usr/calg”. (Default: UTILITY)
VARFORMAT Specifies the data name to be recorded in the data file if the output variable name
is not specified in a test spec.
(%n$s: use the name, %n$.0s: does not use the name)
where, n is a number to specify the item as follows:
1: Test name, 2: Die name, 3: Module name,
4: Device name, 5: Algorithm name, 6: Output Parameter name
(Default: %1$.0s%2$s_%3$s_%4$s_%5$s_%6$s)
If the output variable name is specified in a test spec, the data name is determined
by ALTFORMAT parameter.
VERIFYLIMIT TRUE: Error occurs when the limit file does not depend on the Test Plan, limit is
specified for the ARRAY, CHARACTER, STRING type variable or the
parameters in the limit file are not the same as the Test Plan. (Default)
FALSE: Ignores the error above.
VERIFYTEST TRUE: Error occurs when you refer to a module which does not exist in the Test
Spec.
FALSE: Ignores the error above. (Default)
WORKSPACE Specifies the shared memory size to be used by SPECS.
SPECS uses WORKSPACE * 8000 bytes for a session.
(Default: 8000)

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setup_ Command Syntax and SPECS Files

This section describes the command syntax for the opt/SPECS/install/bin/setup_file
and /opt/SPECS/install/bin/setup_iccap files. It also describes the structure of the
SPECS system files.
This section consists of the following:

• “setup_file Command Syntax”

• “setup_iccap Command Syntax”
• “Structure of SPECS Files”

NOTE If you execute either the /opt/SPECS/install/bin/setup_file or the

/opt/SPECS/install/bin/setup_iccap command, make sure you
execute the /opt/SPECS/install/bin/setup_config command. This
will update the reconfigured files.

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setup_file Command Syntax

The syntax of the /opt/SPECS/install/bin/setup_file command is described in this
section. For a list of the files files in each file category, refer to the “Structure of
SPECS Files” on page 1-48.
setup_file [-h] [-F] [-c | -e | -v | -b | -l | -f | -u]
-h Displays the command syntax of a terminal.
-F Creates the new SPECS B.02.50 files by overwriting the
existing files. If you do not specify this option, the setup_file
creates only the files which your computer does not have in
your SPECS revision.
-c Creates the SPECS configuration files.
-e Creates the SPECS environment and X resource files.
-v Creates the SPECS log files.
-b Creates the BASIC files.
-l Creates the algorithm library files for BASIC and
C languages.
-f Creates the framework files
-u Creates the TEMPLATE files, BASIC user library files, and
master files.
This command can be executed by a superuser or an administrator. If you execute
this command as an administrator, the command does not overwrite the
/opt/SPECS/lib/BASIC.* files.
If the existing files do not have revision names, the setup_file creates files using the
name “SPECS_B.02.50”.
If the existing files already have revision names, the setup_file creates the files
without using a revision name.

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setup_iccap Command Syntax

The syntax for the /opt/SPECS/install/bin/setup_iccap command is described in this
section. For a list of the files in each file category, refer to the “Structure of SPECS
Files” on page 1-48.
setup_iccap [-h] [-F] [-c | -e | -v | -b | -l | -f | -u]
-h Displays the command syntax of a terminal.
-F Creates the new SPECS B.02.50 new files by overwriting
the existing files. If you do not specify this option, the
setup_file creates only the files that your computer does not
have in your version of SPECS.
-l Creates the algorithm library files used with IC-CAP for
BASIC and C languages.
-f Creates the framework files for using IC-CAP
-u Creates the BASIC user library files for IC-CAP.
If the existing files do not have revision names, the setup_iccap creates files using
the name, “SPECS_B.02.50”.
If the existing files already have revision names, the setup_iccap creates the files
without using a revision name.

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Structure of SPECS Files

This section lists the files for each directory that the setup_ command can specify.
It also includes the available options.

• SPECS configuration files

/opt/SPECS/sys/config/sysconf
/opt/SPECS/sys/config/sysconflog
/opt/SPECS/sys/config/envconf
/opt/SPECS/sys/config/envconflog
/opt/SPECS/sys/config/usrconflog
/opt/SPECS/sys/config/usrconflog.1
/opt/SPECS/sys/config/usrconflog.2
/opt/SPECS/sys/config/usrconflog.3
/opt/SPECS/sys/config/usrconflog.4
/opt/SPECS/sys/config/xdb-pref
• SPECS environment and X resorce files
/opt/SPECS/sys/resource/X/C/SPECS
/opt/SPECS/sys/resource/X/ja_JP.SJIS/SPECS
/opt/SPECS/sys/resource/home/csh.login
/opt/SPECS/sys/resource/home/profile
• SPECS log files
/var/opt/SPECS/log/syslog
/var/opt/SPECS/log/tplexeclog
/var/opt/SPECS/log/prober.log
/var/opt/SPECS/log/prtctf.log
/var/opt/SPECS/log/setuplog

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• BASIC files
/opt/SPECS/sys/bin/BASIC.int
/opt/SPECS/sys/lib/BASIC.coms
/opt/SPECS/sys/lib/BASIC.libs
/opt/SPECS/sys/lib/BASIC.syscom
/opt/SPECS/sys/lib/BASIC.syslib
/opt/SPECS/sys/lib/BASIC.tstcom
/opt/SPECS/sys/lib/BASIC.tstlib
/opt/SPECS/sys/lib/BASIC.usrcom
/opt/SPECS/sys/lib/BASIC.usrlib
• Algorithm library files for BASIC and C language
/opt/SPECS/usr/alg/measure/DEMO.[bas|lib]
/opt/SPECS/usr/alg/meausre/TRNG.[bas|lib]
/opt/SPECS/usr/alg/prober/EG4080_HPSTD.[bas|lib]
/opt/SPECS/usr/alg/prober/NOPROBER_HPSTD.[bas|lib]
/opt/SPECS/usr/alg/prober/TELP8_HPSTD.[bas|lib]
/opt/SPECS/usr/alg/prober/TSK90A_HPSTD.[bas|lib]
/opt/SPECS/usr/alg/tester/HP4062F.[bas|lib]
/opt/SPECS/usr/alg/tester/HP4062UX.[bas|lib]
/opt/SPECS/usr/alg/tester/HP4071A.[bas|lib]
/opt/SPECS/usr/alg/tester/HP4072A.[bas|lib]
/opt/SPECS/usr/alg/tester/HP4073A.[nas|lib]
/opt/SPECS/usr/alg/tester/NOTESTER.[bas|lib]
/opt/SPECS/usr/alg/utility/UTILITY.[bas|lib]
/opt/SPECS/usr/alg/utility/UTILITY4062.[bas|lib]
/opt/SPECS/usr/alg/utility/UTILITY_NOTESTER.[bas|lib]
/opt/SPECS/usr/calg/measure/DEMO.[lib|sl|~]
/opt/SPECS/usr/calg/measure/TRNG.[lib|sl|~]

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/opt/SPECS/usr/calg/prober/EG4080_HPSTD.[lib|sl|~]
/opt/SPECS/usr/calg/prober/NOPROBER_HPSTD.[lib|sl|~]
/opt/SPECS/usr/calg/prober/TELP8_HPSTD.[lib|sl|~]
/opt/SPECS/usr/calg/prober/TSK90A_HPSTD.[lib|sl|~]
/opt/SPECS/usr/calg/tester/HP4062UX.[lib|sl|~]
/opt/SPECS/usr/calg/tester/HP4071A.[lib|sl|~]
/opt/SPECS/usr/calg/tester/HP4072A.[lib|sl|~]
/opt/SPECS/usr/calg/tester/HP4073A.[lib|sl|~]
/opt/SPECS/usr/calg/tester/NOTESTER.[lib|sl|~]
/opt/SPECS/usr/calg/utility/UTILITY.[lib|sl|~]
/opt/SPECS/usr/calg/utility/UTILITY4062.[lib|sl|~]
/opt/SPECS/usr/calg/utility/UTILITY_NOTESTER.[lib|sl|~]
• Framework files
/opt/SPECS/usr/fwk/HPSTD_EG4080.[cf|fwk|~]
/opt/SPECS/usr/fwk/HPSTD_NOPROBER.[cf|fwk|~]
/opt/SPECS/usr/fwk/HPSTD_TELP8.[cf|fwk|~]
/opt/SPECS/usr/fwk/HPSTD_TSK90A.[cf|fwk|~]
• TEMPLATE files, BASIC user library files, and master files
/opt/SPECS/usr/etc/TEMPLATE.act
/opt/SPECS/usr/etc/TEMPLATE.alg
/opt/SPECS/usr/etc/TEMPLATE.die
/opt/SPECS/usr/etc/TEMPLATE.job
/opt/SPECS/usr/etc/TEMPLATE.pnl
/opt/SPECS/usr/etc/TEMPLATE.prb
/opt/SPECS/usr/etc/TEMPLATE.sys
/opt/SPECS/usr/etc/TEMPLATE.tag
/opt/SPECS/usr/etc/TEMPLATE.tst
/opt/SPECS/usr/etc/TEMPLATE.waf

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/opt/SPECS/usr/etc/TEMPLATE.c
/opt/SPECS/usr/etc/TEMPLATE.mak
/opt/SPECS/usr/lib/GRAPH.usrlib
/opt/SPECS/usr/tpl/master.dat
• Algorithm library files used with IC-CAP for BASIC and C language
/opt/SPECS/usr/alg/measure/iccap/ICCAP_BJT
/opt/SPECS/usr/alg/measure/iccap/ICCAP_BSIM3
/opt/SPECS/usr/alg/measure/iccap/ICCAP2_ANY
/opt/SPECS/usr/alg/measure/iccap/ICCAP2_BJT
/opt/SPECS/usr/alg/measure/iccap/ICCAP2_BSIM3
/opt/SPECS/usr/calg/measure/iccap/ICCAP2_ANY
/opt/SPECS/usr/calg/measure/iccap/ICCAP2_BJT
/opt/SPECS/usr/calg/measure/iccap/ICCAP2_BSIM3
• Framework files for using IC-CAP
/opt/SPECS/usr/fwk/plug/iccap/ICCAP_BJT
/opt/SPECS/usr/fwk/plug/iccap/ICCAP_BSIM3
/opt/SPECS/usr/fwk/plug/iccap/ICCAP2_BJT
/opt/SPECS/usr/fwk/plug/iccap/ICCAP2_BSIM3
• BASIC user library files for using IC-CAP
/opt/SPECS/usr/lib/ICCAP.usrlib
/opt/SPECS/usr/lib/ICCAP2.usrlib

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