SENSORS and

SIGNAL
PROCESSING

Lecture notes
Ha Le Nhu Ngoc Thanh, Ph.D.
 Lecture 9+10:
Capacitive sensors
Main contents
1. Several definitions of capacitance
2. Capacitance computation for certain configuration
3. Working principle of capacitive sensor
4. Electric circuit based capacitive sensor
5. Sensitivity of capacitive sensor
6. Capacitive sensor applications
7. Capacitive level sensor
8. Capacitive proximity sensor
9. Capacitive touch sensor
10. Connection
11. Exercises

Mechatronics Engineering – Sensors and Actuators 2 © Ha Le Nhu Ngoc Thanh, Ph.D.

 SEVERAL DEFINITIONS OF CAPACITOR
Definition of electric field:
An electric field is a region around electric charge (hạt tích điện).

q0
F
E
E

electric field : Electric force :

E
F [N ]
qq0 k
F
r2
q0 r : distance q,q0
k : coulomb constant
© Ha Le Nhu Ngoc Thanh, Ph.D.
 SEVERAL DEFINITIONS OF CAPACITOR*
- A capacitor consists of two electric conductors separated by a dielectric (solid, liquid or gas)
or vacuum.
- The relationship between the charge q
and the potential difference (𝑉)
generated a capacitance C
C = q/V or C = Q/V
- If a capacitor formed by n equal parallel
plane plates have an area A, distance

and dielectric constant 𝜀𝑟 , the capacitance

d

can be described : Example :

n 9 plates
A A
C 8
C 1
0 r (n r
d
d ) 0

- 𝜀𝑟 is the relative dielectric between the plates (called dielectric constant)

Where:

- 𝜀𝑜 is the vacuum dielectric (0 = 8.854187 x 10-12 F/m)

- A area of overlap between two plates and d the plate separation
Mechatronics Engineering – Sensors and Actuators 4 © Ha Le Nhu Ngoc Thanh, Ph.D.
 SEVERAL DEFINITIONS OF CAPACITOR
Several definitions of capacitor
- V can be expressed in terms of the work done on +Q when it moves from
the positive to the negative plate.

- where E is the electric field in [V.m-1] or newton/coulomb, [N.C-1] ) between

two parallel plates, F is the force (in newton, N), and d is the distance
between two plates.
- Commonly used capacitors have a capacitance range from 1pF to 1000μF.
- The voltage–current relationship of a capacitor is expressed by:

Mechatronics Engineering – Sensors and Actuators 5 © Ha Le Nhu Ngoc Thanh, Ph.D.

 SEVERAL DEFINITIONS OF CAPACITOR*
Several definitions of capacitor
Symbol of capacitors

Mechatronics Engineering – Sensors and Actuators 6 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITANCE COMPUTATION FOR CERTAIN CONFIGURATIONS
Certain Configurations

Mechatronics Engineering – Sensors and Actuators 7 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITANCE COMPUTATION FOR CERTAIN CONFIGURATIONS

- 𝜀𝑟 is relative Dielectric Permittivity (RDP) or dielectric constant table:

Certain Configurations

Mechatronics Engineering – Sensors and Actuators 9 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITANCE COMPUTATION FOR CERTAIN CONFIGURATIONS
Example

Mechatronics Engineering – Sensors and Actuators 10 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITANCE COMPUTATION FOR CERTAIN CONFIGURATIONS
Example

Mechatronics Engineering – Sensors and Actuators 11 © Ha Le Nhu Ngoc Thanh, Ph.D.

 WORKING PRINCIPLE OF CAPACTITIVE SENSOR
1. Common capacitive sensor configuration
Many sensor configurations for capacitive displacement.
- Electrode separation d
C r o
- The dielectric 𝜺𝒓 d A
- Change of area A

- Change in dielectric 𝜺𝒓 is not common.

*Note:

- The configuration based on a variation of the distance between electrodes is common for large and very small
displacements.
- The configuration based on a variation of area is more common for medium-range displacement measurement, 1 cm
to 10 cm.

Mechatronics Engineering – Sensors and Actuators 14 © Ha Le Nhu Ngoc Thanh, Ph.D.

 WORKING PRINCIPLE OF CAPACTITIVE SENSOR*
a) Change d
The plate separation changes
- Keeping one of the plates fixed and move other plate to the object whose displacement is to be
M 
measured, we can have a capacity whose distance between plates varies with displacement.
0

ro M (P 
C  ro A C A Mg)
d dz

dx
Capacitor change

Mechatronics Engineering – Sensors and Actuators 15 © Ha Le Nhu Ngoc Thanh, Ph.D.

 WORKING PRINCIPLE OF CAPACTITIVE SENSOR*
b) Change A
Area of overlap changes due to the displacement

C r o
w
x d

Mechatronics Engineering – Sensors and Actuators 16 © Ha Le Nhu Ngoc Thanh, Ph.D.

 WORKING PRINCIPLE OF CAPACTITIVE SENSOR*
c) Characteristic of parallel plates capacitive sensor

Question linear
nonlinear ro 1
C impedance Z 
A,
d C
 r o dz
z ,C A, impedance Z
 dz  r  o A

ro 1
C impedance Z 
A,
d C
linear  r o d
nonlinear A ,C A, impedance Z
  r  o A
d
Capacitive sensors are linear or
nonlinear, depending on the parameter

- Linear when 𝜀𝑟 or A change

that changes.

- Nonlinear when d change

Mechatronics Engineering – Sensors and Actuators 17 © Ha Le Nhu Ngoc Thanh, Ph.D.

 WORKING PRINCIPLE OF CAPACTITIVE SENSOR*
4. Several Parallel plate capacitive sensor configurations

Compute C ?
d

0 r
C
Ad
d1 Dielectric 1
d Dielectric 2
2

Compute C ? Compute C ?

Mechatronics Engineering – Sensors and Actuators 18 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITOR CIRCUIT BASED CAPACITIVE SENSOR
5. Computation the current and voltage of capacitor.
Once capacitance (C) change causes to current and voltage change  object measurement
* Computation current i(t) of spacing capacitive sensor?

Mechatronics Engineering – Sensors and Actuators 20 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITOR CIRCUIT BASED CAPACITIVE SENSOR
* Computation voltage v(t) of spacing capacitive sensor
Compute V1-V2?
Method 1:

Mechatronics Engineering – Sensors and Actuators 22 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITOR CIRCUIT BASED CAPACITIVE SENSOR*
-

Mechatronics Engineering – Sensors and Actuators 31 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITOR CIRCUIT BASED CAPACITIVE SENSOR*
-

Mechatronics Engineering – Sensors and Actuators 32 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE SENSOR APPLICATIONS*
Capacitive accelerometer sensors

Let m is mass that is free to move, a is the acceleration: F = m a

the deflection constant of the spring k: 𝑥 𝐹Τ𝑘

The mass, which is secured by springs on both ends, suffers a displacement (x) which depends on
 𝑚𝑎Τ𝑘
= 𝑥=

Mechatronics Engineering – Sensors and Actuators 37 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE SENSOR APPLICATIONS*
Compute ∆𝑉, and acceleration a?
Capacitive accelerometer sensors

C1

C2

Mechatronics Engineering – Sensors and Actuators 38 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE SENSOR APPLICATIONS*
Amplified circuit for this three-plate sensor is shown i1
in Figure. The transfer function of the center plate
deflection x. Find the output voltage Vout ? i3

i2
C2

C1

Mechatronics Engineering – Sensors and Actuators 40 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE SENSOR APPLICATIONS*
To improve a sensor’s measurement range, accuracy, sensitivity, stability, and signal-to-noise
ratio, a multiplate configuration can be used. A multiplate capacitive sensor that is often seen in
capacitive acceleration, vibration, and displacement measurements.

Mechatronics Engineering – Sensors and Actuators 42 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE SENSOR APPLICATIONS
Sensor design
- Spacing-variation-based sensors can have single-plate, dual-plate, or multiplate designs.
- In the single-plate design, the sensing plate (or probe) functions as one electrode, while the target,
made of a conductive material, functions as the second electrode.

Mechatronics Engineering – Sensors and Actuators 44 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE SENSOR APPLICATIONS
Sensor design
- A target’s surface may be curved
or irregular; capacitive sensors
usually measure the average
distance to the target.
- Smaller sensors have better
abilities to distinguish small
features on a target  Why
- Thus, a sensor’s size is often
chosen based on the size of the
target and is usually chosen
smaller than the target.
0 r
A
C
d
once A is small,
d C is large

Mechatronics Engineering – Sensors and Actuators 45 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE SENSOR APPLICATIONS
1. Capacitive defect detection (ON/OFF)
Because capacitive sensors have much higher sensitivities to conductors (dẫn điện) than
nonconductors (không dẫn), they can be used to detect the presence or absence of metallic
parts in completed assemblies.

Mechatronics Engineering – Sensors and Actuators 48 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE SENSOR APPLICATIONS
2.Capacitive Distance/Presence detection (ON/OFF)
- A capacitive sensor formed by a human (a conductive target) and a single sensing plate.
The
capacitance increases when the human gets closer to the metal plate.
- By measuring this capacitance, the distance between the human and the sensing plate can
be estimated.
- The human body itself, as a massive conductive target, provides a sufficient charge
reservoir.
Human body is a second plate of capacitor
Mechatronics Engineering – Sensors and Actuators 49 © Ha Le Nhu Ngoc Thanh, Ph.D.
 CAPACITIVE LEVEL SENSOR*
Principle for level measurement:
The level sensor in Figure is based on the variation in distance,
it works when the conductivity for the liquid is very high
(mercury, water, etc.) so its surface acts as an ‘‘electrode
plate.’’
where C1 is constant, and C2 changes inversely with the liquid
height h. Compute h?

Mechatronics Engineering – Sensors and Actuators 55 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE LEVEL SENSOR*
Method 1: Using parallel plate capacitive for Level measurement
How to measure h of liquid?

hmax

Mechatronics Engineering – Sensors and Actuators 57 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE LEVEL SENSOR*
Using another circuit for level measurement as
beside Figure,
a) find hf, b) and hf when Vout=V/2
In two cases:

1. C0 is a liquid empty part of

tank C is filled part of tank
2. C0 is empty tank
C is filled liquid (C=C1+C2)

Mechatronics Engineering – Sensors and Actuators 60 © Ha Le Nhu Ngoc Thanh, Ph.D.

 WORKING PRINCIPLE OF CAPACTITIVE SENSOR*
Cylindrical capacitive sensor

To change capacitive C in circular shape, it will change

a) Change dielectric constant
b) Change radius a, b, or change length (L).

C 2 L
r
0 ln b a

62 © Ha Le Nhu Ngoc Thanh, Ph.D.

Engineering – Sensors and Actuators
Mechatronics
 CAPACITIVE LEVEL SENSOR*
Method 2: Using cylindrical capacitor for Level
measurement Other configuration
The level sensor shown in Figure is based on a variation in
the dielectric material. If the conductive cylinders are
coaxial, the total capacitance will be
Compute h2?

Hollow
tube
Mechatronics Engineering – Sensors and Actuators 63 © Ha Le Nhu Ngoc Thanh, Ph.D.
 CAPACITIVE LEVEL SENSOR*
Other configuration for level measurement
Also using cylindrical capacitive sensors (CCSs), the level of the dielectric media changes, causing
the total capacitance C to change. Compute C and h?

Mechatronics Engineering – Sensors and Actuators 66 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE PROXIMITY SENSORS*
Detectable ability
Capacitive proximity sensor detect any material with or
without contact, it can also adjust the sensitivity to detect
liquids or solids even through non-metallic tanks or
vessels by digital output why?

liqui
d
wood

meta
l

One application of εr-based capacitive sensors is to

detect water level through a barrier. Water is a much
higher dielectric constant than plastic/glass, giving
the sensor more sensitive with water thus, its have
the ability to “see through” the plastic/glass and
detect the water level.
Mechatronics Engineering – Sensors and Actuators 69 © Ha Le Nhu Ngoc Thanh, Ph.D.
 CAPACITIVE PROXIMITY SENSORS*
Operational principle: The external capacitance between the target and the internal sensor
plate generate a feedback capacitance in the oscillator circuit. As the target approaches the
sensors face the oscillations increase until they reach a threshold level and activate the output
switching device.
Symbol:

Mechatronics Engineering – Sensors and Actuators 70 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE PROXIMITY SENSORS
Measure a velocity

Mechatronics Engineering – Sensors and Actuators 71 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE PROXIMITY SENSORS
Applications and installation of capacitive proximity sensor
Video https://www.youtube.com/watch?v=o4_6yu-GIDU

Capacitive proximity sensor

Mechatronics Engineering – Sensors and Actuators 72 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CAPACITIVE PROXIMITY SENSORS
Applications and installation of capacitive proximity sensor
Video https://www.youtube.com/watch?v=7yS4ShhfQdQ

© Ha Le Nhu Ngoc Thanh, Ph.D.

Mechatronics Engineering – Sensors and Actuators 73
 CAPACITIVE TOUCH SENSORS
Capacitive touch sensing
- Figure shows a capacitor formed by a finger and a copper with a glass overlay as
the insulating dielectric.
- Finger and copper are two conductive plates of capacitor
- When a finger is placed over the glass overlay, a capacitance change is
detected.
- Their primary applications are switches, touchscreen inputs, and
consumer electronic devices such as tablet PCs or iPhones.

© Ha Le Nhu Ngoc Thanh, Ph.D.

Mechatronics Engineering – Sensors and Actuators 74

 CAPACITIVE TOUCH SENSORS*
Capacitive touch fingerprint sensor
- Capacitive fingerprint sensor contains tens of thousands of tiny capacitive plates (function as
pixels).
- When a finger is placed on the sensor, electrical charges are created.
- Where there is a ridge or valley, the distance above the plates varies, as does the
capacitance, building a pattern of the finger’s “print.”

ADC

© Ha Le Nhu Ngoc Thanh, Ph.D.

Mechatronics Engineering – Sensors and Actuators 75
 CONNECTION*
Capacitive proximity sensor connection

Current flow

Current flow

Logic

1
Logic 0

Sourcing connection Sinking connection

(current flow out) (current flow in)

Mechatronics Engineering – Sensors and Actuators 76 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CONNECTION*
Capacitive proximity sensor connection

Conduct 1 – impact

Conduct 0 – no impact

Mechatronics Engineering – Sensors and Actuators 77 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CONNECTION*
Capacitive proximity sensor connection
Example of sensors and PLC Mitsubishi connection

Input or Output? and

What is logic level?

(NO/NC) (NO/NC)

Obj. Obj.
Input or Output? and
What is logic level?

Mechatronics Engineering – Sensors and Actuators 78 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CONNECTION*
Capacitive proximity sensor connection
Example of sensors and PLC Mitsubishi connection

Mechatronics Engineering – Sensors and Actuators 79 © Ha Le Nhu Ngoc Thanh, Ph.D.

 CONNECTION*
Capacitive proximity sensor connection
Example of sensors and PLC Siemen connection
Given PLC S7-1200, let connect sensor NPN, PNP to PLC? Using input I0.0

Mechatronics Engineering – Sensors and Actuators 80 © Ha Le Nhu Ngoc Thanh, Ph.D.

 HCMUTE Univ. - FME
https://fme.hcmute.edu.vn/

Lecture notes info

Sensors and Signal Processing
Fall Semester, 2023

Copy right © Ha Le Nhu Ngoc Thanh,

Ph.D. Email: thanh.hlnn@hcmute.edu.vn
Sites: https://sites.google.com/view/halenhungocthanh/courses?authuser=0

Mechatronics Engineering – Sensors and Actuators 86 © Ha Le Nhu Ngoc Thanh, Ph.D.