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Micro Electro Mechanical Systems

Micro Electro Mechanical Systems (MEMS) is a technology that combines mechanical and electrical components on a chip using microfabrication techniques. MEMS devices range in size from 1 to 100 micrometers and are used in various applications including sensors, actuators, biomedical devices, automotive systems, and military equipment. Key MEMS fabrication steps include deposition, patterning using lithography, and etching. While MEMS offer advantages like miniaturization and improved accuracy, their design and manufacturing also present challenges such as high costs and complex procedures. The future of MEMS is linked to growing demand for environmental monitoring and wireless communication devices.

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57 views24 pages

Micro Electro Mechanical Systems

Micro Electro Mechanical Systems (MEMS) is a technology that combines mechanical and electrical components on a chip using microfabrication techniques. MEMS devices range in size from 1 to 100 micrometers and are used in various applications including sensors, actuators, biomedical devices, automotive systems, and military equipment. Key MEMS fabrication steps include deposition, patterning using lithography, and etching. While MEMS offer advantages like miniaturization and improved accuracy, their design and manufacturing also present challenges such as high costs and complex procedures. The future of MEMS is linked to growing demand for environmental monitoring and wireless communication devices.

Uploaded by

kksundari
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© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Micro Electro Mechanical Systems

Introduction
Fabrication Techniques
Design and Modeling
Applications
Advantages and Disadvantages
Future scope
Conclusion
MEMS is a technology of very small devices. It is a combination of
mechanical functions and electrical functions on the same chip
using micro fabrication technology.

MEMS are made up of components between 1 to 100 micrometers


in size
MEMS devices generally range in size from 20 micrometers to a
millimeter
Actuator
Ambient intelligence
Energy scavengers
Getters
Sensor (M,T,C,R,E)
Fabrication of MEMS

Deposition Patterning Etching

Physical Chemical Lithography Dry Wet

Photolithography
Electron beam lithography
Ion beam lithography
Ion track technology
X-ray lithography.
Deposition
Physical deposition :
Physical deposition consists of a process in which a material is removed from a
target, and deposited on a surface
Chemical deposition :
Chemical deposition techniques include chemical vapor deposition, in which a
stream of source gas reacts on the substrate to grow the material desired.

Patterning
Patterning of MEMS is the transfer of a pattern into a material.
Lithography is a widely used process in patterning of mems .
Examples of lithography are Photolithography, Electron beam lithography, Ion
beam lithography, Ion track technology, X-ray lithography.
Etching
Wet Etching : Dry Etching :
Wet chemical etching Dry etching can be done in
consists in selective removal three ways and they are
of material by dipping a a) Reactive ion etching (RIE)
substrate into a solution b) Sputter etching
that dissolves it. c) Vapor phase etching.
The chemical nature of this
etching process provides a
good selectivity
Designing an MST/MEMS device is basically an iterative process; the
design is put into a simulation loop, improved and resubmitted for
simulation until the design fits the demands.
It is seldom possible to use design methodologies and tools from
traditional industries working with larger dimensions due to the
fundamental differences related to the order of magnitude of the typical
dimensions
Metal can package
Plastic package
Ceramic package
Applications of MEMS
In medicine
A MEMS is a device that can be
implanted in the human body.
MEMS surgical tools provide the
flexibility and accuracy to perform
surgery.
BIO MEMS
Bio-mems are used to refer to the
science and technology of operating at
the micro scale for biological and
biomedical applications.
In automotives :
Heavy use of mems is found in air
bag systems, vehicle security
system, inertial brake lights, rollover
detection, automatic door locks etc.

As gyroscope:
Inexpensive vibrating structure
gyroscopes manufactured with
MEMS technology have become
widely available. These are
packaged similarly to other integrated
circuits and may provide either
analog or digital outputs.
In microphones:
The mems microphone also called
as microphone Chip is widely used
in the present day communication
world.

In military :

Micro-electro mechanical system (MEMS)


technology help projectiles to reach their
targets accurately.
In accelerometers:
MEMS accelerometers are widely used in cars
for airbag deployment and in consumer
electronics applications such as smart phones,
gaming devices for sensing motion

In sensors:
A sensor is a device which receives and
responds to a signal when touched. A
micro sensor reaches a significantly higher
speed and sensitivity compared with
microscopic approaches.
Apart from these applications mems are also used in many fields in
the present world

They are used to detect earth quakes, in gas shut off, in shock and
tilt sensing

Inkjet printers and micro scanners also involve the use of mems.
Mems is used in Optical switching technology in which, switching
technology and alignment for data communications is done.
Advantages and disadvantages
Minimize energy and Farm establishment
materials. requires huge
Improved investments.
reproducibility. Micro-components are
Improved accuracy and costly compared to
reliability. macro components.
Increased selectivity Design includes very
and sensitivity. much complex
procedures
Conclusion
This enabling technology
promises to create entirely
new categories of
products.
MEMS will be the
indispensible factor in
advancing technology
As with all emerging
technologies had been
predicted to revolutionize
technology and our lives
The future of MEMS is integrally linked to market trends in general and
driven by the increasing demand to monitor and control our
environment and the equipment and instruments we use in our daily
lives.
In order to avoid the need for a multitude of wires, such sensors must
be self sustaining and able to communicate wirelessly.
As a result, not only more sensors are needed, but also small energy
generating modules and wireless transmission components. Clearly, the
increased numbers of devices will drive size reduction which in turn will
enable higher levels of integration.
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