Fluidic MEMS and Micro Channels
Fluidic MEMS and Micro Channels
Channels
What is Microfluidics?
It is the science and technology of systems that process or manipulate small (10–9 to 10–
18 litres) amounts of fluids, using channels with dimensions of tens to hundreds of
micrometres
velocity (V)
length scale (L),
dynamic viscosity(μ),
The Reynolds number is often used to predict the transition between laminar and turbulent
flow cases. If the Re of a fluid flow is below a threshold value, the fluid is described as
laminar flow, the fluid flow can be described by layers that do not interfere with each other. If
the Re of a fluid flow is greater than a threshold value, the fluid enters the turbulent flow
regime. In microfluid systems, because of the generally small scale encountered, the Re is
typically very small. It is safe to say that most microfluid systems are dominated by laminar
flow behavior.
Methods for Fluid Movement in Channels
• Pressure difference.
A microfluid chip is made of many categories of components.We discuss two most important ones in
this section, namely channels and valves.
Channels
Microfluid channels are the most important components in a microfluid system.There are several important
aspects that must be taken into consideration when selecting channel materials and subsequent fabrication
methods.These include:
1. Hydrophobicity of the channel wall.
2. Biocompatibility and chemical compatibility.
3. Permeability of channel material to air and liquid.
4. Retention of chemicals on walls.
5. Optical transparency.
6. Temperature of the processing.
7. Functional complexity and development cost.
Materials for channels
• Inorganic materials: glass (Pyrex, specialty glasses), silicon, silicon dioxide, silicon
nitride, polysilicon.
Valves
Valves are important elements in a microfluid system.They provide complex system-level functionalities to a
laboratory-on-a-chip system. The following factors are generally considered when selecting or developing a
micromachined valve:
• The reliability of valve operation. Ideally, a valve should be leak free during off state and open during on state.
• One-time valves are operated only once during the life of operation.
Since the valve is critical for the performance of a microfluid system and for enabling miniaturization, many
valve designs have been developed in the past. Generally, valve structures fall into the following categories:
• Hard-membrane valves
• Soft-membrane valves
• Plug valves
• Threshold valves
Applications of microfluidics
● capillary electrophoresis
● isoelectric focusing
● flow cytometry
● PCR amplification
● DNA analysis
● separation and manipulation of cells