Scribd
Upload
33 views13 pages

Mems Presentation

This document describes the design, simulation, fabrication, and testing of a MEMS capacitive pressure sensor. It includes a schematic of the sensor design using a capacitor sealed in a cavity and coupled to a pressure sensing diaphragm. An equation is provided to calculate the change in capacitance based on applied pressure. Finite element modeling is used to simulate diaphragm deflection. Fabrication process steps are illustrated. Images show the fully fabricated sensor and perforated plates. Graphs display measured sensor performance for different diameter diaphragms. Advantages of MEMS capacitive sensors include high sensitivity, large dynamic range, thin profile, and low power. Applications include medical, aerospace, and barometric devices.

Uploaded by

Siddhesh Sharma
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd
33 views13 pages

Mems Presentation

This document describes the design, simulation, fabrication, and testing of a MEMS capacitive pressure sensor. It includes a schematic of the sensor design using a capacitor sealed in a cavity and coupled to a pressure sensing diaphragm. An equation is provided to calculate the change in capacitance based on applied pressure. Finite element modeling is used to simulate diaphragm deflection. Fabrication process steps are illustrated. Images show the fully fabricated sensor and perforated plates. Graphs display measured sensor performance for different diameter diaphragms. Advantages of MEMS capacitive sensors include high sensitivity, large dynamic range, thin profile, and low power. Applications include medical, aerospace, and barometric devices.

Uploaded by

Siddhesh Sharma
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd
You are on page 1/ 13

MEMS CAPACITIVE PRESSURE SENSOR

SIDDHESH BHARATBHUSHAN SHARMA


22M1168
SPRING 2023
EE701
Sensor Design

Figure . A schematic drawing for a high


sensitive ultra-thin pressure sensor design
with a capacitor hermetically sealed in a
cavity. This capacitor is mechanically
coupled with a pressure sensing diaphragm,
but electrically isolated
Equation for Measurement

where ΔC is the change in capacitance, P is the pressure difference across the


diaphragm, R and T are the radius and thickness of the diaphragm, E and v are Young's
modulus and Poisson's ratio of the diaphragm material, Asense is the area of the moving plate,
and g is the sensing gap between the moving plate and the fixed plate.
Simulation using Finite Element Method

Figure . A FEM model


showing a deflected pressure
sensing diaphragm and an
attached moving plate through
a center post located at the
center of the diaphragm
Sensor Fabrication

Figure. An
illustration of a
fabrication
process flow
for an ultra-
thin capacitive
pressure
sensor .
Images of Fully Fabricated Sensor

Figure. A top view picture of


a fully fabricated pressure
sensor with an overall
dimension of 1.0
mm×1.0mm×60μm.
Images of Fully Fabricated Sensor
Figure . SEM
pictures showing
the perforated
moving plate inside
a cavity and the
perforated fixed
plate above it. The
size of the holes is
in the
range 2.0−2.5μm.
SENSOR MEASURMENTS

Figure . A
measured
capacitive
pressure sensor
performance for
a pressure
sensor having
a 90μm- radius
diaphragm and
a 150μm- radius
moving plate.
SENSOR MEASURMENTS

Figure . A
measured
capacitive pressure
sensor performance
for pressure sensor
having
a 100μm- radius
diaphragm and
a 150μm- radius
moving plate.
Advantages of using MEMS Capacitive
Sensor
• High Sensitivity
• Large Dynamic Range
• Can take up Ultra thin profile
• Immune to measurement media
• Resistant to EMI effects
• Low power consumption
• High Linearity and Stability
Applications of MEMS Capacitive Sensor
• Non Invasive Pressure control in respiratory and blood
pressure measurement .
• Cathetor Tip Sensors .
• Cabin pressure monitoring in aerospace .
• Altimeters and Barometers .
• Biomedical applications .
References

• Y. Zhang, R. Howver, B. Gogoi and N. Yazdi, "A high-


sensitive ultra-thin MEMS capacitive pressure
sensor," 2011 16th International Solid-State Sensors,
Actuators and Microsystems Conference, Beijing, China,
2011, pp. 112-115, doi:
10.1109/TRANSDUCERS.2011.5969151.
THANK YOU !

You might also like

pFad - Phonifier reborn

Pfad - The Proxy pFad of © 2024 Garber Painting. All rights reserved.

Note: This service is not intended for secure transactions such as banking, social media, email, or purchasing. Use at your own risk. We assume no liability whatsoever for broken pages.


Alternative Proxies:

Alternative Proxy

pFad Proxy

pFad v3 Proxy

pFad v4 Proxy