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"Design and implementation of a new 3-DOF electromagnetic micropositioner ..."

Mei-Yung Chen et al. (2006)

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DOI: 10.1109/ACC.2006.1656363

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-04

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Mei-Yung Chen, Hsuan-Han Huang, Shao-Kang Hung, Li-Chen Fu:
Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism. ACC 2006

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