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ORCID"Etching process prediction based on cascade recurrent neural network."
Zhenjie Yao et al. (2025)
- Zhenjie Yao
, Ziyi Hu, Panpan Lai, Fengling Qin, Wenrui Wang, Zhicheng Wu, Lingfei Wang, Hua Shao, Yongfu Li, Zhiqiang Li, Zhongming Liu, Junjie Li, Rui Chen, Ling Li:
Etching process prediction based on cascade recurrent neural network. Eng. Appl. Artif. Intell. 139: 109590 (2025)
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