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"Path Planning of Pattern Transfer Based on Dual-Operator and a ..."

Yingzhi Wang et al. (2020)

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DOI: 10.3390/E22030295

access: open

type: Journal Article

metadata version: 2021-10-14

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  dblp key:
  - journals/entropy/WangHJYL20
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  - https://dblp.org/rec/journals/entropy/WangHJYL20
Yingzhi Wang, Tailin Han, Xu Jiang, Yuhan Yan, Hong Liu:
Path Planning of Pattern Transfer Based on Dual-Operator and a Dual-Population Ant Colony Algorithm for Digital Mask Projection Lithography. Entropy 22(3): 295 (2020)

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