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"Self-alignment of micro-parts using capillary interaction: Unified ..."

ShiQing Gao, YouHe Zhou (2013)

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DOI: 10.1016/J.MICROREL.2013.04.009

access: closed

type: Journal Article

metadata version: 2020-02-22

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ShiQing Gao, YouHe Zhou:
Self-alignment of micro-parts using capillary interaction: Unified modeling and misalignment analysis. Microelectron. Reliab. 53(8): 1137-1148 (2013)

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