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MEMS Accelerometer

Inertial sensors like microaccelerometers and microgyrometers are important mechanical micro-sensors used to measure linear acceleration and angular velocity. Microaccelerometers are the second largest selling sensor after pressure sensors, with 90% of their market in automotive applications like airbag deployment and active suspension. Any inertial sensor design requires a seismic mass, elastic spring, dashpot, and method to measure the displacement of the seismic mass and convert it to an electrical output.

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Rohit Shirodkar
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96 views7 pages

MEMS Accelerometer

Inertial sensors like microaccelerometers and microgyrometers are important mechanical micro-sensors used to measure linear acceleration and angular velocity. Microaccelerometers are the second largest selling sensor after pressure sensors, with 90% of their market in automotive applications like airbag deployment and active suspension. Any inertial sensor design requires a seismic mass, elastic spring, dashpot, and method to measure the displacement of the seismic mass and convert it to an electrical output.

Uploaded by

Rohit Shirodkar
Copyright
© Attribution Non-Commercial (BY-NC)
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd
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Most important type of mechanical micro-sensor is inertial sensors for measurement of linear acceleration and angular velocity.

Microaccelerometer Microgyrometer

Microaccelerometer alone have second largest sales volume after pressure sensors. Today, the automotive application is 90% of overall market for airbag deployment sensing and active suspension.

Accelerometers: Acceleration,velocity,displacement vectors

Gyro: Rotation rate ,axis , angle

Applications: Automobiles, Aerospace,Missile, Robotics

Consumer applications Active stabilization of picture in camcorders Head mounted displays & inertial reality Sports equipment Biomedical application for activity monitoring Industrial Applications: Robotics

Any inertial sensor design normally requires a seismic mass( also called proof mass), an elastic spring, a dashpot and a method to measure the displacement of seismic mass. The proof mass is used to generate an inertial force due to an acceleration or deceleration event and the elastic spring to mechanically support the proof mass and to restore the mass to its neutral position after the acceleration is removed.

The dashpot is usually the volume of air or controlled ambient ,captured inside the cavity and is designed to control the motion of the seismic mass & to obtain favorable frequencyresponse characteristics. The sense methodology converts the mechanical displacement to an electrical output.

Accelerometer consists of a proof mass of mass M suspended by a suspension beam with an effective spring constant K and anchored to a fixed frame ( F ). A damping factor ( D ) affects the dynamic movement of the beam.

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