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Tech Lef

This document provides information about resistance and capacitance (RC) values contained in a LEF technology file for timing driven place and route. It notes that the RC values were extracted from worst case interconnect models and assume full routing, so the timing numbers may be significantly slower than reality. It advises using these RC values only for initial timing driven place and route runs and not for final chip-level timing simulations. The document also provides history notes on updates made to the LEF file format and parameters over time.

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swams_suni647
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144 views11 pages

Tech Lef

This document provides information about resistance and capacitance (RC) values contained in a LEF technology file for timing driven place and route. It notes that the RC values were extracted from worst case interconnect models and assume full routing, so the timing numbers may be significantly slower than reality. It advises using these RC values only for initial timing driven place and route runs and not for final chip-level timing simulations. The document also provides history notes on updates made to the LEF file format and parameters over time.

Uploaded by

swams_suni647
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as DOCX, PDF, TXT or read online on Scribd
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# Preview export LEF

#
# Preview sub-version 4.4.2.100.41
#
# TECH LIB NAME: tsmc18
# TECH FILE NAME: techfile.cds
#
# RC values have been extracted from TSMC's worst case interconnect
# tables included with spice model version 1.5.
# Document No. TA-10A5-6001 (T-018-LO-SP-001) Rev1.5 08.31.1999
#
# Resistance and Capacitance Values
# ---------------------------------
# The LEF technology files included in this directory contain
# resistance and capacitance (RC) values for the purpose of timing
# driven place & route. Please note that the RC values contained in
# this tech file were created using the worst case interconnect models
# from the foundry and assume a full metal route at every grid location
# on every metal layer, so the values are intentionally very
# conservative. It is assumed that this technology file will be used
# only as a starting point for creating initial timing driven place &
# route runs during the development of your own more accurate RC
# values, tailored to your specific place & route environment. AS A
# RESULT, TIMING NUMBERS DERIVED FROM THESE RC VALUES MAY BE
# SIGNIFICANTLY SLOWER THAN REALITY.
#
# The RC values used in the LEF technology file are to be used only
# for timing driven place & route. Due to accuracy limitations,
# please do not attempt to use this file for chip-level RC extraction
# in conjunction with your sign-off timing simulations. For chip-level
# extraction, please use a dedicated extraction tool such as
HyperExtract,
# starRC or Simplex, etc.
#
# $Id: tsmc18_6lm.lef,v 1.3 2000-02-22 22:42:45-08 slb Exp $
#
#******

# 2001 Apr 11 - ted : Updated for version 5.3.1


# : Added global default Antenna values and layer values.
# : Added AntennaGateArea to PIN definitions.

# 2002 Jun 05 - wjwang : added CLASS CORE to PORTS for macros PVSS1DGZ
and
# PVDD1DGZ so that power router hooks up pads to
# core rings.
# 2002 Jun 07 - haresh Added the STACK keywords to handle stacked vias

# 2002 Jun 17 - Brian Added Antenna cell syntax and changed Antenna
parameters

# 2002 Jun 19 - wjwang Copied metal3 power pins to metal5 for


ram_128x16A, ram_256x16A,
# and rom_512x16A macros for clean power connections.
# 2003 Apr 01 - harlen Added MANUFACTURINGGRID
#VERSION 5.0 ;

#VERSION 5.3.1 ;
VERSION 5.4 ;

NAMESCASESENSITIVE ON ;
BUSBITCHARS "[]" ;
DIVIDERCHAR "/" ;

UNITS
DATABASE MICRONS 2000 ;
END UNITS

# AntennaInputGateArea 10.0000 ;
# AntennaInoutDiffArea 1000000.00 ;
# AntennaOutputDiffArea 1000000.00 ;

MANUFACTURINGGRID 0.005 ;

LAYER Metal1
TYPE ROUTING ;
WIDTH 0.230 ;
SPACING 0.230 ;
SPACING 0.6 RANGE 10.0 100000.0 ;
PITCH 0.560 ;
DIRECTION HORIZONTAL ;
# (Worst case resistance model for Metal1 = 0.101 ohm/sq) =
1.0100e-01
RESISTANCE RPERSQ 1.0100e-01 ;
# CAP = (CAP1 + CAP2) * 0.001 pF/fF
# M2-M1-PO1(FOX):0.23:0.33: CAP1 = (Cb_a * PO1(FOX) ratio + Ct_a
* M2 ratio) / M1 width = 0.121212121212121
# M2-M1-PO1(FOX):0.23:0.33: CAP1 = (2.30e-02 * 1 + 1.15e-02 *
0.424242424242424) / 0.23 = 0.121212121212121
# M3-M1-PO1(FOX):0.23:0.33: CAP2 = (Cb_a * PO1(FOX) ratio + Ct_a
* M3 ratio) / M1 width = 0.0103135704874835
# M3-M1-PO1(FOX):0.23:0.33: CAP2 = (2.30e-02 * 0 + 4.12e-03 *
0.575757575757576) / 0.23 = 0.0103135704874835
# CAP = (0.121212121212121 + 0.0103135704874835) * 0.001 pF/fF =
1.3153e-04
# CAPACITANCE CPERSQDIST 1.3153e-04 ;
# ECAP = (ECAP1 + ECAP2 + Cc) * 0.001 pF/fF
# M2-M1-PO1(FOX):0.23:0.33: ECAP1 = Cfb * PO1(FOX) ratio + Cft *
M2 ratio = 0.0171242424242424
# M2-M1-PO1(FOX):0.23:0.33: ECAP1 = 1.39e-02 * 1 + 7.60e-03 *
0.424242424242424 = 0.0171242424242424
# M3-M1-PO1(FOX):0.23:0.33: ECAP2 = Cfb * PO1(FOX) ratio + Cft *
M3 ratio = 0.00177909090909091
# M3-M1-PO1(FOX):0.23:0.33: ECAP2 = 1.43e-02 * 0 + 3.09e-03 *
0.575757575757576 = 0.00177909090909091
# M3-M1-PO1(FOX):0.23:0.33: Cc = 6.88e-02
# ECAP = (0.0171242424242424 + 0.00177909090909091 + 6.88e-02) *
0.001 pF/fF = 8.7703e-05
# EDGECAPACITANCE 8.7703e-05 ;

CAPACITANCE CPERSQDIST 4.282879e-05 ;


EDGECAPACITANCE 5.864874e-05 ;

#
# Changed in LEF v5.3.1
# ANTENNALENGTHFACTOR 1.325 ;
Thickness 0.53 ;
AntennaSideAreaRatio 400 ;
AntennaDiffSideAreaRatio PWL ( ( 0 400 ) ( 0.202 400 ) ( 0.203
2281.2 ) ( 1 2600 ) ) ;

END Metal1

LAYER Via12
TYPE CUT ;
AntennaAreaRatio 20 ;
AntennaDiffAreaRatio PWL ( ( 0 20 ) ( 0.202 20 ) ( 0.203 91.916 ) (
1 158.33 ) ) ;
END Via12

LAYER Metal2
TYPE ROUTING ;
WIDTH 0.280 ;
SPACING 0.280 ;
SPACING 0.6 RANGE 10.0 100000.0 ;
PITCH 0.660 ;
DIRECTION VERTICAL ;
# (Worst case resistance model for Metal2 = 0.101 ohm/sq) =
1.0100e-01
RESISTANCE RPERSQ 1.0100e-01 ;
# CAP = (CAP1 + CAP2) * 0.001 pF/fF
# M3-M2-M1:0.28:0.38: CAP1 = (Cb_a * M1 ratio + Ct_a * M3 ratio)
/ M2 width = 0.05
# M3-M2-M1:0.28:0.38: CAP1 = (1.40e-02 * 0.5 + 1.40e-02 * 0.5) /
0.28 = 0.05
# M4-M2-PO1(FOX):0.28:0.38: CAP2 = (Cb_a * PO1(FOX) ratio + Ct_a
* M4 ratio) / M2 width = 0.0200178571428571
# M4-M2-PO1(FOX):0.28:0.38: CAP2 = (6.19e-03 * 0.5 + 5.02e-03 *
0.5) / 0.28 = 0.0200178571428571
# CAP = (0.05 + 0.0200178571428571) * 0.001 pF/fF = 7.0018e-05
# CAPACITANCE CPERSQDIST 7.0018e-05 ;
# ECAP = (ECAP1 + ECAP2 + Cc) * 0.001 pF/fF
# M3-M2-M1:0.28:0.38: ECAP1 = Cfb * M1 ratio + Cft * M3 ratio =
0.008585
# M3-M2-M1:0.28:0.38: ECAP1 = 8.55e-03 * 0.5 + 8.62e-03 * 0.5 =
0.008585
# M4-M2-PO1(FOX):0.28:0.38: ECAP2 = Cfb * PO1(FOX) ratio + Cft *
M4 ratio = 0.00403
# M4-M2-PO1(FOX):0.28:0.38: ECAP2 = 4.41e-03 * 0.5 + 3.65e-03 *
0.5 = 0.00403
# M4-M2-PO1(FOX):0.28:0.38: Cc = 7.05e-02
# ECAP = (0.008585 + 0.00403 + 7.05e-02) * 0.001 pF/fF = 8.3115e-
05
# EDGECAPACITANCE 8.3115e-05 ;

CAPACITANCE CPERSQDIST 3.335823e-05 ;


EDGECAPACITANCE 6.619992e-05 ;

#
# Changed in LEF v5.3.1
# ANTENNALENGTHFACTOR 1.325 ;
Thickness 0.53 ;
AntennaSideAreaRatio 400 ;
AntennaDiffSideAreaRatio PWL ( ( 0 400 ) ( 0.202 400 ) ( 0.203
2281.2 ) ( 1 2600 ) ) ;
END Metal2

LAYER Via23
TYPE CUT ;
AntennaAreaRatio 20 ;
AntennaDiffAreaRatio PWL ( ( 0 20 ) ( 0.202 20 ) ( 0.203 91.916 ) (
1 158.33 ) ) ;
END Via23

LAYER Metal3
TYPE ROUTING ;
WIDTH 0.280 ;
SPACING 0.280 ;
SPACING 0.6 RANGE 10.0 100000.0 ;
PITCH 0.560 ;
DIRECTION HORIZONTAL ;
# (Worst case resistance model for Metal3 = 0.101 ohm/sq) =
1.0100e-01
RESISTANCE RPERSQ 1.0100e-01 ;
# CAP = (CAP1 + CAP2) * 0.001 pF/fF
# M4-M3-M2:0.28:0.28: CAP1 = (Cb_a * M2 ratio + Ct_a * M4 ratio)
/ M3 width = 0.0424242424242424
# M4-M3-M2:0.28:0.28: CAP1 = (1.40e-02 * 0.424242424242424 +
1.40e-02 * 0.424242424242424) / 0.28 = 0.0424242424242424
# M5-M3-M1:0.28:0.28: CAP2 = (Cb_a * M1 ratio + Ct_a * M5 ratio)
/ M3 width = 0.0206450216450216
# M5-M3-M1:0.28:0.28: CAP2 = (5.02e-03 * 0.575757575757576 +
5.02e-03 * 0.575757575757576) / 0.28 = 0.0206450216450216
# CAP = (0.0424242424242424 + 0.0206450216450216) * 0.001 pF/fF =
6.3069e-05
# CAPACITANCE CPERSQDIST 6.3069e-05 ;
# ECAP = (ECAP1 + ECAP2 + Cc) * 0.001 pF/fF
# M4-M3-M2:0.28:0.28: ECAP1 = Cfb * M2 ratio + Cft * M4 ratio =
0.00554484848484849
# M4-M3-M2:0.28:0.28: ECAP1 = 6.51e-03 * 0.424242424242424 +
6.56e-03 * 0.424242424242424 = 0.00554484848484849
# M5-M3-M1:0.28:0.28: ECAP2 = Cfb * M1 ratio + Cft * M5 ratio =
0.00343727272727273
# M5-M3-M1:0.28:0.28: ECAP2 = 2.98e-03 * 0.575757575757576 +
2.99e-03 * 0.575757575757576 = 0.00343727272727273
# M5-M3-M1:0.28:0.28: Cc = 9.13e-02
# ECAP = (0.00554484848484849 + 0.00343727272727273 + 9.13e-02) *
0.001 pF/fF = 1.0028e-04
# EDGECAPACITANCE 1.0028e-04 ;

CAPACITANCE CPERSQDIST 2.149274e-05 ;


EDGECAPACITANCE 7.250222e-05 ;

#
# Changed in LEF v5.3.1
# ANTENNALENGTHFACTOR 1.325 ;
Thickness 0.53 ;
AntennaSideAreaRatio 400 ;
AntennaDiffSideAreaRatio PWL ( ( 0 400 ) ( 0.202 400 ) ( 0.203
2281.2 ) ( 1 2600 ) ) ;
END Metal3
LAYER Via34
TYPE CUT ;
AntennaAreaRatio 20 ;
AntennaDiffAreaRatio PWL ( ( 0 20 ) ( 0.202 20 ) ( 0.203 91.916 ) (
1 158.33 ) ) ;
END Via34

LAYER Metal4
TYPE ROUTING ;
WIDTH 0.280 ;
SPACING 0.280 ;
SPACING 0.6 RANGE 10.0 100000.0 ;
PITCH 0.660 ;
DIRECTION VERTICAL ;
# (Worst case resistance model for Metal4 = 0.101 ohm/sq) =
1.0100e-01
RESISTANCE RPERSQ 1.0100e-01 ;
# CAP = (CAP1 + CAP2) * 0.001 pF/fF
# M5-M4-M3:0.28:0.38: CAP1 = (Cb_a * M3 ratio + Ct_a * M5 ratio)
/ M4 width = 0.0375
# M5-M4-M3:0.28:0.38: CAP1 = (1.40e-02 * 0.5 + 1.40e-02 * 0.25) /
0.28 = 0.0375
# M6-M4-M2:0.28:0.38: CAP2 = (Cb_a * M2 ratio + Ct_a * M6 ratio)
/ M4 width = 0.0224107142857143
# M6-M4-M2:0.28:0.38: CAP2 = (5.02e-03 * 0.5 + 5.02e-03 * 0.75) /
0.28 = 0.0224107142857143
# CAP = (0.0375 + 0.0224107142857143) * 0.001 pF/fF = 5.9911e-05
# CAPACITANCE CPERSQDIST 5.9911e-05 ;
# ECAP = (ECAP1 + ECAP2 + Cc) * 0.001 pF/fF
# M5-M4-M3:0.28:0.38: ECAP1 = Cfb * M3 ratio + Cft * M5 ratio =
0.00643
# M5-M4-M3:0.28:0.38: ECAP1 = 8.55e-03 * 0.5 + 8.62e-03 * 0.25 =
0.00643
# M6-M4-M2:0.28:0.38: ECAP2 = Cfb * M2 ratio + Cft * M6 ratio =
0.0046575
# M6-M4-M2:0.28:0.38: ECAP2 = 3.72e-03 * 0.5 + 3.73e-03 * 0.75 =
0.0046575
# M6-M4-M2:0.28:0.38: Cc = 7.10e-02
# ECAP = (0.00643 + 0.0046575 + 7.10e-02) * 0.001 pF/fF =
8.2087e-05
# EDGECAPACITANCE 8.2087e-05 ;

CAPACITANCE CPERSQDIST 2.354472e-05 ;


EDGECAPACITANCE 5.760390e-05 ;

#
# Changed in LEF v5.3.1
# ANTENNALENGTHFACTOR 1.325 ;
Thickness 0.53 ;
AntennaSideAreaRatio 400 ;
AntennaDiffSideAreaRatio PWL ( ( 0 400 ) ( 0.202 400 ) ( 0.203
2281.2 ) ( 1 2600 ) ) ;
END Metal4

LAYER Via45
TYPE CUT ;
AntennaAreaRatio 20 ;
AntennaDiffAreaRatio PWL ( ( 0 20 ) ( 0.202 20 ) ( 0.203 91.916 ) (
1 158.33 ) ) ;
END Via45

LAYER Metal5
TYPE ROUTING ;
WIDTH 0.280 ;
SPACING 0.280 ;
SPACING 0.6 RANGE 10.0 100000.0 ;
PITCH 1.120 ;
OFFSET 0.28 ;
DIRECTION HORIZONTAL ;
# (Worst case resistance model for Metal5 = 0.101 ohm/sq) =
1.0100e-01
RESISTANCE RPERSQ 1.0100e-01 ;
# CAP = (CAP1 + CAP2) * 0.001 pF/fF
# M6-M5-M4:0.28:0.8: CAP1 = (Cb_a * M4 ratio + Ct_a * M6 ratio) /
M5 width = 0.0378787878787879
# M6-M5-M4:0.28:0.8: CAP1 = (1.40e-02 * 0.424242424242424 +
1.40e-02 * 0.333333333333333) / 0.28 = 0.0378787878787879
# M5-M3:0.28:0.8: CAP2 = Ca * M3 ratio / M5 width =
0.0103225108225108
# M5-M3:0.28:0.8: CAP2 = 5.02e-03 * 0.575757575757576 / 0.28 =
0.0103225108225108
# CAP = (0.0378787878787879 + 0.0103225108225108) * 0.001 pF/fF =
4.8201e-05
# CAPACITANCE CPERSQDIST 4.8201e-05 ;
# ECAP = (ECAP1 + ECAP2 + Cc) * 0.001 pF/fF
# M6-M5-M4:0.28:0.8: ECAP1 = Cfb * M4 ratio + Cft * M6 ratio =
0.0119272727272727
# M6-M5-M4:0.28:0.8: ECAP1 = 1.57e-02 * 0.424242424242424 +
1.58e-02 * 0.333333333333333 = 0.0119272727272727
# M5-M3:0.28:0.8: ECAP2 = Cf * M3 ratio = 0.00516454545454545
# M5-M3:0.28:0.8: ECAP2 = 8.97e-03 * 0.575757575757576 =
0.00516454545454545
# M5-M3:0.28:0.8: Cc = 4.05e-02
# ECAP = (0.0119272727272727 + 0.00516454545454545 + 4.05e-02) *
0.001 pF/fF = 5.7592e-05
# EDGECAPACITANCE 5.7592e-05 ;

CAPACITANCE CPERSQDIST 8.167316e-06 ;


EDGECAPACITANCE 4.792884e-05 ;

#
# Changed in LEF v5.3.1
# ANTENNALENGTHFACTOR 1.325 ;
Thickness 0.53 ;
AntennaSideAreaRatio 400 ;
AntennaDiffSideAreaRatio PWL ( ( 0 400 ) ( 0.202 400 ) ( 0.203
2281.2 ) ( 1 2600 ) ) ;
END Metal5

LAYER Via56
TYPE CUT ;
AntennaAreaRatio 20 ;
AntennaDiffAreaRatio PWL ( ( 0 20 ) ( 0.202 20 ) ( 0.203 91.916 ) (
1 158.33 ) ) ;
END Via56
LAYER Metal6
TYPE ROUTING ;
WIDTH 0.440 ;
SPACING 0.460 ;
SPACING 0.6 RANGE 10.0 100000.0 ;
PITCH 1.320 ;
OFFSET 0.33 ;
DIRECTION VERTICAL ;
# (Worst case resistance model for Metal6 = 0.045 ohm/sq) =
4.5000e-02
RESISTANCE RPERSQ 4.5000e-02 ;
# CAP = (CAP1 + CAP2) * 0.001 pF/fF
# M6-M5:0.44:0.86: CAP1 = Ca * M5 ratio / M6 width =
0.0124431818181818
# M6-M5:0.44:0.86: CAP1 = 2.19e-02 * 0.25 / 0.44 =
0.0124431818181818
# M6-M4:0.44:0.86: CAP2 = Ca * M4 ratio / M6 width =
0.0134488636363636
# M6-M4:0.44:0.86: CAP2 = 7.89e-03 * 0.75 / 0.44 =
0.0134488636363636
# CAP = (0.0124431818181818 + 0.0134488636363636) * 0.001 pF/fF =
2.5892e-05
# CAPACITANCE CPERSQDIST 2.5892e-05 ;
# ECAP = (ECAP1 + ECAP2 + Cc) * 0.001 pF/fF
# M6-M5:0.44:0.86: ECAP1 = Cf * M5 ratio = 0.00465
# M6-M5:0.44:0.86: ECAP1 = 1.86e-02 * 0.25 = 0.00465
# M6-M4:0.44:0.86: ECAP2 = Cf * M4 ratio = 0.0060675
# M6-M4:0.44:0.86: ECAP2 = 8.09e-03 * 0.75 = 0.0060675
# M6-M4:0.44:0.86: Cc = 7.50e-02
# ECAP = (0.00465 + 0.0060675 + 7.50e-02) * 0.001 pF/fF =
8.5718e-05
# EDGECAPACITANCE 8.5718e-05 ;

CAPACITANCE CPERSQDIST 5.935205e-06 ;


EDGECAPACITANCE 5.356685e-05 ;

#
# Changed in LEF v5.3.1
# ANTENNALENGTHFACTOR 1.325 ;
Thickness 0.99 ;
AntennaSideAreaRatio 400 ;
AntennaDiffSideAreaRatio PWL ( ( 0 400 ) ( 0.202 400 ) ( 0.203
2281.2 ) ( 1 2600 ) ) ;
END Metal6

LAYER OVERLAP
TYPE OVERLAP ;
END OVERLAP

VIA via1 DEFAULT


# (Worst case resistance model for via1 = 6.4 ohm/ct) =
6.4000e+00
RESISTANCE 6.4000e+00 ;
LAYER Metal1 ;
RECT -0.190 -0.140 0.190 0.140 ;
LAYER Via12 ;
RECT -0.130 -0.130 0.130 0.130 ;
LAYER Metal2 ;
RECT -0.190 -0.140 0.190 0.140 ;
END via1

VIA via2 DEFAULT


# (Worst case resistance model for via2 = 6.4 ohm/ct) =
6.4000e+00
RESISTANCE 6.4000e+00 ;
LAYER Metal2 ;
RECT -0.190 -0.140 0.190 0.140 ;
LAYER Via23 ;
RECT -0.130 -0.130 0.130 0.130 ;
LAYER Metal3 ;
RECT -0.190 -0.140 0.190 0.140 ;
END via2

VIA via3 DEFAULT


# (Worst case resistance model for via3 = 6.4 ohm/ct) =
6.4000e+00
RESISTANCE 6.4000e+00 ;
LAYER Metal3 ;
RECT -0.190 -0.140 0.190 0.140 ;
LAYER Via34 ;
RECT -0.130 -0.130 0.130 0.130 ;
LAYER Metal4 ;
RECT -0.190 -0.140 0.190 0.140 ;
END via3

VIA via4 DEFAULT


# (Worst case resistance model for via4 = 6.4 ohm/ct) =
6.4000e+00
RESISTANCE 6.4000e+00 ;
LAYER Metal4 ;
RECT -0.190 -0.140 0.190 0.140 ;
LAYER Via45 ;
RECT -0.130 -0.130 0.130 0.130 ;
LAYER Metal5 ;
RECT -0.190 -0.140 0.190 0.140 ;
END via4

VIA via5 DEFAULT


# (Worst case resistance model for via5 = 2.54 ohm/ct) =
2.5400e+00
RESISTANCE 2.5400e+00 ;
LAYER Metal5 ;
RECT -0.240 -0.190 0.240 0.190 ;
LAYER Via56 ;
RECT -0.180 -0.180 0.180 0.180 ;
LAYER Metal6 ;
RECT -0.270 -0.270 0.270 0.270 ;
END via5

VIARULE via1Array GENERATE


LAYER Metal1 ;
DIRECTION HORIZONTAL ;
OVERHANG 0.060 ;
METALOVERHANG 0.000 ;
LAYER Metal2 ;
DIRECTION VERTICAL ;
OVERHANG 0.060 ;
METALOVERHANG 0.000 ;

LAYER Via12 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END via1Array

VIARULE via2Array GENERATE


LAYER Metal2 ;
DIRECTION VERTICAL ;
OVERHANG 0.060 ;
METALOVERHANG 0.000 ;

LAYER Metal3 ;
DIRECTION HORIZONTAL ;
OVERHANG 0.060 ;
METALOVERHANG 0.000 ;

LAYER Via23 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END via2Array

VIARULE via3Array GENERATE


LAYER Metal3 ;
DIRECTION HORIZONTAL ;
OVERHANG 0.060 ;
METALOVERHANG 0.000 ;

LAYER Metal4 ;
DIRECTION VERTICAL ;
OVERHANG 0.060 ;
METALOVERHANG 0.000 ;

LAYER Via34 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END via3Array

VIARULE via4Array GENERATE


LAYER Metal4 ;
DIRECTION VERTICAL ;
OVERHANG 0.060 ;
METALOVERHANG 0.000 ;

LAYER Metal5 ;
DIRECTION HORIZONTAL ;
OVERHANG 0.060 ;
METALOVERHANG 0.000 ;

LAYER Via45 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END via4Array
VIARULE via5Array GENERATE
LAYER Metal5 ;
DIRECTION HORIZONTAL ;
OVERHANG 0.060 ;
METALOVERHANG 0.000 ;

LAYER Metal6 ;
DIRECTION VERTICAL ;
OVERHANG 0.090 ;
METALOVERHANG 0.000 ;

LAYER Via56 ;
RECT -0.180 -0.180 0.180 0.180 ;
SPACING 0.710 BY 0.710 ;
END via5Array

VIARULE TURNM1 GENERATE


LAYER Metal1 ;
DIRECTION vertical ;

LAYER Metal1 ;
DIRECTION horizontal ;
END TURNM1

VIARULE TURNM2 GENERATE


LAYER Metal2 ;
DIRECTION vertical ;

LAYER Metal2 ;
DIRECTION horizontal ;
END TURNM2

VIARULE TURNM3 GENERATE


LAYER Metal3 ;
DIRECTION vertical ;

LAYER Metal3 ;
DIRECTION horizontal ;
END TURNM3

VIARULE TURNM4 GENERATE


LAYER Metal4 ;
DIRECTION vertical ;

LAYER Metal4 ;
DIRECTION horizontal ;
END TURNM4

VIARULE TURNM5 GENERATE


LAYER Metal5 ;
DIRECTION vertical ;

LAYER Metal5 ;
DIRECTION horizontal ;
END TURNM5

VIARULE TURNM6 GENERATE


LAYER Metal6 ;
DIRECTION vertical ;

LAYER Metal6 ;
DIRECTION horizontal ;
END TURNM6

SPACING
SAMENET Metal1 Metal1 0.230 ;
SAMENET Metal2 Metal2 0.280 STACK ;
SAMENET Metal3 Metal3 0.280 STACK ;
SAMENET Metal4 Metal4 0.280 STACK ;
SAMENET Metal5 Metal5 0.280 STACK ;
SAMENET Metal6 Metal6 0.460 ;
SAMENET Via12 Via12 0.260 ;
SAMENET Via23 Via23 0.260 ;
SAMENET Via34 Via34 0.260 ;
SAMENET Via45 Via45 0.260 ;
SAMENET Via56 Via56 0.350 ;
SAMENET Via12 Via23 0 STACK ;
SAMENET Via23 Via34 0 STACK ;
SAMENET Via34 Via45 0 STACK ;
SAMENET Via45 Via56 0 STACK ;
END SPACING

SITE tsm3site
SYMMETRY y ;
CLASS core ;
SIZE 0.660 BY 5.040 ;
END tsm3site

SITE pad
SYMMETRY x y r90 ;
CLASS pad ;
SIZE 0.100 BY 235.000 ;
END pad

SITE corner
SYMMETRY x y r90 ;
CLASS pad ;
SIZE 235.000 BY 235.000 ;
END corner

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