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RAMDEOBABA Nagpur-79-80

This document provides details of the Introduction to MEMS course offered in the 6th semester of the B.E. Electronics and Communication Engineering program. The course aims to make students aware of the evolution and advancement of MEMS devices and their design, modeling, and fabrication. The course outcomes include understanding the working principles of MEMS sensors and actuators, microfabrication processes, device design and modeling, and applications of RF MEMS devices and physical microsensors. The course has 6 units covering topics such as the history of MEMS, types of MEMS, fabrication techniques, mechanics of solids in MEMS, RF MEMS devices, and physical microsensors. Prerequisites include the Electronic Devices course.

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76 views2 pages

RAMDEOBABA Nagpur-79-80

This document provides details of the Introduction to MEMS course offered in the 6th semester of the B.E. Electronics and Communication Engineering program. The course aims to make students aware of the evolution and advancement of MEMS devices and their design, modeling, and fabrication. The course outcomes include understanding the working principles of MEMS sensors and actuators, microfabrication processes, device design and modeling, and applications of RF MEMS devices and physical microsensors. The course has 6 units covering topics such as the history of MEMS, types of MEMS, fabrication techniques, mechanics of solids in MEMS, RF MEMS devices, and physical microsensors. Prerequisites include the Electronic Devices course.

Uploaded by

murali
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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Syllabus for Semester VI, B. E.

(Electronics and Communication Engineering)

Course Code: ECT359 – 2 Course: Introduction to MEMS


(Program Elective – 2)
L: 3Hrs, T: 0Hr, P: 0 Hrs. Per week Total Credits: 03

Course Objectives
The objective of this course is to make student aware of:
1. Evolution of MEMS and their advancement in recent time.
2. Concept of designing, modeling and fabrication of MEMS devices.

Course outcomes
At the end of the course the students will be able to:
1. Appreciate the underlying working principles of MEMS and NEMS sensors, Actuators
used in micro systems.
2. Understand the basic principles and applications of micro-fabrication processes
3. Understand the basics of device design and modeling
4. Understand the applications of RF MEMS devices and Physical micro sensors

Prerequisites – Electronic Devices (ECT251)

Unit I
Introduction to MEMS: Historical background, Scaling effects, Benefits of Miniaturization,
Micro/Nano Sensors, Actuators and Systems overview: Case studies.

Unit II
Types of MEMS: Optical MEMS, Bio- MEMS, RF- MEMS, Micro fluidics

Unit III
MEMS fabrication modules: Oxidation, Deposition, Lithography, Etching. Micromachining,
Wafer Bonding, recent trends.

Page 79 of 104
Unit IV
Mechanics of solids in MEMS/NEMS: Stresses, Strain, Hookes‟s law, Poisson effect, Linear
Thermal Expansion, Bending; Energy methods, Overview of Finite Element Method, Modeling
of Coupled Electromechanical Systems, modeling based on case study of a device.

Unit V
RF MEMS Devices: Capacitor, Inductor, Switches, Resonators, and antennas, RF MEMS
components in communications, space and defense applications.

Unit VI
Physical Micro sensors: Classification of physical sensors, Thermal sensors, Electrical Sensors,
Mechanical Sensors, Chemical and Biosensors.

Text Books:
1. G. K. Anantha suresh, K. J.Vinoy, S .Gopalkrishnan K. N. Bhat,V.K.Aatre, Microand
Smart Systems,Wiley India,2012.
2. S.E.Lyshevski, Nano-andMicro-Electromechanical systems: Fundamentals of Nano-and
Micro engineering (Vol.8) .CRC press, (2005).
3. S.D.Senturia, Microsystem Design, Kluwer Academic Publishers, 2001.
4. M.Madou, Fundamentals of Microfabrication, CRCPress,1997.

ReferenceBook:
1. G.Kovacs, Micro machined Transducers Source book, McGraw-Hill, Boston,1998.
2. M.H.Bao, Micromechanical Transducers: Pressure sensors, accelerometers, and
Gyroscopes, Elsevier, NewYork,2000.

Page 80 of 104

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