MEMS & SENSOR Design

ECD-415a

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering

National Institute of Technology Hamirpur
Hamirpur, Himachal Pradesh
India

Aug,21 2019
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Lecture #3: MEMS Design and Simulation using

COMSOL MULTIPHYSICS

References:
’Foundations of MEMS’, by Chang Liu, Second Edition, Prentice Hall.
’Analysis and Design Principles of MEMS devices’, by Minhand Bao, Elsevier.
’Introductory MEMS’, by Thomas M. Adams, Richard A. Layton, Springer.
’Microsystem Design’, by Stephan D. Sentura, Kluwer Academic Publisher.
’Microelectromechanical Systems’, N.P.Mahalik, Tata Mcgraw Hill.

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Outline of the lecture

Introduction to COMSOL Multiphysics Software.

Simulation of MEMS

Examples

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Outline

1 Introduction to Micro Electro Mechanical Systems (MEMS)

2 Application of MEMS

3 Sensors and Actuators

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

What is MEMS ?

MEMS, an acronym for Micro electro mechanical systems,

originated in the United States, referred to as Microsystem
technoloies in Europe and Micromachining in Japan.

M (micro) indicates a dimensional scale, E (electro) refers to

electrical and/or electronic parts, M (mechanical) referes to
mechanical or moving parts and S (system) refers to combination or
interconnection of.

MEMS refer to devices that have characteristic length between 1

micron to 1 mm, that combine electrical and mechanical
components, and that are fabricated using integrated circuit
batch-processing technologies.

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Micro Electro Mechanical Systems (MEMS)

For example: If the source alphabet consists of 26 capital english

letters, then the following binary code of block-length L=5 can be
used.

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

How are they made?

MEMS are fabricated as integrated microsystems,that include

mechanical or other non-electronic elements on the silicon chip along
with the electronic part of the system.

MEMS use some form of lithography-based microfabrication,

borrowed from the microelectronics industry and enhanced with
specialized techniques generally called micromachining.

The batch fabrication that is characteristic of the IC fabrication

offers the potential for great cost reduction when manufacturing in
high volume

The combination of lithography with thin-film methods and etching

techniques allow patterning of the third dimension, making possible
the creation of movable parts.
V. Praksh Singh, PhD
Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Bulk Micromachining

Figure: Steps in a Typical Bulk Micromachining Process

V. Praksh Singh, PhD
Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Bulk Micromachining (Contd.)

V. Praksh Singh, PhD

Figure: Steps in a Typical Surface Micromachining Process
Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Surface Micromachining

Figure: Steps in a Typical Surface Micromachining Process

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

What are they made of ?

The choice of materials in a MEMS is determined by

microfabrication constraints. Substrates: The most common

substrate material for micromachining is silicon. It has been

successful in the microelectronics industry and will continue to be in
areas of miniaturization
The range of additive films and materials for MEMS devices is much
larger than the types of possible substrates and includes conductors,
semiconductors and insulators such as:
silicon - single crystal, polycrystalline and amorphous
silicon compounds (SixNy, SiO2, SiC)
metals and metallic compounds (Au, Cu, Al, ZnO, GaAs)
organics (diamond, polymers)

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Outline

1 Introduction to Micro Electro Mechanical Systems (MEMS)

2 Application of MEMS

3 Sensors and Actuators

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Outline

1 Introduction to Micro Electro Mechanical Systems (MEMS)

2 Application of MEMS

3 Sensors and Actuators

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Sensors and Actuators

A large number of MEMS application involve Sensors and Actuators.

Sensors are devices that detect and monitor physical or chemical

phenomenon.

Actuators are devices that produce some action i.e. mechanical

motion, force, or torque

Sensors and Actuators are collectively referred to as transducers.

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a
Introduction to Micro Electro Mechanical Systems (MEMS) Application of MEMS Sensors and Actuators

Sensors and Actuators

A large number of MEMS application involve Sensors and Actuators.

Sensors are devices that detect and monitor physical or chemical

phenomenon.

Actuators are devices that produce some action i.e. mechanical

motion, force, or torque

Sensors and Actuators are collectively referred to as transducers.

V. Praksh Singh, PhD

Department of Electronics & Comunication Engineering National Institute of Technology Hamirpur Hamirpur, Himachal Pradesh India
MEMS & SENSOR Design ECD-415a