CSW-71D - CD31ZZ-069Q
CSW-71D - CD31ZZ-069Q
TECHNICAL INSTRUCTION
CSW-71D
COMPRESSOR UNIT
E-mail: cryo@shi.co.jp
URL: http://www.shicryogenics.com
TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
TABLE OF CONTENTS
TABLE OF CONTENTS
CROSS REFERANCE 1
1 GENERAL INFORMATION 2
1-1 SPECIFICATIONS 2
1-2 CONSTRUCTION 6
1-2-1 CONTROLS AND COUPLINGS 6
1-2-2 GAS AND OIL FLOW IN THE COMPRESSOR UNIT 9
1-2-3 INTERNAL COMPONENTS 11
1-3 ELECTRICAL DESCRIPTION 13
1-3-1 EXTERNAL CONNECTOR 13
1-3-2 SAFETY DEVICES 14
2 INSTALLATION 15
2-1 SITE REQUIREMENT 17
2-2 INPUT POWER CABLE CONNECTION 19
3 MAINTENANCE 21
3-1 PERIODICAL MAINTENANCE 22
3-1-1 REPLACEMENT OF THE COMPRESSOR ADSORBER 23
3-2 FUSE REPLACEMENT 27
APPENDIX 28
ELECTRICAL SCHEMATIC
DRAWINGS
REVISION CONTROL
CSW-71D
TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
CROSS REFERENCE
CROSS REFERENCE
Thoroughly read this manual and following manuals before using this equipment.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-1 SPECIFICATIONS
1 GENERAL INFORMATION
1-1 SPECIFICATIONS
The specifications of CSW-71D Helium Compressor Unit are summarized in Table 1.1.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-1 SPECIFICATIONS
The typical flow characteristics are shown in Figure 1.1, and cooling water requirement are shown in
Table 1.2.
For Water
11 3.0
Cooling Water Flow Rate
[gallon/min.]
Admissible Range Admissible Range
[liter/min.]
8 2.0
7
6 1.5
5
1.0
4
3 0.5
0 4 8 12 16 20 24 28 32 30 40 50 60 70 80 90
Cooling Water Inlet Temperature [deg.C] Cooling Water Inlet Temperature [deg.F]
For Antifreeze (50/50 % mixture of water and ethylene glycol or propylene glycol.)
The larger circulating pump will be required for the Antifreeze
11 3.0
10
Cooling Water Flow Rate
Cooling Water Flow Rate
2.5
9
Admissible Range Admissible Range
[gallon/min.]
[liter/min.]
8
2.0
7
6 1.5
5
1.0
4
3 0.5
0 4 8 12 16 20 24 28 32 30 40 50 60 70 80 90
Cooling Water Inlet Temperature [deg.C] Cooling Water Inlet Temperature [deg.F]
0.20 30.0
20.0
0.10
10.0
0.00 0.0
4.0 5.0 6.0 7.0 8.0 9.0 10.0 1.0 1.2 1.4 1.6 1.8 2.0 2.2 2.4 2.6
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-1 SPECIFICATIONS
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-1 SPECIFICATIONS
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-2 CONSTRUCTION
1-2 CONSTRUCTION
The function of the Compressor Unit is to supply high pressure He gas to the Cold Head and
re-compress the returned He gas from the Cold Head. The Compressor Unit consists of the following
major components: a Compressor Capsule, a Cooling system, Oil separation and injection system, and
Adsorber.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-2 CONSTRUCTION
COLD HEAD CONNECTOR : To use for connecting the Cold Head Cable to supply a Cold Head
10
(JC) driving power.
To use for the external signal output of condition monitoring for the
compressor unit. The connector to be “D-Sub 15 Pins (Female type)” in
use.
EXTERNAL CONNECTOR : Warning; Pay special attention to its wiring when using the external connector on
11
(JR) the Compressor Unit.
Connecting a jumper wire between Pins No.6 - No.8, No.6 - No.13 and
No.6 - No.15 may result in misoperation in some of safety devices in
the equipment, causing electric shock, burn or malfunction.
12 HE-GAS SUPPLY CONNECTOR To use for connecting a Flex Line (for Supply He-gas line)
13 HE-GAS RETURN CONNECTOR To use for connecting a Flex Line (for Return He-gas line)
14 HE-GAS CHARGE CONNECTOR To use for charging and refilling a He-gas.
COOLING WATER INPUT
15 A connector for cooling water inlet. (PT3/8 inch, Female type)
CONNECTOR
COOLING WATER OUTPUT
16 A connector for cooling water outlet. (PT3/8 inch, Female type)
CONNECTOR
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-2 CONSTRUCTION
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-2 CONSTRUCTION
The flow diagram for CSW-71D Compressor Unit is shown in Figure 1.4.
Internal components diagram and its functions are described in Figure 1.5 and Table 1.4.
1) Low pressure He gas discharged from a Cold Head can be led through a HE-GAS RETURN
CONNECTOR to the Compressor Unit.
2) The low pressure (Return) He gas can pass through a STORAGE TANK and a FILTER, and flow
into a COMPRESSOR CAPSULE.
3) The low pressure He gas will be compressed and pressurized in the COMPRESSOR CAPSULE,
and the high pressure with high temperature He gas after the compression will be discharged from
the COMPRESSOR CAPSULE outlet.
4) The high pressure with high temperature He gas will be led to a water cooled HE-GAS COOLER
and cooled down in the cooler.
5) The high pressure He gas after cooling will flow into an OIL SEPARATOR to separate an almost all
of lubricating oil mist from the high pressure He gas.
6) The separated lubricating oil can be returned to the COMPRESSOR CAPSULE through a lub oil
return pipings.
7) The high pressure He gas discharged from the OIL SEPARATOR will be led to an ADSORBER.
8) The remained lub oil contents in the high pressure He gas can be adsorbed through an active
charcoal layer to make the high pressure He gas being pure.
9) The pure high pressure He gas can be supplied to the Cold Head through a HE-GAS SUPPLY
CONNECTOR.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-2 CONSTRUCTION
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-2 CONSTRUCTION
The parts list and its functions are described in Table 1.4.
The He-gas flow diagram and internal components are shown in Figure 1.4 and Figure 1.5.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
1-2 CONSTRUCTION
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
Pay special attention to its wiring when using the external connector on the compressor unit. Connecting a jumper
wire between Pins No.6 - No.8, No.6 - No.13 and No.6 - No.15 may result in misoperation in some of safety devices
in the equipment, causing electric shock, burn or malfunction.
“IMPORTANT”
See “ELECTRICAL SCHEMATIC” of CSW-71D Compressor Unit, for detail.
“IMPORTANT”
The maximum allowable tightening torque of the D-Sub Connector lock screw (#4-40UNC) is 0.17 Nm.
External Connector can be used monitoring the status of the Compressor Unit and the remote control
sequences of the Compressor Unit are described in Table 1.5.
The “D-sub” pins indicated in Figure 1.6 on the control panel for the Compressor Unit can be applied to
an initial condition monitoring for a first-aid diagnostics of the Compressor Unit by means of measuring
the each item with a digital Volt/Ohm Meter. The Fault Condition classified the digital meter reading as
referred to the Table 1.5 can be identified simply an actual operation condition of the Compressor Unit
in the field.
8 7 6 5 4 3 2 1
15 14 13 12 11 10 9
Figure 1.5 EXTERNAL CONNECTOR WIRING ON THE COMPRESSOR UNIT
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
The safety devices list for Compressor Unit is shown in Table 1.6.
ITEM FUNCTIONS
Setting temperature; 110 deg.C ---- approx.
To shut down the Compressor Unit and signal a high temperature alarm to the
THERMOSTAT : (TS1)
External Connector, in case of higher temperature of a compressed He-gas at a
compressor outlet than the setting temperature.
Setting temperature; 60 deg.C ---- approx.
To shut down the Compressor Unit and signal a high temperature alarm to the
THERMOSTAT : (TS2)
External Connector, in case of higher temperature of a compressed He-gas at a
He-gas cooler outlet than the setting temperature.
Setting temperature; 60 deg.C ---- approx.
To shut down the Compressor Unit and signal a higher temperature alarm to the
THERMOSTAT : (TS3)
External Connector, in case of higher temperature of a water at a cooling water
outlet than the setting temperature.
To stabilize a pressure for even of the He-gas between the Supply and Return
SOLENOID VALVE : (YV)
piping, at a shut off the Compressor Unit.
Setting pressure;
“Operate” 2.55 MPa ---- approx.
HIGH PRESSURE SWITCH : “Reset” 2.26 MPa ---- approx.
(PSH) To adjust a Supply He-gas pressure smoothly by a function of the pressure switch
for Open and/or Shut, in case of higher pressure of the Supply He-gas than the
setting pressure.
Setting Pressure;
“Operate” 0.15 MPa ---- approx.
LOW PRESSURE SWITCH :
To shut down the Compressor Unit and signal a Low pressure alarm to the
(PSL)
External Connector, in case of lower pressure of a compressed He-gas caused by
a smaller quantity of He-gas than original filling in the compressor unit.
Setting pressure;
“Operate” 2.61 - 2.75 MPa
“Reset” 2.50 MPa ---- minimum
RELIEF VALVE
To adjust a Supply He-gas pressure smoothly by a function of the Relief Valve for
blowing off the He-gas to the atmosphere, in case of higher pressure of Supply
He-gas than the setting pressure.
Setting current; 13 A
MAIN POWER SWITCH :
To shut down the Compressor Unit, in case of occurring over-current and/or
(QF1)
short-circuit than the setting current.
PHASE FAILURE To avoid starting-up of the Compressor Unit in case of an abnormal operation
PROTECTION CIRCUIT : caused by irregular connecting of Input Power Cable such as failure connecting.
FUSE : To protect the Compressor Unit from the over-load caused by short-circuit and/or
(FU1, FU2, FU3, FU4) any other electrical failure in the DC power or the Solenoid Valve.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
2 INSTALLATION
2 INSTALLATION
<Warning about electric shock>
WARNING This cryocooler includes a high-voltage section. Touching it may result in electric shock. Handle it with extreme
care.
Make sure no power is applied to the compressor unit before starting the installation. Failing to observe this precaution
may result in electric shock.
Do not install the equipment near places subject to condensation such as a watering place. Failing to observe this
precaution may result in electric shock or malfunction.
Do not install the equipment in a dusty environment. Failing to observe this precaution may result in electric shock
or malfunction.
Make sure the power specification of the cryocooler used conforms to the customer's power supply before using the
equipment. Using the cryocooler with a non-conforming power supply may result in electric shock or malfunction.
If the compressor unit used is the CSW-71D (water cooled, high voltage type), pay attention to the setting of the
applicable input supply voltage. The product is shipped with the input supply voltage set to 480V. Before installing
the equipment, be sure to check your supply voltage and change it to the appropriate setting if necessary. Operating
the equipment with your supply voltage different from the setting of the compressor unit may result in electric shock or
malfunction.
Make sure no power is applied to the compressor unit before starting operation when connecting or disconnecting the
cold head power cable. Failing to observe this precaution may result in electric shock.
Be sure to turn off and Lock Out with OFF position the main power of the customer's power source before connecting
or disconnecting the input power cable to the Compressor Unit, and then remove the input power cable from the main
power. Failing to observe this precaution may result in electric shock.
Do not change the setting of the dial above the main power switch of the compressor unit under any circumstances.
Failing to observe this precaution may result in electric shock.
The minimum bending radius of the flex lines is 150mm (intermediate), 300 mm (terminal). Bending the flex lines at
a smaller angle may cause explosion or escape of gas, and so this should be avoided.
Do not disassemble the equipment for purposes other than maintenance specified in this service manual under any
circumstances. Disassembling the equipment may result in electric shock, explosion or escape of gas.
Install the cryocooler in the ventilated area, otherwise it may result in asphyxiation in case the helium gas is purged or
leaked.
Do not put the heat sensitive or flammable object neat the Compressor Unit, or result in fire, injury or malfunction of the
WARNING system.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
2 INSTALLATION
This cryocooler is intended for the exclusive use indoors. It cannot be used outdoors. Failing to observe this
precaution may prevent the cryocooler from operating normally.
Do not use inverter for the main power source of the compressor unit. Operating with inverter may result in the
damage or malfunction of the compressor electric circuit.
Avoid using the transformer for the main power source of the compressor unit. If the transformer is installed at the
upstream of the unit, lacking phase protection circuit with the cryocooler occurs in a malfunction. That may result in
misoperation or malfunction. When using the transformer, install the other lacking phase protection device in
upstream of the transformer.
Do not get on the compressor unit or put an object on top of it. Failing to observe this precaution may prevent the
cryocooler from operating normally or cause injury.
Secure enough space around the compressor unit for heat radiation and maintenance. Failing to secure enough
space may result in misoperation or malfunction. (See the technical instruction of the compressor unit used, for
details.)
If the compressor unit used is a water-cooled type (CSW-71C, CSW-71D), use cooling water with appropriate
temperature, flow rate and water quality. Using inappropriate cooling water may result in misoperation or
malfunction. (See the technical instruction of the compressor unit used, for details.)
If the compressor unit used is a water-cooled type (CSW-71C, CSW-71D), do not use the demineralized water for
cooling water. Using demineralized water for cooling water may result in water leakage or malfunction. (See the
technical instruction of the compressor unit used, for details.)
Be sure to check the flat rubber gasket of the self seal coupling of the cold head and compressor unit for dirt, dust or
to see whether the flat rubber gasket is attached correctly, before connecting the flex lines. Connecting the flex lines
with an abnormal flat rubber gasket setting may cause escape of gas.
This cryocooler (cold head, compressor unit, compressor adsorber, flex lines) is shipped with a helium gas at about
1.62 MPa sealed in. Be sure to adjust the pressure to an appropriate value according to the cold head used before
operating the equipment. Using the cryocooler at an improper pressure may cause misoperation.
Pay attention to the contamination when charging a helium gas. The contamination may result in occurrence of the
noise from the Cold Head or decreasing the cooling capacity.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
Avoid using the transformer for the main power source of the compressor unit. If the transformer is installed at the
upstream of the unit, lacking phase protection circuit with the cryocooler occurs in a malfunction. That may result in
misoperation or malfunction. When using the transformer, install the other lacking phase protection device in
upstream of the transformer.
Secure enough space around the compressor unit for heat radiation and maintenance. Failing to secure enough
space may result in misoperation or malfunction. (See the technical instruction of the compressor unit used, for
details.)
If the compressor unit used is a water-cooled type (CSW-71C, CSW-71D), use cooling water with appropriate
temperature, flow rate and water quality. Using inappropriate cooling water may result in misoperation or
malfunction. (See the technical instruction of the compressor unit used, for details.)
If the compressor unit used is a water-cooled type (CSW-71C, CSW-71D), do not use the demineralized water for
cooling water. Using demineralized water for cooling water may result in water leakage or malfunction. (See the
technical instruction of the compressor unit used, for details.)
・ An almost level and even area in the field will be selected to install the Compressor Unit.
・ An area to be influenced by splashing water and/or dusts will not be selected to install the
Compressor Unit installation area.
・ A clean environmental condition without dirt and/or free from an exhausted heat will be selected to
install the Compressor Unit in the field.
・ A quality of cooling water will be secured to use for an appropriate coolant for the Compressor Unit.
・ Any heat sensitive object cannot be positioned on surroundings of the Compressor Unit.
POWER SOURCE
Ensure the correct AC power source is available for the compressor. See Table 1.1 for the power
requirements for your system.
COOLING WATER
Ensure the correct cooling water is available for the compressor. See Figure 1.1 and Table 1.2. for
the cooling water requirements for your system.
Operating with Antifreeze (50/50 % mixture of water and ethylene glycol), the flow rate shall be larger
than the water. See Figure 1.1 and Table 1.2. for the cooling water requirements for your system.
SERVICE AREA
The Compressor Unit should have enough space as shown in Figure 2.1.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
Be sure to turn off and Lock Out with OFF position the main power of the customer's power source before connecting
or disconnecting the input power cable to the Compressor Unit, and then remove the input power cable from the main
power. Failing to observe this precaution may result in electric shock.
Do not change the setting of the dial above the main power switch of the compressor unit under any circumstances.
Failing to observe this precaution may result in electric shock.
Avoid using the transformer for the main power source of the compressor unit. If the transformer is installed at the
upstream of the unit, lacking phase protection circuit with the cryocooler occurs in a malfunction. That may result in
misoperation or malfunction. When using the transformer, install the other lacking phase protection device in
upstream of the transformer.
“IMPORTANT”
This cryocooler is provided with a phase reverse protection circuit for the input power. If the input
power is connected with reverse phase, the cryocooler does not start.
“IMPORTANT”
See “ELECTRICAL SCHEMATIC” of CSW-71D Compressor Unit, for detail.
“IMPORTANT”
See “INPUT POWER CABLE HV” of “APPENDIX” for detail.
Upstream Protection
Use the fuses or circuit breakers as upstream protection of L1, L2, L3. The recommended rating of
the protection is maximum 30A.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
See the Table 1.1 for power requirements. The cables are marked with label and connect as follows:
For
Compressor Unit
WIRING DIAGRAM
FIELD GROUNDING
TEMINAL TEMINAL
For User's L1 L2 L3
Power Source
L1
L2
L3
Ground
Control Box
Terminal Block
1L3
380
380
380
380
380
1L3
400
400
400
400
400
1L3
415
415
415
415
415
1L3
460
460
460
460
460
1L3
480
480
480
480
480
1L2
380
380
380
380
380
1L2
400
400
400
400
400
1L2
415
415
415
415
415
1L2
460
460
460
460
460
1L2
480
480
480
480
480
1L1
380
380
380
380
380
1L1
400
400
400
400
400
1L1
415
415
415
415
415
1L1
460
460
460
460
460
1L1
480
480
480
480
480
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
3 MAINTENANCE
3 MAINTENANCE
<Warning about electric shock>
WARNING This cryocooler includes a high-voltage section. Touching it may result in electric shock. Handle it with extreme
care.
Make sure no power is applied to the compressor unit before starting the installation. Failing to observe this precaution
may result in electric shock.
Be sure to turn off and Lock Out with OFF position the main power of the customer's power source before connecting
or disconnecting the input power cable to the Compressor Unit, and then remove the input power cable from the main
power. Failing to observe this precaution may result in electric shock.
Do not change the setting of the dial above the main power switch of the compressor unit under any circumstances.
Failing to observe this precaution may result in electric shock.
Be sure to turn off and Lock Out with OFF position the customer's main power before performing maintenance work
such as replacement of fuses. Failing to observe this precaution may result in electric shock.
Do not disassemble the equipment for purposes other than maintenance specified in this service manual under any
circumstances. Disassembling the equipment may result in electric shock, explosion or escape of gas.
The cold head, compressor unit, compressor adsorber and flex lines are pressurized with helium gas. Purge the
helium gas from all pressurized components before disposing. Open the purging valve gradually or it may result in
serious injury.
When scrapping the CryoCooler, handle it as Industrial Waste and pass it over to legally qualified disposer.
Install the cryocooler in the ventilated area, otherwise it may result in asphyxiation in case the helium gas is purged or
leaked.
The Adsorber weight is about 11.0kg. When replace the adsorber, be careful of handling so that it may not get hurt.
WARNING
Secure enough space around the compressor unit for heat radiation and maintenance. Failing to secure enough
space may result in misoperation or malfunction. (See the technical instruction of the compressor unit used, for
details.)
If the compressor unit used is a water-cooled type (CSW-71C, CSW-71D), use cooling water with appropriate
temperature, flow rate and water quality. Using inappropriate cooling water may result in misoperation or
malfunction. (See the technical instruction of the compressor unit used, for details.)
The cold head drive switch provided with the compressor unit is only used for maintenance. Be sure to turn it OFF
in normal operation. Using the compressor unit with the cold head drive switch turned ON may result in
misoperation or malfunction.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
CSW-71D Compressor Unit is to be required the routine maintenance. The basic maintenance work is to
replace the oil mist Adsorber of the Compressor Unit for every 20,000 Hrs operation as mentioned
Table 3.1.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
Do not disassemble the equipment for purposes other than maintenance specified in this service manual under any
circumstances. Disassembling the equipment may result in electric shock, explosion or escape of gas.
The cold head, compressor unit, compressor adsorber and flex lines are pressurized with helium gas. Purge the
helium gas from all pressurized components before disposing. Open the purging valve gradually or it may result in
serious injury.
When scrapping the CryoCooler, handle it as Industrial Waste and pass it over to legally qualified disposer.
Install the cryocooler in the ventilated area, otherwise it may result in asphyxiation in case the helium gas is purged or
leaked.
The Adsorber weight is about 11.0kg. When replace the adsorber, be careful of handling so that it may not get hurt.
WARNING
The Oil Mist Adsorber is required to replace for every 20,000 Hrs operation.
TOOLS REMARKS
1 1“ open-end wrench For Aero-quip coupling
2 1-1/8“ Open-end wrench For Aero-quip coupling
3 1-3/16“ Open-end wrench For Aero-quip coupling
4 Snoop liquid For leak check
5 Cotton wipers For leak check
6 13 mm Open-end wrench For fixing nut for Adsorber
7 Screw driver (phillips(+)) For side panel of Compressor Unit.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
PREPARATION
1) Shut down the Cryocooler.
2) Disconnect the Input Power Cable from the Compressor Unit.
3) Disconnect the Supply and Return Flex Lines from the Compressor Unit.
3) Remove the Nut secured the Adsorber to Rear Panel. Use two wrenches.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
4) Remove the Nut and Washer secured the Adsorber to the base panel of the Compressor Unit.
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TECHNICAL INSTRUCTION Sumitomo Heavy Industries, Ltd.
2) Secure the Adsorber to the base panel of the Compressor Unit by tightened Nut and Washer.
Tightening Torque: 14.5 Nm
5) Sprinkle “Liquid Leak Detector” on the Flex line connecting coupling, in case the bubbling is found,
tighten the connecting coupling again and re-check the leakage.
Ensure that the pressure gauge indication is specified value for the type of Cold Head. Charge
the helium gas, in case of low pressure indicating.
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Do not change the setting of the dial above the main power switch of the compressor unit under any circumstances.
Failing to observe this precaution may result in electric shock.
Be sure to turn off and Lock Out with OFF position the customer's main power before performing maintenance work
such as replacement of fuses. Failing to observe this precaution may result in electric shock.
Fuses are equipped inside of the Fuse Box for the Control Box.
1) Loosen the screws that hold the compressor side panel, and remove the panel.
FU4
FU3
FU2
FU1
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APPENDIX
APPENDIX
ELECTRICAL SCHEMATIC
DRAWINGS
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REVISION CONTROL
REVISION CONTROL
Manual
Revision Remarks Date
No.
-A Publication of first edition. DEC. 10 / 1999
-B Change the Electrical Schematic Diagram. APR. 4 / 2000
-C Delete the description of “water temp. alarm signal“. JAN. 11 / 2001
-D Change the SHI address. JAN. 25 / 2001
-E Delete the description of spare fuse. JAN. 30 / 2001
-F Change the Electrical Schematic Diagram. FEB. 19 / 2001
-G Change the specification of power requirement. MAR. 21 / 2001
Add the specification of recommended power
-H APR. 1 / 2002
requirement and description of demineralized water.
-I Change the dimension. MAY 31 / 2002
Correct the descriptions of Input Power Cable
-J JUL 11 / 2002
Connection.
-K Add the transformer-use CAUTION FEB. 28 / 2003
CD32ZZ-069 -L Change the division name. JUNE 9 / 2003
Add the description for the RDK-408D2 and S2
-M DEC. 18 / 2003
Cold Head.
The information of the SHI inquiries and
typographical error was corrected.
-N JAN. 12 / 2006
The descriptionof the Cooling Water requirement
was revised.
Electrical Schematic (2/2) was corrected.
-P Add the specification for the D-Sub Connector lock AUG 21 / 2008
screw tighten torque.
-Q The Humidity Range was added. DEC. 1 / 2009
CSW-71D