Designation: F50 − 12 (Reapproved 2015)

Standard Practice for

Continuous Sizing and Counting of Airborne Particles in
Dust-Controlled Areas and Clean Rooms Using Instruments
Capable of Detecting Single Sub-Micrometre and Larger
Particles1
This standard is issued under the fixed designation F50; the number immediately following the designation indicates the year of original
adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A superscript
epsilon (´) indicates an editorial change since the last revision or reapproval.

1. Scope 1.5 Sample acquisition procedures and equipment may be

1.1 This practice covers the determination of the particle selected for specific applications based on varying cleanroom
concentration, by number, and the size distribution of airborne class levels. Firm requirements for these selections are beyond
particles in dust-controlled areas and clean rooms, for particles the scope of this practice; however, sampling practices shall be
in the size range of approximately 0.01 to 5.0 µm. Particle stated that take into account potential spatial and statistical
concentrations not exceeding 3.5 × 10 6 particles/m 3 variations of suspended particles in clean rooms.
(100 000 ⁄ft3) are covered for all particles equal to and larger NOTE 2—General references to cleanroom classifications follow Fed-
than the minimum size measured. eral Standard 209E, latest revision. Where airborne particles are to be
characterized in dust-controlled areas that do not meet these
1.2 This practice uses an airborne single particle counting classifications, the latest revision of the pertinent specification for these
device (SPC) whose operation is based on measuring the signal areas shall be used.
produced by an individual particle passing through the sensing 1.6 The values stated in SI units are to be regarded as the
zone. The signal must be directly or indirectly related to standard. The values given in parentheses are provided for
particle size. information only and are not considered standard.
NOTE 1—The SPC type is not specified here. The SPC can be a 1.7 This standard does not purport to address all of the
conventional optical particle counter (OPC), an aerodynamic particle safety concerns, if any, associated with its use. It is the
sizer, a condensation nucleus counter (CNC) operating in conjunction with
a diffusion battery or differential mobility analyzer, or any other device responsibility of the user of this standard to establish appro-
capable of counting and sizing single particles in the size range of concern priate safety and health practices and determine the applica-
and of sampling in a cleanroom environment. bility of regulatory limitations prior to use. For specific hazards
1.3 Individuals performing tests in accordance with this statements, see Section 8.
practice shall be trained in use of the SPC and shall understand
its operation. 2. Referenced Documents

1.4 Since the concentration and the particle size distribution 2.1 ASTM Standards:2
of airborne particles are subject to continuous variations, the D1356 Terminology Relating to Sampling and Analysis of
choice of sampling probe configuration, locations and sam- Atmospheres
pling times will affect sampling results. Further, the differences F328 Practice for Calibration of an Airborne Particle Coun-
in the physical measurement, electronic and sample handling ter Using Monodisperse Spherical Particles (Withdrawn
systems between the various SPCs and the differences in 2007)3
physical properties of the various particles being measured can F649 Practice for Secondary Calibration of Airborne Particle
contribute to variations in the test results. These differences Counter Using Comparison Procedures (Withdrawn
should be recognized and minimized by using a standard 2007)3
method of primary calibration and by minimizing variability of F658 Practice for Calibration of a Liquid-Borne Particle
sample acquisition procedures. Counter Using an Optical System Based Upon Light

1 2
This practice is under the jurisdiction of ASTM Committee E21 on Space For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Simulation and Applications of Space Technology and is the direct responsibility of contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Subcommittee E21.05 on Contamination. Standards volume information, refer to the standard’s Document Summary page on
Current edition approved Oct. 1, 2015. Published November 2015. Originally the ASTM website.
3
approved in 1965. Last previous edition approved in 2012 as F50 – 12. DOI: The last approved version of this historical standard is referenced on
10.1520/F0050-12R15. www.astm.org.

Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States

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 F50 − 12 (2015)
Extinction (Withdrawn 2007)3 3.1.6.1 Discussion—It can be quantified as the ratio of the
2.2 U.S. Federal Standard: square root of the difference between the measured and actual
Federal Standard No. 209E, Clean Room and Work Station variances of a monosized particle size distribution to the mean
Requirements, Controlled Environment4,5 diameter of those monosize particles, using procedures as
2.3 Other Documents:6 shown in Practice F658.
ISO 14644-1 Cleanrooms and Associated Controlled 3.1.7 standardization—secondary calibration of electronic
Environments, Classification of air cleanliness system voltage and signal response threshold levels using the
ISO 14644-2 Cleanrooms and Associated Controlled reference system built into the SPC.
Environments, Specifications for testing and monitoring to 3.1.7.1 Discussion—The SPC should be capable of carrying
prove continued compliance with ISO 14644-1 out this procedure with a simple, rapid manual operation or by
internal timed or microprocessor controlled components.
3. Terminology
3.2 For definitions of other terms used in this practice, see
3.1 Definitions of Terms Specific to This Standard: Terminology D1356 and (Federal Standard 209E).
3.1.1 dust-controlled area—a clean room or clean work
space in which airborne and deposited particulate contamina- 4. Summary of Practice
tion levels, or both, are controlled on the basis of a documented 4.1 Satisfactory primary calibration within the manufactur-
standard such as Federal Standard 209E. er’s recommended time period and routine standardization
3.1.2 dynamic range—the particle size range, expressed as a should be verified as a first step.
multiple of the minimum measured size, over which the SPC 4.2 A sample acquisition program is established on the basis
can measure particles with size resolution of 10 % or less. of the cleanliness level that is to be verified or monitored. This
3.1.3 particle concentration—the number of individual par- program will include sample point identification, sample size
ticles per unit volume of ambient temperature and pressure air, definitions and sampling frequency, specification of the sam-
particles/m3 or particles/ft3. pler inlet and sample transport system, definition of the particle
3.1.4 particle size—equivalent diameter of a particle de- size ranges to be measured, and any other parameters of
tected by an SPC. concern in the dust-controlled area or clean room.
3.1.4.1 Discussion—The equivalent diameter is the diameter 4.3 Air samples are passed through the SPC and the particle
of a reference sphere of known size and physical characteristics content of each sample is defined by the SPC. Particles
(for example, refractive index when using an OPC; density contained in the sampled air pass through the sensing zone of
when using an aerodynamic particle sizer; etc) and generating the SPC. Each particle produces a signal that can be related to
the same response in the SPC sensing zone as the particle being particle size. An electronic system sorts and counts the pulses,
measured. Spherical particles are used for calibration of the registering the number of particles of various sizes that have
SPCs considered here. The SPC response is related to the size, passed through the sensing zone during passage of a known gas
shape, orientation and physical properties of the particle volume. The concentration and particle size data can be
passing through the SPC sensing zone. If an optical particle displayed, printed or otherwise processed, locally or remotely.
counter is used, the geometry of the optical system, as well as
5. Significance and Use
the spectral distribution of the illuminating light influences the
reported particle size. If a condensation nucleus counter with a 5.1 The primary purpose of this practice is to describe a
size-fractionation device is used, the SPC operating parameters procedure for collecting near real-time data on airborne particle
and the particle properties that affect the nucleation efficiency concentration and size distribution in clean areas as indicated
and, for example, the diffusion coefficient, will influence by single particle counting techniques. Implementation of
reported data. The SPC instruction manual should make the some government and industry specifications requires acquisi-
user aware of the effects of such factors on the indicated tion of particle size and concentration data using an SPC.
particle size data. 5.2 The processing requirements of many products manu-
3.1.5 primary calibration—calibration with standard refer- factured in a clean room involves environmental cleanliness
ence particles for particle size and (optionally) concentration. levels so low that a single particle counter with capability for
Initially carried out by the SPC manufacturer. detecting very small particles is required to characterize clean
3.1.6 resolution—the capability of the SPC to differentiate room air. Real-time information on concentration of airborne
between particles with small difference in size. particles in size ranges from less than 0.1 µm to 5 µm and
greater can be obtained only with an SPC. Definition of
particles larger than approximately 0.05 µm may be carried out
4
Available from U.S. General Services Administration, Federal Supply Service, with direct measurement of light scattering from individual
Standardization Division, Washington, DC 20406, http://www.gsa.gov.
5
particles; other techniques may be required for smaller
Fed-Std-209E has been replaced by ISO/DIS 14644-1 and -2, but may continue
to be used by mutual agreement.
particles, such as preliminary growth by condensation before
6
Available from Institute of Environmental Sciences and Technology (IEST), particle measurement.
Arlington Place One, 2340 S. Arlington Heights Rd., Suite 100, Arlington Heights,
IL 60005-4516, http://www.iest.org, and from International Organization for Stan-
5.3 Particle size data are referenced to the particle system
dardization (ISO), 1, ch. de la Voie-Creuse, CP 56, CH-1211 Geneva 20, used to calibrate the SPC. Differences in detection, electronic
Switzerland, http://www.iso.org. and sample handling systems among the various SPCs may

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 F50 − 12 (2015)
contribute to differences in particle characterization. Care must transit tube with dimensions so that residence time in the tube
be exercised in attempting to compare data from particles that will not exceed 10 s. Sample tubes should be configured so that
vary significantly in composition or shape from the calibration the flow Reynolds number is maintained in the range 5 000 to
base material. Variations may also occur between instruments 25 000. For particles in the size range 0.1 µm to ≈ 2 µm in
using similar particle sensing systems with different operating diameter and a SPC flow rate of 0.028 m3/min (1 ft3/min), a
parameters. These effects should be recognized and minimized transit tube up to 30 m long can be used. For particles in the
by using standard methods for SPC calibration and operation. size range ≈ 2 µm to 10 µm, a maximum transit tube length of
5.4 In applying this practice, the fundamental assumption is 3 m can be used. If a flexible transit tube is to be used, then no
made that the particles in the sample passing through the SPC radius of curvature below 15 cm shall be used.
are representative of the particles in the entire dust-controlled 7.1.2 Particle Sensing/Measurement Chamber—Defined by
area being analyzed. Care is required that good sampling the nature of the SPC that is used. It should be verified that
procedures are used and that no artifacts are produced at any minimum recirculation and recounting of particles occurs in
point in the sample handling and analysis process; these that chamber. If the particle characterization system includes
precautions are necessary both in verification and in operation any particle manipulation (for example, diffusion battery or
of the SPC. nucleation chamber, etc) before particle sensing occurs, then
the SPC element that manipulates the particles shall not result
6. Interferences in significant particle number change during that process.
6.1 Since the SPC is typically a high sensitivity device, it’s 7.1.3 Air Flow Metering of Control System, shall be located
response may be affected by internally or externally generated after the particle sensing/measurement chamber so as to
noise. The SPC should not be operated at a sensitivity level so minimize particle losses or artifact generation before measure-
high that internal noise produces more than 5 % of the data ment occurs.
signals. 7.1.4 Exhaust System, may consist of either a built-in
6.2 Precautions should also be taken to ensure that the test vacuum source or an external vacuum supply. If the built-in
area environment does not exceed the radio frequency or vacuum source is used, then the exhaust stream from that
electromagnetic interference capabilities of the SPC. source shall be suitably filtered so that particles sampled by and
internally generated by the SPC, or both, are not returned to the
6.3 Operation at acceptably low levels of internal noise can dust-controlled area.
be verified by drawing a sample into the SPC through a filter
or other gas cleaning device that will positively remove at least 7.2 Particle Characterization System, shall be capable of
99.97 % of all particles of size equal to and greater than that both detecting and sizing the particles that are sampled by the
which the SPC will measure. After a short stabilization period, SPC. The characterization system particle sizing resolution,
any signals reported by the SPC can be assumed to arise from expressed as a percentage, shall not exceed 10 % over the
internal or external noise sources. operating dynamic range. The SPC specifications shall include
information as to the maximum particle concentration that can
7. Apparatus be measured before coincidence error > 10 % of the indicated
7.1 SPC—The apparatus shall consist of a SPC, selected on particle count, occurs in the detection process. The specifica-
the basis of its ability to count and size single particles in the tions shall also define the pulse rate where the data processing
required size range. The SPC shall include a sample air flow system becomes saturated and can no longer produce accurate
system, a particle characterization system, and a data process- pulse size and frequency information.
ing system. The minimum measurable particle size shall be
NOTE 3—Dynamic range for SPCs will frequently vary with particle
selected from the clean area definition stated in ISO 14644-1 size sensitivity. For an SPC operating solely in the size range < 1 µm, a
(Table I of Federal Standard 209E), or from a different speci- dynamic range of 20 to 1 is typical. For an SPC used for particle
fication of clean-area airborne particle concentration at a stated measurement > 1 µm, a dynamic range of 20 to 40 is typical. The dynamic
minimum particle size. For classification levels based on range limitations occur as a consequence of both typical particle size
distributions in clean areas and of data processing system gain limitations.
measurement of particles larger than 0.05 µm, an optical
particle counter (OPC), an aerodynamic particle sizer or an 7.3 Particle Data Processing System, shall include compo-
equivalent SPC can be used. For classification levels based on nents for counting and sizing data signals from particles
particles less than 0.05 µm, a CNC in combination with a observed by the SPC, a means of converting data signal level
diffusion battery, a differential mobility analyzer or an equiva- to particle size information, sufficient data processing capabil-
lent SPC can be used. ity to relate particle count and air flow data to particle
7.1.1 Sample Air Flow System, consists of an intake tube, concentration information, and internal monitoring capability
the particle sensing/measurement chamber, an air flow meter- to verify that critical SPC components are operating correctly.
ing or control system, and an exhaust system. No abrupt Data shall be available as front-panel display, convenient
transitions in dimension should occur within the air flow on-board hard-copy format or as signals that can be transmitted
system. The inlet tube should consist of a sharp-edged inlet to a remote data reception device in a format that will allow
nozzle connected to a tube that will transport the sample air to either direct storage or further processing. The particle data
the particle characterization system. The sample inlet nozzle processing system shall also include the necessary components
should have a cross-sectional area equivalent to that of a circle to carry out standardization of the SPC. The standardization
of diameter at least 2 mm. The nozzle can be attached to a may be done either manually or by internal SPC control.

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 F50 − 12 (2015)
8. Hazards source generation or reception. A minimum of three locations
8.1 Some SPCs use laser illumination devices. These are shall be sampled in order to verify results and consistency of
normally contained within a safety-interlocked SPC cabinet. If sampling. Continuous sampling or a timed sample collection
the SPC cabinet safety interlock has been bypassed for any routine can be used for clean area monitoring. The sample inlet
reason, the operator should make sure that no personnel are nozzle should be isokinetic, not necessarily for optimum
exposed to the direct laser beam. particle collection efficiency, but so that point sources of
airborne contamination can be identified more easily. A number
8.2 Some SPC components may operate at hazardous elec- of preselected sample point locations can be monitored by
trical voltage levels. Care is required to make sure that using either multiplexed SPC sensors to a single data center or
personnel are protected from such potential hazards. by multiplexing air flow lines to a single SPC. The former
8.3 If the SPC is used to measure particle content of toxic, permits monitoring several locations simultaneously, while the
flammable or otherwise hazardous gases, the SPC exhaust must latter allows use of a single SPC for monitoring several
be vented safely, as specified by the Material Safety Data Sheet locations sequentially. In the latter system air sample transport
document for the gas. considerations may limit SPC operation to measurement of
particles in the size range below 1 µm.
9. Sampling
10. Calibration and Standardization
9.1 Sample collection considerations are based on acquisi-
tion of sufficient sample so that adequate data are procured. If 10.1 There shall be a record of primary calibration showing
the objective of sampling is to permit definition of dust- that the SPC has been calibrated using a standard procedure,
controlled area characteristics in terms of anticipated cleanli- such as Practices F328 or F649, and particles of known size.
ness level, then sufficient data should be procured for a sample Make sure that the time since the last calibration is within the
so that statistical requirements for defining cleanliness can be manufacturer’s recommended time interval. The SPC shall be
satisfied. Further details are provided in Section 12 for these calibrated for particle size response and for sample volume
requirements. For routine monitoring, statistically valid data flow rate. Particle size response can be recorded as hard copy
may not be required. However, sufficient data should be or can be stored within suitable SPC electronic circuitry.
collected so that the operator may be reasonably confident that 10.2 The SPC background-noise-count rate shall be re-
a predetermined maximum particle concentration at the SPC corded at the time of primary calibration and shall be verified
minimum size level is never exceeded. if any anomalous data are recorded or other problems occur.
9.2 Cleanroom Class Level Verification—The locations and 11. Procedure
minimum number of sampling points shall be established in
accordance with the requirements of ISO 14644-1 and ISO 11.1 Verify that the calibration and background noise re-
14644-2 (Federal Standard 209E). A sample point grid will be cords are current. If not, then calibrate the SPC and determine
established within the dust-controlled area. The minimum background-noise-count rates. Calibration may require that
number of sample locations stated in ISO 14644-1 and ISO trained metrology personnel carry out the necessary work.
14644-2 (Federal Standard 209E) will be measured. A greater Background noise measurements can be carried out in the
number of locations can also be used. Air sample volumes shall dust-controlled areas to be characterized. Place a filter on the
be at least those stated in ISO 14644-1 and ISO 14644-2 (Table SPC inlet that will remove at least 99.97 % of particles equal
II of Federal Standard 209E). These volumes are defined on the to and larger than the minimum size detected by the SPC. Turn
bases of both the clean room class and the particle size(s) being on the sample inlet flow and adjust (if required) for correct flow
measured for that determination. When the dust-controlled area rate. Record the particle count rate.
airborne-particle cleanliness-verification process is carried out, 11.2 Establish and record the sample point locations for the
the SPC shall be located in that area, preferably at the sample dust-controlled area in accordance with 9.2 and 9.3. If sample
point location. If process tools or equipment are located so that transport in tubing is required, place the tubing so that it will
the SPC cannot be placed at the desired sample point location, not be subject to vibration or motion during any sample
a sample transport line may be used. Two or more samples acquisition procedures.
shall be taken at each location and airborne particle concen- 11.3 Define the sampling schedule for the dust-controlled
tration data from at least two locations shall be used to verify area in terms of number and location of sample points, sample
the class level for each dust-controlled area. If exception to volume, sample frequency, and sample size. The minimum
these values can be justified, then a written report to that effect number of sample points and replicate measurements will be
shall be included with the report of the clean room class-level determined for area verification in accordance with ISO
verification. 14644-1 and ISO 14644-2 (Federal Standard 209E). The num-
9.3 Clean Room Monitoring—The locations and the number ber and location of sample points for monitoring will be
of sampling points shall be established on the basis of the determined in accordance with 9.3. For area verification, the
activity that will be carried out in the dust-controlled area. sample frequency and sample size will be scheduled so as to
Sampling can be carried out at locations expected to be ensure acquisition of statistically acceptable data. The primary
representative of conditions within the overall dust-controlled requirement here is that sufficient data be procured so that the
area. Alternately, sampling can be carried out at locations that dust-controlled area air cleanliness can be stated with assur-
may be critical to production in terms of potential particle ance. For very clean areas, the concentration of airborne

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 F50 − 12 (2015)
particles will be very low, so that large samples may be TABLE 2 Upper 95th Percentile Limit for True Mean of Poisson
required. In addition, the spatial distribution of particles in the Distribution
air is random in nature, so that sample-to-sample variability Observed Number Upper Limit Observed Number Upper Limit
must be considered in defining the sample size so as to 0 3.00 14 21.89
1 4.74 15 23.10
minimize effects of such variability. The SPC sample flow rate 2 6.30 16 24.30
must also be considered in defining sample volume; if sample 3 7.75 17 25.50
flow rates are very low, then the time required for an acceptable 4 9.15 18 26.69
5 10.54 19 27.88
sample may be so long that clean room conditions may change 6 11.84 20 29.06
appreciably during and between samples. 7 13.15 25 34.92
8 14.43 30 40.69
11.4 Operate the SPC in accordance with the sampling 9 15.71 35 46.40
schedule defined in 11.3. Particle data shall be recorded for 10 16.96 40 52.07
11 18.21 45 57.69
each sample point measurement. The data shall include particle
12 19.44 50 63.29
count information for each size range within the SPC dynamic 13 20.67
range and data processing system capability.

12. Calculations
observed simply to indicate trends in particle concentration
12.1 For verification of dust-controlled area airborne- without defining any quantitative concentration levels. If single
particle concentration, air samples are taken at numerous readings are used and if the count level is in the range of 50 or
locations throughout the area. As shown in ISO 14644-1 and more, then the upper 95th percentile confidence limit on the
ISO 14644-2 (Federal Standard 209E), one or more samples true count can be estimated as the count plus 1.65 times the
are taken at each of the locations (L). At each location a sample square root of the count (an estimate of the count standard
average A is calculated. If only one sample is taken, the reading deviation). If single readings with 50 or fewer counts are used,
for that one sample is used. The mean of the sample averages then the upper 95th percentile confidence limit on the true
for all the locations is determined and used as the best estimate count can be obtained from Table 2.7 It is assumed that the true
of the true mean concentration in the area. A standard mean is constant during the measurement. The values are
deviation, SD, of these averages is then calculated and then a obtained by finding the Poisson distribution true mean for
standard error, SE, is calculated. The standard error is equal to which the indicated count is at the 95th percentile value. If
the standard deviation divided by the square root of the number multiple readings are used and they have only a few counts,
of locations, SE = SD/L1/2. Upper confidence limits on the true then either Table 2 or the Student’s t analytical procedure
mean concentrations, are determined as the mean of the sample shown in 12.1 can be used to approximate the 95th percentile
averages plus the product of k and SE, where k is obtained from upper confidence level.
tables of the Student’s t distribution. The 95th percentile upper
confidence limit would be obtained by adding the product of 13. Report
specific values of k and the standard error to the mean 13.1 Report the following information, as specified:
concentration, with the value of k determined by the number of 13.1.1 Clean room or dustfree area identification and
sample locations as shown in Table 1. For many more than 15 location,
sample locations, k becomes 1.65. If the number of particle 13.1.2 Dust-free area airflow type, for example,
count data is less than 20, then confidence intervals may be “unidirectional,” “nonunidirectional,” “mixed”,
used from Table 2, as shown in 12.2. 13.1.3 SPC identification and calibration status,
12.2 For monitoring dust-controlled area air cleanliness, the 13.1.4 SPC background noise count data,
measurement data may be used to calculate anticipated mean 13.1.5 Date and time when SPC use for verification begins
levels with an appropriate confidence level, much as in 12.1 and ends,
when more than one reading is used. Data may also be 13.1.6 Clean room or dustfree area status as “as-built,”
“at-rest,” “operational” or “other”,
13.1.7 Dust-free-area air-cleanliness-classification target
TABLE 1 95th Percentile Upper Confidence Limit Factor, k
level,
Number of Locations UCL Factor k 13.1.8 Area classification verification or area monitoring,
3 2.92 13.1.9 SPC particle size range(s) being measured,
4 2.35
5 2.13 13.1.10 SPC inlet sampling flow and sensor measured
6 2.02 sample flow,
7 1.94 13.1.11 Location of sampling points,
8 1.90
9 1.86 13.1.12 Sampling schedule for verification or monitoring
10 1.83 protocol,
11 1.81 13.1.13 Raw data for each sample point, and
12 1.80
13 1.78 13.1.14 Particle distribution used in data reduction.
14 1.77
15 1.76
7
16 1.75 Garwood, F., “Fiducial Limits for the Poisson Distribution,” Biometrika,
United Kingdom, Vol 28, 1936 , pp. 437–442.

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 F50 − 12 (2015)
14. Precision and Bias 14.2 The precision and bias of particle data obtained when
14.1 The precision of data from this practice will vary with using this practice is equivalent to those obtained with Prac-
the conditions under which the data are acquired. If the practice tices F649 or F328.
is used in dustfree areas where fewer than 10 data points are
obtained in any single measurement, then the operator may 15. Keywords
either define a mean value for the cleanliness of the dustfree 15.1 air sampling; airborne particles; particle counting;
area with a preselected confidence limit or the operator may particle size distribution; particles
state the maximum particle concentration in a specific number
of measurements of defined sample volume.

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