SEMI-GAS® EQUIPMENT

Custom Gas Equipment

Rack Mount System
Features
" Safely Dispenses Hazardous Process Gases

" Con#gurable for Standard or Bulk Gas Delivery

" Performs Purging Automa!cally

" Performs Cylinder Switchover Automa!cally

" Includes Ergonomically Posi!oned Color Touch Screen

" Intui!ve Opera!ng Interface and Control

" Con!nuously Monitors System Condi!ons for Alarms

" Maintains Detailed Alarm Logs

" Mul!ple Communica!ons Protocols Available

" Manual, Semi Automa!c and Fully Automa!c Designs

Engineering Data
" Dimensions: 96" T X 54" W X 26" D
Materials of Construc!on
" Voltage: 110 To 240 VAC, 1 Phase
APPLIED ENERGY " All Welded 11 Ga Steel Rack
" Frequency: 50 To 60SYSTEMS,
Hz INC
180 Quaker Lane " High Strength Floor Moun!ng Base
" Heaters: 1 kW
Malvern, PA 19355
www.appliedenergysystems.com " Heavy Cast Aluminum Cylinder Brackets
Phone: 610.647.8744
Fax: 610.640.4548 " Securely Holds up to 4 Cylinders Within Protec!ve
sales@appliedenergysystems.com Frame Extensions

Ordering Informa!on
Contact your SEMI-GAS® Sales Representa!ve
or call 610-647-8744

APPLIED ENERGY SYSTEMS, INC

180 Quaker Lane
The Standard of Excellence in Safety, Quality and Performance
Malvern, PA 19355
www.semi-gas.com
Phone: 610.647.8744
Fax: 610.640.4548
sales@semi-gas.com
MILLENNIUM FDTS GAS DELIVERY SYSTEM

MILLENNIUM FULL DUPLEX TOUCH SCREEN SYSTEM

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FULL DUPLEX GAS PANEL

APPLIED ENERGY SYSTEMS, INC.
 TYPICAL CHANGEOVER DISPLAY SECURITY SCREEN

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www.appliedenergysystems.com
EMERGENCY SHUTDOWN SYSTEM (ESS)- Single Channel
EMERGENCY SHUTDOWN SYSTEM (ESS) (ESS)-- Single
AnalogChannel
(for
(for uninterrupted
(for use with
use
gasPanels)
with Manual
Manual flow on Manual Panels)
Panels)
Changeover

• FUNCTION:
The ESS Analog Changeover Controller is designed to monitor

transducer inputs and initiate a changeover from one cylinder or bank

that is depleted to another. These inputs can be from either pressure

transducers or analog cylinder scales. The controller also monitors

up to nine optically isolated sensors and will shutdown the system

should a fault condition occur.

• OPERATION:
The ESS Analog Changeover Controller monitors up to nine optically

isolated inputs. These inputs can be digital or analog and may used

to monitor flow, pressure, exhaust, and fire sensors, as may be required

• Front View of a Controller

in a particular installation. Two of these inputs are normally used to

monitor pressure transducers or analog scales.

With the proper security, the system software can be modified to change the alarm and

changeover conditions. Sensor variables can also be modified.

Various LED’s provide the status of all inputs. A four line display provides pressure or

weight information from the transducers or scales.

A remote connector provides the ability to monitor the system at a remote location as

well as provide the ability for a remote ABORT. A remote ALARM and ALARM SILENCE

are also provided.

• FEATURES:
• The ESS Series of controllers are CMOS, microprocessor based systems, with a long
history of error-free performance

• Integrated menu-driven software with keypad for easy changing of variables

• Three levels of security

APPLIED ENERGY SYSTEMS

• Remote control and communications

 • MORE FEATURES:
• Membrane Front Panel - A membrane front panel,

using metallic snap-action switch domes on a printed

circuit board base, provides a reliable operator interface

with tactile feedback. Descrete LED’s indicate the

status of the various solenoids and sensors, while a

Liquid Crystal Display (LCD) displays operator prompts,

programming information and transducer outputs.

• Remote Connector - A remote connector provides

for remote status and shut-down. Several of the

output signals available on this connector may be

configured by the user, using the menu.

• Security - Three levels of security are provided to • Rear View of a Controller

allow for a hierarchy of control and operation.

• OTHER FEATURES:
• Alarm and alarm shutdown can be programmed for each sensor

• Debounce times for each sensor can be programmed to avoid

nuisance tripping

• LED status/Trip indications are located on all sensory inputs

• Optional Remote Control Box

• Power Input: 115/230 VAC, 50/60 Hz, 2.0 Amperes • Input Pneumatic Air (Nitrogen): 80-100 psig

APPLIED ENERGY SYSTEMS, INC.

180 Quaker Lane Malvern, PA 19355 • (610) 647-8744 • Fax (610) 640-4548
www.appliedenergysystems.com
EMERGENCY SHUTDOWN SYSTEM (ESS) - Changeover
(for uninterrupted gas flow on Manual Panels)

• FUNCTION:
The ESS is designed to interrupt the flow of toxic,

corrosive or flammable gas from a cylinder under

unsafe or undesirable conditions. One gas panel

is typically controlled.

• OPERATION:
The ESS Changover Controller monitors up to

eleven optically isolated inputs. These inputs

may be used to monitor flow, pressure, exhaust

• Front View of a Controller
and fire sensors as required in a particular

installation. Two of these inputs are used to

monitor pressure switches that monitor the supply status of the two cylinders or cylinder banks.

Various LED’s provide the status of all inputs as well as the cylinder supply status.

Where required, two of the inputs may be connected to remotely located ABORT and ALARM SILENCE switches. A remote panel

is available for this purpose.

Programming of each ESS is provided by the manufacturer in response to the unique combination of sensors required by the

installation.

• FEATURES:
• The ESS Series of Controllers are CMOS, microprocessor based
systems, with a long history of error-free performance.

• Remote panel for system status and remote shutdown is available

• Internal buzzer sounds with any alarm condition. It may be silenced APPLIED ENERGY SYSTEMS

with the alarm silence button.

• PURGE:
The PURGE key provides a means of disabling selected

sensors while a gas panel is being purged.

• PROGRAMMABLE PARAMETERS:
Programmable parameters for each digital input include:

1. The logical sense of the sensor (normally open

vs. normally closed)

2. The latching characteristics (should gas flow be

restored when the sensor becomes safe)

3. The debounce time required before the sensor • Rear View of a Controller
is declared unsafe

4. Whether the sensor is to be overridden during

purge operations

• ESS SPECIFICATIONS:
• Size: 8” x 5” x 6”

• Weight: 3.5 Pounds

• Power: 100-125 Volts or 200-250 Volts (user selectable)

Fused at 2 Amperes (7 Watts normal)

• Pneumatic: 80-100 psi (inert gas preferred)

• Optional Remote Control Box

APPLIED ENERGY SYSTEMS, INC.

180 Quaker Lane Malvern, PA 19355 • (610) 647-8744 • Fax (610) 640-4548
www.appliedenergysystems.com
 FIELD SERVICES

RELY ON THE FIELD SERVICE GROUP AT AES TO SUPPORT YOUR

ULTRA HIGH PURITY GAS HANDLING SYSTEMS

For Semiconductor Systems:

• Installation of ultra-high purity single-wall and double-wall tubing

• Installation of vacuum pump forelines and exhaust lines

• Analytical Testing of gas lines to assure leak integrity and purity

• Gas system start-up and training

ULTRA-HIGH PURITY COAXIAL PIPING

GAS CABINETS, VALVE

MANIFOLD BOXES, AND UHP PIPING VACUUM PUMP FORELINES AND EXHAUST LINES

For Pharmaceutical Systems:

• Installation of WFI and Clean Steam Loops

• QA Documentation required for speedy validation

• Internal Video Borescope of all welds

USP WATER DROPS FOR A APPLIED ENERGY SYSTEMS, INC

MAJOR PHARMACEUTICAL COMPANY
Technical Consulting:

• On-call certified and trained engineers, technicians, and specialists.

• Equipment Installation oversight worldwide.

Analytical Testing:

• Helium Leak Testing to 2 x 10-10 Atm-cc/sec.

AES SUPPLIED EQUIPMENT
AND OVERSIGHT IN INDIA
• Hydrocarbon Testing to 20 ppb.

• Oxygen Analysis to 1 ppb.

• Moisture Analysis to 1 ppb.

• Particle Testing to .014 micron.

ANALYTICAL TESTING BY A QA SPECIALIST

INSTALLATION OF GAS CABINETS

AND VALVE MANIFOLD BOX INCLUDING
UHP PIPING AND ANALYTICAL TESTING

With over 20 years of worldwide experience our teams are trained and certified to provide
the highest quality installation resulting in superior performance and a quick start-up.

APPLIED ENERGY SYSTEMS, INC.

180 Quaker Lane, Malvern, PA 19355 • (610)647-8744 • Fax(610)640-4548

www.appliedenergysystems.com
HPM II AUTOMATIC CONTROLLER

• FUNCTION:
The HPM II Automatic Controller is designed to control a gas panel used

for toxic, corrosive or reactive gases

• OPERATION:
The controller monitors up to twelve digital and three analog optically

isolated sensors during on-line operation. If a sensor trip is detected,

the cylinder is isolated and a sensor LED, on the front panel, is

illuminated. Should the sensor become safe, the cylinder may or may

not come back on-line, depending on the programming

• Front View of a Controller

Upon cylinder depletion, the controller provides for an automatic,

iterative “PURGE DOWN” sequence to prepare the cylinder for safe removal. When bringing

a new cylinder on-line, the controller will prompt the operator and perform a programmable,

iterative “PURGE UP” sequence to prepare the new cylinder for on-line operation.

• FEATURES:
The HPM Series of Controllers are CMOS, microprocessor based systems, with a long

history of error-free performance. All units provide a variety of pre-programmed,

automatically sequenced purge recipies.

• Typical Installation
• BENEFITS: on a Gas Cabinet
• Over 10 years of on-line experience without failure

• Integrated menu-driven, touch sensitive display

• Three levels of security APPLIED ENERGY SYSTEMS

• Remote control and communications

• Interactive panel schematic

 • MORE FEATURES:
• Membrane Front Panel - A membrane front panel,

using metallic snap-action switch domes on a printed

circuit board base, provides a reliable operator interface

with tactile feedback. Descrete LED’s indicate the

status of the various solenoids and sensors, while a

Liquid Crystal Display (LCD) displays operator prompts,

programming information and transducer outputs.

• Remote Connector - A remote connector provides

for remote status and shut-down. Several of the

output signals available on this connector may be

configured by the user, using the menu.

• Security - Three levels of security are provided to • Rear View of a Controller

allow for a hierarchy of control and operation.

• OTHER FEATURES:
• Alarm and alarm shutdown can be programmed for each sensor

• Debounce times for each sensor can be programmed to avoid

nuisance tripping

• LED status/Trip indications are located on all sensory inputs

• Manual Mode for valve actuation via touch sensitive front panel

(software will not permit unsafe valve actuations)

• Optional Remote Control Box

• Power Input: 115/230 VAC, 50/60 Hz, 2.0 Amperes • Input Pneumatic Air (Nitrogen): 80-100 psig

APPLIED ENERGY SYSTEMS, INC.

180 Quaker Lane Malvern, PA 19355 • (610) 647-8744 • Fax (610) 640-4548
www.appliedenergysystems.com
EMERGENCY SHUTDOWN SYSTEM (ESS)- Single Channel
HPM III AUTOMATIC
EMERGENCY CHANGEOVER
SHUTDOWN CONTROLLER
SYSTEM (ESS)- Single Channel
-(for
(for use
foruse with Manual
Manual
uninterrupted
with Panels)
gas flow . . . guaranteed!
Panels)

• FUNCTION:
The HPM III Automatic Changeover Controller is designed to control a

two cylinder gas panel used for toxic, corrosive or reactive gases

• OPERATION:
The HPM III Automatic Changeover Controller monitors pressure

transducers for each cylinder as well as 12 optically isolated sensors

during on-line operation.

The controller monitors two gas supplies and initiates a changeover

between the cylinders when the “in use” supply is depleted to a

programmable set-point.
• Front View of a Controller
Upon cylinder depletion, the controller provides for an automatic, iterative “PURGE DOWN”

sequence to prepare the cylinder for safe removal. When bringing a new cylinder on-line,

the controller will prompt the operator and perform a programmable, iterative “PURGE UP”

sequence to prepare the new cylinder for on-line operation. During cylinder replacement,

the controller continues to monitor all inputs.

All automated purge procedures can be performed without affecting the gas flow from the

on-line cylinder.

• FEATURES:
The HPM Series of Controllers are CMOS, microprocessor based systems, with a long

history of error-free performance. All units provide a variety of pre-programmed,

automatically sequenced purge recipies. • Typical Installation

on a Gas Cabinet
• BENEFITS:
• Over 10 years of on-line experience without failure

• Integrated menu-driven, touch sensitive display APPLIED ENERGY SYSTEMS

• Three levels of security

• Remote control and communications

 • MORE FEATURES:
• Membrane Front Panel - A membrane front panel,

using metallic snap-action switch domes on a printed

circuit board base, provides a reliable operator interface

with tactile feedback. Descrete LED’s indicate the

status of the various solenoids and sensors, while a

Liquid Crystal Display (LCD) displays operator prompts,

programming information and transducer outputs.

• Remote Connector - A remote connector provides

for remote status and shut-down. Several of the

output signals available on this connector may be

configured by the user, using the menu.

• Security - Three levels of security are provided to • Rear View of a Controller

allow for a hierarchy of control and operation.

• OTHER FEATURES:
• Alarm and alarm shutdown can be programmed for each sensor

• Debounce times for each sensor can be programmed to avoid

nuisance tripping

• LED status/Trip indications are located on all sensory inputs

• Manual Mode for valve actuation via touch sensitive front panel

(software will not permit unsafe valve actuations)

• Optional Remote Control Box

• Power Input: 115/230 VAC, 50/60 Hz, 2.0 Amperes • Input Pneumatic Air (Nitrogen): 80-100 psig

APPLIED ENERGY SYSTEMS, INC.

180 Quaker Lane Malvern, PA 19355 • (610) 647-8744 • Fax (610) 640-4548
www.appliedenergysystems.com
 MILLENNIUM GAS CABINETS
Applied Energy Systems specializes in the safe and ultra pure delivery of inert
and hazardous gases. Orbital welding and careful attention to surface finish,
orifice sizes and flow coefficients assure design performance.

The Millennium series of Gas Cabinets conforms to SEMI-S2, the International

Fire Code and other applicable codes.

All systems are fabricated in a certified Class 100 Cleanroom

• OPTIONS:
• Manual Gas Cabinet:
For inert, non-toxic and non-reactive gases
• Semi-Automatic Gas Cabinet:
For less reactive or toxic gases
• Fully-Automatic Gas Cabinet:
For toxic, corrosive and reactive gases
• Auto-Changeover Gas Cabinet:
For uninterrupted gas flow

• MORE OPTIONS:
• Class I, Division II (Z-purge with Intrinsic Barriers)
• High Flow Design
• Cylinder Heating
• Automatic Changeover View of Two Cylinder
• Analog Scales for Liquefied Gases Gas Cabinet

• FEATURES:
For the Semi-Automatic Gas Cabinet an interactive procedure is performed manually for cleansing the system prior to and after
cylinder change. All of the valving is manually actuated except for the cylinder isolation valve which is pneumatic. Should any
sensor trip the controller will isolate the cylinder. Our ESS controller monitors up to nine optically isolated sensors and can provide
alarm and shutdown for each sensor to meet your requirements. Remote outputs are provided for remote system status and/or
shutdown.

The Fully-Automatic Gas Cabinet is designed to monitor a large number of process sensors and other facility inputs, as required.
A touch sensitive display provides easy user interface. Three levels of security offer the ability to maintain various levels of control
on the cylinder change and software modifications. Iterative Vacuum/Purge sequence for this system is fully automated and
provides unsurpassed safety for both the operator and the process. System cleanliness is maintained and any potential contami-
nation is eliminated.

The Auto-Changeover Gas Cabinet performs iterative vacuum/purge cycling to protect the operator during cylinder change and
assures cleanliness of the process gas. Cylinder changeover can be defined by pressure or mass inputs. Software is available
for multiple cylinder scales on each bank. Purge up and Purge down procedures can be performed without interruption of on-line
cylinder.

All systems are fabricated in one of our certified cleanrooms and fully tested. Helium leak testing is performed using dry leak
detectors with sensitivity to 5x10-11 Atm-cc/sec. Full analytical testing and guarantees can also be performed.

APPLIED ENERGY SYSTEMS

• RENDERING OF APPLICATION:

Millennium Gas Cabinet and a

Millennium VMB

• The Millennium VMB is available in four, six and eight stick

configurations

• High-flow systems are available.

• SPECIFICATIONS:

Millennium Gas Cabinet:

• One Cylinder: 74”H x 18”W x 18”D (1880mmH x 457mmW x 457mmD) Add 6” (150mm) for stack
• Two Cylinder: 74”H x 24”W x 18”D (1880mmH x 610mmW x 457mmD) Add 6” (150mm) for stack
• Three Cylinder: 74”H x 36”W x 18”D (1880mmH x 914mmW x 457mmD) Add 8” (200mm) for stack

Exhaust Requirements:
• One Cylinder: 6” (150mm) Exhaust Duct 175 Ft.3/min. (5.1m3/min.)
• Two Cylinder: 6” (150mm) Exhaust Duct 250 Ft.3/min. (7.3m3/min.)
• Three Cylinder: 8” (200mm) Exhaust Duct 350 Ft.3/min. (10.3m3/min.)

• Power Input: 115-230 VAC, 50-60 Hz, 2.0 Amperes

• Input Pneumatic Air (Nitrogen): 80-100 psi (550-690 kPa)
• Communication: RS-485, Standard Digital Inputs and Outputs
• Temperature: 30oF - 120oF (4-50oC)

APPLIED ENERGY SYSTEMS, INC.

180 Quaker Lane, Malvern, PA 19355 • (610) 647-8744 • Fax: (610) 640-4548
www.appliedenergysystems.com
 THE MILLENNIUM LINE OF
VALVE MANIFOLD BOXES
Meets All Provisions of SEMI-S2, The International Fire Code & Other Applicable Codes

• Incorporating the Powerful Z-World Rabbit Microprocessor

• I/O Capabilities to support over 170 Surface Mounted

LED’s on Front Panel (20 per stick plus global LED’s)

• Communication Options include Ethernet, RS-485

and soon to be released Wireless

• Ultra High-Purity Design

• Front Mounted Components for Easy Maintenance

Valve Manifold Boxes are used to regulate and distribute the supply of Hazardous Production Material (HPM) gas to multiple tools,
safely, and without contamination or pressure fluctuations that may affect the end process.

The Millennium line of VMB’s represents a new generation of capabilities for Semiconductor fabrication facilities.

All valve and sensor states are displayed simultaneously on the front panel. With a quick glance, the operator can easily
verify the complete system status. There is no need to scroll through a display to determine a specific fault or valve position.

• View of Controller (4 Stick) • Close Up View of Controller

• SECURITY AND PROGRAMMING:

The Millennium VMB offers three levels of security. With the proper password all of the operating, purging and sensor
variables are accessed. For example, Purge/Vacuum cycles and timing, as well as, sensor debounce times can all be modified.

APPLIED ENERGY SYSTEMS

• RENDERING OF APPLICATION:

4, 6 or 8
Outputs are
Available

• The Millennium VMB is available in four, six and eight stick

configurations

• High-flow systems are available.

• SPECIFICATIONS:

Processor and Controller:

• Communications: Ethernet, RS-485, Standard Digital Inputs/Outputs
• Power: 100-240 Volts, 50-60 Hertz, 2 Amperes

VMB:
• Dimensions: 4 Stick - 26” W x 40”H x 15”D (660mm W x 1015mm H x 380mm D)
• Stick Design: Options: Models:
• Regulator Millennium 674 - 4 Stick Semi-Automatic
• Excess Flow Sensor Millennium 676 - 6 Stick Semi-Automatic
• Pressure Transducer Millennium 678 - 8 Stick Semi-Automatic
• Filter - .003 Micron Millennium 684 - 4 Stick Fully Automatic
• High Flow Millennium 686 - 6 Stick Fully Automatic
Millennium 688 - 8 Stick Fully Automatic
• Each Millennium controller includes 8 optically isolated digital sensor inputs per stick plus 8 optically isolated digital
sensor inputs for centralized functions
• Each controller provides for 4 pneumatic outputs per stick plus 4 pneumatic outputs for centralized functions
• Each controller includes 4 relay outputs per stick plus 4 relay outputs for centralized functions
• All relay coils and pilot valves are monitored for open and short circuit conditions
• A bright 4-line, 20 characters per line, vacuum fluorescent display provides access to the programming menu and
purge functions
• A SEMI approved, latching EMO switch physically interrupts the power for the pilot solenoids
• A key-lock option prevents the solenoids from being re-energized without a key; otherwise, a password provides access

Optional: Analog transducers with digital pressure displays can be provided for each stick, as well as, 2 internal
pressure transducers for monitoring a Z-purge and the CDA supply pressure

• Power Input: 100-240 VAC , 50-60 Hz, 2.0 Amperes • Input Pneumatic Air (Nitrogen): 80-100 psi
(550-690 kPa)

APPLIED ENERGY SYSTEMS, INC.

180 Quaker Lane, Malvern, PA 19355 • (610) 647-8744 • Fax: (610) 640-4548
www.appliedenergysystems.com
EMERGENCY SHUTDOWN SYSTEM (ESS)- Single Channel
(for
(for use
use with
with Manual
Manual Panels)
Panels)

• FUNCTION:
The ESS is designed to interrupt the flow of toxic,

corrosive or flammable gas from a cylinder under

unsafe or undesirable conditions. One gas panel

is typically controlled.

• OPERATION:
The ESS monitors up to eleven optically isolated

inputs. These inputs may be used to monitor flow,

pressure, exhaust and fire sensors as required in

a particular installation. • Front View of a Controller

Where required, two of the inputs may be connected

to remotely located ABORT and/or ALARM SILENCE

switches. A remote panel is available for this purpose.

Various LED’s provide the status of all the inputs as well as the overall system status.

Programming of each ESS is provided by the manufacturer in response to the unique combination of sensors required by the

installation.

• FEATURES:
• The ESS Series of Controllers are CMOS, microprocessor based
systems, with a long history of error-free performance.

• Remote panel for system status and remote shutdown is available

• Internal buzzer sounds with any alarm condition. It may be silenced

with the alarm silence button.
APPLIED ENERGY SYSTEMS
• PURGE:
The PURGE key provides a means of disabling selected

sensors while a gas panel is being purged.

• PROGRAMMABLE PARAMETERS:
Programmable parameters for each digital input include:

1. The logical sense of the sensor (normally open

vs. normally closed)

2. The latching characteristics (should gas flow be

restored when the sensor becomes safe)

3. The debounce time required before the sensor • Rear View of a Controller
is declared unsafe

4. Whether the sensor is to be overridden during

purge operations

• ESS SPECIFICATIONS:
• Size: 8” x 5” x 6”

• Weight: 3.5 Pounds

• Power: 100-125 Volts or 200-250 Volts (user selectable)

Fused at 2 Amperes (7 Watts normal)

• Pneumatic: 80-100 psi (inert gas preferred)

• Optional Remote Control Box

APPLIED ENERGY SYSTEMS, INC.

180 Quaker Lane Malvern, PA 19355 • (610) 647-8744 • Fax (610) 640-4548
www.appliedenergysystems.com