Parala Maharaja Engineering College , Berhmapur

Presentation on

OPTICAL GYROSCOPE(MEMS)

By:-
Chinmayee Nayak
Mechanical 4th yr , 7th semester
Regd no:-2101109401
 Micro-opto- electro-mechanical system (MOEMS)
OPTICAL GYROSCOPE
Introduction
A fibre-optic gyroscope (FOG) senses changes in orientation using the Sagnac effect, thus performing the function of a mechanical gyroscope.
However its principle of operation is instead based on the interference of light which has passed through a coil of optical fibre, which can be as
long as 5 kilometres.
Parts of an optical gyroscope:-
1.Light source: Often a laser that emits a beam of light.
2.Beam splitter: Divides the light into two beams that travel in opposite directions.
3.Optical fibers or waveguides: Pathways for the light beams to travel through.
4.Detector: Measures the phase shift between the two beams of light.
5.Electronics: Convert the detector's signals into readable data. Fig.1. Optical gyroscope

Governing principle:- The Sagnac Effect

• The Sagnac effect, also called Sagnac interference, named after French physicist Georges Sagnac, is a phenomenon encountered in
interferometry that is elicited by rotation. The Sagnac effect manifests itself in a setup called a ring interferometer or Sagnac interferometer.
• The Sagnac effect manifests itself in a setup called a ring interferometer or Sagnac interferometer. A beam of light is split and the two beams
are made to follow the same path but in opposite directions.
• On return to the point of entry the two light beams are allowed to exit the ring and undergo interference.
• The relative phases of the two exiting beams, and thus the position of the interference fringes, are shifted according to the angular velocity of the
apparatus. In other words, when the interferometer is at rest with respect to a nonrotating frame, the light takes the same amount of time to traverse the
ring in either direction.
• However, when the interferometer system is spun, one beam of light has a longer path to travel than the other in order to complete one circuit of the
mechanical frame, and so takes longer, resulting in a phase difference between the two beams.

Description and operation:-

• Typically three or more mirrors are used, so that counter-propagating light
beams follow a closed path such as a triangle or square.
• Alternatively fiber optics can be employed to guide the light through a closed
path.
• If the platform on which the ring interferometer is mounted is rotating, the
Fig. 2. Schematic representation of
interference fringes are displaced compared to their position when the platform is not rotating. Sagnac interferometer.

• The amount of displacement is proportional to the angular velocity of the rotating platform.
• The phase shift of the interference fringes is proportional to the platform's angular frequency ω
and is given by the formula originally derived by Sagnac:-

where ,
“A” is the oriented area of the loop
Fig. 3. A guided wave Sagnac interferometer, or fibre optic
“λ” the wavelength of light gyroscope, can be realized using an optical fiber in a single or
multiple loops.
 WORKING PROCESS OF THE OPTICAL GYROSCOPE
• Two beams from a laser are injected into the same fibre but in opposite directions. Due to the Sagnac effect, the beam travelling against the
rotation experiences a slightly shorter path delay than the other beam. The resulting differential phase shift is measured through interferometry,

thus translating one component of the angular velocity into a shift of the interference pattern which is measured photometrically.

• Beam splitting optics split light from a laser diode (or other laser light source) into two waves propagating in both clockwise and anticlockwise
directions through a coil consisting of many turns of optical fibre. The strength of the Sagnac effect is dependent on the effective area of the
closed optical path: this is not simply the geometric area of the loop but is also increased by the number of turns in the coil.

Fig.4. Working of an optical gyroscope

 Fabrication process of an optical gyroscope
1.Design and Simulation: Engineers create a detailed design of the MEMS gyroscope using CAD software. This includes defining the structure,
materials, and dimensions. Simulations are run to predict how the gyroscope will perform, including its response to different forces and
environmental conditions. This ensures the design meets the required specifications before moving to fabrication.

2.Material Selection: Silicon is often the material of choice because of its excellent mechanical properties, such as strength and flexibility, which
are crucial for the tiny moving parts in a MEMS device. Depending on the specific requirements, other materials like silicon dioxide, silicon
nitride, or metals may also be used.

3.Wafer Preparation: The silicon wafer is cleaned using a series of chemical baths to remove any contaminants. This is essential to ensure that
subsequent processes like photolithography and etching are not hindered by impurities.

Fig.5. Gyroscope uses eight micro-mirrors manufactured

by the MEMS technology to construct two optical loops *Fig.6. Four-micromirror interferometric MOEMS gyroscope.
over a small area to enhance the Sagnac effect.
*Parts of a Four-micromirror interferometric MOEMS gyroscope :-

 Integrated optics chip: This is the core component of the system, where the optical signal is processed.

 SLD: This stands for Superluminescent Diode, which is a type of light source that emits a broad spectrum of light.

 Coupler: This device combines or splits optical signals.

 Collimator: This component converts the diverging light beam from the SLD into a parallel beam.

 Mirror: This reflects the light beam at an angle.

 Detector: This device converts the optical signal into an electrical signal.

 Optical sensitivity part: This is the part of the system that is sensitive to light. It is likely the detector or a component connected to it.
4. Photolithography: The wafer is coated with a thin layer of photoresist, a light-sensitive material. A mask with the desired pattern is placed over
the wafer, and the assembly is exposed to ultraviolet light. The light causes the exposed areas of the photoresist to undergo a chemical change,
allowing those areas to be developed away, leaving behind a precise pattern on the wafer.
5. Etching: The patterned wafer is etched using either wet chemical etching or dry plasma etching. Wet etching involves immersing the wafer in a
chemical solution that removes the exposed silicon, while dry etching uses a plasma of reactive gases to achieve the same effect. This process
creates the intricate 3D structures required for the MEMS device.
6. Deposition: Various thin films of materials are deposited onto the wafer to create the necessary layers for the device. Techniques like chemical
vapor deposition (CVD), physical vapor deposition (PVD), and atomic layer deposition (ALD) are used to build up the layers with high precision.
7. Dicing: The wafer is cut into individual dies using a precision dicing saw. Each die contains one MEMS gyroscope. The dicing process must be
done with extreme care to avoid damaging the delicate structures.
8. Packaging: The individual dies are placed into protective packages that provide electrical connections and, in some cases, optical components.
Packaging ensures the gyroscopes are protected from environmental factors like dust, moisture, and mechanical stress.

Fig.7. MOMES gyroscope comprised of the modified add/drop filter known as

the Panda ring resonator, where the optical path length had been enhanced utilizing the
panda ring. Fig.8. Order of process of fabrication of optical gyroscope
9. Testing and Calibration: Each MEMS gyroscope is rigorously tested to ensure it meets performance standards. This includes measuring its
response to known rotations and adjusting the device to account for any manufacturing variations. Calibration ensures that the gyroscope provides
accurate and reliable measurements.

10. Integration: The calibrated gyroscopes are integrated into final products, such as smartphones, drones, or navigation systems. This integration
involves connecting the gyroscopes to the electronic systems that will use their data for various applications.

Fig.8. Diagram of a mems optical gyroscope

Advantages:-
• A FOG provides extremely precise rotational rate information, in part because of its lack of cross-axis sensitivity to vibration, acceleration, and
shock.
• Unlike the classic spinning-mass gyroscope or resonant/mechanical gyroscopes, the FOG has no moving parts and doesn't rely on inertial
resistance to movement. Hence, the FOG is an excellent alternative to a mechanical gyroscope.
• Because of their intrinsic reliability and long lifetime, FOGs are used for high performance space applications and military inertial navigation
systems.
• The FOG typically shows a higher resolution than a ring laser gyroscope.
Disadvantages:-
• Like all other gyroscope technologies and depending on detailed FOG design, FOGs may require initial calibration (determining which
indication corresponds to zero angular velocity).
• FOGs can be sensitive to temperature variations, which can affect their accuracy. This sensitivity can be mitigated through careful design and
temperature compensation techniques, but it remains a factor to consider.
• FOGs are more complex devices compared to mechanical gyroscopes, requiring more sophisticated electronics and signal processing
techniques. This can increase costs and potentially reduce reliability.
• FOGs can be more expensive than mechanical gyroscopes, especially for high-performance models. This can be a limiting factor in certain
applications where cost is a primary concern.
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