Technology Beyond 1 NM
Technology Beyond 1 NM
Abstract—The continuous scaling of transistors has driven IV-C Let Us See the Approach of Three Tech
remarkable advancements in semiconductor technology, enabling Giants . . . . . . . . . . . . . . . . . . 3
unprecedented improvements in computational power and energy IV-D Challenges in CFET Manufacturing . . 7
efficiency. This paper explores the evolution of transistor archi-
tectures from planar MOSFETs to FinFETs, Gate-All-Around IV-E Future Outlook for CFETs . . . . . . . 7
(GAA) FETs, and Vertical Integration FETs (VIFETs), highlight-
ing their structural innovations and performance enhancements. V PowerVia Technology 7
As traditional scaling approaches physical limits around the
1nm node, emerging technologies like Complementary FETs VI 2D Materials 7
(CFETs) and quantum computing are gaining prominence. These VI-A Overview . . . . . . . . . . . . . . . . . 7
advancements address critical challenges such as short-channel
effects, power efficiency, and integration density. The motivation
VI-B Advantages of 2D Materials . . . . . . 9
for scaling beyond 1nm extends beyond miniaturization, driven VI-C Challenges of 2D Materials . . . . . . . 9
by the need for higher performance in data-intensive applications VI-D Applications of 2D Materials . . . . . . 9
like artificial intelligence and IoT, as well as sustainability VI-E Future Impact of 2D Materials in Tech-
concerns. This paper provides a comprehensive review of the nology Scaling . . . . . . . . . . . . . . 9
current state of transistor technology, future prospects, and the
technological and economic motivations for advancing semicon-
ductor research beyond 1nm. VII 3D Stacking and Chiplets 10
Index Terms—Transistor scaling, FinFET, GAA FET, CFET,
VIFET, quantum computing, semiconductor technology, Moore’s VIII Photonic Interconnects 10
Law, 1nm node, emerging technologies VIII-A Advantages . . . . . . . . . . . . . . . . 10
VIII-B Applications of Photonic Interconnects . 10
C ONTENTS
IX Quantum Computing 11
I Introduction 1 IX-A Quantum Computing Elements . . . . . 11
IX-B Advantages . . . . . . . . . . . . . . . . 11
II Importance, Need, and Motivation for Technol- IX-C Challenges and Future Directions . . . . 11
ogy Beyond 1nm 2
II-A Importance of Technology Beyond 1nm 2 X The Future 12
X-A The Future of Technology Scaling . . . 12
II-B Need for Scaling Beyond 1nm . . . . . 2
X-B Future products . . . . . . . . . . . . . 12
II-C Motivation for Advancing Beyond 1nm 2
XI Conclusion 13
III Transistor Evolution so far 2
III-A Importance of Innovation in Transistor References 13
Architectures . . . . . . . . . . . . . . . 2
III-B Planar Transistors . . . . . . . . . . . . 3 I. I NTRODUCTION
III-C FinFETs . . . . . . . . . . . . . . . . . 3 The relentless drive towards miniaturization has been a
III-D Gate-All-Around (GAA) Transistors . . 3 defining characteristic of the semiconductor industry, follow-
ing Moore’s Law, which predicted the doubling of transistor
IV CFET - A Vertical Revolution 3 density approximately every two years [1]. This trend has not
IV-A Complementary FET (CFET) Transistors 3 only facilitated exponential growth in computational power but
IV-B Advantages of CFETs . . . . . . . . . . 3 has also led to innovations that underpin modern technological
advancements. However, as transistor dimensions approach • Enabling Advanced Applications: Applications like ar-
the 1nm scale, traditional planar MOSFET architectures face tificial intelligence (AI), machine learning, autonomous
significant challenges, including short-channel effects, leakage systems, and data centers demand ever-increasing compu-
currents, and reduced gate control [2]. These limitations have tational power. Scaling beyond 1nm provides the neces-
necessitated the development of new transistor architectures sary performance and energy efficiency required for these
and materials to sustain performance improvements. data-intensive applications [3].
• Enhanced Power Efficiency: With smaller transistors,
The transition from planar transistors to FinFETs marked power consumption can be significantly reduced due to
a significant milestone in addressing these scaling challenges. lower switching energy and reduced leakage currents,
Introduced at the 22nm node, FinFETs improved electrostatic which is crucial for portable devices and Internet of
control by introducing a three-dimensional (3D) structure, Things (IoT) applications [4].
reducing leakage and enhancing performance [3]. As de-
vice dimensions continued to shrink, Gate-All-Around (GAA) B. Need for Scaling Beyond 1nm
FETs emerged as a successor to FinFETs, offering even better • Physical Limits of Traditional Transistors: As transis-
control by surrounding the channel with the gate on all sides. tors shrink below 5nm, traditional architectures like Fin-
GAA FETs, implemented at the 3nm and 2nm nodes, represent FETs encounter significant issues such as short-channel
a critical step in maintaining scaling trends and improving effects, leakage currents, and difficulties in maintaining
energy efficiency [4]. electrostatic control [2]. These challenges necessitate the
exploration of new transistor architectures like GAA and
Looking beyond GAA technology, Vertical Integration FETs CFETs.
(VIFETs) and Complementary FETs (CFETs) are being ex- • Demand for Higher Integration: Beyond 1nm scaling
plored to overcome the limitations of horizontal scaling [5]. allows for greater integration of functionality within a sin-
VIFETs stack transistors vertically, increasing density without gle chip, enabling more powerful system-on-chip (SoC)
reducing horizontal dimensions, while CFETs combine n-type designs. This is critical for reducing the overall footprint
and p-type transistors in a vertical configuration to optimize of electronic devices while boosting their functionality
performance and area efficiency [6]. These advanced architec- [11].
tures are essential for sustaining Moore’s Law and meeting • Thermal Management: Smaller transistors generate less
the performance demands of emerging applications such as heat, which is beneficial in terms of cooling require-
artificial intelligence, autonomous systems, and IoT devices ments and overall energy consumption. Efficient thermal
[7]. management is especially important in high-performance
computing environments where power density can be-
Moreover, the push beyond 1nm is not solely about tran- come a limiting factor [7].
sistor miniaturization but also involves exploring new com-
C. Motivation for Advancing Beyond 1nm
putational paradigms. Quantum computing, with its potential
to solve problems intractable for classical systems, represents • Economic Benefits: Continuing to scale down transistor
a significant frontier in this regard [8]. Integrating quantum sizes enables more transistors per wafer, thereby reducing
devices with conventional semiconductors could unlock new the cost per transistor. This helps maintain economic via-
levels of performance and efficiency, driving the next wave of bility and supports the competitiveness of semiconductor
technological innovation [9]. companies [5].
• Expanding Technological Frontiers: The push beyond
This paper examines the evolution of transistor architectures 1nm is not just about miniaturization but also about
from planar MOSFETs to advanced structures like FinFETs, exploring new paradigms like quantum computing and
GAA FETs, VIFETs, and CFETs. It also explores the moti- neuromorphic computing. These technologies promise to
vations for continuing to scale beyond 1nm, the challenges revolutionize computing power and efficiency far beyond
associated with this progression, and the potential impact of the capabilities of classical systems [6].
quantum computing on future semiconductor technologies. • Sustainability and Energy Efficiency: Energy-efficient
computing is a critical goal in the context of climate
II. I MPORTANCE , N EED , AND M OTIVATION FOR change and rising global energy consumption. Tech-
T ECHNOLOGY B EYOND 1 NM nology beyond 1nm enables energy-efficient processors,
A. Importance of Technology Beyond 1nm which is crucial for data centers, consumer electronics,
• Sustaining Moore’s Law: As technology nodes approach and environmental sustainability [9].
atomic scales, maintaining the pace of Moore’s Law III. T RANSISTOR E VOLUTION SO FAR
becomes more challenging. Innovations beyond 1nm help
to continue the trend of increasing transistor density, A. Importance of Innovation in Transistor Architectures
thus enabling further performance improvements and cost The evolution of transistor technology has been a critical
reductions [10]. driver of advancements in semiconductor devices. This section
provides an overview of how transistor architectures have B. Advantages of CFETs
changed over time to meet the demands of miniaturization and With every successive manufacturing node, scaling a tran-
enhanced performance, especially as technology nodes shrink sistor becomes ever more difficult. For the majority of the
beyond the 1nm scale. industry giants, it even becomes difficult to define. Device
density used to increase as gate length and metal pitch
Continuous innovation in transistor architecture is essential decreased. For a number of reasons, this is far more difficult
for maintaining the trajectory of Moore’s Law and meeting now.
the computational demands of emerging technologies such as • Short channel effects limit gate-length scaling
AI and quantum computing [10]. • Parasitic effects limit device density
• Metal resistance limits metal pitch.
As shown in the Moore’s Law timeline figure 1 [12] and
Therefore, in order to maximize total circuit performance,
the transistor technology roadmap figure 2 [13], the evolution
new device designs that balance these elements should be
of transistors has been pivotal to technological advancements.
required rather than just lowering all circuit dimensions. The
minimum distance between transistors is become increasingly
B. Planar Transistors significant as a barrier to further advances in device density
as transistors get smaller.
Planar transistors were the standard for several decades, en-
abling scaling according to Moore’s Law. However, as feature This is where CFET comes in.
sizes approached sub-20nm nodes, controlling leakage currents • CFETs allow for reduced footprint by vertically stacking
and short-channel effects became increasingly challenging [2]. transistors, leading to a smaller area and lower capac-
itance, which enhances switching speed and reduces
C. FinFETs
power consumption [9].
FinFETs, or Fin Field-Effect Transistors, were introduced • The compact design of CFETs enables more efficient
to improve electrostatic control over the channel by using a routing of interconnects, which is particularly valuable
thin, vertical fin as the channel, allowing better gate control as device complexity increases with advanced nodes.
and reduced leakage [3]. Stacking of CFET: CFETs stack nFETs and pFETs in a
3D configuration, utilizing both the upper and lower regions of
The adoption of FinFETs at the 22nm node marked a the stack for different transistor types. This stacking enables
significant shift in transistor design, enabling continued scaling a more efficient use of space and contributes to the potential
and performance gains [11]. for higher transistor density.
D. Gate-All-Around (GAA) Transistors
Design Structure of CFET: CFETs, adopt a 3D-stacked
As technology approached the 5nm and 3nm nodes, Gate- structure. They stack both n-type and p-type transistors on
All-Around (GAA) FETs emerged as the next evolutionary top of each other in a single, integrated process. CFETs aim
step, where the gate fully surrounds the channel, offering even to achieve nearly double the transistor density compared to
better control over leakage and short-channel effects [4]. FinFETs by combining both types of transistors in a more
compact design.
GAA structures such as nanosheet transistors are being
C. Let Us See the Approach of Three Tech Giants
explored by major semiconductor manufacturers to extend
scaling limits [14]. • Intel’s Approach
[15] – As one of the first companies to use CFET technol-
ogy, Intel demonstrated a number of noteworthy im-
IV. CFET - A V ERTICAL R EVOLUTION provements in CFET design. A novel backside power
A. Complementary FET (CFET) Transistors supply approach allowed the business to demonstrate
a significant decrease in size in their inverter circuits,
Complementary FET (CFET) technology represents a novel allowing interconnects to be made both above and
approach to transistor scaling, aiming to further enhance below the silicon surface.
performance and density as the industry pushes beyond the – The advancements made by Intel included a decrease
limitations of traditional architectures. in the distance between devices, an increase in the
• CFETs integrate n-type and p-type transistors vertically, number of nanosheets per device, and an optimized
stacking them to achieve a more compact design com- design for improved electrical properties.
pared to lateral configurations [18]. • Samsung’s Approach
• This vertical integration enables improved transistor den-
– Samsung demonstrated CFET prototypes with re-
sity, making CFETs a promising candidate for scaling duced contacted poly pitch (CPP) values of 48 and
beyond the 1nm node [5]. 45 nm, adopting a novel strategy. The business
Fig. 1. Moore’s Law timeline
TABLE I
C OMPARATIVE STUDY BETWEEN PLANA AND FINFETS
TABLE II
C OMPARATIVE STUDY BETWEEN FINFET AND GAAF ET
TABLE III
C OMPARATIVE STUDY BETWEEN GAAF ET AND CF ET
Feature FinFET CFET
Design Structure Fin-like structure with a vertical silicon fin. 3D-stacked structure, stacking nFETs and pFETs on top of each other.
Transistor Stacking Side-by-side on the same silicon wafer. 3D configuration, both types of transistors stacked in a single, integrated process.
- Higher transistor density.
Advantages of CFET over FinFET - - Simplified manufacturing process.
- Potential for improved performance.
Density Moderate transistor density. Aims for higher transistor density.
Integration Side-by-side transistors. 3D-stacked design simplifies manufacturing.
Performance Well-established, but potential limitations in future scaling. Potential for improved performance by reducing transistor distances.
Commercial Deployment In commercial use since around 2011. Still in the research and development phase, estimated commercial deployment in 7-10 years.
V. P OWERV IA T ECHNOLOGY
What it is: PowerVia is Intel’s backside power delivery
technology, which places power interconnects beneath the
silicon rather than above it.
Fig. 8. Evolution of CFET Why it matters: It frees up space for data intercon-
nects, reduces electrical resistance, and enables further scaling,
supporting continued advancements in chip performance and
jective of developing CFET technology, Intel, Samsung, and efficiency.
TSMC have all embraced unique approaches and advance-
• Backside Power Delivery: PowerVia technology by Intel
ments. While Samsung promotes electrical isolation, TSMC
relocates power interconnects to the underside of the
places emphasis on dielectric layer creation precision, Intel
silicon, freeing up space above for data interconnects and
concentrates on overall size reduction and backside power
enabling larger, less resistive power connections.
transmission. The cooperation and rivalry between these indus-
• Initial Setup: Transistors (FinFETs on the Intel 4 pro-
try titans promise to influence the development of electronic
cess) are formed at the silicon surface with deep, narrow
gadgets and computer systems in the future as the semicon-
holes, called nano-TSVs, filled with metal to support
ductor sector as a whole overcomes obstacles.
backside connectivity.
• Carrier Wafer Bonding and Flip: A blank carrier wafer
is bonded to the top interconnects, and the assembly
is flipped, allowing the original silicon surface to be
polished down until the ends of the nano-TSVs are
exposed.
• Backside Interconnect Formation: Chunky interconnect
layers are built up on the polished side, connecting to the
nano-TSVs to establish a robust power delivery network
on the chip’s underside.
• Resulting Chip Structure: The finished chip consists of
a support layer of silicon, data interconnects, a thin silicon
layer for transistors, and backside power interconnects
connecting to the package.
VI. 2D M ATERIALS
A. Overview
What it is: Materials like graphene and molybdenum
disulfide are atomically thin and can enable extremely small
transistors with superior electron mobility.