Scrubber Eng
Scrubber Eng
NOx NOx
TRS-HS
NSP
HES
STP TRS-F
VSC
TMC
TTS
SAF-A
Wet scrubber selection table You are advised to select an off-gas scrubber of the right type from the table
below in consideration of the gas type, concentration and exhaust flow rate.
Special (silane-containing) TTS type (for use at a very small NSP type
gas treatment airflow rate up to 300 L/min.) (for use only at a small airflow rate)
1
NSP STP
TRS-HS SYS
TRS-F
2
TRS-HStype(Vertical packed column) Detailed spec.: page 9
Features
❶Achieves a high removal ratio with small installation space requirements.
❷Incorporates new design features for easier maintenance.
❸Allows cross connection at the water inlet.
❹A standards-compliant drain pan is available as an option.
❺Features special filler material and a spray nozzle.
❻The performance is improved by seven to ten percent from earlier
models(※depending on the gas type).
❼The circulation tank is leak-free thanks to the bottom-integrated design.
Removal ratio
Gas name Molecular formula Scrubbing liquid Removal ratio
Hydrogen chloride HCI H2O 97% or more
Ammonia NH3 H2SO4 97% or more
* The scrubber may take care of gases and mists of other types as well.
(Note 1)The removal ratio for hydrogen chloride gas and ammonia gas is given assuming an original
concentration of 100 ppm (max.) for each gas.
(Note 2)Achieving the intended removal ratio requires the satisfaction of the specified fresh water
supply rate and scrubbing chemical liquid concentration.
(Note 3)For information about the removal of gas or mist of any other type, please contact us with
specific information about the gas.
■T
he FRP drain pan is lightweight and cost-efficient thanks to the
tank base integrated design
■T
he stainless steel drain pan(with FRP flake lining on the internal
surface)comes with an inclined bottom plate.
■T
he drain pan can be made HF-resistant.
■T
he FRP drain pan has the smooth internal surface of an FRP
molded product.
■T
he size can be changed upon request.
■C
omplies with the Water Pollution Control Law!
3
TRS-Flarge series(Vertical packed column) Detailed spec.: page 10
Features
❶Employs anti-corrosive molded FRP components.
❷Employs a spiral nozzle that resists clogging.
❸The time for on-site assembly work may be reduced(by installing
the pre-assembled unit so that the work at the site may be limited
to making connections)
Wet scrubber
material filler - PP; mist catcher - PVC
Standard color Scrubbing column and tank - Munsell N-7 Blower - Munsell 2.5G6/3
Standard motor Totally enclosed fan cooled motor for outdoor installation, 200/220 V, 50/60 Hz
Scrubbing column 600Pa
pressure loss
Machine noise level 73 to 76 dB (A) (a reference noise level at 1 m from the machine)
Allowable inlet 40℃ max. with standard design
temperature (80℃ max. with optional design feature)
Scrubbing
column pressure 1500 Pa max.
resistance
Removal ratio
Gas name Molecular formula Scrubbing liquid Removal ratio
Hydrogen chloride HCI H2O 90 % or more
Hydrogen fluoride HF H2O 90 % or more
Ammonia NH3 H2SO4 95 % or more
Chlorine gas Cl2 NaOH 90 % or more
Hydrogen sulfide H2S NaOH 95 % or more
Sulfuric acid mist H2SO4 H2O 90 % or more
Chromic acid mist CrO3 H2O 90 % or more
(Note 1)The removal ratios in the table are given assuming an original concentration of 100 ppm (max.)
for each given gas.
(Note 2)The removal ratio may vary with the fresh water supply rate when scrubbing is done with
water or with the NaOH concentration when scrubbing is done with NaOH.
(Note 3)A portion of HCl gas still remaining after the treatment may produce white smoke
at the exhaust outlet under certain conditions depending on factors such as the gas
concentration, outside temperature and humidity.
Features
❶Low Column height and compact
❷Both of Push and Suction are available
❸Employs anti-corrosive molded FRP components
Removal ratio
Gas name Molecular formula Scrubbing liquid Removal ratio
Hydrogen chloride HCI H2O 90 % or more
Hydrogen fluoride HF H2O 90 % or more
Ammonia NH3 H2SO4 90 % or more
Sulfur dioxide SO2 NaOH 90 % or more
Hydrogen sulfide H2S NaOH 90 % or more
(Note 1)The removal ratios in the table are given assuming an original concentration of 100 ppm (max.)
for each given gas.
(Note 2)The removal ratio may vary with the fresh water supply rate when scrubbing is done with water.
(Note 3)A portion of HCl gas still remaining after the treatment may produce white smoke at the exhaust
outlet under certain conditions depending on factors such as the gas concentration,
outside temperature and humidity.
4
HEStype(Hybrid scrubber with electrical dust collector) Detailed spec.: page 13
Features
❶Complete white smoke elimination and safe operation
❷Easy maintenance and inspection (almost maintenance free) and
energy conservation (few running costs other than electricity costs)
❸Can be used with an existing scrubber (*or used alone).
❹The space requirement is cut to one third from conventional
electrical dust collectors (thanks to a higher treatment speed).
❺Requires high-grade grounding work (Type A under Japanese laws)
apart from the installation work.
HES type standard common specifications
Upper compartment, electrode compartment, insulator compartment -
Standard material
C-FRP; mist catcher - PVC; conical unit and tank - FRP
Rotary scrubber - Munsell 2.5G6/3
Standard color Main unit (upper/electrode/insulator compartments), conical unit and
tank - Munsell N-7
Standard motor Totally enclosed fan cooled motor for outdoor installation, 200/220 V, 50/60 Hz
Scrubbing column 300Pa
pressure loss
Machine noise level 82 to 87 dB (A) (a reference noise level at 1 m from the machine)
Allowable inlet 40℃ max. with the standard design
temperature (80℃ max. with an optional design feature)
Removal ratio
Target substance Chemical formula Airflow velocity limit Removal ratio
H2SO4 1.5m/sec 97% or more
Acidic mist
HNO3 1.5m/sec 97% or more
NH4CI 1.0m/sec 97% or more
Acidic fume SO3 1.0m/sec 95 % or more
HCIO4 1.0m/sec 95 % or more
* The reference removal ratios are given assuming the target substance concentration of 50 mg/Nm3 at the inlet.
* For information about the relationship between the target substance concentration at the inlet and the
Flow sheet removal ratio, contact us.
Compact design integrating dust collector with a gas scrubber Advantages of low running costs and maintenance free
This is a compact hybrid scrubber system with an electrical dust There are few running cost than the electricity costs. The pressure loss
collector. It puts together a gas scrubber unit that is designed produced by the system is as small as 200 Pa or less. As a result, the
to remove harmful gases by sprinkling water onto blower impeller blower can run on little power and requires no regular part replacement.
blades with an electrical dust collector that is designed to The running costs are kept low. Thanks to the simple construction, the
remove white smoke particles by means of an electrical charge. system is free of troubles like clogging, and offers ease of maintenance
It achieves a treatment speed about three times faster than and inspection. The system employs discharge tubes (of the cross
conventional electrical dust collectors. The system is available needle type), reducing the corona start voltage by 50 % compared
with five airflow rate settings: 20, 50, 100, 150 and 200 m3/min. with discharge wires. Moreover, they are free from the risk of breakage
We also accept purchase of the electrical dust collector unit alone by sparks. Mist and fume adhering to the dust collecting plates are
without the rotary scrubber unit. Feel free to consult us if you have washed away by automatic intermittent sprinkling of water. The rectifier
a problem with the scrubber you already have, like white smoke is given a very compact design.
coming out from the exhaust outlet. Please note that Class A
grounding*1 is required for using this scrubber at your site. Cross needle type discharge tubes
The use of cross needle type discharge
*1 :Class A grounding [a term used in Japanese laws]: grounding electrodes eliminates the risk of
resistance of 10 ohms of less to be provided in the presence trouble caused by the burnup of wire.
of DC voltage in the 35 to 50 kV range (50 kV = 50,000 V). A Capable of forming a strong electric
field, they contribute to the compact
DC voltage of that level is in the category of "extra high voltage" design and the stable maintaining of
under Japanese laws. the electrical charge at a high voltage.
5
STPtype(Vertical packed column) Detailed spec.: page 14
Features
❶Ideal for the treatment of high concentration gases.
❷Accepts design customization.
❸Realizes high removal ratio (95% or higher).
STP type standard common specifications
Main unit and circulation tank - FRP;
Standard material
filler - PP; mist catcher - PVC
Standard color Scrubbing column and tank - Munsell N-7 Blower - Munsell 2.5G6/3
Wet scrubber
Standard motor Totally enclosed fan cooled motor for outdoor installation, 200/220 V, 50/60 Hz
Scrubbing column 600Pa
pressure loss
Machine noise level 73 to 76 dB (A) (a reference noise level at 1 m from the machine)
Allowable inlet 40℃ max. with standard design
temperature (80℃ max. with optional design feature)
Scrubbing
column pressure 1500 Pa max.
resistance
Removal ratio
Gas name Molecular formula Scrubbing liquid Removal ratio
Hydrogen chloride HCI H2O 95〜98%
Hydrogen fluoride HF H2O 95〜98%
Ammonia NH3 H2SO4 98〜99%
Chlorine gas Cl2 NaOH 95〜98%
Hydrogen sulfide H2S NaOH 98〜99%
Sulfuric acid mist H2SO4 H2O 95〜98%
Chromic acid mist CrO3 H2O 95〜98%
(Note 1)As the reference conditions, it is assumed that the gas temperature is in the normal range,
Athe airflow rate is not higher than the design flow rate, and the targeted gas concentration at
inlet is 50 to 500 ppm.
(Note 2)In ammonia gas removal, it is assumed that the scrubbing liquid maintains a pH value of 2.0 or lower.
(Note 3)In chlorine gas or hydrogen sulfide removal, it is assumed that the scrubbing liquid maintains a pH
value of 12.5 or higher.
(Note 4)In sulfuric acid mist and chromic acid mist removal, the target mist particle size is 20 μm or greater.
(Note 5)A portion of HCl gas still remaining after the treatment may produce white smoke at the outlet under
certain conditions depending on factors such as the gas concentration, outside temperature an humidity.
6
VSCtype(Venturi scrubber) Detailed spec.: page 15
Features
❶Removes particles at high efficiency.
❷Removes particles and harmful gases at the same time.
❸The mist catcher is washable.
Flow sheet
100
90
80
70
60
50
0 5 10 15 20 25 30
Targeted gas(examples)
SiH2Cl2 , dichlorosilane
SiHCl3 , trichlorosilane
HCl, hydrogen chloride
Removal ratio
Targeted gas Removal ratio
SiCl4, SiH2Cl2, HCl 5,000~10,000ppm 99.98%
SiHCl3, HCl 110,000~260,000ppm 99.99%
SiH2Cl2, SiHCl3, HCl 5,000~10,000ppm 99.98%
7
NSPtype(Net spray column) Detailed spec.: page 15
Features
❶Highly efficient scrubbing of high concentration gas at a low flow rate.
❷Easy maintenance.
The scrubber employs a nozzle design that resists clogging. The
independent mist catcher column facilitates maintenance.
❸Can handle special gas from semiconductor production containing
silica particles, etc.
Wet scrubber
Standard Main unit and circulation tank - FRP;
material net -- PVC
Standard Column - Munsell N-7
color Blower - Munsell 2.5G6/3
Standard motor Totally enclosed fan cooled motor for outdoor installation, 200/220 V, 50/60 Hz
Pressure loss Main unit - 400 Pa
from the main unit
Allowable inlet 40℃ max. with standard design
temperature (80℃ max. with optional design feature)
Flow sheet
Features
❶High separation efficiency.
❷Low pressure loss from the system.
❸Highly anti-corrosive design.
8
TRS-HStype(Vertical packed column)
Dimensions
Table of materials
No. Part name Material Quantity Remarks
1 Column unit FRP 1
2 Blower FRPP(Note 1) 1
3 Circulation pump G-PP(Note 2) 1
4 Circulation tank FRP 1
5 Overflow fitting FRP 1 40A, JIS10K flange
6 Drain fitting FRP 1 40A with PVC valve
7 Ball tap at the water inlet PVC 1 20A, JIS10K flange
8 Water inlet PVC 1 20A, JIS10K flange
9 Circulation tank inspection door FRP 1 300(W)x 400(L)
(Note 3)
10 Common base SS400 1 Hot-dip galvanized
11 Mist catcher removal door FRP 1
12 Filler loading door FRP 1 300W×400H
13 Filler removal door FRP 1 300W×400H
14 Name plate Acryl 1
(Note 1)In the case of the model with a turbo fan, the fan casing is made of FRP
and the impeller is made of G-PP (or FRP upon request).
(Note 2)PP is used in the case of TRS-HS50 or greater.
(Note 3)The dimensions are 400 (W) x 400 (L) in the case of TRS-HS120 or larger.
9
TRS-F large series(Vertical packed column)
Dimensions
Wet scrubber
Table of materials
№ Part name Material Quantity Remarks
1 Scrubbing column unit FRP 1
2 Blower FRP 1
3 Circulation pump PP 1
4 Circulation tank FRP 1
5 Overflow fitting FRP 1 50A JIS10K(Note 1)
6 Drain fitting FRP 1 50A with PVC valve(Note 1)
7 Ball tap at the water inlet FRP 1 20A JIS10K
8 Water inlet FRP 1 25A JIS10K
9 Circulation tank inspection door FRP 1 500 x 500(Note 2)
10 Base SS400 1 Hot-dip galvanized
Scrubbing column entrance
11 FRP 1 With PVC lid
inspection door
12 Filler removal door FRP 1 With PVC lid
Sprinkler pipe inspection door/
13 FRP 1 With PVC lid
filler loading door
14 Mist catcher removal door FRP 1 1000×230
15 Mist catcher inspection door FRP 1 With PVC lid
16 Pressure gauge - 1
17 Connecting duct PVC 1
(Note 1)65A in the case of TRS-F600 - F800
(Note 2)400 x 450 in the case of TRS-F200 and F250
10
SYS-Dtype(Horizontal packed column)
Dimensions
Table of materials
№ Part name Material Quantity Remarks
1 Scrubbing column unit FRP 1
2 Blower FRP 1
3 Circulation pump PP 1
4 Circulation tank FRP 1
5 Overflow fitting FRP 1 40A JIS10kF
6 Drain fitting FRP 1 40A with PVC valve
7 Ball tap at the water inlet FRP 1 20A JIS10kF
8 Water inlet FRP 1 25A JIS10kF
9 Circulation tank inspection door FRP 1
10 Common base FRP 1 Hot-dip galvanized
11 Sprinkler pipe inspection door FRP 1 With PVC lid
12 Mist catcher removal door FRP 1
13 Filler removal door FRP 1
11
SYS-Stype(Horizontal packed column)
Dimensions
Wet scrubber
Table of materials
№ Part name Material Quantity Remarks
1 Scrubbing column unit FRP 1
2 Blower FRP 1
3 Circulation pump PP 1
4 Circulation tank FRP 1
5 Overflow fitting FRP 1 40A JIS10kF
6 Drain fitting FRP 1 40A with PVC valve
7 Ball tap at the water inlet FRP 1 20A JIS10kF
8 Water inlet FRP 1 25A JIS10kF
9 Circulation tank inspection door FRP 1
10 Common base FRP 1 Hot-dip galvanized
11 Sprinkler pipe inspection door FRP 1 With PVC lid
12 Mist catcher inspection door FRP 1
13 Filler removal door FRP 1
14 Ventilator FRP 1 Options
12
HEStype(Hybrid scrubber with electrical dust collector)
Dimensions
Table of materials
№ Part name Material Quantity Remarks
1 Rotary scrubber FRP 1
2 Conical unit FRP 1
3 Mist catcher PVC 1
4 Upper compartment C-FRP 1
5 Insulator compartment C-FRP 2
6 Electrode compartment C-FRP 1
7 Discharge tube SUS316L (Note 1)
8 Bus duct C-FRP 1
9 Bus bar SGP 1
10 Lower tank FRP 1
(Note 1)The number of discharge tubes depends on the airflow rate setting.
(Note 1)The standard material for discharge tubes is SUS316L.
If you are interested in the choice of SUS304 or Ti as discharge
tube material, consult us.
HES-20 〜 20 〜 32 40 × 22 35 4.3
MAX
HES-50 21 〜 35 33 〜 55 40 × 22 52 4.3
8.5㎥ /min
HES-100 36 〜 85 56 〜 125 40 × 55 70 × 1.0 1.2 6.1
MAX
HES-150 86 〜 115 126 〜 175 40 × 55 87 6.1
5.7kPa
HES-200 116 〜 150 176 〜 230 40 × 55 87 6.1
13
STPtype(Vertical packed column)
Dimensions
Wet scrubber
Table of materials
№ Part name Material Quantity Remarks
1 Scrubbing column unit FRP 1
2 Blower FRP 1
3 Circulation pump PP 1
4 Circulation tank FRP 1
5 Overflow fitting FRP 1 40A JIS10kF
6 Drain fitting FRP 1 40A with PVC valve
7 Ball tap at the water inlet FRP 1 20A JIS10kF
8 Water inlet FRP 1 25A JIS10kF
9 Circulation tank inspection door FRP 1
10 Circulation tank base SS400 1 Hot-dip galvanized
Sprinkler pipe inspection door/
11 FRP 1 With PVC lid
filler loading door
12 Mist catcher inspection door FRP 1 With PVC lid
13 Filler removal door FRP 1 With PVC lid
14 Pressure gauge - 1
14
VSCtype(Venturi scrubber)
Dimensions Dimensions (unit: mm)
Model A B C D φE φF φG
VSC-20 1570 1800 2650 3335 200 500 200
VSC-30 1570 1800 3225 3335 250 500 250
VSC-40 1620 2000 3013 3335 250 500 250
VSC-60 1720 2000 3588 3335 300 650 300
VSC-80 2120 2000 3950 3335 350 750 350
VSC-100 2320 2000 4300 3535 400 850 400
VSC-120 2420 2100 4925 3535 450 850 450
VSC-150 2520 2200 5550 3535 500 1050 500
VSC-180 2620 2300 5700 3535 550 1050 550
VSC-220 2820 2500 6375 3635 600 1200 600
VSC-270 2920 2800 6525 3635 650 1350 650
VSC-300 3120 2920 7150 3635 700 1450 700
Table of materials
№ Part name Material Quantity Remarks
1 Main unit FRP 1
2 Circulation pump PP 1
3 Circulation tank FRP 1
4 Overflow fitting FRP 1 50A JIS10kF
5 Drain fitting FRP 1 50A with PVC valve
6 Ball tap at the water inlet FRP 1 20A JIS10kF
7 Water inlet FRP 1 25A JIS10kF
8 Circulation tank inspection door FRP 1
9 Common base SS400 1 Hot-dip galvanized
10 Sprinkler pipe inspection door FRP 1
11 Mist catcher removal door FRP 2
Table of materials
№ Part name Material Quantity Remarks
1 Main unit FRP 1
2 Circulation pump PP 1
3 Circulation tank FRP 1
4 Overflow fitting FRP 1 40A JIS10kF
5 Drain fitting FRP 1 40A with PVC valve
6 Water inlet FRP 1 25A JIS10kF
7 Circulation tank inspection door FRP 1
8 Common base SS400 1 Hot-dip galvanized
Sprinkler pipe entrance /
9 PVC 8
inspection door
10 Mist trap FRP 1
15
TMC-S/Wtype (Mist separator)
Dimensions
Table of materials
№ Part name Material Quantity Remarks
1 Housing FRP 1
Wet scrubber
The quantity is two in the case of
Scrubbing
4 PVC 1 Models 100 through 300, three in the
water inlet
case of Models 450 through 800.
The quantity is two in the case of
5 Drain fitting FRP 1
Models 600 and 800.
* Option: stand(made of SS400)
* * The element is split into two parts with Models 200 and 300, into four
parts with Models 450 and 600, into six parts with Model 800.
Dimensions
Table of materials
№ Part name Material Quantity Remarks
1 Housing FRP 1
16
SAF-Atype(Activated charcoal filter column) Detailed spec.: page 18
Features
❶Uses easily replaceable cartridge type filter.
❷Uses TEXELCOAL as an absorber, capable of removing composite
odor by its use alone.
❸The low pressure loss from the unit minimizes the power
consumed by the blower.
Flow sheet
Filter photo
17
SAF-Atype(Activated charcoal filter column)
Dimensions
Wet scrubber
Table of materials
№ Part name Material Quantity Remarks
1 Activated charcoal column unit FRP 1
2 Blower FRP 1
3 Drain fitting FRP 1
4 Common base SS400 1 Hot-dip galvanized
5 Mist catcher PVC 1 MC-100
6 Mist catcher removal door FRP 1
Including activated
7 SA filter PP 2 sets
charcoal
SAF-A4D - A144D
(sirocco fan series)
standard specifications
Blower
Number of SA filter units Weight
Model Airflow rate Static pressure Motor
Number × stacks Model (kg)
(㎥ /min) (kPa) (kW)
SAF-A4D 4×2 CES101 4 0.75 0.4 160
SAF-A9D 9×2 CES101 9 0.75 0.75 200
SAF-A16D 16 × 2 CES101 16 0.75 0.75 260
Deodorizing system
SAF-A25D 25 × 2 CES101 25 0.75 1.5 370
SAF-A36D 36 × 2 CES101 36 0.75 1.5 450
SAF-A50D 50 × 2 CES151 50 0.75 2.2 730
SAF-A72D 72 × 2 CES201 72 0.75 2.2 960
SAF-A96D 96 × 2 CES201 96 0.75 3.7 1150
SAF-A144D 144 × 2 NSF302 144 0.75 3.7 1770
18
Options
Damper Silencer
19
Implementation examples with photos
20
Technical information
21
22