Data Sheet MEDFAENm

DFA Compact Capsule Filters for

the Microelectronics Industry

Description

The DFA filter assembly is a handy, easy-to-use and cost-

effective capsule filter designed for relatively low flow rates
and small volume batch processes.

Flexibility in filter media and connector options allow for a wide

range of general industry applications.

Features and Benefits

• Wide variety of media materials
(PTFE, nylon 6,6, hydrophilic PVDF, HDPE, polypropylene)
• Broad range of connector options
(Swagelok1, Pillarfitting2, NPT, flare style)
DFA1
• All-polymeric construction
• O-ring free design
• Allows for easy customization of filtration systems to accom-
modate various flow rates and removal rating requirements
• Able to vent and drain quickly and easily
• Low hold-up volume

1 Trademark of Swagelok Co.

2 Trademark of Nippon Pillar Packing Co., Ltd.

Specifications DFA4201 DFA6402

Emflon® Ultipor ® N66 Ultipleat ® P-Nylon Fluorodyne®

Materials Filter Medium PTFE (hydrophobic) Nylon 6,6 (hydrophilic) Nylon 6,6 (hydrophilic) PVDF (hydrophilic)
Other Components Polypropylene Polyester, Polypropylene HDPE, Polypropylene Polypropylene

Removal Ratings 0.05 μm, 0.1 μm, 0.1 μm, 0.2 μm 10 nm, 20 nm, 40 nm, 0.1 μm, 0.2 μm
0.2 μm, 0.45 μm 0.15 μm
Maximum operating temperature 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F
Maximum Liquid 0.49 MPaG 0.49 MPaG 0.49 MPaG 0.49 MPaG
operating pressure
( 38 ˚C / 100 ˚F ) Gas 0.34 MPaG 0.34 MPaG 0.34 MPaG 0.34 MPaG
Maximum differential 0.34 MPa 0.34 MPa 0.34 MPa 0.34 MPa
pressure ( 38 ˚C / 100 ˚F )
Main applications Vent air Photoresist Photoresist Ultrapure DI Water
Process gas Developer Developer Aqueous chemicals
Organic solvents DI Water DI Water
Minimum order quantity 6 pcs 6 pcs 6 pcs 6 pcs
Specifications
P Emflon® PE-Kleen HDC® II Profile® Star

Materials Filter Medium PTFE (hydrophobic) HDPE Polypropylene Polypropylene

Other Components HDPE, Polypropylene HDPE, Polypropylene Polypropylene Polypropylene
Removal Ratings 0.05 μm, 3
5 nm , 10 nm, 30 nm 0.6 μm, 1.2 μm, 2.5 μm, 4.5 μm 0.8 μm, 1 μm
0.1 μm, 0.2 μm 0.05 μm, 1 μm 6 μm, 10 μm, 20 μm, 40 μm, 70 μm 1.5 μm, 3 μm, 5 μm
Maximum operating temperature 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F 38 ˚C / 100 ˚F
Maximum Liquid 0.49 MPaG 0.49 MPaG 0.49 MPaG 0.49 MPaG
operating pressure
( 38 ˚C / 100 ˚F ) Gas 0.34 MPaG 0.34 MPaG 0.34 MPaG 0.34 MPaG
Maximum differential 0.34 MPa 0.34 MPa 0.34 MPa 0.34 MPa
pressure ( 38 ˚C / 100 ˚F )
Main applications Photoresist Photoresist Acids, bases Suspensions
Organic solvents Organic solvents DI Water High viscosity fluids
Chemicals Chemicals Solvents Coatings
Minimum order quantity 6 pcs 6 pcs 6 pcs 6 pcs
3 5 nm is available for DFA1, DFA2 and DFA6402.

Configuration and Dimensions

DFA1, 2 Series
DFA1 SW44/84M DFA1 NP64M/84M DFA1 NP64

＊
DFA2 SW84 DFA2 NP124M DFA2 FL6/64

＊
Without vent / drain.

DFA3201, 4201, 5301, 6402 Series

DFA3201 DFA4201 DFA5301 DFA6402
Part Numbers / Ordering Information (DFA1, 2 Series)

Table 3 : Connector options

DFA 1 2 3
Inlet / Outlet Vent / Drain
Code
Size Connections Size Connections
Table 1 : Configurations
DFA1 SW44 1/4" Swagelok 1/4" Swagelok
1 for low flow rates DFA1 SW84M 8 mm Swagelok 4 mm Swagelok
2 for medium flow rates DFA1 NP64 3/8" Pillarfitting 4 mm Pillarfitting
DFA1 NP64M 6 mm Pillarfitting 4 mm Pillarfitting
DFA1 NP64MR4 6 mm Pillarfitting 4 mm Pillarfitting
DFA1 NP84M 8 mm Pillarfitting 4 mm Pillarfitting
DFA1 NP84MR4 8 mm Pillarfitting 4 mm Pillarfitting

DFA2 FL6 3/8" Flare style nil nil

DFA2 FL64 3/8" Flare style 1/4" Flare style
DFA2 NP64 3/8" Pillarfitting 1/4" Pillarfitting
DFA2 NP84M 8 mm Pillarfitting 4 mm Pillarfitting
DFA2 NP124M 12 mm Pillarfitting 4 mm Pillarfitting
DFA2 NP124MR4 12 mm Pillarfitting 4 mm Pillarfitting
DFA2 SW84 1/2" Swagelok 1/4" Swagelok
4 R option is for repeat order products without sleeves and nuts on inlet/outlet.
5 Contact Pall for other fitting options.

Table 2 : Options for filter media and removal ratings6

Emflon 8 Ultipor N66 Ultipleat P-Nylon Fluorodyne P Emflon PE-Kleen HDC II 7 Profile Star 7

Code Removal Code Removal Code Removal Code Removal Code Removal Code Removal Code Removal Code Removal
ratings ratings ratings ratings ratings ratings ratings ratings

FDE 8 0.05 μm NIEY 0.1 μm AN01E 10 nm V001EY 0.1 μm UFDE 0.05 μm UG5E 5 nm J006 7 0.6 μm A008 7 0.8 μm
FTE 8 0.1 μm NAEY 0.2 μm ANME 20 nm V002EY 0.2 μm UFTE 0.1 μm UG001E 10 nm J012 7 1.2 μm A010 7 1 μm
FRE 8 0.2 μm ANDE 40 nm UFRE 0.2 μm UG003E 30 nm J025 7 2.5 μm A015 7 1.5 μm
AN15E 0.15 μm UG005E 0.05 μm J045 7 4.5 μm A030 7 3 μm
UG100E 1 μm J060 7 6 μm A050 7 5 μm
J100 7 10 μm
J200 7 20 μm
J400 7 40 μm
J700 7 70 μm

6 The E in the the part number stands for an electronic grade product. < notes > Part numbers in combination with all codes are not always available.
7 Extra rinsing option (F) is available for HDC II and Profile Star filters. Please contact Pall for part number availability.
8 S-grade option is treated to have very low initial extractables.

Minimum order quantity and packaging unit 6 pcs

Representative example part numbers

DFA1FRESSW44 DFA1UNIENP64M DFA1NAEYSW44

DFA1FTESNP64M DFA1UNIENP84M DFA1NIEYNP64M
DFA1FTESNP84M DFA2UNIEFL64 DFA1NIEYNP84M
DFA1FDESNP64M DFA1UNDENP64M DFA1NIEYSW44
DFA1FDESNP84M DFA1UNDNP84M
DFA1V001EYSW44
DFA2UNDEFL64
DFA1ANDENP64M
DFA2UNDENP64R DFA2UG001EFL64
DFA2ANDEFL64
DFA2UNDENP84M
DFA2ANDENP64R
DFA2UNMENP84M
DFA1ANMENP64M
DFA2UNMENP64R
DFA2ANMENP64R
DFA2NUMEFL64
Part Numbers / Ordering Information (DFA3201, 4201, 5301, 6402 Series)

DFA 4 5

Table 4 : Connector options

Fittings Inlet / Outlet Vent / Drain

Code Size Connections Size Connections

3201 3/8" Hose 1/8" NPT male

4201 1/4" NPT male 1/8" NPT male
5301 6 mm Swagelok 4 mm Swagelok
6402 3/8" Swagelok 1/4" Swagelok

Table 5 : Options for filter media and removal ratings9

Emflon 11 Ultipor N66 Ultipleat P-Nylon Fluorodyne P Emflon PE-Kleen HDC II 10 Profile Star 10

Code Removal Code Removal Code Removal Code Removal Removal Removal Code Removal Code Removal
ratings ratings ratings ratings Code ratings Code ratings ratings ratings

FDE 11 0.05 μm NIEY 0.1 μm AN01E 10 nm V001EY 0.1 μm UFDE 0.05 μm UG5E 5 nm J006 10 0.6 μm A008 10 0.8 μm
FTE 11 0.1 μm NAEY 0.2 μm ANME 20 nm V002EY 0.2 μm UFTE 0.1 μm UG001E 10 nm J012 10 1.2 μm A010 10 1 μm
FRE 11 0.2 μm ANDE 40 nm UFRE 0.2 μm UG003E 30 nm J025 10 2.5 μm A015 10 1.5 μm
FXE 11 0.45 μm AN15E 0.15 μm UG005E 0.05 μm J045 10 4.5 μm A030 10 3 μm
UG100E 1 μm J060 10 6 μm A050 10 5 μm
J100 10 10 μm
J200 10 20 μm
J400 10 40 μm
J700 10 70 μm

9 The E in the the part number stands for an electronic grade product. < notes > Part numbers in combination with all codes are not always available.
10 Extra rinsing option (F) is available for HDC II and Profile Star. Please contact Pall for the part number availability.
11 S-grade option is treated to have very low initial extractable.
12 There will be an indication as P in for 4201J012, 4201J025 and DFA3201,
however the performance is unchanged.

Minimum order quantity and packaging unit 6 pcs

Representative example part numbers

DFA4201FRES DFA4201UNAE DFA6402NAEY

DFA4201FTES DFA4201UNIE DFA6402NIEY
DFA6402FTES DFA6402UNAE
DFA4201V002EY
DFA4201FDES DFA6402UNIE
DFA4201V001EY
DFA6402FDE DFA6402UNDE
DFA6402FDES DFA6402UG100E
DFA4201UG015E
DFA6402ANDE
DFA4201UG007E
DFA6402ANME
DFA6402UG007E
DFA4201UG005E
DFA6402UG005E
DFA6402UG003E
Typical Flow Charcteristics – 1 cP fluid, 20 ºC
DFA4201 DFA1 SW44
Typical Flow Charcteristics – 1 cP fluid, 20 ºC
DFA4201 DFA1 SW44
Typical Flow Charcteristics – 1 cP fluid, 20 ºC
DFA6402, DFA2
Microelectronics
25 Harbor Park Drive Visit us on the Web at microelectronics.pall.com
Port Washington, NY 11050
+1 800 360 7255 toll free US Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/corporate_contact.asp.
+1 516 484 3600 telephone
+1 516 801 9711 fax Because of technological developments related to the products, systems, and/or services
described herein, the data and procedures are subject to change without notice. Please con-
Nihon Pall Ltd. sult your Pall representative or visit www.pall.com to verify that this information remains valid.
6-5-1, Nishishinjuku, © Copyright 2019, Pall Corporation. Pall, , Emflon, Ultipor, Ultipeat, Fluorodyne, HDC and Profile are trademarks of
Shinjuku-ku Pall Corporation.
Tokyo 163-1325 Japan ® Indicates a Pall trademark registered in the USA. is a service mark of Pall Corporation.
+81 3 6901 5700 telephone
+81 3 5322 2109 fax

MEDFAENm June 2019