Digital Scale and DRO System

Linear Encoder
NC Linear Scale Systems

Catalog No. E13005(2)

Linear Encoders for

Numerical Motion/Position Control Systems
Integrated Production System for...
The Utsunomiya Operations Kiyohara Production Department presents a
complete manufacturing environment where linear encoders for Mitutoyo
measuring equipment as well as linear scales for the general market are
produced. The whole production process including the manufacturing of
glass scales for linear encoders, assembly of electronic components and
products, and inspection is performed here. Conditions are continuously
being optimized for further enhanced scale accuracy and even higher
quality. The underground research laboratory at the Kiyohara Production
Department has been specially designed and constructed to provide the
environment required for the high-level scale graduation process as well as Sputtering equipment
for high-accuracy measurements.
Located on a solid bedrock foundation nine meters underground, the Topsoil
facility maintains a stable and tightly controlled environment all year Styrofoam insulation
Bituminous waterproofing
Concrete slabs
round. Temperature and humidity fluctuations as well as external Space above dropped ceiling
Laboratory space
vibrations are kept to an absolute minimum. In this laboratory, we Vibration-proof foundation
produce master scales, perform accuracy evaluation, and pursue various
kinds of research that provide the underpinning for the accuracy and
quality of our linear scales. Underground research facility

Linear Encoder Accuracy

Calibration Technology
To assure high accuracy in linear encoders, a highly reliable calibration system is indispensable.
The ultra-precision length measuring machine developed by Mitutoyo and installed in the
underground research facility at the Kiyohara Production Department benefits from the highly
stable underground environment. In addition, the light path of the laser interferometer used to
measure lengths is placed in a vacuum to further eliminate any causes of uncertainty. The result is a
linear encoder calibration system of world-leading precision, internationally recognized by mutual
interlaboratory comparisons. In recognition of the high technological standard realized by this
system, it received the Best Paper Award of the Japan Society of Precision Engineering in 2004 and
the FA Paper Award of the FANUC FA and Robot Foundation in 2005.
Ultra-precision length measuring machine with
vacuum laser interferometer

Linear Scales from Mitutoyo are traceable to national standards

National Institute of Advanced Industrial
Science and Technology
National standard National Metrology Institute of Japan
Universal Time Coordinated atomic clock
and optical frequency comb generator

Mitutoyo Utsunomiya Calibration Center

(JCSS Accredited Calibration Laboratory No.0031)
Secondary standard
633nm molecular iodine absorption line length measurement
machine with wavelength stabilized He-Ne laser

Mitutoyo Utsunomiya Operations

Working standard 633nm length measurement machine
with wavelength stabilized He-Ne laser
Length measuring machine with optical interferometer (for scales)

Instrumental error

Linear Scale

Linear Scale Traceability System Chart

2
 NC Linear Scale Systems

Application———————————————————————— 3 Absolute Scale Unit— ———————————————— 40, 41

NC Linear Scale Systems

Detection Principle——————————————————— 4, 5 ABS ST700 Compact Type Series———— 42–47
ABS ST1300————————————————— 48-53
NC Linear Scale Systems – System Diagram— —————— 6

System Diagram
ABS AT1100————————————————— 54-59

Applications
NC Linear Scale Systems – Overview——————————— 7
ABS AT500 Series (0.001μm/0.005μm/0.01μm)——— 60–71
Separate Type ST Series ABS AT500 Series (0.05μm)————————— 72–79
ST36— ——————————————————— 8–11 Discontinued models and succession models —————— 80
ST46-EZA— ————————————————12– 22 specification compatibility tables

Assembly Type AT Series Separate Type ST Series

Assembly Type AT Series Handling linear scales— ————————————————— 81
AT402E———————————————————23–27 AT scale air supply—————————————————— 82, 83
AT211— ——————————————————28–33
Technical Information— ————————————————— 84
AT203— —————————————————— 34–37
AT217-TL/AT217-TL-B— ————————— 38–39

Linear Scale is a registered trademark of Mitutoyo Corporation for its linear encoder products.

Applications
AT Series - Reference
Semiconductor fabrication equipment Various NC machine tools

Interface Unit
Dicing saw positioning High-precision fully closed loop control
Workpiece Cutting blade
Sliding table

Absolute Scale Unit

Base
Linear scale
Linear scales

ST Series - Reference
Lithography equipment Electronic component inserter
Scanning stage positioning High-speed, high-precision mounting of electronic
components Linear scale

Linear scales
Technical Information

ST Series - Reference
Electron microscope FPD inspection equipment
Mask observation, circuit pattern measurement, Defect inspection and repair position
defect inspection, etc. determination Linear scales
Electron beam
Silicon wafer
CCD camera
XY table
(with integrated linear scales) Work chamber

Monitor

XYテーブル駆動方式
Vacuum pump

3
 Detection Principle
NC Linear Scale Systems

Detection principle of the transmission photoelectric scale

(Assembly Type Linear Scale)
System Diagram
Applications

Collimator lens Glass scale

Scale gratings Light-emitting diode Light-receiving device
(20µm graduation pitch) (LED) (Photodiode array)
Light-receiving device 20µm
(Photodiode array)

2-phase sinusoidal signals

Interpolation circuit

Light-emitting diode
(LED) Collimator lens Glass scale Resolution
2-phase square wave signals
The assembly type linear scale uses a graduated glass scale as measuring length reference. A light-emitting diode
(LED) and light-receiving device mounted on opposite sides of the scale serve to detect produce and detect changes in
light intensity and output a value representing the displacement magnitude. Because the change in transmitted light
intensity of the glass scale is converted into an electrical signal, the setup is called a transmission photoelectric system.
A parallel light beam generated by the LED and collimator lens is directed through the scale gratings. A light-receiving
device consisting of a photodiode array on the other side of the scale receives the parallel light beam and produces
interference fringes with a cycle that corresponds to the scale grating pitch. When the glass scale is displaced in the
measuring direction, the interference fringes shift, and a 2-phase sinusoidal signal with a cycle that corresponds to the
20µm pitch of the scale gratings is output by the light-receiving device.
An interpolation circuit electrically divides the output sinusoidal signal, resulting in a square wave (pulse) signal
representing the limiting resolution.

Detection principle of the reflective photoelectric scale (ST36, etc.)

Light-emitting diode
(LEDy)
Light-receiving device
(Photodiode array)

Main scale
Collimator lens
Index scale

The separate type photoelectric linear scale also uses a graduated glass scale as measuring length reference. An LED
and light-receiving device together with gratings on an index scale produce and detect changes in light intensity and
output a value representing the displacement magnitude. Because the change in reflected light intensity of the glass
scale is converted into an electrical signal, the setup is called a reflective type photoelectric system.
A parallel light beam generated by the LED and collimator lens is directed onto the index scale gratings and the glass
scale gratings. The light reflected from the scale gratings produces interference fringes on the photodiode array of the
light-receiving device. When the glass scale is displaced in the measuring direction, the interference fringes shift, and a
sinusoidal signal with a cycle that is the same as, or one-half of, the scale grating pitch is output by the light-receiving
device.

4
 NC Linear Scale Systems
Detection principle of electromagnetic induction system (ABS ST700, ABS AT1100)

System Diagram
Basic operation principle of
electromagnetic induction system
Electromagnetic induction is a phenomenon that occurs, for

Applications
Coil A L I1
1 example, when two coils are arranged facing each other, as
∼ shown in Figure 1, and a time-varying current (I1) is passed
I2 through coil A. This will cause an induced current (I2) to flow
V2 V in coil B, in a direction that cancels out the magnetic field.
L2 The electromagnetic induction type linear scale uses this
Coil B phenomenon to convert a displacement magnitude into
an electrical signal. The operational principle of the sensor
[Figure 1] Electromagnetic induction system
encoder principle section is shown in Figure 2. A number of scale coils are
When a current (I1) that changes over time is passed through coil A, a arranged with precise spacing on the main scale. The
magnetic flux is created in the vicinity of coil A. moveable sensor section that detects displacement carries
This causes an inductive current (I2) to flow in coil B, in a direction that
cancels out the magnetic field. an exciter coil and a corresponding detector coil. A current
Magnetic permeability between coils is largely identical in air, water, or oil. is sent through the exciter coil, thereby creating a magnetic
flux that induces a current in the facing scale coil. The
Electromagnetic induction type sensor has magnetic flux created in turn by that current induces a
excellent water resistance and oil resistance.
P current in the facing detector coil. The degree of inductive
Voltage (V) coupling between the coils changes according to the
displacement magnitude of the sensor section, allowing a
Displace- Sensor Displacement magnitude
ment section
sinusoidal signal with a cycle that corresponds to the pitch
Multi-track design allows
Exciter coil
Scale coil configuration of absolute encoder of the scale coils to be obtained.
By using an electrical circuit that performs interpolation
Coils arranged at constant
pitch on scale
(division) of this sinusoidal signal, displacement can be
P measured with fine resolution.
[Figure 2] Electromagnetic induction scale
detection principle

Telecentric Principle (ABS ST1300)

Reflective photoelectric linear encoder equipped with two-sided telecentric imaging
Light-receiving device
Light-receiving device

Z Two-sided telecentric
Light source + optical system
X Two-sided telecentric optical
system Z
Y
X
Scale Deep focal depth
Scale
Wide imaging range
Detection Principle
・The scale grating is captured as an image with the two-sided telecentric optical system and its displacement is detected with a light-
receiving device.
Features
・Adoption of a two-sided telecentric imaging optical system ⇒ Improves the robustness of the encoder.
 • The deep focal depth ⇒ Extends allowance for gap variation (scale waviness and stage orientation variation, detector mounting
  variation, etc.).
 • The wide imaging range ⇒ Extends allowance for contamination, slight damage, etc. on the scale.

5
 NC Linear Scale Systems – System Diagram
NC Linear Scale Systems

Scale Unit
System Diagram

Incremental scale unit

Applications

Separate Type

With square wave signal / sinusoidal siqnal simultaneous output

High-accuracy type : ST36*

*1Vp-p differential sinusoidal signal output types also available.
Please contact us for details.
Compact type : ST46-EZA

Assembly Type

With sinusoidal siqnal output

General type : AT402E *

*1Vp-p differential type

With square-wave signal output

Slim spar and high speed type : AT211

Standard type : AT203

Slim type : AT217-TL/AT217-TL-B

*Please consult us regarding manufacture of 1Vp-p differential sinusoidal siqnal
output types.

Absolute scale unit

Separate Type High environmental resistance type : ABS ST700 Compact

High resolution type : ABS ST1300

Slim spar type : ABS AT500

Assembly Type
Standard type : ABS AT1100

DRO Scale System AT103/AT112-F/AT113/AT116/AT715**

**Refer to the Linear Scale DRO Systems (Catalog No. E13000).

6
NC Linear Scale Systems – Overview
: Compatible (with limitations)

Scale name Reference Absolute Output signal cycle Signal unit No. of divisions Resolution Maximum Maximum Minimum edge

NC Linear Scale Systems

See page
(Code) point function of sinusoidal signal range response speed*1 interval*2
400 0.01μm 70mm/s

System Diagram
ST36B − 200 0.02μm 150mm/s
ST36C

Applications
Yes No 4μm (PSU-200) 3000mm 125ns P8 - 11
(ST36A) 80 0.05μm 260mm/s
(ST36D)
40 0.1μm 720mm/s
Separate Type Linear Scales

400 0.05μm 450mm/s

200 0.1μm 900mm/s
ST46-EZA Yes No 20μm − 3000mm 100ns P12 - 22
40 0.5μm 2600mm/s
20 1μm 2600mm/s

ABS ST700 − Yes − − − 0.1μm 6000mm 5000mm/s − P42 - 47

Compact type

0.001μm
ABS ST1300 − Yes − − − 12000mm 8m/s*3 − P48 - 53
0.01μm

1Vp-p differential P23 - 27

AT402E Yes 20μm − − − 3040mm 2000mm/s sine wave

200 0.1μm 710mm/s

100 0.2μm 1400mm/s 125ns
40 0.5μm
AT211 Yes No − − 1500mm P28 - 33
Assembly Type Linear Scales

20 1μm 250ns
2000mm/s
8 2.5μm 500ns
4 5μm 1000ns
200 0.1μm 333mm/s
AT203 Yes No − − 40 0.5μm 6000mm 1833mm/s 250ns P34 - 37
20 1μm 2000mm/s
AT217-TL/ Yes No 20μm − 20 1μm 1500mm 833mm/s 800ns P38 - 39
AT217-TL-B
− 0.005μm
ABS AT500*5 − Yes − − 2200mm 2500mm/s*4 − P60 - 79
− 0.05μm
ABS AT1100 − Yes − − − 0.05μm 3040mm 3000mm/s − P54 - 59
*1 Maximum response speed of pulse output type uses the logical value (IC specification) with a margin of about 10%.
*2 For information on minimum edge interval, see "Explanation of Terms" on page 86.
The guaranteed value for minimum edge interval is +0%, -10%.
For some models, values other than shown above can also be selected.
*3 It depends on the interface.
*4 Maximum response speed of H type with 0.005μm resolution is 1200mm/s.
*5 Resolution and maximum response speed of Siemens IF are different from the above table.

7
 Separate Type ST Series
Sinusoidal siqnal & Square-Wave Signal Output Scale Unit (High Accuracy Type)

ST36
Separate Type ST Series

Features
• High accuracy type, 0.5μm class (effective range up to 300mm)
• Has a thinner detector head (thickness 11.5mm).
• The maximum effective measurement length of 3000mm enables use on large machines.
• 4 different types available for each signal output specification.
ST36

• LED display function for indicating signal errors.

Specifications
Item Code ST36A ST36B ST36C ST36D
Detection method Reflective photoelectric linear encoder
Main scale grating pitch 8μm
Signal output pitch 4μm
2-phase square wave signals 2-phase square wave signals
Output signal 2-phase sinusoidal signals 1Vp-p differential sinusoidal siqnals
(reset input type) 2-phase sinusoidal signals
Effective range 10 - 3000mm
Effective range 10 to 300mm: ±0.5 µm
Effective range 350 to 500mm: ±1.0µm
Accuracy (20°C)
Effective range 600 to 1000mm: ±2.0µm
Effective range 1100 to 3000mm: ±2.0µm/m
Thermal expansion coefficient ≈ 8 x10-6 / K
Maximum response speed 1200mm/s (with sinusoidal siqnals output) (For 2-phase square wave signal types, see page 10)
Scale reference point* With scale reference point (50mm pitch, 10 to 80mm: Center point)
Power supply 5VDC±5%
Maximum current consumption 120mA 250mA 190mA
Operating temperature/humidity 0 to 40°C, 20 to 80% RH (no condensation)
Storage temperature/humidity -20 to 60°C, 20 to 80%RH (no condensation)
Alarm indication A scale alarm is indicated with an LED on the I/F box
*Maximum speed for scale reference point detection is 20mm/s.

Parts Alarm reset transmission/reception

Main scale (10 to 80) signal circuit (B Type)

I/F box side Control device side

For a photocoupler For a relay
Main scale (100 to 3000)
AL (Anode)

Detector head AL (Cathode)

Reset input
Head cable Connect the alarm reset input circuit so that the current is 3 to 10mA. Also, the
device has an internal resistor (1.2kΩ), so by applying 5 to 12V with a pulse width
Scale retaining spring of at least 10ms across AL (anode)-AL (cathode), the alarm can be reset. When
applying 12V or more, add an external resistance to limit the current to within the
Output connector range stated above.
I/F Box
(included)

8
Output signal waveform
• 2-phase sinusoidal signals (Type A, C) • 1Vp-p differential sinusoidal siqnals (Type D)
Output signal pitch = 4µm = 360°
Phase A Vref

0.2-0.6V
VPP
Phase A Vref

Output signal pitch 4µm

Separate Type ST Series

Phase B Vref

0.2-0.6V
VPP
Phase XA Vref

Phase difference 90° VPP = 2V Vref =˙ . 2.5V

(Typ)

ST36
• Scale reference point 200±100µm

0.2-0.6V
Phase B Vref
VOH = 2.4V min.
PZ VOL = 0.4V max. Phase difference 90° ±10°
(Note) The phase difference between the PZ signal and the Phase A signal
(and the Phase B signal) are not defined.

0.2-0.6V
Phase XB Vref
• 2-phase square wave signals (Type B, C)
VOH
PA 180°±90°
VOL

0.15-0.35V
PA Phase Z Vref

PB

0.15-0.35V
Phase XZ Vref
PB

( )
td VOH = 2.5V (min.) Vref =˙ . 2.5V
VOH = 2.5V (max.)
PZ td: Edge interval, resolution = 100%

PZ (Note) The phase difference between the PZ signal

and the PA signal / PB signal has no effect.
Z-phase pulse width
200±100µm

Output specification
1 8 1. Output connector specification (Type A, B, C) 2. Output connector specification (Type D)
• Output connector (pin type): RDAD-15P-LNA(05) (Hirose • Output connector (pin type): RDAD-15P-LNA(05) inch screws (Hirose
9 15 Electric or equivalent) Electric or equivalent)
• Applicable connector (standard accessory): D15-403N-110 • Applicable connector (standard accessory): D15-403N-150 inch
(Technical Electron or equivalent) screws (Technical Electron or equivalent)

Pin No. Type A Signal Type B Signal Type C Signal Type D Signal
1 0V (GND) 0V (GND) 0V (GND) Phase XA
2 0V (GND) 0V (GND) 0V (GND) Phase XB
3 +5V +5V +5V Phase Z
4 +5V +5V +5V +5V (VDD)
5 Phase A Reset input (anode) Phase A +5V (VDD)
6 Phase B Reset input (cathode) Phase B N.C
7 Vref Vref Vref N.C
8 PZ (scale reference point) PZ (scale reference point) PZ (scale reference point) N.C
9 N.C ALM (alarm, negative logic) ALM (alarm, negative logic) Phase A
10 Vref PA PA Phase B
11 N.C PA PA Phase XZ
12 N.C PB PB 0V (GND)
13 N.C PB PB 0V (GND)
14 N.C PZ PZ N.C
15 F.G F.G ( = 0V) F.G ( = 0V) 0V (GND)

9
 Specification
• There is an extensive selection of specifications for ST36.
• Choose the appropriate numbers and letters below
according to specification required.

Selection Method
If standard specifications (recommended items marked
with / symbols below) meet your requirements, please
order using the code numbers shown on page 11.

How to read the code

ST36 - - - -
Separate Type ST Series

Signal output
Code Output
A Sinusoidal signal
ST36

B Square wave signal + external reset input

C Sinusoidal signal + Square wave signal Special codes
D 1Vp-p differential
Code Details
None Standard selection specification
Effective range Z Special specification
Note: If there are special details, please select Z.
Code Effective range (mm) Code Effective range (mm)
0010
0025
10
25
0900
1000
900
1000
Head cable length
0050 50 1100 1100 Code Length
0075 75 1200 1200 A 1m (High flex)
0080 80 1300 1300 B 0.5m (High flex)
0100 100 1400 1400 Z Special length specification (max. 2.5m)
0150 150 1500 1500 Note: If there are special details, please select Z.
0200 200 1600 1600
0250
0300
250
300
1700
1800
1700
1800
Alarm output
0350 350 2000 2000 Code Details
0400 400 2200 2200 S Alarm signal
0450 450 2400 2400 H High impedance
0500 500 2500 2500 ◎Z When [Signal output] is [A] or [D]
0600 600 2600 2600
0700 700 2800 2800
0800 800 3000 3000 Direction
Note: For the standard specification, the indicated effective range Code Details
depends on the product code.
Example of standard specification 1 Normal: PA goes ahead
Effective range 10mm: ST36 -0010 2 Reverse: PB goes ahead
Effective range 250mm: ST36 -0250 ◎Z When [Signal output] is [A] or [D]

Scale reference point Traveling direction of detector head

Code Details Reference point track

A 50mm pitch (100 to 3000)
B Center point (10 to 3000)
Z Special position specification
Note: For reference positions in the effective range Head cable Scale track
of 10 to 80mm, [B: Center point] is the
standard specification. VOH
PA
VOL
Resolution / Minimum edge interval PA
Minimum edge interval
125ns 250ns 500ns 1000ns PB
Resolution
0.01μm A: 70mm/s B: 30mm/s C: 15mm/s D: 8mm/s
0.02μm E: 150mm/s F: 70mm/s G: 30mm/s H: 15mm/s PB
0.05μm J: 360mm/s K: 180mm/s L: 90mm/s M: 45mm/s td
0.1 μm N: 720mm/s P: 360mm/s Q: 180mm/s R: 90mm/s PZ
— Z: When [Signal output] is [A][D], maximum response speed at Sinusoidal signal
-3 dB attenuation is 1.2m/s. VOH = 2.5V (min.)
PZ
Note: The minimum edge interval varies 0 to -10% based on the operating environmental conditions.
Z-phase pulse width VOL = 0.5V (max.)
200±100µm td: Edge interval, resolution
This is the waveform that results when the detector
head moves as shown in the figure above.

10
 Mounting dimensions
• 10 to 80mm (Adhesive fixing type) • 100 to 3000mm Unit: mm

A00001 No.

6.6

(12.1)
(12.1)

7±0.2
7±0.2
6.6

Separate Type ST Series

32±0.2 2 32±0.2 2
2×M3, depth 4 2×M3, depth 4 16.9±0.1
14.9±0.1 Overall length L2 // 0.03 A 11.5 (0.6)
// 0.03 A (20) Effective range L1 (20) 0.015 A
11.5 (0.6)
Head center point at scale reference point signal output 0.015 A 36 Scale reference point mark
ø2 (Hole for adjusting pin)
Mounting surface 32±0.2 2 (50mm pitch)
Center of detector

5.5±0.2
ø2 (Hole for adjusting pin) Center of detector 2×M3, depth 4
Center of detector L1/2 Mounting surface

17.8
2×M3, depth 4

6
9±0.2

10
10

ST36
22 or more
22

A00001
6

22
22

A00001
8

2.8±0.1
// 0.01/100 G

12+0.5
32±0.2 2

0
36 0.01/100
A 4.8+0.2
(L2-L1)/2 Effective range L1 L3 L3 0

// 0.01/100 G
Overall length L2 G: Machine guideway 0.01/100
A

4× G: Machine guideway
R4

R4
35

4
25±0.2 5

42±0.2

5
ø22
ø5

50

21
Model ST36
A00001
06ABZ763 B No.

Mitutoyo Corporation
2×ø4.5
R4
MADE IN JAPAN

4 68±0.2 Scale retaining spring A

2×M5, through hole (5) 80 35
25±0.2 5

(9)
5

5
19

21
No. A00001

Head cable 1m (High flex) 2×ø4.5

(Up to 2.5 m available as custom order)
Scale retaining spring B

Dimensions of scale units

Scale Scale
Effective Overall fixing Effective Overall
fixing Retaining Retaining
range length pitch Retaining Retaining
Order No.* Code* Order No.* Code* range length
L1 (mm) L2 (mm) L3 (mm) spring A spring B L1 (mm) L2 (mm)
pitch spring A spring B
L3 (mm)
579-501-0 ST36 -10 10 30 – – – 579-518-0 ST36 -900 900 940 90 1 pc. 10 pcs.
579-502-0 ST36 -25 25 45 – – – 579-519-0 ST36 -1000 1000 1040 100 1 pc. 10 pcs.
579-503-0 ST36 -50 50 70 – – – 579-520-0 ST36 -1100 1100 1140 90 1 pc. 12 pcs.
579-504-0 ST36 -75 75 90 – – – 579-521-0 ST36 -1200 1200 1240 100 1 pc. 12 pcs.
579-505-0 ST36 -80 80 100 – – – 579-522-0 ST36 -1300 1300 1340 130 1 pc. 10 pcs.
579-506-0 ST36 -100 100 140 50 1 pc. 2 pcs. 579-523-0 ST36 -1400 1400 1440 100 1 pc. 14 pcs.
579-507-0 ST36 -150 150 190 75 1 pc. 2 pcs. 579-524-0 ST36 -1500 1500 1540 125 1 pc. 12 pcs.
579-508-0 ST36 -200 200 240 100 1 pc. 2 pcs. 579-525-0 ST36 -1600 1600 1640 100 1 pc. 16 pcs.
579-509-0 ST36 -250 250 290 60 1 pc. 4 pcs. 579-526-0 ST36 -1700 1700 1740 120 1 pc. 14 pcs.
579-510-0 ST36 -300 300 340 75 1 pc. 4 pcs. 579-527-0 ST36 -1800 1800 1840 100 1 pc. 18 pcs.
579-511-0 ST36 -350 350 390 85 1 pc. 4 pcs. 579-528-0 ST36 -2000 2000 2040 100 1 pc. 20 pcs.
579-512-0 ST36 -400 400 440 100 1 pc. 4 pcs. 579-529-0 ST36 -2200 2200 2240 100 1 pc. 22 pcs.
579-513-0 ST36 -450 450 490 75 1 pc. 6 pcs. 579-530-0 ST36 -2400 2400 2440 100 1 pc. 24 pcs.
579-514-0 ST36 -500 500 540 80 1 pc. 6 pcs. 579-531-0 ST36 -2500 2500 2540 95 1 pc. 26 pcs.
579-515-0 ST36 -600 600 640 100 1 pc. 6 pcs. 579-532-0 ST36 -2600 2600 2640 100 1 pc. 26 pcs.
579-516-0 ST36 -700 700 740 85 1 pc. 8 pcs. 579-533-0 ST36 -2800 2800 2840 100 1 pc. 28 pcs.
579-517-0 ST36 -800 800 840 100 1 pc. 8 pcs. 579-534-0 ST36 -3000 3000 3040 100 1 pc. 30 pcs.
* The above code numbers are for recommended items marked with / symbols.
If recommended specifications meet your requirements, use these code numbers to order.
* The and symbols in the tables above have the following meanings:
→A (2-phase sinusoidal signals) : →1
→B (2-phase square wave signals + reset input) : →2
→C (2-phase sinusoidal signals + 2-phase square wave signals) : →3
→D (1Vp-p differential) : →4

11
 Separate Type ST Series
Sinusoidal siqnal & Square-Wave Signal Output
Scale Unit (Compact Type)

ST46-EZA Glass Scale Type

Separate Type ST Series
ST46-EZA

Features
• Includes an automatic adjusting function for the signal (EZA function) at the push of a button.
• Detector head mounting and signal adjustment possible without oscilloscope or PC.
• A setup indicator for checking signal strength is included.
• I/F circuit integrated in connector shell reduces volume to 60% compared to conventional interface.
• The thickness of the detector head is only 7.5 mm. The metal tape scale type has a mounting surface area of 12.5 by 9.325
mm, allowing use in applications where a space-saving design is important.

Specifications
Item Code ST46-EZA
Detection method Reflective photoelectric linear encoder
Scale specifications Grating pitch: 20µm, Material: glass
Main scale grating pitch 20μm
Type B: 2-phase square wave signals, reference point pulse, external reset input
Output signal
Type C: 2-phase square wave signals, reference point pulse, 2-phase sinusoidal signals
Effective range 10 to 3000mm
Effective range 10 to 300mm: ±1µm
Effective range 350 to 500mm: ±2µm
Accuracy (20°C)
Effective range 600 to 1000mm: ±3µm
Effective range 1100 to 3000mm: ±3µm/m
Thermal expansion coefficient ≈ 8 x10-6 / K
Scale reference point With scale reference point
(50mm pitch, 10 to 80mm: Center point)
Maximum response speed 2.6m/s (at sine wave amplitude -3dB)
Power supply voltage 5VDC±5%
Maximum current consumption 250mA
Operating temperature/humidity 0 to 40°C, 20 to 80%RH (no condensation)
Storage temperature/humidity -20 to 60°C, 20 to 80%RH (no condensation)

System Configuration
Main scale
Output connector (included)
Feedback cable
Detector unit
Controller

To be supplied by customer (feedback cable/controller)

12
Output specification 1 8 Output signal waveform and specification
• Connector pin assignment Applicable connector • 2-phase square wave signals
(Type B) (included)
(Type B) VOH
9 15 HDAB-15S PA
VOL
Pin No. Signal Pin No. Signal
PA
1, 2 0V (GND) 10 PA (main signal pulse_Normal phase)
3, 4 +5V (Vcc) 11 PA (main signal pulse_Reverse phase) PB

Separate Type ST Series

5 Reset input AL (anode) 12 PB (main signal pulse_Normal phase)
6 Reset input AL (cathode) 13 PB (main signal pulse_Reverse phase)
PB
7 NC 14 PZ (reference point pulse_Reverse phase)
信号ケーブル部コネクタ （CN3）
（オス）
8 PZ (reference point pulse_Normal phase) 15 F. G td
ピンNo. 信号名 ピンNo. 信号名
9 ALM (alarm) 1、2、13 0V 8 PB

ST46-EZA
3、4、11 ＋5V PZ9 PZ VOH = 2.5V (min.)
• Connector pin assignment 1 8 5 PA 10 PZ VOL = 0.5V (max.)
6 PA 12、14 未使用
(Type C) Applicable connector 7 PB
Traveling direction
PZ15 F.G
of detector head td: Edge
Scale track interval, resolution
(included)
適合コネクタ（CN4）：HDAB-15S（ヒロセ又は相当品（Dsubシリーズ） Z-phase使用可）
pulse width
9 15 HDAB-15S 0.8±0.4mm
Pin No. Signal Pin No. Signal • 2-phase sinusoidal signals, 2-phase square wave signals
1, 2 0V (GND) 10 PA (main signal pulse_Normal phase) Reference point mark
(Type C)
3, 4 +5V (Vcc) 11 PA (main signal pulse_Reverse phase)
5 Phase A (sinusoidal siqnal) 12 PB (main signal pulse_Normal phase) 最小エッジ間隔 100∼800ns

6 Phase B (sinusoidal siqnal) 13 PB (main signal pulse_Reverse phase) Phase A VDC

VPP
7 Vref ( Vcc / 2) 信号ケーブル部コネクタ
14 PZ (reference （CN3）
point pulse_Reverse phase) （オス）
8 PZ (reference point pulse_Normal phase) 15 F. G （注意） PZ信号とPA信号（又はPB信号）
ピンNo. 信号名 ピンNo. 信号名
9 ALM (alarm) Output signal   との位相差は関係しません。
pitch 20µm
1、2、13 0V 8 PB
3、4、11 ＋5V 9 PZ
5 PA 10 PZ
6 PA 12、14 未使用
Phase B VDC

VPP
7 PB 15 F.G

適合コネクタ（CN4）：HDAB-15S（ヒロセ又は相当品（Dsubシリーズ）使用可）
• Application program (Option, Part No.06AEF800)
Phase difference 90° Vpp=2v VDC=V ref. (Vcc/2 =˙ . 2.5V)
Connector control unit (Typ)
has setup indicator VOH
PA
VOL
PA

PB

PB
NC side td
Detector head
VOH = 2.5V (min.)
PZ
Micro USB VOL = 0.5V (max.)
Connector shell td: Edge interval, resolution
PZ
Z-phase pulse width
0.8±0.4mm

※検出ヘッドが上図のように移動した際の波形です。

Signal strength checking and parameter setup can

be performed on a PC (PC to be prepared by customer)

13
 Specification • There is an extensive selection of specifications for the
ST46-EZA.
• Choose the appropriate numbers and letters below

Selection Method according to specification required.

If standard specifications (recommended items marked
with symbol below) meet your requirements, please
order using the code numbers shown on pages 19 - 20.
(Glass Scale Type)
How to read the code
ST46-EZA - -
Separate Type ST Series

Signal output Special codes

Code Details Code Details
B Square wave signal + external reset input None Standard selection specification
C Sinusoidal signal + Square wave signal Z Special specification
ST46-EZA

Head cable length

Effective range Code Length
Effective Effective Effective A 1m (standard)
Code range (mm) Code range (mm) Code range (mm) B 0.5m
0010 10 0450 450 1600 1600 C 2m
0025 25 0500 500 1700 1700 Special length specification
Z
0050 50 0600 600 1800 1800 (max. 2.5m)
0075 75 0700 700 2000 2000
0080 80 0800 800 2200 2200 Alarm output
0100 100 0900 900 2400 2400 Code Details
0150 150 1000 1000 2500 2500 S Alarm signal
0200 200 1100 1100 2600 2600 H High impedance
0250 250 1200 1200 2800 2800
0300 300 1300 1300 3000 3000 Direction
0350 350 1400 1400 Code Details
0400 400 1500 1500 1 Normal
Note: For the standard specification, the indicated effective range 2 Reverse
depends on the product code.
Example of standard specification When the direction is normal, the sinusoidal signal, the 2-phase square wave output
Effective range 10mm: ST46EZA -0010 signal (Phase A, Phase B) and the reference point signal waveform are as shown below.
Effective range 250mm: ST46EZA -0250
Traveling direction of detector head Scale track

Reference point/ Scale shape

Code Details (Effective range) Details - Cross-section (Effective range)
A 50mm pitch (100 to 3000mm) Glass, separate: t4.8 x w22 (100 to 3000mm) Reference point mark
B Center point (10 to 80mm) Glass, separate: t2.8 x w8 (10 to 80mm)
C Center point (10 to 80mm) With aluminum base: t5.1 x w23 (10 to 80mm)
Z Special position specification Special shape Phase A VDC VPP

Resolution / Minimum edge interval Output signal pitch 20µm

Maximum response
Code Resolution Minimum edge interval
speed
Phase B VDC
VPP

A 100 ns 450 mm/s

B 200 ns 225 mm/s
0.05 µm
C 400 ns 112 mm/s
D 800 ns 56 mm/s Phase difference 90° Vpp=2v VDC=V ref. (Vcc/2 =˙ . 2.5V)
E 100 ns 900 mm/s (Typ)
F 200 ns 450 mm/s VOH
0.1 µm
G 400 ns 225 mm/s
H 800 ns 112 mm/s PA
VOL
J 100 ns 2600 mm/s
K 200 ns 2250 mm/s PA
0.5 µm
L 400 ns 1125 mm/s
M 800 ns 562 mm/s PB
N 100 ns 2600 mm/s
P 200 ns 2600 mm/s
1 µm PB
Q 400 ns 2250 mm/s
R 800 ns 1125 mm/s td
S 100 ns 2600 mm/s
T 200 ns 2600 mm/s
5 µm VOH = 2.5V (min.)
U 400 ns 2600 mm/s PZ
V 800 ns 2600 mm/s VOL = 0.5V (max.)
td: Edge interval, resolution
PZ
Z-phase pulse width
0.8±0.4mm

14
(Glass Scale Type)
ST46-EZA Scale unit mounting dimensions
• Effective range 10 to 80mm (No aluminum base) • Effective range 10 to 80mm (With aluminum base)
Unit: mm

Separate Type ST Series

2×M2.5, depth 3

2×M2.5, depth 3

5.5±0.2
14.4±0.1

(9.3)
26±0.2
7.5 (1.8)
30

ST46-EZA
12.1±0.1 26±0.2
5.5±0.2

26±0.2 // 0.05 A
(9.3)

7.5 (1.8) 2×M2.5, depth 3

30 // 0.02 G

0.2±0.2
26±0.2

2
// 0.05 A
2×M2.5, depth 3

12.5
3.3±0.2

20
// 0.02 G

23
2

8.5±0.2
S/N B0700001
12.5

L3 L4 5.1
2.8 G: Machine guideway
8.5±0.2

Effective range L1 Effective range L1 A

A
Overall length L2 0.02 G: Machine guideway Overall length L2 0.02
// 0.02 G Adhesive application section 2×R2.75 // 0.02 G
2×R2.75
Use silicon-based adhesive
// 0.02/100 G KE441
1.5
21±0.2

21±0.2
44
44

26

(2.8)
26

Scale drawing
8.5
7
1.5

2×ø2.8 2×ø2.8
1

20
23
25 25
// 0.02/100 G S/N B0700001

63 63
0.02/100 2 0.4
L4 L3 3.8
2×3.4
16.3

16.3
S/N B0700001 S/N B0700001
Scale mounting diagram,
13.5

ST46-EZA MADE IN JAPAN

06ADY287 Kawasaki,Japan
ST46-EZA MADE IN JAPAN
06ADY287 Kawasaki,Japan
13.5 5.1
recommended method (Scale = 2/1)

Dimensions of scale units

• 10 to 80mm (No aluminum base) • 10 to 80 mm (With aluminum base)

Order No. Code Effective range Overall length Order No. Code Effective range Overall length L3 L4
L1 (mm) L2 (mm) L1 (mm) L2 (mm) (mm) (mm)
579-665-12 ST46EZAB-10B 10 30 579-665-13 ST46EZAB-10C 10 30 15 7.5
579-666-12 ST46EZAB-25B 25 45 579-666-13 ST46EZAB-25C 25 45 25 10
579-667-12 ST46EZAB-50B 50 70 579-667-13 ST46EZAB-50C 50 70 40 15
579-668-12 ST46EZAB-75B 75 90 579-668-13 ST46EZAB-75C 75 90 60 15
579-669-12 ST46EZAB-80B 80 100 579-669-13 ST46EZAB-80C 80 100 70 15
579-665-22 ST46EZAC-10B 10 30 579-665-23 ST46EZAC-10C 10 30 15 7.5
579-666-22 ST46EZAC-25B 25 45 579-666-23 ST46EZAC-25C 25 45 25 10
579-667-22 ST46EZAC-50B 50 70 579-667-23 ST46EZAC-50C 50 70 40 15
579-668-22 ST46EZAC-75B 75 90 579-668-23 ST46EZAC-75C 75 90 60 15
579-669-22 ST46EZAC-80B 80 100 579-669-23 ST46EZAC-80C 80 100 70 15

15
 • Effective range 100 to 3000mm 2×M2.5, depth 3
Unit: mm
S/N B0000777

(9.3)
26±0.2

5.5±0.2
Overall length L2 14.1±0.1
(20) Effective range L1 (20) 7.5 (1.8)
30
2×M2.5, depth 3 // 0.05 A
Separate Type ST Series

26±0.2

0.9±0.2
2
B

12.5
// 0.02 G

22
8.5±0.2
ST46-EZA

12+0.5
0
Mounting pitch L3 Mounting pitch L3 G: Machine guideway
2×R2.75 4.8
A
0.02
// 0.02 G

21±0.2
44
26

2×ø2.8

21

21
25

5
5
63
25 1.5 0.4 25 1.5 0.4
2×ø4.5 2×ø4.5
16.3

S/N B0700001

35
13.5

ST46-EZA MADE IN JAPAN

06ADY287 Kawasaki,Japan 35

Dimensions of scale units

Effective range Overall length Scale fixing pitch Scale retaining spring Scale retaining spring
Order No.* Code* L1 L2 L3 A B
(mm) (mm) (mm) (pcs.) (pcs.)
579-670- 1 ST46EZA - 100A 100 140 50 2
579-671- 1 ST46EZA - 150A 150 190 75 2
579-672- 1 ST46EZA - 200A 200 240 100 2
579-673- 1 ST46EZA - 250A 250 290 60 4
579-674- 1 ST46EZA - 300A 300 340 75 4
579-675- 1 ST46EZA - 350A 350 390 85 4
579-676- 1 ST46EZA - 400A 400 440 100 4
579-677- 1 ST46EZA - 450A 450 490 75 6
579-678- 1 ST46EZA - 500A 500 540 80 6
579-679- 1 ST46EZA - 600A 600 640 100 6
579-680- 1 ST46EZA - 700A 700 740 85 8
579-681- 1 ST46EZA - 800A 800 840 100 8
579-682- 1 ST46EZA - 900A 900 940 90 10
579-683- 1 ST46EZA -1000A 1000 1040 100 10
579-684- 1 ST46EZA -1100A 1100 1140 90 1 12
579-685- 1 ST46EZA -1200A 1200 1240 100 12
579-686- 1 ST46EZA -1300A 1300 1340 130 10
579-687- 1 ST46EZA -1400A 1400 1440 100 14
579-688- 1 ST46EZA -1500A 1500 1540 125 12
579-689- 1 ST46EZA -1600A 1600 1640 100 16
579-690- 1 ST46EZA -1700A 1700 1740 120 14
579-691- 1 ST46EZA -1800A 1800 1840 100 18
579-692- 1 ST46EZA -2000A 2000 2040 100 20
579-693- 1 ST46EZA -2200A 2200 2240 100 22
579-694- 1 ST46EZA -2400A 2400 2440 100 24
579-695- 1 ST46EZA -2500A 2500 2540 95 26
579-696- 1 ST46EZA -2600A 2600 2640 100 26
579-697- 1 ST46EZA -2800A 2800 2840 100 28
579-698- 1 ST46EZA -3000A 3000 3040 100 30
* The above code numbers are for recommended items marked with symbol. If recommended specifications meet your requirements, please use these code numbers to order.
→ B (2-phase square wave signals + external reset input): →1
→ C (2-phase square wave signals + 2-phase sinusoidal signals): →2

16
 Separate Type ST Series
Sinusoidal siqnal & Square-Wave Signal Output
Scale Unit (Compact Type)

ST46-EZA Metal Tape Scale Type

Separate Type ST Series

ST46-EZA
Double-end mounting design

Double-sided tape mounting design

Features
• Includes an automatic adjusting function for the signal (EZA function) at the push of a button.
• Detector head mounting and signal adjustment possible without oscilloscope or PC.
• A setup indicator for checking signal strength is included.
• I/F circuit integrated in connector shell reduces volume to 60% compared to conventional interface.
• The thickness of the detector head is only 7.5 mm. The metal tape scale type has a mounting surface area of 12.5 by 9.325
mm, allowing use in applications where a space-saving design is important.

SPECIFICATIONS
Model ST46-EZA
Detection method Reflective photoelectlic linear encoder
Scale type Metal tape
Main scale grating pitch 20µm
Type B: 2-phase square wave signals, reference point pulse, external reset input.
Output signal Type C: 2-phase square wave signals, reference point pulse, 2-phase sinusoidal signals.
Effective range  10 to 3000mm
Effective range 10 to 1000mm: ±5μm
Accuracy (20°C) Effective range 1100 to 3000mm: ±5μm/m
(The above accuracy applies to individual scales. For double-end mounting designs, perform
point-to-point correction after ensuring the metal tape is tensioned correctly.)
Maximum response speed 2.6m/s (With sinusoidal signal amplitude of -3dB)
Scale reference point 50mm pitch, 10 to 80mm: Center point
Power supply voltage 5VDC±5%
Operating temperature/ humidity range 0 to 40°C, RH 20 to 80% (no condensation)
Storage temperature/ humidity range –20 to 60°C, RH 20 to 80% (no condensation)

System Configuration
Main scale
Output connector (included)
Feedback cable
Detector unit
Controller

To be supplied by customer (feedback cable/controller)

17
 Output specification 1 8 Output signal waveform and specification
• Connector pin assignment Applicable connector • 2-phase square wave signals
(Type B) (included)
(Type B) VOH
9 15 HDAB-15S PA
VOL
Pin No. Signal Pin No. Signal
PA
1, 2 0V (GND) 10 PA (main signal pulse_Normal phase)
3, 4 +5V (Vcc) 11 PA (main signal pulse_Reverse phase) PB
5 Reset input AL (anode) 12 PB (main signal pulse_Normal phase)
6 Reset input AL (cathode) 13 PB (main signal pulse_Reverse phase)
PB
7 NC 14 PZ (reference point pulse_Reverse phase)
信号ケーブル部コネクタ （CN3）
（オス）
8 PZ (reference point pulse_Normal phase) 15 F. G td
ピンNo. 信号名 ピンNo. 信号名
9 ALM (alarm) 1、2、13 0V 8 PB
3、4、11 ＋5V PZ9 PZ VOH = 2.5V (min.)
• Connector pin assignment 1 8 5 PA 10 PZ VOL = 0.5V (max.)
6 PA 12、14 未使用
(Type C) Applicable connector 7 PB
Traveling direction
PZ15 F.G
of detector head td: Edge
Scale track interval, resolution
(included)
適合コネクタ（CN4）：HDAB-15S（ヒロセ又は相当品（Dsubシリーズ） Z-phase使用可）
pulse width
Separate Type ST Series

9 15 HDAB-15S 0.8±0.4mm
Pin No. Signal Pin No. Signal • 2-phase sinusoidal signals, 2-phase square wave signals
1, 2 0V (GND) 10 PA (main signal pulse_Normal phase) Reference point mark
(Type C)
3, 4 +5V (Vcc) 11 PA (main signal pulse_Reverse phase)
ST46-EZA

5 Phase A (sinusoidal siqnal) 12 PB (main signal pulse_Normal phase) 最小エッジ間隔 100∼800ns

6 Phase B (sinusoidal siqnal) 13 PB (main signal pulse_Reverse phase) Phase A VDC

VPP
7 Vref ( Vcc / 2) 信号ケーブル部コネクタ
14 PZ (reference （CN3）
point pulse_Reverse phase) （オス）
8 PZ (reference point pulse_Normal phase) 15 F. G （注意） PZ信号とPA信号（又はPB信号）
ピンNo. 信号名 ピンNo. 信号名
9 ALM (alarm) Output signal   との位相差は関係しません。
pitch 20µm
1、2、13 0V 8 PB
3、4、11 ＋5V 9 PZ
5 PA 10 PZ
6 PA 12、14 未使用
Phase B VDC

VPP
7 PB 15 F.G

• Application program (Option, Part No.06AEF800)

適合コネクタ（CN4）：HDAB-15S（ヒロセ又は相当品（Dsubシリーズ）使用可）

Phase difference 90°

Connector control unit (Typ)
Vpp=2v VDC=V ref. (Vcc/2 =˙ . 2.5V)
has setup indicator
VOH
PA
VOL
PA

PB

NC side PB
td
Detector head
VOH = 2.5V (min.)
Micro USB PZ
Connector shell VOL = 0.5V (max.)
td: Edge interval, resolution
PZ
Z-phase pulse width
0.8±0.4mm

※検出ヘッドが上図のように移動した際の波形です。

Signal strength checking and parameter setup can

be performed on a PC (PC to be prepared by customer)

18
 Specification • There is an extensive selection of specifications for the
ST46-EZA.
• Choose the appropriate numbers and letters below

Selection Method according to specification required.

If standard specifications (recommended items marked
with symbol below) meet your requirements, please
order using the code numbers shown on pages 19 - 20.
(Metal Tape Scale Type)
How to read the code
ST46-EZA - -
Signal output Special codes
Code Details Code Details
B Square wave signal + external reset input None Standard selection specification
C Sinusoidal signal + Square wave signal Z Special specification

Head cable length

Effective range Code Length
Effective Effective Effective A 1m (standard)

Separate Type ST Series

Code range (mm) Code range (mm) Code range (mm) B 0.5m
0010 10 0450 450 1600 1600 C 2m
0025 25 0500 500 1700 1700 Special length specification
Z
0050 50 0600 600 1800 1800 (max. 2.5m)
0075 75 0700 700 2000 2000
Alarm output

ST46-EZA
0080 80 0800 800 2200 2200
0100 100 0900 900 2400 2400 Code Details
0150 150 1000 1000 2500 2500 S Alarm signal
0200 200 1100 1100 2600 2600 H High impedance
0250 250 1200 1200 2800 2800
0300 300 1300 1300 3000 3000 Direction
0350 350 1400 1400 Code Details
0400 400 1500 1500 1 Normal
Note: For the standard specification, the indicated effective range 2 Reverse
depends on the product code.
Example of standard specification When the direction is normal, the sinusoidal signal, the 2-phase square wave output
Effective range 10mm: ST46EZA -0010 signal (Phase A, Phase B) and the reference point signal waveform are as shown below.
Effective range 250mm: ST46EZA -0250
Traveling direction of detector head Scale track

Reference point/ Scale shape

Code Details (Effective range) Details - Cross-section (Effective range)
Metal Tape Scale double-end mounting: Reference point mark
D 50mm pitch (500 to 3000mm) t0.2 x w13 (500 to 3000mm)
Center point (10 to 80mm) Metal Tape Scale Double-sided tape
E
50mm pitch (100 to 3000mm) mounting: t0.2 x w13 (10 to 3000mm)
Z Special position specification Special shape Phase A VDC VPP

Resolution / Minimum edge interval Output signal pitch 20µm

Maximum response
Code Resolution Minimum edge interval
speed
Phase B VDC
VPP

A 100 ns 450 mm/s

B 200 ns 225 mm/s
0.05 µm
C 400 ns 112 mm/s
Phase difference 90° Vpp=2v VDC=V ref. (Vcc/2 =˙ . 2.5V)
D 800 ns 56 mm/s
(Typ)
E 100 ns 900 mm/s
F 200 ns 450 mm/s VOH
0.1 µm PA
G 400 ns 225 mm/s VOL
H 800 ns 112 mm/s
J 100 ns 2600 mm/s PA
K 200 ns 2250 mm/s PB
0.5 µm
L 400 ns 1125 mm/s
M 800 ns 562 mm/s
N 100 ns 2600 mm/s PB
P 200 ns 2600 mm/s td
1 µm
Q 400 ns 2250 mm/s
R 800 ns 1125 mm/s VOH = 2.5V (min.)
PZ
S 100 ns 2600 mm/s VOL = 0.5V (max.)
T 200 ns 2600 mm/s td: Edge interval, resolution
5 µm PZ
U 400 ns 2600 mm/s
V 800 ns 2600 mm/s Z-phase pulse width
0.8±0.4mm

19
 (Metal Tape Scale Type)

• Double-end mounting design (effective range 500 to 1000mm) Unit: mm

(5) 19±0.2 46±0.2 (100±0.2) ×n ±0.3 40.5±0.2 20±0.2 （11.5）

Fixed block (33) (13) 6.5 Tension block A
ø3.8
1.3

6.5
1.5
4.8

12.4
ø6.4 A

5.5±0.2
2×M2.5 Depth 3 26±0.2
// 0.2 A // 0.05 G
（8） (6.5) 0.05/1000
Scale holder A length L4
Scale length L3 ø5 G:Machine Guide
6.6

8
16
2×ø3.4 Cutting
29 ø6.5 Depth of counterbore 3.5 2×ø3.4 Cut 52.5
Fixed block mounting dimensions // 0.05 A (14)
30 Tension block A mounting dimensions 7.5 1.5±0.1
B Output position of scale origin signal
2×M2.5 Depth 3 26±0.2 X 0.2
Separate Type ST Series

// 0.1 G 50mm pitch // 0.05 B

12.5 2.5±0.2
2

17.1
15.6
13.2

(16)
16

13
8.5±0.2

X' (0.6) 5.9

ST46-EZA

（68） Effective length L1 (74)

Total length L2 Cross-section X-X'

2×R2.75
21±0.2
44
26

2×ø2.8
25
63
16.3

S/N B0700001
13.5

ST46-EZA MADE IN JAPAN

06ADY287 Kawasaki,Japan

Dimensions of scale units

Effective range Scale Overall length Scale length Scale holder A length
Order No. Code n
L1 (mm) L2 (mm) L3 (mm) L4 (mm)
579-678- 4 ST46EZA - 500D 500 642 590 546 5
579-679- 4 ST46EZA - 600D 600 742 690 646 6
579-680- 4 ST46EZA - 700D 700 842 790 746 7
579-681- 4 ST46EZA - 800D 800 942 890 846 8
579-682- 4 ST46EZA - 900D 900 1042 990 946 9
579-683- 4 ST46EZA -1000D 1000 1142 1090 1046 10
* The above code numbers are for recommended items marked with symbol. If recommended specifications meet your requirements, please use these code numbers to order.
→ B (2-phase square wave signals + external reset input): →1
→ C (2-phase square wave signals + 2-phase sinusoidal signals): →2

20
• Double-end mounting design (effective range 1100 to 3000mm)
Unit: mm

(5) 19±0.2 46±0.2 (100±0.2)×n ±0.3 40.5±0.2 20±0.2 (11.5)

ø3.8 44 12±0.2 (44)
(8) (33) (13) (6.5) 6.5 G:Machine guideway
(33) (33)
4.8

(5.9)
1.3

1.5
6.5
2.4
(7)

12.4

ø6.5

ø3.4
ø6.4 2×M2.5 Depth3 A

5.5±0.2
26±0.2
Scale length L3 // 0.2 A // 0.05 G
ø5 0.05/1000
6.6

ø3.4
ø6.5
1.3

8
16
2×ø3.4 Cutting (4.8)
29 ø6.5 Depth of counterbore 3.5 2×ø3.4 52.5 Middle-fixed block mounting dimensions
Fixed block mounting dimensions Tension block A mounting dimensions
1000×m Scale holder A length L4
Output position of scale origin signal // 0.05 A
50mm pitch 966 (5) 24 (5) 2×M2.5 depth 3 Scale holder A (14)
B Middle-fixed block 30 7.5 1.5±0.2
8.5

12.5 2.5±0.2
Scale 26±0.2 // 0.05 B 0.2
// 0.1 G holder B

Separate Type ST Series

5

17.1
15.6
13.2

(16)
8
16

13
1.3
11.5±0.2

8.5±0.2
X' (0.6)
(68) Effective range L1 (74) 5.9
Overall length L2 Cross-section X-X'

ST46-EZA
2×R2.75
ø3.4

21±0.2
26

44
2×ø2.8
25
63
16.3
13.5

S/N B0700001

06ADY287 Kawasaki,Japan

Dimensions of scale units

Effective range Scale Overall length Scale length Scale holder A length
Order No. Code m n
L1 (mm) L2 (mm) L3 (mm) L4 (mm)
579-684- 4 ST46EZA -1100D 1100 1242 1190 146 1 11
579-685- 4 ST46EZA -1200D 1200 1342 1290 246 1 12
579-686- 4 ST46EZA -1300D 1300 1442 1390 346 1 13
579-687- 4 ST46EZA -1400D 1400 1542 1490 446 1 14
579-688- 4 ST46EZA -1500D 1500 1642 1590 546 1 15
579-689- 4 ST46EZA -1600D 1600 1742 1690 646 1 16
579-690- 4 ST46EZA -1700D 1700 1842 1790 746 1 17
579-691- 4 ST46EZA -1800D 1800 1942 1890 846 1 18
579-692- 4 ST46EZA -2000D 2000 2142 2090 1046 1 20
579-693- 4 ST46EZA -2200D 2200 2342 2290 246 2 22
579-694- 4 ST46EZA -2400D 2400 2542 2490 446 2 24
579-695- 4 ST46EZA -2500D 2500 2642 2590 546 2 25
579-696- 4 ST46EZA -2600D 2600 2742 2690 646 2 26
579-697- 4 ST46EZA -2800D 2800 2942 2890 846 2 28
579-698- 4 ST46EZA -3000D 3000 3142 3090 1046 2 30
* The above code numbers are for recommended items marked with symbol. If recommended specifications meet your requirements, please use these code numbers to order.
→ B (2-phase square wave signals + external reset input): →1
→ C (2-phase square wave signals + 2-phase sinusoidal signals): →2

21
 • Double-sided tape mounting design
Unit: mm

5.5±0.2
2×M2.5 Depth 3 26±0.2
// 0.2 G // 0.05 G
*The output position of the scale origin signal is only the center point, if the effective length of the scale is less than 75mm. 0.05/1000
G:Machine guideway
Scale length L3
// 0.05 A (9.325)
*Output position of scale origin signals 30 X
End cap // 0.1 G End cap 7.5 1.5±0.1 1.45

12.5 1±0.2
50mm pitch 2×M2.5 Depth 3 26±0.2

13
2

13
20
X' 10

8.5±0.2
10 End cap
30 30
0.2 (tape scale)
（50） Effective range L1 (50)
Overall length L2 (0.125)
(double-sided tape)
2×R2.75
Cross-section X-X'
Separate Type ST Series

21±0.2
26

2×ø2.8 44
25
ST46-EZA

63
16.3

S/N B0700001
13.5

ST46-EZA MADE IN JAPAN

06ADY287 Kawasaki,Japan

Dimensions of scale units

Effective range Scale Overall length Scale length
Order No. Code L1 (mm) L2 (mm) L3 (mm)
579-665- 5 ST46EZA - 10E 10 110 70
579-666- 5 ST46EZA - 25E 25 125 85
579-667- 5 ST46EZA - 50E 50 150 110
579-668- 5 ST46EZA - 75E 75 175 135
579-670- 5 ST46EZA - 100E 100 200 160
579-671- 5 ST46EZA - 150E 150 250 210
579-672- 5 ST46EZA - 200E 200 300 260
579-673- 5 ST46EZA - 250E 250 350 310
579-674- 5 ST46EZA - 300E 300 400 360
579-675- 5 ST46EZA - 350E 350 450 410
579-676- 5 ST46EZA - 400E 400 500 460
579-677- 5 ST46EZA - 450E 450 550 510
579-678- 5 ST46EZA - 500E 500 600 560
579-679- 5 ST46EZA - 600E 600 700 660
579-680- 5 ST46EZA - 700E 700 800 760
579-681- 5 ST46EZA - 800E 800 900 860
579-682- 5 ST46EZA - 900E 900 1000 960
579-683- 5 ST46EZA -1000E 1000 1100 1060
579-684- 5 ST46EZA -1100E 1100 1200 1160
579-685- 5 ST46EZA -1200E 1200 1300 1260
579-686- 5 ST46EZA -1300E 1300 1400 1360
579-687- 5 ST46EZA -1400E 1400 1500 1460
579-688- 5 ST46EZA -1500E 1500 1600 1560
579-689- 5 ST46EZA -1600E 1600 1700 1660
579-690- 5 ST46EZA -1700E 1700 1800 1760
579-691- 5 ST46EZA -1800E 1800 1900 1860
579-692- 5 ST46EZA -2000E 2000 2100 2060
579-693- 5 ST46EZA -2200E 2200 2300 2260
579-694- 5 ST46EZA -2400E 2400 2500 2460
579-695- 5 ST46EZA -2500E 2500 2600 2560
579-696- 5 ST46EZA -2600E 2600 2700 2660
579-697- 5 ST46EZA -2800E 2800 2900 2860
579-698- 5 ST46EZA -3000E 3000 3100 3060
* The above code numbers are for recommended items marked with symbol. If recommended specifications meet your requirements, please use these code numbers to order.
→ B (2-phase square wave signals + external reset input): →1
→ C (2-phase square wave signals + 2-phase sinusoidal signals): →2

22
 Assembly Type AT Series
1Vpp Differential Signal Output Type Scale Unit

AT402E
Features
• Ideal for machine tools for heavy cutting as well as linear motors.
• Has multi-point elastic fixing for excellent vibration resistance (200m/s2),shock resistance (400m/s2),
and temperature characteristics.
• The adoption of the Absolute Interval Code has enabled a simplified, low-cost ABS system.

Specifications

Assembly Type AT Series

Item Code AT402E-A Type AT402E-B Type AT402E-C Type
Cable configuration 3m single wire 3m European CNC manufacturers' specification 3m FANUC LTD. specification
Detection method Photoelectric linear encoder
Base position of elongation due to Midpoint of the screws used for rigid fixing near the midpoint of the effective range.
temperature changes

AT402E
Effective range 140 to 3040mm
Output signal Signal: 1Vpp differential Sinusoidal signal, differential reference point pulse: Absolute Interval Code compatible
Signal output pitch 20μm
Maximum response speed 120m/min (with Sinusoidal signal amplitude of -3db)
Effective range 140 to 540mm : ±2μm
Accuracy (20°C) Effective range 640 to 940mm : ±3μm
Effective range 1040 to 3040mm : ±3μm/m
Thermal expansion coefficient ≈ 8 x10-6 / K
Operating temperature/humidity 0 to 45°C 20 to 80% RH (no condensation)
Storage temperature/humidity -20 to 70°C 20 to 80% RH (no condensation)
Vibration resistance 200m/s2 (55 to 2000Hz)
Shock resistance 400m/s2 (half-sine 11ms)
Power supply voltage 5VDC±5%
Maximum current consumption 120mA
Maximum sliding force 4N
Air supply hole With air supply hole (end of scale frame/detector head)
Note 1: For details regarding the applicable system, please consult with the individual manufacturer.

Cable configuration
Signal conversion adapter
Ref. (Optional accessories)
Overall scale

Signal cable Ass’y

PSU-400EA

Signal cable Type A

Signal cable Type B PSU-400EV

Signal cable Type C

TIP: Signal cable Type B is connectable.

23
 Interface Unit (Optional accessories)
Signal Conversion Adapter
PSU-400EA
PSU-400E

PSU-400EV

Features
• The PSU-400E series interface unit converts the 1Vp-p differential signal output by AT402E, so that NC feedback systems or
measurement control devices can be used with linear scales in order to achieve highly accurate positioning.
• PSU-400EA interface unit converts the 1Vp-p differential signal output by AT402E to the 11μA differential signal.
Assembly Type AT Series

• PSU-400EV interface unit splits the 1Vp-p differential signal output by AT402E into a minimum of 20 and a maximum of 4000
divisions, and converts the signal to a square wave.

Specifications
AT402E

Order No. 539-008 539-009

Items PSU-400EA PSU-400EV
Input signal 1Vpp differential Sinusoidal signal (AT402E)
Output signal 11μA sine wave signal TTL signal (RS422)
TTL X5 (1μm), TTL X10 (0.5μm), TTL X20 (0.25μm),
Output signal: — TTL X25 (0.2μm), TTL X50 (0.1μm), TTL X100 (0.05μm),
Division number (Resolution)
TTL X250 (0.1μm), TTL X500 (0.01μm), TTL X1000 (0.005μm)
Minimum edge intervals — 62.5,125,250,500,1000,2000 [ns]
Maximum current consumption 60mA 130mA
Power supply DC5V±5%
Storage temperature -20 to 70ºC 20 to 80%RH
Operating temperature 0 to 50ºC 20 to 80%RH
External dimension 80(W)×40(D)×20(H)
Simple error display Error display
Status LED (without error output) (with error output)
Response speed 120m/min (100kHz) It depends on number of interpolation and minimum edge intervals
(Max: 100kHz)
TIP: Signal cable Type B is connectable.

(1) 80 (2)
31
40

150
150

71 (3)

No. Name
(1) INPUT connector Connector for connecting with Linear Scale AT402E
(2) OUTPUT connector Connector for connecting with external device
(3) ALM lamp Lights red when alarming (Normally lights green)

24
Pin assignment Output signal waveform
(1) Signal cable A (single wire specification) Signal period = 20µm = 360°
Wire color Signal Wire color Signal

0.4-0.6V
White +5V Yellow Phase XB Phase A Vref
Black GND Green Phase Z
Brown Phase A Blue Phase XZ
Red Phase XA Shield FG
Orange Phase B

0.4-0.6V
Note 1: Ground the shield to the earth bar Phase XA Vref

(2) Signal cable B (European CNC manufacturer's specification)

12-pin Type Connector without locking ring

0.4-0.6V
Pin Signal Pin Signal Phase B Vref
2,12 +5V 1 Phase XB

Assembly Type AT Series

10,11 GND 3 Phase Z
Phase 90 ±10°
5 Phase A 4 Phase XZ
6 Phase XA Shell FG

0.4-0.6V
8 Phase B 7,9 Not used Phase XB Vref

AT402E
(3) Signal cable C (FANUC LTD. specification) 180°±90°
12-pin Type Connector
Pin Signal Pin Signal

0.15-0.35V
Phase Z Vref
1,2 +5V 8 Phase XB
3,4 GND 9 Phase Z

0.15-0.35V
5 Phase A 10 Phase XZ
Phase XZ Vref
6 Phase XA 11, shell FG
7 Phase B 12 Not used
Note 1: Connector used: RM15WTP-12P Vref = 2.5±0.5V
Note 2: Applicable connector: RM15WTR-12S nominai = 100%
(Hirose Electric or equivalent product)

(4) When connecting with PSU-400EA

Pin Cable color Signal
1 White IA+ ⅠA 0 7-16µApp
2 Black IA-
3 Brown +5V
4 Red GND
5 Orange IB+
6 Yellow IB-
7 Green IZ+
ⅠB 0 7-16µApp

8 Blue IZ-
9 Pink F.G. (shell)

ⅠZ 0 2-8.5µA

(5) When connecting with PSU-400EV

Pin Cable color Signal
1 Blue PB
2 Brown +5V A 0
3 Purple PZ
4 Grey PZ
5 Orange PA
6 Yellow PA
7 Pink AL
8 Green PB
B 0

9 - Not used Phase Z pulse width: 20µm

10 Red GND
11 Black GND
12 White +5V
Z 0

25
 AT402E scale unit mounting dimensions
Maximum effective length L3=L0+10
R �Surface of aluminum frame (Effective range L 0 )
// 0.1 G L2 = (L0/2) +65
0.05/500 P100×n
35 P100 ±0.2 6 (hole), through hole (Aluminum frame)
6
58.5

X
S/N 7200001
62 ±0.1

Ref.
AT402E
MADE IN JAPAN

Longitudinal direction

10.4

ø6.5
25 40±0.2
(Detector head) 90 (19)
19±2 Effective range L0 ø7, through hole
Overall length L1 = L0+119
Assembly Type AT Series

5
ZP1 ZP2 ZP3 ZP4
=10.02 =10.04 =10.06 =10.08 ZPn=10+0.02×n
Absolute Interval Code Elastically secured portion
ZP=20 ZP=20 ZP=20 ZP=20 ZP=20 2×M5, depth 5 M5×0.8, length 25
Special leaf spring
7 76±0.2 (spring washer and flat round washer)
P * Mounting mating surface
// 0.1 G
AT402E

0.05/500
5 25±0.2

S/N 7200001
Kawasaki , JAPAN

[Notes]
1. G indicates the machine guideway.
2. P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface for mounting the detector head.
3. Q and R indicate the datum surfaces for mounting this linear scale.

Absolute Interval Code

Ref.

(19) (45)
64±2 5
ZP1 ZP2 ZP3 ZP4
1.5±0.1 (Clearance between the detector head and aluminum frame)

First reference point output position =10.02 =10.04 =10.06 =10.08 ZPn=10+0.02×n
Reference point signal output position
ZP=20 ZP=20 ZP=20 ZP=20 ZP=20
27.6 Effective range
G
(14.8)
*Surface of aluminum frame Maximum travel length
13
Air purge
MS×0.8, depth 5

View from X direction

(Surface direction)
Mounting example 1
39.8

G 27.6 AIR AIR

AIR
(14.8)
C/N. 539-375-00

C/N. 539-375-00
C/N. 539-375-00

)
M/N. AT402E-440

M/N. AT402E-440
M/N. AT402E-440

Clearance between the detector

*Surface// of0.1
aluminum
R frame Mounting example 2 Mounting example 3
85

13
1.5±0.1 head and aluminum frame

Air purge
Longitudinal direction
Vertical direction M5×0.8, depth 5
25

39.8

M6 nut
2±0.1 AIR AIR
C/N. 539-375-00

C/N. 539-375-00

37
M/N. AT402E-440

M/N. AT402E-440
(

(Clearance between the detector

) // 0.1 R
85

head and aluminum frame S Mounting mating surface * Longitudinal M5 bolt

// 0.1 P *Vertical direction direction
* Longitudinal direction
25

* Vertical direction M6 nut

2±0.1 35

(Clearance
head and aluminum frame )
between the detector 37
S * Mounting mating surface
M5 bolt

// 0.1 P
* Longitudinal direction
* Vertical direction

26
Dimensions of scale units
Effective range Overall length Maximum travel length
Code L 2 (mm) n (pcs)
L0 (mm) L1 (mm) L 3 (mm)
AT402E-140 140 259 135 150 2
AT402E-240 240 359 185 250 3
AT402E-340 340 459 235 350 4
AT402E-440 440 559 285 450 5
AT402E-540 540 659 335 550 6
AT402E-640 640 759 358 650 7
AT402E-740 740 859 435 750 8
AT402E-840 840 985 485 850 9
AT402E-940 940 1059 535 950 10
AT402E-1040 1040 1159 585 1050 11
AT402E-1140 1140 1259 635 1150 12
AT402E-1240 1240 1359 685 1250 13

Assembly Type AT Series

AT402E-1340 1340 1459 735 1350 14
AT402E-1440 1440 1559 785 1450 15
AT402E-1540 1540 1659 835 1550 16
AT402E-1640 1640 1759 885 1650 17
AT402E-1740 1740 1859 935 1750 18

AT402E
AT402E-1840 1840 1959 985 1850 19
AT402E-2040 2040 2159 1085 2050 21
AT402E-2240 2240 2359 1185 2250 23
AT402E-2440 2440 2559 1285 2450 25
AT402E-2640 2640 2759 1385 2650 27
AT402E-2840 2840 2959 1485 2850 29
AT402E-3040 3040 3159 1585 3050 31

Codes and Order Numbers

Scale unit + single wire cable 3m Scale unit + cable with European CNC manufacturer's connector 3m Scale unit + Cable with FANUC LTD. connector 3m
Code (A Type) (B Type) (C Type)
Order No. Order No. Order No.
AT402E-140 539-371-01 539-371-02 539-371-03
AT402E-240 539-373-01 539-373-02 539-373-03
AT402E-340 539-374-01 539-374-02 539-374-03
AT402E-440 539-375-01 539-375-02 539-375-03
AT402E-540 539-376-01 539-376-02 539-376-03
AT402E-640 539-377-01 539-377-02 539-377-03
AT402E-740 539-378-01 539-378-02 539-378-03
AT402E-840 539-379-01 539-379-02 539-379-03
AT402E-940 539-380-01 539-380-02 539-380-03
AT402E-1040 539-381-01 539-381-02 539-381-03
AT402E-1140 539-382-01 539-382-02 539-382-03
AT402E-1240 539-383-01 539-383-02 539-383-03
AT402E-1340 539-384-01 539-384-02 539-384-03
AT402E-1440 539-385-01 539-385-02 539-385-03
AT402E-1540 539-386-01 539-386-02 539-386-03
AT402E-1640 539-387-01 539-387-02 539-387-03
AT402E-1740 539-388-01 539-388-02 539-388-03
AT402E-1840 539-389-01 539-389-02 539-389-03
AT402E-2040 539-390-01 539-390-02 539-390-03
AT402E-2240 539-391-01 539-391-02 539-391-03
AT402E-2440 539-392-01 539-392-02 539-392-03
AT402E-2640 539-393-01 539-393-02 539-393-03
AT402E-2840 539-394-01 539-394-02 539-394-03
AT402E-3040 539-395-01 539-395-02 539-395-03

27
 Assembly Type AT Series
Square-Wave Signal Output Type Scale Unit (Slim/High-speed types)

AT211
Mounting method: Multi-point fixing (excellent vibration and shock resistance)
Scale alarm display LED
Assembly Type AT Series

Mounting method: Double-end fixing (space-saving type)

Scale alarm display LED

AT211

Features
• This is a slim, sealed scale that can be directly connected to the control unit.
• High speed response up to 120m/min, making it compatible with a wide range of resolutions
from 0.1 to 5μm.
• The multi-point fixing type has excellent vibration resistance.
• Scale alarm display makes for easy maintenance.
• Wide range of specifications enables easy choice to best suit your application.
Single head cable type (no connector)
Specifications
Item Code AT211
Effective range (L0) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 750, 800, 900, 1000, 1100, 1200, 1300, 1400, 1500 mm
Scale reference point 50mm pitch, center point, left end, right end (fixed when shipped)
(3+3L0/1000) μm〔(For L0≦500mm, we can also fabricate a high-accuracy type: (2+2L0/1000) μm)〕
Accuracy (20°C) L0: Effective range (mm)
Vibration resistance 200 m/s2 (Conditions: 55 to 2000Hz) (Multi-point fixing type)
Shock resistance 250 m/s2 (Conditions: half-sine, 11ms) (Multi-point fixing type)
Air supply hole With air supply hole (Multi-point fixing type)
Type PA/PA, PB/PB, PZ/PZ
Output signal
Electrical specifications Conforms to RS422
Main scale grating pitch 20μm
Minimum resolution 0.1, 0.2, 0.5, 1, 2.5, 5μm (fixed when shipped)
Minimum edge interval 125, 250, 333, 500, 1000ns (fixed when shipped)
Maximum response speed 5.4 to 120 m/min (Determined by minimum resolution and minimum edge interval)
Power supply voltage 5VDC±5%
Maximum current consumption 200 mA
Sliding force 5N max.
Operating temperature 0 to 45°C
Storage temperature -20 to 70°C
Operating/storage humidity 20 to 80%RH (no condensation)
Direction switching Standard/Reverse (set when shipped)
Alarm detection Over-speed, scale signal error
Alarm function Alarm output Output for PA/PA, PB/PB, and PZ/PZ are all high-impedance
Alarm display Red LED on NC side connector of signal cable turns on (this does not include single head cable types)

28
Mounting dimensions for multi-point fixing type Unit: mm
ø5 (hole), countersunk ø8.6 on both sides, depth 6
Fixing screw: Hex bolts M4×25

20 // 0.1 G
A
14.3
(4.8) Overall length L 3 (4.8)

L2 100±0.2 100±0.2 100±0.2 L2

Scale unit mounting surface // 0.1 G 5.5
25

AIR
40

AT211
46±0.2

MADE IN JAPAN
58

G: Machine guideway
Air supply hole (M5)
0.5±0.2 19 80±0.2 2×M6×1.0, through hole
(On both sides)
ø9, both sides countersunk,
94 depth 4.5
// 0.1 A
Effective range L 0
(19)

Maximum travel length L1

Assembly Type AT Series

Coil spring Head cable (L=0.3m or 1m)

(30)
(ø9)

Possible to mount scale unit on this surface 2×M4×0.7, depth 5 80±0.2

(34)

(Reverse mounting direction) // 0.2 G

// 0.1 G

AT211
0.03/100

10
Scale unit mounting surface
(Standard mounting direction)
Note: If the head cable is required to lead from the opposite direction, the scale unit can be installed upside down.

Flexible metal conduit Signal cable

(L is 3, 5, or 7m)
(16)

(47.4) (56.4)
(50)
(ø10.5)
(41.2)

ALARM

Scale alarm display LED

Connector for feedback cable
(Included accessory)
User provides the cable and NC side connectors.

Mounting dimensions for multi-point fixing type

Effective range Maximum travel length End surface dimensions Overall length No. of mounting holes on scale unit
Scale unit L0 (mm) L1 (mm) L2 (mm) L3 (mm) (pcs)
AT211- 100A 100 120 19.5 239 3
AT211- 150A 150 170 44.5 289 3
AT211- 200A 200 220 19.5 339 4
AT211- 250A 250 270 44.5 389 4
AT211- 300A 300 330 24.5 449 5
AT211- 350A 350 380 49.5 499 5
AT211- 400A 400 430 24.5 549 6
AT211- 450A 450 480 49.5 599 6
AT211- 500A 500 540 29.5 659 7
AT211- 600A 600 640 29.5 759 8
AT211- 700A 700 740 29.5 859 9
AT211- 750A 750 780 49.5 899 9
AT211- 800A 800 840 29.5 959 10
AT211- 900A 900 940 29.5 1059 11
AT211-1000A 1000 1040 29.5 1159 12
AT211-1100A 1100 1140 29.5 1259 13
AT211-1200A 1200 1240 29.5 1359 14
AT211-1300A 1300 1340 29.5 1459 15
AT211-1400A 1400 1440 29.5 1559 16
AT211-1500A 1500 1540 29.5 1659 17

29
 Mounting dimensions for double-end fixing type Unit: mm
Overall length L4
22 9 Mounting hole pitch L2 9
A
1
Middle support L5
// 0.2 G
// 0.1 G Middle support L7 Scale unit mounting surface

5
Middle support B A ø5 (hole) C
(Fixed) (Fixed) (Fixed)

21.5

17.5
35

AT211
52

28±0.2
10
17
7 Both sides countersunk,
14 depth 6.5
80 ±0.2 2×M6×1.0, through hole G: Machine guideway
1.5±0.2 19
94 ø9, both sides countersunk,
depth 4.5
// 0.1 A
Effective range L0
(19)

Maximum travel length L1

Coil spring Head cable (L=0.3m or 1m)

(50)
(30) 17 Mounting hole pitch L3 17
Assembly Type AT Series

2×M4×0.7, depth 5 80±0.2 2×ø7, through hole

// 0.2 G
(ø9)

// 0.1 G ø14, both sides countersunk,

depth 6.5

1
(34)

11
15

B A ø5 (h C

1
(Fixed) ole)
Middle support (Fixed) (Fixed)
5

Scale unit mounting surface

AT211

1 Middle support L7

Middle support L6

Note: If the head cable is required to lead from the opposite direction, the scale unit can be installed upside down.

Flexible metal conduit Signal cable

(L is 3, 5, or 7m)
(16)

(47.4) (56.4)
(50)
(ø10.5)
(41.2)

Scale alarm display LED

Connector for feedback cable
(Included accessory)
User provides the cable and NC side connectors.

Mounting dimensions for double-end fixing type

travel Mounting hole pitch
Effective range Maximum Overall Middle support (mm) • The number of middle supports attached
Scale unit length (mm) length depends on the effective range.
L0 (mm) L1 (mm) L2 (mm) L3 (mm) L4 (mm) L5 L6 L7
AT211- 100B 100 120 258 242 276 Effective range (mm) Middle support
AT211- 150B 150 170 308 292 326 500 to 1000 A (1 place)
AT211- 200B 200 220 358 342 376 1100 to 1500 B, C (2 places)
AT211- 250B 250 270 408 392 426
— —
AT211- 300B 300 330 468 452 486
AT211- 350B 350 380 518 502 536
AT211- 400B 400 430 568 552 586
AT211- 450B 450 480 618 602 636 —
AT211- 500B 500 540 678 662 696 339 331
AT211- 600B 600 640 778 762 796 389 381
AT211- 700B 700 740 878 862 896 439 431
AT211- 750B 750 780 918 902 936 459 451
AT211- 800B 800 840 978 962 996 489 481
AT211- 900B 900 940 1078 1062 1096 539 531
AT211-1000B 1000 1040 1178 1162 1196 589 581
AT211-1100B 1100 1140 1278 1262 1296 430
AT211-1200B 1200 1240 1378 1362 1396 460
AT211-1300B 1300 1340 1478 1462 1496 — — 490
AT211-1400B 1400 1440 1578 1562 1596 530
AT211-1500B 1500 1540 1678 1662 1696 560

30
Cable pattern Unit: mm

(56.4) (50) Head cable (47.4) (56.4) (50) Head cable

(47.4) (L is 0.3 or 1m)

(ø10.5)
(50) (30) (L is 0.3 or 1m) (50) (30)
(ø6.5)

(ø6.5)
(ø9)

(41.2)
(41.2)

(34)
(34)

ALARM
ALARM

Scale alarm display LED Signal cable

Scale alarm display LED Signal cable
Connector for feedback cable (L is 3, 5, or 7m)
Connector for feedback cable (L is 3, 5, or 7m)
(Included accessory) (Included accessory)
User provides the cable and NC side connectors. User provides the cable and NC side connectors.

Assembly Type AT Series

(56.4) Head cable
(47.4) (L is 0.3 or 1m)
(50) (30) Sheath / Oil-resistant PVC
(ø6.5)

(45)
(ø6.5)

(ø6.5)
(4)
(41.2)

(34)
ALARM

Scale alarm display LED Signal cable

AT211
(L is 3, 5, or 7m) Single head cable type (no connector)
Connector for feedback cable (L is 3, 5, or 9m)
(Included accessory)
Wires (pre-soldered)
User provides the cable and NC side connectors.

31
 Specification
• There is an extensive selection of specifications for the AT211.
• Choose the appropriate numbers and letters below
according to specification required.

Selection Method
If you don't have a specification in mind, choose the
option with the .
* For special applications not shown in the specifications, please contact us.
Additionally, we are also able to meet the 1VP-P Sinusoidal signal output
specification.

How to read the code

AT211 - - -

Effective range list

Code Effective range (mm) Code Effective range (mm) Code Effective range (mm)
0100 100 0450 450 1000 1000
0150 150 0500 500 1100 1100
Assembly Type AT Series

0200 200 0600 600 1200 1200

0250 250 0700 700 1300 1300
0300 300 0750 750 1400 1400
0350 350 0800 800 1500 1500
0400 400 0900 900
AT211

Mounting method
Code
A Multi-point fixing
B Double-end fixing

Scale reference point 50mm pitch interval When the scale reference point is at the center point
(midpoint of effective range)
Code When the scale reference
point is at the left end When the scale reference
Pitch: 50 point is at the right end
1 50mm pitch 10 10
2 Center point
3 Left end
4 Right end
AT211

From the effective range mark Units: mm

Accuracy (20°C)
Code
S (3+3L0/1000) μm Note 1: L0 is the effective range (mm).
H (2+2L0/1000) μm Note 2: Type H is used for effective ranges of 500mm or less.

Specification combination table (resolution, response speed, and minimum edge interval)
Minimum edge interval
(ns)* 125 250 333 500 1000
Resolution (μm)
0.1 A: 43 (710) B: 22 (360) C: 16 (260) D: 11 (180) E: 5.4 (90)
0.2 F: 86 (1400) G: 43 (710) H: 32 (530) J : 22 (360) K: 11 (180)
0.5 L:120 (2000) M:110 (1800) N: 81 (1300) P: 54 (900) Q: 27 (450)
1.0 — R:120 (2000) S:120 (2000) T:110 (1800) U: 54 (900)
2.5 — — — W: 120 (2000) X:120 (2000)
5.0 — — — — Y:120 (2000)
* Codes A to Y show the maximum response speed in m/min, values in ( ) are mm/s.
Note: The minimum edge interval varies 0 to -10% based on the operating environmental conditions.

32
(Example) AT211 - 1 5 0 0 A 1 S - P 1 - A B
Effective range
1500mm Signal cable
Length3m
Mounting method No flexible metal conduit
Multi-point fixing
Scale reference point Head cable
50mm pitch Direction Length 0.3m
Standard: PA goes ahead With flexible metal conduit
Accuracy
(3+3Lo/1000) μm Resolution 0.5μm
Response speed 54m/min
Minimum edge interval: 500ns

Signal cable
Flexible metal
Code Length (L) conduit*1 Scale alarm display LED
A 3m Yes Not waterproof Waterproof connector (special) Scale unit
B 3m No
NC device
MODEL AT211

C 5m Yes
D 5m No (CN5) (CN4) (CN3) (CN2) (CN1)
E 7m Yes Feedback cable Signal cable Head cable
(Provided by user)
F 7m No

Assembly Type AT Series

Included connector (when a signal cable is used)
G*2 3m No
H*2 5m No
J*2 7m No Connector for signal cable (CN3) (pin type) Output circuit specification
X No signal cable 1 8 Pin No. Signal Pin No. Signal PA PA
Phase A
*1 The cable is enclosed in a flexible 1, 2, 13 0V 8 PB PA
PA
metal conduit or else is PVC sheathed. 3, 4, 11 +5V 9 PZ PB

AT211
PB
*2 The connector (CN3) for signal cables 5 PA 10 PZ Phase B
AM26C31 PB
6 PA 12, 14 Not used PB
G, H, and J are half-pitch connectors. 9 15 7 15 Minimum edge interval
PB F.G t t t t
t = 125 to 1000ns
Applicable connector (CN4): PZ
PZ
HDAB-15S (Hirose Electric or equivalent product (D-sub series) may be used) Phase Z
PZ
PZ
60±10µm

Head cable
Flexible
Code Length metal Connector (CN1)
(L) conduit Scale alarm display LED
Not waterproof Waterproof connector (special) Scale unit
A 0.3m Yes Special waterproof
No Special waterproof
NC device

B 0.3m MODEL AT211

C 1m No Special waterproof
D 3m (CN5) (CN4) (CN3) (CN2) (CN1)
E 4m Feedback cable Signal cable Head cable
(Provided by user) Included connector (when a signal cable is used)
F 5m
No No
H 7m
J 8m
K 9m
Connector provided by user
Note: The cable is enclosed in a flexible Scale unit
(CN5)
metal conduit or else is PVC sheathed.
NC device

AT211

Single head cable type (no connector)

MODEL

Single wires Single head cable type (no connector)

ø6.5

4
Detector head
45 L Head cable

ALM signal for single head cable type (no connector) Wire color Signal Wire color Signal
White, black 0V Blue
AT211

1k PB
High Brown, red +5V Purple PZ
Alarm circuit ALM
Orange Gray
PATraveling directionPZ
of detector head
Low (when alarm occurs) Pink
Equivalent to TC7S08 (Toshiba C-MOS) Yellow PA ALM
Green PB

Direction
Code
1 Standard: PA goes ahead Standard: PA
2 Reverse: PB goes ahead PA goes ahead PB
AT211

Traveling direction of detector head Reverse: PA

PB goes ahead PB

* These are settings for when the scale is moving.

33
Standard: PA
PA goes ahead PB
 Assembly Type AT Series
Square Wave Signal Output Type Scale Unit (Standard type)

AT203
Features
• The maximum effective measurement length of 6000mm enables use on large machines (such as for LCD production).
• The travel length of the linear scale is output with 2-phase square wave signals, which can be used as a feedback signal for
NC machine tools.
• The pulse signal unit (PSU) is no longer needed, and the AT203 can be directly connected to the NC machine tool.
• The maximum response speed is 2000mm/s. (When resolution is 1μm and the minimum edge interval is 250ns)
Assembly Type AT Series

Specifications
Item Code AT203
Detection method Photoelectric type transmission linear encoder
Output Two 90° phase-shifted square wave signals
AT203

Output method Differential line driver

Signal output pitch 20μm
Resolution 1, 0.5, 0.1μm (switched using DIP switches)
Effective range 100 to 6000mm
Effective range 100 to 1500mm (3+3L0 /1000) μm
Accuracy (20°C) Effective range 1600 to 3000mm (5+5L0 /1000) μm
Effective range 3250 to 6000mm (5+8L0 /1000) μm
L0: Effective range (mm)
Maximum response speed 11 to 120m/min (Depends on the resolution and minimum edge interval) (See separate table)
Scale reference point pitch 50mm
Main scale thermal expansion coefficient ≈ 8 x10-6 / K
Power supply voltage 5VDC±5%　
Maximum current consumption 250mA
Operating/storage temperature 0 to 45°C, -20 to 70°C (no condensation)
Operating/storage humidity (relative humidity) 20 to 80% RH (no condensation)
Sliding force 5N max.
Signal cable 3m (optional accessory) Part No.09AAA353B
Signal cable 5m (included accessory) Part No.09AAA353A

Pin assignment Output signal waveform

Pin No. Function
1 0V PA
2 0V
3 +5V PA
4 +5V
5 PA PB
6 PA
7 PB PB
8 PB t
9 PZ t: Minimum edge interval
10 PZ
11 +5V PZ
12 N.C.
13 0V PZ
14 N.C.
15 F.G 70±10µm
Connector used: HDAB-15P (Hirose Electric)
Applicable selectable: HDAB-15S (Hirose Electric)

34
Maximum response speed*
Maximum response speed (m/min)
Minimum edge interval Resolution 1 µm 0.5 µm
AT203
0.1 µm
500ns 110 (50) 54 (50) 11 (11)
250ns 120 (50) 110 (50) 22 (22)
Traveling direction of detector head
The indicates the setting when shipped
* Values in ( ) are for effective ranges of 3250mm and more.
* The minimum edge interval varies 0 to -10% based on the operating environmental conditions. AT203

Assembly Type AT Series

Traveling direction of detector head
Direction
Internal DIP switches can be used to switch between the standard and reverse directions.

AT203
Standard: PA
PA goes ahead
AT203
PB

Reverse: PA
Traveling direction of detector head PB goes ahead
PB
* This is in the standard direction when shipped.
AT203

Traveling direction of detector head

Wiring example
Relay cable NC device
R1
5 PA
R2 A
6 PA
R1R1
7 PB PA
Standard: R2 B
PA goes8 ahead
PB
R1 R1
9 PZ PB
R2 C
10 PZ
Scale unit

R1
3 +5V
Reverse: PA
4 +5V +5V
PB goes
11 ahead
+5V PB
1 0V
2 0V * This is in the standard direction when shipped.
GND
13 0V Note 1: When the shield has a drain wire, connect it to Pin 15.
Shell F.G
(Note 2) Note 2: Always ground the shield for relay cables by, for example,
15 F.G
(Note 1) FG connecting it to an earth conductor.

R1 = 560
R2 = 150
Recommended receiver: SN75ALS195(TI)

35
 AT203 scale unit mounting dimensions
• AT203-100 to 3000 Unit: mm
Overall length L3

37.5 Mounting hole pitch L2

20 Maximum travel length L1

A Air supply hole (M5) Scale unit
Effective range L0 // 0.2 G Mounting surface
単位：mm
27
7

27
37

49.5
1.5±0.2

AT203
31±0.3
80

10
MADE IN JAPAN

X
7
29

(46.3) 10

8
12.6
10.5
Assembly Type AT Series

1.5±0.2 36 7 Countersunk, depth 6.5

41.2

11.6 G: Machine guideway

// 0.1 A
Signal cable 60±0.2

10 90 7
// 0.2 G

10
AT203

7
20

20
Countersunk, depth 5

Detector head mounting surface Scale unit

Mounting surface
111 (hex)

View in X direction

Order No. Code Effective range Maximum travel length Mounting hole pitch Overall length L4 (mm) L5 (mm) L6 (mm)
L0 (mm) L1 (mm) L2 (mm) L3 (mm)
539-411-30 AT203-100 100 120 248 268
539-412-30 AT203-150 150 170 298 318
539-413-30 AT203-200 200 220 348 368
539-414-30 AT203-250 250 270 398 418
539-415-30 AT203-300 300 330 458 478
539-416-30 AT203-350 350 380 508 528
539-417-30 AT203-400 400 430 558 578
539-418-30 AT203-450 450 480 608 628
539-419-30 AT203-500 500 540 668 688
539-421-30 AT203-600 600 650 778 798
539-423-30 AT203-700 700 760 888 908
539-424-30 AT203-750 750 810 938 958
539-425-30 AT203-800 800 860 988 1008
539-426-30 AT203-900 900 960 1088 1108
539-427-30 AT203-1000 1000 1060 1188 1208 594
539-428-30 AT203-1100 1100 1160 1288 1308 644
539-429-30 AT203-1200 1200 1260 1388 1408 694
539-430-30 AT203-1300 1300 1360 1488 1508 744
539-431-30 AT203-1400 1400 1460 1588 1608 794
539-432-30 AT203-1500 1500 1560 1688 1708 844
539-433-30 AT203-1600 1600 1690 1818 1838 610
539-434-30 AT203-1700 1700 1790 1918 1938 650
539-435-30 AT203-1800 1800 1890 2018 2038 670
539-436-30 AT203-2000 2000 2100 2228 2248 740
539-437-30 AT203-2200 2200 2300 2428 2448 800
539-438-30 AT203-2400 2400 2500 2628 2648 1314 1300 650
539-439-30 AT203-2500 2500 2600 2728 2748 1364 1340 670
539-440-30 AT203-2600 2600 2700 2828 2848 1414 1400 700
539-441-30 AT203-2800 2800 2900 3028 3048 1514 1500 750
539-442-30 AT203-3000 3000 3100 3228 3248 1614 1600 800

36
 • AT203-100 to 3000
10 L4
L5 Unit: mm
Middle support
L6 L6
20
6 Adjustable
Mounting surface method A
Middle support

6
B A C

28.5
10 L4
Mounting surface method B L5
2.1
L6 L6
20 Adjustable
Middle support 6
6

B A C
23.5

Assembly Type AT Series

•Dimensions L4, L5, and L6 indicate the recommended mounting positions for the middle
supports included with scale units with an effective range of 1000mm and more.
(The position of the middle support is adjustable in the measuring direction.)

AT203
Effective range (mm) Middle support
1000 to 1500 A (1 place)
1600 to 2200 B, C (2 places)
2400 to 3000 A, B, C (3 places)

• AT203-3250 to 6000
Overall length L2
L3
7 L4 L4 L4 L4 7
32.5
A Elastically secured portion le) Elastically Elastically
80 ho
23 Air supply hole (M5)
60 ø 8( Elastically secured portion Mounting block Rigidly fixed portion secured portion // 0.2 G secured portion
2×
7.5
C1

15
15

66±0.3
50.5
95.5

AT203
MADE IN JAPAN

X
29

(0.5)

1.5±0.2

12.6
8

(46.3)
7
Countersunk, depth 6.5
1.5±0.2 36 11.6
60±0.2
41.2

// 0.1 A 90 G: Machine guideway

Effective range L0
Signal cable
Maximum travel length L1

// 0.2 G
Countersunk, depth 5
11 (hex)

View in X direction
Scale unit
2.5

Detector head mounting surface

Mounting surface

Effective range Maximum travel length Overall length No. of mounting

Order No. Code L0 (mm) L1 (mm) L2 (mm) L3 (mm) L4 (mm) blocks
539-443-30 AT203-3250 3250 3350 3464 1725 800
539-444-30 AT203-3500 3500 3600 3714 1850 850
539-445-30 AT203-3750 3750 3850 3964 1975 930
5
539-446-30 AT203-4000 4000 4100 4214 2100 1000
539-447-30 AT203-4250 4250 4350 4464 2225 1050
539-448-30 AT203-4500 4500 4600 4714 2350 1100
539-449-30 AT203-4750 4750 4850 4964 2475 800
539-450-30 AT203-5000 5000 5100 5214 2600 830
539-451-30 AT203-5250 5250 5350 5464 2725 870
7
539-452-30 AT203-5500 5500 5600 5714 2850 910
539-453-30 AT203-5750 5750 5850 5964 2975 950
539-454-30 AT203-6000 6000 6100 6214 3100 1000

37
 Assembly Type AT Series
Slim Sealed Type

AT217-TL / AT217-TL-B
Features
• The displacement of the scale is output in 2-phase square wave signals and it can be used as feedback signal.
• Can be connected directly to NC machine tools.
• Since cable can be separated from the detector head, it is excellent in maintenance.

Specifications
Model AT217-TL /AT217-TL-B
Effective range 100 to 1500mm (20 models)
Assembly Type AT Series

Resolution 1μm
AT217-TL/AT217-TL-B

Accuracy (20°C) (5+5L0 /1000)μm

Output signal Two 90° phase-shifted sinusoidal signals
Maximum response speed 50m/min
Signal output pitch 20µm
Scale reference point Output in 50mm pitch
Operating temperature 0 to 45°C
* The indication accuracy does not include quantizing error. L0: Effective range (mm)

AT217-TL Effective range Signal cable length AT217-TL-B Effective range Signal cable length
Order No. Model L0 (mm) (m) Order No. Model L0 (mm) (m)
529-461-5 AT217-100TL 100 (4") 529-461-7 AT217-100TL-B 100 (4")
529-462-5 AT217-150TL 150 (6") 529-462-7 AT217-150TL-B 150 (6")
529-463-5 AT217-200TL 200 (8") 529-463-7 AT217-200TL-B 200 (8")
529-464-5 AT217-250TL 250 (10") 529-464-7 AT217-250TL-B 250 (10")
529-465-5 AT217-300TL 300 (12") 529-465-7 AT217-300TL-B 300 (12")
529-466-5 AT217-350TL 350 (14") 529-466-7 AT217-350TL-B 350 (14")
529-467-5 AT217-400TL 400 (16") 529-467-7 AT217-400TL-B 400 (16")
529-468-5 AT217-450TL 450 (18") 529-468-7 AT217-450TL-B 450 (18")
529-469-5 AT217-500TL 500 (20") 529-469-7 AT217-500TL-B 500 (20")
529-471-5 AT217-600TL 600 (24") 529-471-7 AT217-600TL-B 600 (24")
5 5
529-473-5 AT217-700TL 700 (28") 529-473-7 AT217-700TL-B 700 (28")
529-474-5 AT217-750TL 750 (30") 529-474-7 AT217-750TL-B 750 (30")
529-475-5 AT217-800TL 800 (32") 529-475-7 AT217-800TL-B 800 (32")
529-476-5 AT217-900TL 900 (36") 529-476-7 AT217-900TL-B 900 (36")
529-477-5 AT217-1000TL 1000 (40") 529-477-7 AT217-1000TL-B 1000 (40")
529-478-5 AT217-1100TL 1100 (44") 529-478-7 AT217-1100TL-B 1100 (44")
529-479-5 AT217-1200TL 1200 (48") 529-479-7 AT217-1200TL-B 1200 (48")
529-480-5 AT217-1300TL 1300 (52") 529-480-7 AT217-1300TL-B 1300 (52")
529-481-5 AT217-1400TL 1400 (56") 529-481-7 AT217-1400TL-B 1400 (56")
529-482-5 AT217-1500TL 1500 (60") 529-482-7 AT217-1500TL-B 1500 (60")

Meaning of Model No.

AT217 - 0100 TL - B AT217 - 0100 TL - B
Signal cable
Blank : Flexible metallic tube Effective range:
B : no Flexible metallic tube 100 to 1500mm
Effective range: Signal cable
100 to 1500mm Blank : Flexible metallic tube
B : no Flexible metallic tube

38
AT217-TL/AT-217-TL-B scale unit mounting dimensions Unit: mm

L4 (Overall length)
9 (.354) L2 (Mounting hole pitch)
Hole on both
sides 6.5 deep

17.5 (.689)
28 (1.102) L1 (Maximum travel range)
22 (.866) 0.2 G
L0 (Effective range)
10 (.393)
17 (.669)

Assembly Type AT Series

(1.378)

AT217-TL/AT217-TL-B
53.5 (2.106)
35

7
(.275)

28±0.4 (1.102)
14 80±0.2 (3.150)
1.5±0.4 19 1.5 (.551) 2- through hole,
(.059) (.748) (.059) 94 (3.701) ø9 hole on both sides,
4.5 deep
0.1 A 170.3 (6.705)

2-ø7 thru hole

ø14 double-sided dril, depth 6.5 80±0.2 (3.150) 2-M4 5mm deep 0.2 G

Scale unit
Main unit mounting face L3 (Mounting hole pitch)

Middle support G: Machine guide

9 (.354) L5 (Distance between mounting hole and (A))
L7 (Distance between (B) and (C))
1 (.039)
(.197)

ø5
Middle support (B) (A) (C)
5
(.846)
21.5

Mounting method A
15 (.591)

Middle support (B) (A) (C)

ø5
5
(.197)

1 (.039)

Mounting method B L7 (Distance between (B) and (C))

17 L6 (Distance between mounting hole and (A))

(.669)

39
 Absolute Scale Unit

ABS AT500 Series

ABS ST1300 Series (Double-end screw-mounting type)

ABS AT1100 Series

ABS ST700 Compact Type Series (scale base type)

Scale Format
Resolution
Applicable Systems*1
0.005μm 0.05μm 0.1μm 0.01μm 0.001μm
FANUC Ltd. FS-i Series, POWER Mate i ABS AT553
ABS AT555
NC control device Serial αi interface ABS AT1153 ABS ST758 ABS ST1351 ABS ST1352

Mitsubishi Electric Corporation ABS AT543

Applicable amplifier: MDS-D/MDS-DH Series ABS AT545 ABS AT1143 ABS ST748 — —
MITSUBISHI CNC Series
Mitsubishi Electric Corporation MR-J4/MR-J3 Series ABS AT545A*2 ABS AT543A ABS ST748A ABS ST1341A ABS ST1342A
MELSERVO Series
Yaskawa Electric Corporation
Absolute Scale Unit

Servopack: SGDV, SGDS — — ABS ST788A ABS ST1381A ABS ST1382A

-VII, Series
Panasonic Corporation, Motor MINAS-A5, A5L, A5N, A5NL Series — ABS AT573A ABS ST778A ABS ST1371A ABS ST1372A
business unit MINAS Series MINAS-A4, A4P, A4N, A4NL Series

Siemens AG DRIVE-CLIQ — ABS AT1123 — ABS AT524 ABS AT527

Nikki Denso Co., Ltd. VC / VC / VPS Series
Servoland Corporation SVF Series — ABS AT503A
Servo Amplifier supporting PMAC JAPAN Co., Ltd. UMAC-Turbo PMAC2
Mitutoyo ENSIS Interface ABS ST708A ABS ST1301A ABS ST1302A
ABS AT505
Other control device manufacturers ABS AT503
ABS AT505A
*1 For details regarding the applicable system, please consult with the individual manufacturer.
*2 Only for the MR-J4/MR-J3 series

Specifications
Series Scale Type Maximum effective Maximum response Accuracy (20°C)*4
range speed
ABS ST700 Compact Type Series Separate Type 6000mm 5m/s (5+5L0/1000) μm
ABS ST1300 Series Separate Type 12000mm 8m/s ±5μm
SC Type 2200mm 2.5m/s (3+3L0/1000) μm
ABS AT500 Series HC Type Assembly Type 1000mm
2.5m/s (1.2m/s*3) (2+2L0/1000) μm
HR/HL Type 350mm
(3+5L/1000) μm L=140 to 2040mm
ABS AT1100 Series Assembly Type 3040mm 3m/s (5+5L/1000) μm L=2240 to 3040mm
*3 Maximum response speed of 0.005μm resolution type
*4 L0=effective range (mm); scale base type accuracy for the ST700 compact type series

40
Absolute system, linear scale principle (e.g. ABS AT500 Series)
[Figure 1]

AT500
MADE IN JAPAN

Signal period (No. of interpolations) Resolution

COA 3768mm (512) 7.36mm

Electrostatic capacitance

MED 58.88mm (512) 0.115mm

FIN 0.92mm (512) Approx. 1.8µm

Absolute Scale Unit

Photoelectric mode

OPT 20µm (400) 0.05µm

(4096) 0.005µm

3768mm

As shown in Figure1, when power is supplied to the linear scale the COA signal position is detected, and based on this the MED
wavelength and position is detected.
In the same way, from the microprocessor that detects the FIN and OPT signal positions, an ultimate absolute value of
resolution of 0.05μm/0.005μm is obtained.

Direction of absolute unit scale data increase

• ABS ST700 Compact Type Series • ABS ST1300 Series

The data will increase when the detector moves in this direction. The data will increase when the detector moves in this direction.

• ABS AT1100 Series • ABS AT500 Series

CL
CL

AT500

CL
CL

The data will increase when the detector moves in this direction. The data will increase when the detector moves in this direction.

41
 Separate Type ABS ST Series
Absolute Scale Unit (High environmental resistance type)

ABS ST700 Compact Type Series

Features Scale base type

• Absolute measurement with separate type scales
• Non-contact detection is optimal for high speed and high acceleration of linear motors, etc.
• Electromagnetic induction principle means scales are unaffected by contamination
• The detector head is approximately 1/3 the previous model size: 50mm (W) × 28mm (D) × 11mm (H)
• Cable outlets can be in four directions, with mounting holes on the top and sides
• Accuracy (5+5L/1000)μm is realized (previous models: (8+5L/1000) μm)
*L: Effective range (mm)
• Compatible with servo amplifiers from a range of companies (high-speed serial interfaces)

How to read the code

ABS ST7 0 8 A L - 100 A - R
Head cable outlets
Absolute type R: Right
A: Scale base type L: Left
Series U: Up
Separate type Absolute linear scale Effective range: 100mm to 6000mm
D: Down
ABS ST700 compact type series (effective range 3m) Blank: 100mm to 3000mm
ABS ST700L compact type series (3.2m effective range 6m) L: 3200mm to 6000mm
Communication method
Interface specification*1 A: 2 wire
0: For Mitutoyo ENSIS high-speed serial Blank: 4 wire
Absolute Scale Unit

ABS ST708A, ST708AL Detector head shape and resolution

ABS ST700 Series

4: Mitsubishi Electric Corporation high-speed serial 8: Shape 50mm (W) × 28mm (D) × 11mm (H)
ABS ST748A, ST748AL
ABS ST748, ST748L Resolution 0.1μm
5: FANUC Ltd. high-speed serial
ABS ST758, ST758L
7: Panasonic Corporation, Motor business unit high-speed serial
ABS ST778A, ST778AL
8: Yaskawa Electric Corporation high-speed serial
ABS ST788A, ST788AL

Applicable interfaces
FANUC Ltd. FS-i Series, POWER Mate i Series
Mitsubishi Electric Corporation MELSERVO MR-J4/MR-J3 Series
Mitsubishi Electric Corporation CNC Series MDS-D/MDS-DH Series
Yaskawa Electric Corporation -VII Series
Applicable interfaces*1 Panasonic Corporation, Motor business unit MINAS-A5, A5L, A5N, A5NL Series, MINAS-A4, A4P, A4N, A4NL
Series
Mitutoyo Corporation ENSIS*2
Nikki Denso Co., Ltd. VC / VC/ VPS Series
Servoland Corporation SVF Series
PMAC JAPAN Co., Ltd. UMAC-Turbo PMAC2
*1 For details (connectivity) regarding the applicable system, please consult with the individual manufacturer.
*2 ENSIS is a registered trademark of Mitutoyo Corporation.

42
Specifications
Item Scale Type Scale base type
Resolution 0.1μm (0.05μm: special order)
Detection method Electromagnetic induction Absolute position detection method*
Shape Separate type scale
Effective range (accuracy guarantee range) 100 to 3000mm / 3200 to 6000mm
Accuracy (20°C) (5+5L/1000) μm L: Effective range mm
Maximum feed speed 5 m/s
Thermal expansion coefficient (12.0±1.5) ×10-6 /°C
(when attached to material equivalent to steel)
Temperature 0 to 50°C
Operating conditions
Humidity 20 to 80%RH
Temperature −20 to 70°C
Storage conditions
Humidity 20 to 80%RH
Power supply voltage 5V±10% (at the detector head)
(Ripple and spike noise should not exceed 100mV)
Current consumption 270mA (Max.)
Vibration resistance 300m/s2 (55 to 2000Hz)
Shock resistance 500m/s2 (half-sine, 11ms)
Length/cable diameter 1m / ø3.8mm (high-flex cable)
Head cable 1) D-sub (15-pin pin type) connector (not waterproof)
Connector 2) D-sub (9-pin socket type) connector (not waterproof): for ST788A
Maximum signal cable length Up to 29m (head cable length included) (Please consult the user's manual)
Detector mounting 1 location each on top and sides
Direction of cable outlet 4 sides (top, bottom, left, right) can be selected
EMC standard CE mark standard
Note: If considering using in an environment in which cutting fluid, etc., is used, please consult our nearest sales department.

System configuration Feedback cable

Yaskawa Electric Corporation serial cable can be
Scale base Detector head Head cable 1m Feedback cable used as the feedback cable for connecting to the
Yaskawa Electric Corporation servo amplifier.
Servo Amplifier Cable type number: JZSP-CLP70- -E (03,05,10,15,20)

Absolute Scale Unit

Connector 2 When wishing to connect a feedback cable to the

ABS ST700 Series

Output connector (Option) Connector 3 Mitsubishi Electric Corporation MR-J4/MR-J3 series,
Supplied by user please reference the code numbers below and order
from our company.
For the MR-J4/MR-J3 series 5m: No.06ACF117A
10m: No.06ACF117B

Output specifications
• ST788A (L) • ST748A (L), ST778A (L), ST708A (L) • ST748 (L), ST758 (L)
Output connector (socket type) 5 1 Output connector (pin type) 1 8
Output connector (pin type) 1 8
D-sub 9-pin D-sub 15-pin D-sub 15-pin
Applicable connector 9 6 Applicable connector 9 15 Applicable connector 9 15
17JE-23090-02 (D2C) (DDK) HDAB-15S (Hirose Electric) HDAB-15S (Hirose Electric)
Alternately, an equivalent product (D-sub series) can Alternately, an equivalent product (D-sub series) can Alternately, an equivalent product (D-sub series) can
be used be used be used
Pin No. Signal Pin No. Signal Pin No. Signal
1 +5V (VCC) 1 0V (GND) 1 0V (GND)
2 RQ/DT (S) 2 0V (GND) 2 0V (GND)
3 +5V (VCC) 3 +5V 3 +5V
4 N.C 4 +5V 4 +5V
5 0V (GND) 5 N.C 5 DT
6 RQ/DT (/S) 6 N.C 6 DT
7 N.C 7 RQ/DT 7 RQ
8 N.C 8 RQ/DT 8 RQ
9 0V (GND) 9 N.C 9 N.C
Connector shell F.G 10 N.C 10 N.C
Note: Leave test terminals (Pin No. 7 and 8) 11 +5V 11 +5V
disconnected during use. 12 N.C 12 N.C
13 0V (GND) 13 0V (GND)
14 N.C 14 N.C
15 F.G 15 F.G
Connector shell F.G Connector shell F.G
Note: Leave test terminals (Pin No. 9 and 10) Note: Leave test terminals (Pin No. 9 and 10)
disconnected during use. disconnected during use.

43
 Mounting dimensions 50 Unit: mm
• Scale base type (100 to 3000mm) 42±0.2 2×M3×0.5, depth 5

7±0.2
30

Scale base length: L1

Scale base center position: L 2
(10) L4±0.2 (L3±0.2) ×n L4±0.2 (10)
44±0.2
22.1±0.2

22±0.2
28±0.2
(25.6)

R4 Model ST7 8A
* S/N F0012345

S/N F0012345

le)
(ho 8 2×M3×0.5, depth 3 +count
4.6
Z× Scale base
Detector head
// 0.1 G

(41.2)
Output connector shape
0.1/1000
ST788A
G: Machine guideway

(32.2)
Up: U Head cable: 1m
(Select) (46.4)
Left: L Right: R
(Select) (Standard) (45.3)
ST7*8A // 0.05 G

(16)
Model S/N F0012345

0.05/1000
(15)

Down: D
(Select) Cable outlet diagram
2.4±0.2

(0.7)
11

C/N. 579-***R08
2.5

M/N. ST7*8A-****A-R
0.4±0.1

-0.05
6.5 +0.1
Distance from scale
surface to detector head

Dimensions
Effective range Maximum L1 L2 L3 L4 No. of
Absolute Scale Unit

Order No. Code travel length n mounting holes

(mm) (mm) (mm) (mm) (mm)
ABS ST700 Series

(mm) Z
579-301* 8 ST7 8 (A) -100A-* 100 110 180 90 80
579-302* 8 ST7 8 (A) -200A-* 200 210 280 140 130
— 3
579-303* 8 ST7 8 (A) -300A-* 300 310 380 190 180
579-304* 8 ST7 8 (A) -400A-* 400 410 480 240 230
2
579-305* 8 ST7 8 (A) -500A-* 500 510 580 290 80
579-306* 8 ST7 8 (A) -600A-* 600 610 680 340 130
5
579-307* 8 ST7 8 (A) -700A-* 700 710 780 390 180
579-308* 8 ST7 8 (A) -800A-* 800 810 880 440 230
579-309* 8 ST7 8 (A) -900A-* 900 910 980 490 80
579-310* 8 ST7 8 (A) -1000A-* 1000 1010 1080 540 130
4 7
579-311* 8 ST7 8 (A) -1100A-* 1100 1110 1180 590 180
579-312* 8 ST7 8 (A) -1200A-* 1200 1210 1280 640 230
579-313* 8 ST7 8 (A) -1300A-* 1300 1310 1380 690 80
579-314* 8 ST7 8 (A) -1400A-* 1400 1410 1480 740 130
6 9
579-315* 8 ST7 8 (A) -1500A-* 1500 1510 1580 790 180
579-316* 8 ST7 8 (A) -1600A-* 1600 1610 1680 840 230
579-317* 8 ST7 8 (A) -1700A-* 1700 1710 1780 890 80
200
579-318* 8 ST7 8 (A) -1800A-* 1800 1810 1880 940 130
8 11
579-319* 8 ST7 8 (A) -1900A-* 1900 1910 1980 990 180
579-320* 8 ST7 8 (A) -2000A-* 2000 2010 2080 1040 230
579-321* 8 ST7 8 (A) -2100A-* 2100 2110 2180 1090 80
579-322* 8 ST7 8 (A) -2200A-* 2200 2210 2280 1140 130
10 13
579-323* 8 ST7 8 (A) -2300A-* 2300 2310 2380 1190 180
579-324* 8 ST7 8 (A) -2400A-* 2400 2410 2480 1240 230
579-325* 8 ST7 8 (A) -2500A-* 2500 2510 2580 1290 80
579-326* 8 ST7 8 (A) -2600A-* 2600 2610 2680 1340 130
12 15
579-327* 8 ST7 8 (A) -2700A-* 2700 2710 2780 1390 180
579-328* 8 ST7 8 (A) -2800A-* 2800 2810 2880 1440 230
579-328* 8 ST7 8 (A) -2900A-* 2900 2910 2980 1490 80
14 17
579-330* 8 ST7 8 (A) -3000A-* 3000 3010 3080 1540 130
The code indicates the interface specification (0,4,5,7,8). ST708A: 0
The Order No. and the * code indicate the direction of the head cable (R, L, U, D). ST748A: 4
The in the Order No. is as described below. ST748: 3
ST758: 5
ST778A: 7
ST788A: 8

44
Mounting dimensions 50
42±0.2
• Scale base type (3200 to 6000mm) 30 2×M3×0.5, depth 5

7±0.2
Unit: mm

Scale base length: L1

Scale base center position: L2
(10) L4±0.2 (L3±0.2)×n L4±0.2 (10)
44±0.2
22.1±0.2
28±0.2

22±0.2
(25.6)

R4 Model ST7*8AL S/N F0212345

S/N F0012345

)
(hole 8 2×M3×0.5, depth 3 +count
4.6 Detector head
Z× Scale base
// 0.1 G

(41.2)
0.1/1000 Output connector shape
G: Machine guideway ST788AL

Up: U

(32.2)
Head cable: 1m
(Select) (46.4)
Left: L Right: R
(Select) (Standard)
(45.3)
ST7*8AL

(16)
Model S/N F0212345

(15)
Down: D // 0.05 G
(Select) Cable outlet diagram 0.05/1000
2.4±0.2

(0.7)
11

C/N. 579-***R08
2.5

M/N. ST7*8AL-****A-R
0.4±0.1

6.5 -0.05
Distance from scale

+0.1
surface to detector head

Dimensions
Maximum

Absolute Scale Unit

Effective range L1 L2 L3 L4
Order No. Code travel length n Z
(mm) (mm) (mm) (mm) (mm)

ABS ST700 Series

(mm)
579-331* 8 ST7 8 (A) L-3200A-* 3200 3210 3280 1640 14 230 17
579-332* 8 ST7 8 (A) L-3400A-* 3400 3410 3480 1740 16 130 19
579-333* 8 ST7 8 (A) L-3600A-* 3600 3610 3680 1840 16 230 19
579-334* 8 ST7 8 (A) L-3800A-* 3800 3810 3880 1940 18 130 21
579-335* 8 ST7 8 (A) L-4000A-* 4000 4010 4080 2040 18 230 21
579-336* 8 ST7 8 (A) L-4200A-* 4200 4210 4280 2140 20 130 23
579-337* 8 ST7 8 (A) L-4400A-* 4400 4410 4480 2240 20 230 23
579-338* 8 ST7 8 (A) L-4600A-* 4600 4610 4680 2340 200 22 130 25
579-339* 8 ST7 8 (A) L-4800A-* 4800 4810 4880 2440 22 230 25
579-340* 8 ST7 8 (A) L-5000A-* 5000 5010 5080 2540 24 130 27
579-341* 8 ST7 8 (A) L-5200A-* 5200 5210 5280 2640 24 230 27
579-342* 8 ST7 8 (A) L-5400A-* 5400 5410 5480 2740 26 130 29
579-343* 8 ST7 8 (A) L-5600A-* 5600 5610 5680 2840 26 230 29
579-344* 8 ST7 8 (A) L-5800A-* 5800 5810 5880 2940 28 130 31
579-345* 8 ST7 8 (A) L-6000A-* 6000 6010 6080 3040 28 230 31
The code indicates the interface specification (0,4,5,7,8).
The Order No. and the * code indicate the direction of the head cable (R, L, U, D).
The in the Order No. is as described below.
ST708AL: 0
ST748AL: 4
ST748L: 3
ST758L: 5
ST778AL: 7
ST788AL: 8

45
 Signal Adjusting Method When Mounting ABS ST700 Series
• In order to perform signal adjustment and confirmation after the unit is mounted, conditioning is necessary using a PC and
application software (ABS ST700 Signal Adjustment Program). (For conditioning, allow a travel distance of at least 60mm.)
The following settings and confirmation are possible with this software:
1) Scale signal automatic adjustment ➞ It is necessary to mount the scale base and detector head detector with specified
dimensions.
2) Scale signal amplitude (signal strength) confirmation
3) Scale origin (absolute position data of zero) setting
4) Absolute position data confirmation
5) Error history clear
6 ABS resultant error checking (effective range 3200mm to 6000mm)

• Required items • “Conversion unit, application software” set

Item Quantity Details Notes Set No. Applicable model Conversion unit Connection cable B
PC* 1 DOS/V (Windows version) Provided by user 06ADZ751 ST70 A, ST70 AL USB-485 DS15P (main unit) MIT cable
USB-485(422)DS15P 06ADT457 ST74 A, ST74 AL USB-485 DS15P (main unit) MEL-J4/J3 cable
Conversion unit 1 (System Sacom Industry Corp.)
06ADP485 ST77 A, ST77 AL USB-485 DS15P (main unit) Y/MAT cable
Connection cable A 1 USB cable Option ST78 A, ST78 AL
Connection cable B 1 RS-485 cable or RS-422 cable (bundle) 06ADZ752 ST74 , ST74 L USB-422 DS15P (main unit) MDS cable
Application 06ADR760 ST75 , ST75 L USB-422 DS15P (main unit) FUNAC cable
1 ABS ST700 Signal Adjustment Program
software
* This program requires a PC with the following operating environment.
PC: DOS/V with Pentium 200 MHz or faster (with USB port)
Memory: 64MB min. (128MB recommended)
Program size: 10MB
OS: Windows95 or later
Monitor: 256 colors, 800×600 or higher (1024×768 or higher is recommended)
USB: COM1 is normally used (other ports can also be used)

• Connection method
Connection cable A Feedback cable
USB port （USB cable） (Supplied by user) Head cable Detector head Scale base
Absolute Scale Unit
ABS ST700 Series

USB-485
PC （422）DS15P

Connection cable B
（RS-485 cable or RS-422 cable） ABS ST700 Series
Grounding
* To prevent the possibility of electric shock the device must be grounded.
* When using Part No.06ADZ751, connect the head cable and the connection cable B together.
* The conversion unit's power source is supplied via connection cable A from the PC USB port.
* In the “Applicable model” column, 1,2,3,4,8,9 apply to . Prepare the appropriate conversion unit and connection cable B for the scale to be used.

Compatibility of Detector Head and Main Scale

• Note that for the ST700 series (compact type) with an Main scale Detector head
AC100V
effective range 3000 mm or less or 3200 mm or more, For effective range of 3200mm to 6000mm Compatible For effective range of 3200mm to 6000mm
the main scale and the detector head are different so they Not compatible
are not compatible. For effective range of 3000mm or less Compatible For effective range of 3000mm or less
• The communication standards are different for the ST7
(L) and ST7 A (L), so they are not compatible.

46
MEMO

47
 Separate Type ABS ST Series
Absolute Scale Unit (High environmental resistance type)

ABS ST1300 Series

Double-end screw-mounting type

Features Double-sided tape mounting type

• Effective length: 12m, Maximum response speed: 8m/s, Resolution: 1nm
• Various interfaces are supported.
• A new detection method has improved robustness in regards to contamination resistance and gap tolerance (in-house testing result).
• There is a choice of mounting method:double-sided tape or double-end screw.
• Signal check program enables integrity check and maintenance.
Meaning of Model No.
ABS ST13 4 1 A - 1200 D
Absolute type Scale mount
D: Double-end mounting
E: Double-sided tape mounting
Series name
Separate Type ABSOLUTE Linear Scale Effective range: 10mm to 12000mm
Transmission method
Interface specification A: When 0, 4, 7, or 8 is selected in the interface specification listed on the left
0: Supports Mitutoyo ENSIS high-speed serial interface Nothing: When 5 is selected in the interface specification listed on the left
ABS ST130 A Resolution
4: Supports Mitsubishi Electric Corporation high-speed serial interface 1: Resolution 0.01µm
ABS ST134 A 2: Resolution 0.001µm
5: Supports FANUC Ltd. high speed serial interface
ABS ST135 A
7: Supports Panasonic Corporation, Motor Business Unit high-speed serial interface
ABS ST137 A
8: Supports Yaskawa Electric Corporation high-speed serial interface
Absolute Scale Unit
ABS ST1300 Series

ABS ST138 A

Available Interfaces
Mitutoyo ENSIS*2
Mitsubishi Electric Corporation, MELSERVO MR-J4 Series
Applicable interfaces*1 FANUC Ltd.
Panasonic Corporation, Motor Business Unit MINAS-A5 Series
Yaskawa Electric Corporation, -VII Series
*1 Be sure to contact each manufacturer for details of the applicable systems (availability of connection).
*2 EENSIS is a registered trademark of Mitutoyo Corporation.

System Configuration About the feedback cable

• For the feedback cable to connect to the Yaskawa Electric Corporation's servo
Tape scale amplifier, a serial cable from Yaskawa Electric Corporation is available.
Cable model No.: JZSP-CLP70-□□-E (03,05,10,15, 20)
• For the feedback cable to connect to Mitsubishi Electric CorporationMR-J4/MR-J3
series, place an order with Mitutoyo with the following order No. specified.
Feedback cable* Feedback cable for MR-J4/MR-J3 series, 5m: No. 06ACF117A, 10m: No.06ACF117B
Detector head

Control device*

Electric connector

Items to be constructed by the client

Note: The feedback cable and control device are to be constructed and connected by the client.
If the feedback cable from Yaskawa Electric Corporation is used, the ST1380A connecting cable (optional: 06AFA434A) is needed.

48
Specifications
Item Model ABS ST1300
Detection method Optical reflection type linear encoder
Metal tape
Scale type
Double-end fixation Double-stick tape fixation
Maximum effective length 12m 3m 3m*1
Fixing part material — Equivalent to iron Other than equivalent to iron
Indication accuracy (20ºC) ±5µm (1m or less) ±5µm (1m or less)
±5µm/m (1.1m or more) *4 ±5µm/m (1.1m or more)
Resolution 0.001µm/0.01µm (switched at shipment)
Maximum response speed 8m/s or less
Applicable Interfaces Mitutoyo ENSIS, Mitsubishi Electric Corporation I/F, FANUC Ltd. I/F, Yaskawa Electric Corporation I/F, Panasonic Corporation I/F
Expansion coefficient ≈ 10x10–6 / K *5 ≈ 10x10–6 / K *2
GAP allowance Initial: ±0.1mm Kinetic: ±0.2mm
Cable length 1m (Highly curved cable)
Detector size 40 (D) × 22 (W) × 23 (H) mm
Operation temperature 0 - 50ºC 0 - 50ºC*1
When mounting: ±10ºC
Storage temperature −20 - 70ºC −20 - 70ºC*3
*1: Double-sided tape fixing type, careful for the condition of operating temperature range, in case that the sealing surface material is except for Fe equivalent.
*2: Thermal expansion coefficient occasionally change, as the difference between scale material’s and sealing surface material’s is excessive.
*3: Double-sided tape fixing type, the accuracy compensation occasionally change, in case that the sealing surface material is except for Fe equivalent and
stored in environment over operating temperature range. Imaging these conditions, double-end fixing type is adopted.
*4: Tension fix is adopted to be stable the temperature property. Because scale tension is longer 250 µm/m, the accuracy compensation is needed over the system.
*5: Thermal expansion coefficient after mounted conform to expansion/contraction of mounted surface by changing outer temperature(Double-end fixing type).

Relation between resolution for each supported interface, maximum effective length, and maximum response speed
Maximum effective length (mm)
Resolution Maximum response speed
Double-end fixation Double-stick tape fixation
10nm 12000mm 3000mm 8m/s
Mitutoyo ENSIS
1nm ±2100mm * ±1500mm * 8m/s
10nm 12000mm 3000mm 4m/s
Mitsubishi Electric Corporation
1nm ±2100mm * ±1500mm * 4m/s
10nm 12000mm 3000mm 8m/s
FANUC Ltd.
1nm ±2100 mm * ±1500mm * 8m/s

Absolute Scale Unit

10nm 12000mm 3000mm 4m/s

ABS ST1300 Series

Panasonic Corporation
1nm ±2100mm * ±1500mm * 0.4m/s
10nm 12000mm 3000mm 8m/s
Yaskawa Electric Corporation
1nm ±1800mm * ±1500mm * 3.6m/s
* When the center of the effective length is set zero (ORIGIN) at default setting. When zero-set is executed at the edge of the scale, the maximum effective length will change.
Max. effective length Zero Max. effective length
Zero position position
Max. effective length /2

Effective length Effective length

(Double-end fixation): −2100 mm - +2100 mm (Double-end fixation/Double-stick tape fixation):
(Mitutoyo ENSIS, Mitsubishi Electric Corporation, 0 mm - +2100 mm
FANUC Ltd., Panasonic Corporation) (Mitutoyo ENSIS, Mitsubishi Electric Corporation,
−1800 mm - +1800 mm FANUC Ltd., Panasonic Corporation)
(Yaskawa Electric Corporation) 0 mm - +1800 mm
(Double-stick tape fixation): −1500 mm - ＋1500 mm (Yaskawa Electric Corporation)

Output specification Pin assignment for Mitsubishi Electric Corporation MELSERVO Pin assignment for FANUC Ltd. α/αi
Pin No. Signal Pin No. Signal Pin No. Signal Pin No. Signal
1, 2 0V (LG) 10 N.C 1, 2 GND 10 N.C
Compatible connector 1 8
3, 4 +5V（P5) 11 +5V (P5) 3, 4 +5V 11 +5V
HDAB-15S
5 N.C 12 N.C 5 SD or SD/REQ 12 N.C
(Standard accessory) 9 15
6 N.C 13 0V (LG) 6 _SD or _SD/_REQ 13 GND
7 MR (RQ/DT) 14 N.C 7* REQ or TEST 14 N.C
8 MRR (_RQ/_DT) 15 F.G 8* _REQ or _TEST 15 F.G
9 N.C Connector shell F.G 9 N.C Connector shell F.G
* TEST/_TEST signal: Used as a communication line when checking signal.
Pin assignment for Panasonic Corporation MINAS Pin assignment for Yaskawa Electric Corporation Σ Series
Pin No. Signal Pin No. Signal Pin No. Signal Pin No. Signal
1, 2 GND 10 N.C 1, 2 GND 10 N.C
3, 4 +5V 11 +5V 3, 4 VCC 11 VCC
5 N.C 12 N.C 5 N.C 12 N.C
6 N.C 13 GND 6 N.C 13 GND
7 +REQ/+SD 14 N.C 7 S 14 N.C
8 -REQ/-SD 15 F.G 8 /S 15 F.G
9 N.C Connector shell F.G 9 N.C Connector shell F.G

49
 External View
• Double-end fixation type (Effective length: 500 to 1000mm)

(5) 10±0.2 65±0.2 ((100±0.2)×n) ±0.3 50.5±0.2 31.5±0.2 (11) M4×8

M4×14
M4×10 (33) (13) 7.5 10±0.2 (Plain washer combined with hex-nut)
M3×6 M4×8

14.8±0.2
// 0.05 G
0.05/1000
2×M3 depth 5 35±0.2 M4×5 G:Machine guideway
M4×5 (Same shape in the rear side) Scale holder "A" length L4 // 0.2 G (4)
(4) (Plain washer combined with hex-nut)
(Plain washer combined with hex-nut)
Scale length L3 M4×5
M4×5 (Sleeve washer combined with hex-nut)
(Sleeve washer combined with hex-nut) 40 30.1

4±0.2
B 2.5 35±0.2 // 0.05 B 15
// 0.1 G X

2.5

17.1
16

16
2×M3 depth 6
17±0.2
X'
(70) Effective length L1 (103)
Overall length L2 30.1
// 0.05 A 23 2±0.1

4±0.2
2×R2.75 0.3

8
22

16
(44)
21
1.3
2×ø2.8 1.2 5.9
25 Section view X-X'
(68) (16.3)
(13.5)

S/N B0700001
ABS ST1340A MADE IN JAPAN
06AEN655 Kawasaki,Japan

Dimensions
• Resolution: 0.01μm
Effective length Scale length Scale length Scale holder A No. of Mass
Order No. Code
L1 (mm) L2 (mm) L3 (mm) L4 (mm) mounting holes (g)

579-434- 1 ST13 1A-00500D 500 673 600 546 5 513

Absolute Scale Unit
ABS ST1300 Series

579-435- 1 ST13 1A-00600D 600 773 700 646 6 534

579-436- 1 ST13 1A-00700D 700 873 800 746 7 556
579-437- 1 ST13 1A-00800D 800 973 900 846 8 578
579-438- 1 ST13 1A-00900D 900 1073 1000 946 9 599
579-439- 1 ST13 1A-01000D 1000 1173 1100 1046 10 621

Dimensions
• Resolution: 0.001μm
Effective length Scale length Scale length Scale holder A No. of Mass
Order No. Code
L1 (mm) L2 (mm) L3 (mm) L4 (mm) mounting holes (g)

579-434- 2 ST13 2A-00500D 500 673 600 546 5 513

579-435- 2 ST13 2A-00600D 600 773 700 646 6 534
579-436- 2 ST13 2A-00700D 700 873 800 746 7 556
579-437- 2 ST13 2A-00800D 800 973 900 846 8 578
579-438- 2 ST13 2A-00900D 900 1073 1000 946 9 599
579-439- 2 ST13 2A-01000D 1000 1173 1100 1046 10 621
indicates the interface specification (0,4,5,7,8).
indicates the interface specification (0,4,5,7,8).

50
External View
• Double-end fixation type (Effective length: 1100 to 12000mm)
(5) 10±0.2 65±0.2 ((100±0.2) ×n) ±0.3 50.5±0.2 31.5±0.2 (11) M4×8
(33) 44 12±0.2 (44) (13) 7.5 10±0.2 M4×14
M4×10 (33) (33) (Plain washer combined with hex-nut)
M3×6 M4×8

14.8±0.2
M3×6 // 0.05 G
M4×5 M4×5 0.05/1000
(Plain washer combined with hex-nut) 2×M3 depth 5 35±0.2 (Plain washer combined with hex-nut) G:Machine guideway
Scale length L3 (Same shape in the rear side) // 0.2 G M4×5
M4×5
(Sleeve washer combined with hex-nut) 1000×m Scale holder "A" length L4 (Sleeve washer combined with hex-nut)
966 (5) 24 (5) 40 30.1
B 2.5 35±0.2 15

4±0.2
5.2

8.7
// 0.1 G // 0.05 B X

2.5

17.1
16

16
B0700001

11.5±0.2

17±0.2
X'
(70) Effective length L1 2×M3 depth 6 (103)
Overall length L2
30.1
(5.9) 2×R2.75 // 0.05 A 23 2±0.1
3.5 0.3

4±0.2
ø3.4

(44)
21
ø6

8
22

16
ø6

2×ø2.8
25
ø3.4

3.5 1.3
(5.9) (68)
1.2 5.9
中間固定部 取付寸法図 Section view X-X'
(16.3)
(13.5)

S/N B0700001
ABS ST1340A MADE IN JAPAN
06AEN655 Kawasaki,Japan

Dimensions
• Resolution: 0.01μm
Effective Scale Scale Scale No. of Effective Scale Scale Scale No. of Mass
Mass Order No. Code length length length holder A mounting
Order No. Code length length length holder A mounting
L1 (mm) L2 (mm) L3 (mm) L4 (mm) holes (g) L1 (mm) L2 (mm) L3 (mm) L4 (mm) holes (g)
579-440- 1 ST13 1A-01100D 1100 1273 1200 146 11 659 579-485- 1 ST13 1A-09200D 9200 9373 9300 246 92 2538
579-441- 1 ST13 1A-01200D 1200 1373 1300 246 12 680 579-486- 1 ST13 1A-09400D 9400 9573 9500 446 94 2581
579-442- 1 ST13 1A-01300D 1300 1473 1400 346 13 702 579-487- 1 ST13 1A-09600D 9600 9773 9700 646 96 2625
579-443- 1 ST13 1A-01400D 1400 1573 1500 446 14 724 579-488- 1 ST13 1A-09800D 9800 9973 9900 846 98 2668
579-444- 1 ST13 1A-01500D 1500 1673 1600 546 15 745 579-489- 1 ST13 1A-10000D 10000 10173 10100 1046 100 2711
579-445- 1 ST13 1A-01600D 1600 1773 1700 646 16 767 579-490- 1 ST13 1A-10200D 10200 10373 10300 246 102 2770
579-446- 1 ST13 1A-01700D 1700 1873 1800 746 17 788 579-491- 1 ST13 1A-10400D 10400 10573 10500 446 104 2814

Absolute Scale Unit

ABS ST1300 Series
579-447- 1 ST13 1A-01800D 1800 1973 1900 846 18 810 579-492- 1 ST13 1A-10600D 10600 10773 10700 646 106 2857
579-448- 1 ST13 1A-02000D 2000 2173 2100 1046 20 853 579-493- 1 ST13 1A-10800D 10800 10973 10900 846 108 2900
579-449- 1 ST13 1A-02200D 2200 2373 2300 246 22 913 579-494- 1 ST13 1A-11000D 11000 11173 11100 1046 110 2943
579-450- 1 ST13 1A-02400D 2400 2573 2500 446 24 956 579-495- 1 ST13 1A-11200D 11200 11373 11300 246 112 3003
579-451- 1 ST13 1A-02500D 2500 2673 2600 546 25 977 579-496- 1 ST13 1A-11400D 11400 11573 11500 446 114 3046
579-452- 1 ST13 1A-02600D 2600 2773 2700 646 26 999 579-497- 1 ST13 1A-11600D 11600 11773 11700 646 116 3089
579-453- 1 ST13 1A-02800D 2800 2973 2800 846 28 1042 579-498- 1 ST13 1A-11800D 11800 11973 11900 846 118 3132
579-499- 1 ST13 1A-12000D 12000 12173 12100 1046 120 3175
579-454- 1 ST13 1A-03000D 3000 3173 3100 1046 30 1085
579-455- 1 ST13 1A-03200D 3200 3373 3300 246 32 1145
579-456- 1 ST13 1A-03400D 3400 3573 3500 446 34 1188 Dimensions
579-457- 1 ST13 1A-03600D 3600 3773 3700 646 36 1231 • Resolution: 0.001μm
579-458- 1 ST13 1A-03800D 3800 3973 3900 846 38 1274
579-459- 1 ST13 1A-04000D 4000 4173 4100 1046 40 1318 Effective Scale Scale Scale No. of Mass
579-460- 1 ST13 1A-04200D 4200 4373 4300 246 42 1377 Order No. Code length length length holder A mounting
L1 (mm) L2 (mm) L3 (mm) L4 (mm) holes (g)
579-461- 1 ST13 1A-04400D 4400 4573 4500 446 44 1420
579-462- 1 ST13 1A-04600D 4600 4773 4700 646 46 1463 579-440- 2 ST13 2A-01100D 1100 1273 1200 146 11 659
579-463- 1 ST13 1A-04800D 4800 4973 4900 846 48 1507 579-441- 2 ST13 2A-01200D 1200 1373 1300 246 12 680
579-464- 1 ST13 1A-05000D 5000 5173 5100 1046 50 1550 579-442- 2 ST13 2A-01300D 1300 1473 1400 346 13 702
579-465- 1 ST13 1A-05200D 5200 5373 5300 246 52 1609 579-443- 2 ST13 2A-01400D 1400 1573 1500 446 14 724
579-466- 1 ST13 1A-05400D 5400 5573 5500 446 54 1652 579-444- 2 ST13 2A-01500D 1500 1673 1600 546 15 745
579-467- 1 ST13 1A-05600D 5600 5773 5700 646 56 1696 579-445- 2 ST13 2A-01600D 1600 1773 1700 646 16 767
579-468- 1 ST13 1A-05800D 5800 5973 5900 846 58 1739 579-446- 2 ST13 2A-01700D 1700 1873 1800 746 17 788
579-469- 1 ST13 1A-06000D 6000 6173 6100 1046 60 1782 579-447- 2 ST13 2A-01800D 1800 1973 1900 846 18 810
579-470- 1 ST13 1A-06200D 6200 6373 6300 246 62 1841 579-448- 2 ST13 2A-02000D 2000 2173 2100 1046 20 853
579-471- 1 ST13 1A-06400D 6400 6573 6500 446 64 1885 579-449- 2 ST13 2A-02200D 2200 2373 2300 246 22 913
579-472- 1 ST13 1A-06600D 6600 6773 6700 646 66 1928 579-450- 2 ST13 2A-02400D 2400 2573 2500 446 24 956
579-473- 1 ST13 1A-06800D 6800 6973 6900 846 68 1971 579-451- 2 ST13 2A-02500D 2500 2673 2600 546 25 977
579-474- 1 ST13 1A-07000D 7000 7173 7100 1046 70 2014 579-452- 2 ST13 2A-02600D 2600 2773 2700 646 26 999
579-475- 1 ST13 1A-07200D 7200 7373 7300 246 72 2074 579-453- 2 ST13 2A-02800D 2800 2973 2900 846 28 1042
579-476- 1 ST13 1A-07400D 7400 7573 7500 446 74 2117 579-454- 2 ST13 2A-03000D 3000 3173 3100 1046 30 1085
579-477- 1 ST13 1A-07600D 7600 7773 7700 646 76 2160 579-455- 2 ST13 2A-03200D 3200 3373 3300 246 32 1145
579-478- 1 ST13 1A-07800D 7800 7973 7900 846 78 2203 579-456- 2 ST13 2A-03400D 3400 3573 3500 446 34 1188
579-479- 1 ST13 1A-08000D 8000 8173 8100 1046 80 2246 579-457- 2 ST13 2A-03600D 3600 3773 3700 646 36 1231
579-480- 1 ST13 1A-08200D 8200 8373 8300 246 82 2306 579-458- 2 ST13 2A-03800D 3800 3973 3900 846 38 1274
579-481- 1 ST13 1A-08400D 8400 8573 8500 446 84 2349 579-459- 2 ST13 2A-04000D 4000 4173 4100 1046 40 1318
579-482- 1 ST13 1A-08600D 8600 8773 8700 646 86 2392 579-460- 2 ST13 2A-04200D 4200 4373 4300 246 42 1377
579-483- 1 ST13 1A-08800D 8800 8973 8900 846 88 2435 indicates the interface specification (0,4,5,7,8).
579-484- 1 ST13 1A-09000D 9000 9173 9100 1046 90 2479 indicates the interface specification (0,4,5,7,8).
Effective length of ST1382A is up to 3600mm.

51
 External View
• Double-end fixation type (Effective length: 10 to 3000mm)

14.8±0.2
A
// 0.05 G
2×M3 depth 5 35±0.2 0.05/1000
(Same shape in the rear side) // 0.2 G
Same shape in the rear side L3 G:Machine guideway
40
2.5 35±0.2
// 0.1 G X (1.45)

2.5

20
S/N B0700001

0.5
17±0.2 2×M3 depth 6
10
10 X' 30
30 30
(50) Effective length L1 (50)
Overall length L2

2×R2.75

// 0.05 A (25.45)
ø3.5

5.5±0.2
23 2±0.1
21
44
26

2×ø2.8

22

13
25
63
0.3(Tape scale)
(0.15)
16.3
13.5

(double-sided tape)
S/N B0700001
ABS ST1340A MADE IN JAPAN
06AEN655 Kawasaki,Japan

Section view X-X'

Dimensions Dimensions
• Resolution: 0.01μm • Resolution: 0.001μm
Effective Scale Scale Effective Scale Scale
Mass Mass
Absolute Scale Unit

Order No. Code length length length Order No. Code length length length
ABS ST1300 Series

(g) (g)
L1 (mm) L2 (mm) L3 (mm) L1 (mm) L2 (mm) L3 (mm)
579-401- 1 ST13 1A-00010E 10 110 70 300 579-401- 2 ST13 2A-00010E 10 110 70 300
579-402- 1 ST13 1A-00025E 25 125 85 300 579-402- 2 ST13 2A-00025E 25 125 85 300
579-403- 1 ST13 1A-00050E 50 150 110 301 579-403- 2 ST13 2A-00050E 50 150 110 301
579-404- 1 ST13 1A-00075E 75 175 135 302 579-404- 2 ST13 2A-00075E 75 175 135 302
579-405- 1 ST13 1A-00100E 100 200 160 303 579-405- 2 ST13 2A-00100E 100 200 160 303
579-406- 1 ST13 1A-00150E 150 250 210 305 579-406- 2 ST13 2A-00150E 150 250 210 305
579-407- 1 ST13 1A-00200E 200 300 260 307 579-407- 2 ST13 2A-00200E 200 300 260 307
579-408- 1 ST13 1A-00250E 250 350 310 309 579-408- 2 ST13 2A-00250E 250 350 310 309
579-409- 1 ST13 1A-00300E 300 400 360 311 579-409- 2 ST13 2A-00300E 300 400 360 311
579-410- 1 ST13 1A-00350E 350 450 410 313 579-410- 2 ST13 2A-00350E 350 450 410 313
579-411- 1 ST13 1A-00400E 400 500 460 315 579-411- 2 ST13 2A-00400E 400 500 460 315
579-412- 1 ST13 1A-00450E 450 550 510 317 579-412- 2 ST13 2A-00450E 450 550 510 317
579-413- 1 ST13 1A-00500E 500 600 560 319 579-413- 2 ST13 2A-00500E 500 600 560 319
579-414- 1 ST13 1A-00600E 600 700 660 323 579-414- 2 ST13 2A-00600E 600 700 660 323
579-415- 1 ST13 1A-00700E 700 800 760 327 579-415- 2 ST13 2A-00700E 700 800 760 327
579-416- 1 ST13 1A-00800E 800 900 860 331 579-416- 2 ST13 2A-00800E 800 900 860 331
579-417- 1 ST13 1A-00900E 900 1000 960 335 579-417- 2 ST13 2A-00900E 900 1000 960 335
579-418- 1 ST13 1A-01000E 1000 1100 1060 339 579-418- 2 ST13 2A-01000E 1000 1100 1060 339
579-419- 1 ST13 1A-01100E 1100 1200 1160 343 579-419- 2 ST13 2A-01100E 1100 1200 1160 343
579-420- 1 ST13 1A-01200E 1200 1300 1260 346 579-420- 2 ST13 2A-01200E 1200 1300 1260 346
579-421- 1 ST13 1A-01300E 1300 1400 1360 350 579-421- 2 ST13 2A-01300E 1300 1400 1360 350
579-422- 1 ST13 1A-01400E 1400 1500 1460 354 579-422- 2 ST13 2A-01400E 1400 1500 1460 354
579-423- 1 ST13 1A-01500E 1500 1600 1560 358 579-423- 2 ST13 2A-01500E 1500 1600 1560 358
579-424- 1 ST13 1A-01600E 1600 1700 1660 362 579-424- 2 ST13 2A-01600E 1600 1700 1660 362
579-425- 1 ST13 1A-01700E 1700 1800 1760 366 579-425- 2 ST13 2A-01700E 1700 1800 1760 366
579-426- 1 ST13 1A-01800E 1800 1900 1860 370 579-426- 2 ST13 2A-01800E 1800 1900 1860 370
579-427- 1 ST13 1A-02000E 2000 2200 2060 378 579-427- 2 ST13 2A-02000E 2000 2100 2060 378
579-428- 1 ST13 1A-02200E 2200 2400 2260 386 579-428- 2 ST13 2A-02200E 2200 2400 2260 386
579-429- 1 ST13 1A-02400E 2400 2500 2460 394 579-429- 2 ST13 2A-02400E 2400 2500 2460 394
579-430- 1 ST13 1A-02500E 2500 2600 2560 398 579-430- 2 ST13 2A-02500E 2500 2600 2560 398
579-431- 1 ST13 1A-02600E 2600 2800 2660 402 579-431- 2 ST13 2A-02600E 2600 2800 2660 402
579-432- 1 ST13 1A-02800E 2800 3000 2860 409 579-432- 2 ST13 2A-02800E 2800 3000 2860 409
579-433- 1 ST13 1A-03000E 3000 3100 3060 417 579-433- 2 ST13 2A-03000E 3000 3100 3060 417
indicates the interface specification (0,4,5,7,8).
indicates the interface specification (0,4,5,7,8).            

52
ABS ST1300 Signal Verification Program
• When the ST1300 signal verification program has been installed in a PC, the program allows signal verification and
maintenance work of the scale by connecting the conversion unit and the PC to the ABS ST1300 series. (The signal
verification work is indispensable. For details, refer to the User's Manual.)
• Description of signal verification program
Item Description Screen photo

Allows checking and judgment of the mounting status by

(1) Verification of the detector head mounting position acquiring data from the tape scale.

Allows checking and judgment of the mounting status by

(2) Verification of the total length of the tape scale acquiring data on the total length of the tape scale.

Allows the scale origin (positional data: 0) to be set at an arbitrary

(3) Setting the scale origin point on the scale.

Allows verification of the current position data with reference

(4) Verification of the absolute position data to the scale origin, and the alarm code and alarm information is
output attached to the position data.

(5) Clearing error records Allows records of error detection in the scale to be cleared.

(6) Writing system parameters Allows system parameters to be written to the detector head.

Absolute Scale Unit

Allows system parameters stored in the detector head to be read

ABS ST1300 Series

(7) Reading system parameters out and displayed.

Allows readout of a detailed internal error code, verification of

(8) Reading and storing error records error code information and saving error codes as an error record
file in the PC.

Allows a check of the acquired data over the total length of the
(9) Signal monitor tape scale.

• Connection details USB port Connecting cable A (USB cable)

Feedback cable
(to be constructed by the client) Head connection unit Detector head Tape scale

PC Conversion unit

Connecting cable B
(RS-485 cable or RS-422 cable) ABS ST1300 series
Ground

Note: To avoid the risk of electric shock, all exposed metalwork in the system must be grounded.

• Order No. of "conversion unit and signal verification program" set

Order No. Conversion unit + Accessories Connecting cable B
06AEX139 Signal verification program MEL-J3 cable (Mitsubishi Electric Corporation)
Conversion unit USB-485 DS15P
06AEX140 Conversion unit manual Y/MAT cable (Yaskawa Electric Corporation)
Device driver (CD-ROM)
06AFA406 Conversion unit USB device MIT cable (Nikki Denso)
Installation manual AC100V
06AFA407 Connecting cable A (USB cable) FANUC cable
Connecting cable B
Note: An Order No. is applicable to each company's interface because connecting cable B differs depending on the interface of the ABS ST1300 series.

53
 Assembly Type ABS AT Series
Absolute Scale Unit (Standard Type)

ABS AT1100 Series

(Resolution 0.05μm Specification)

Features
• This series has adopted a new structure not easily subject to infiltration of coolant and a dust-proof rubber highly resistant to coolant
attack.
　It offers a field support type linear scale with higher reliability than before.
• The sensor-to-scale air gap in this newly developed implementation of Mitutoyo's unique electromagnetic induction method is
approximately 0.4mm – around 4 times as wide as that of a conventional optical or electromagnetic sensor. This much larger
gap makes problems due to the ingress of foreign bodies, etc. unlikely to occur, and is the world's largest in a machine tool-
oriented scale.
• The de facto standard frame multipoint mounting method has been adopted to provide high resistance to vibration and shock.
• The improvement of signal processing technology in the electromagnetic induction type absolute linear encoder has achieved
approximately 6 times higher accuracy than that of previous scales.
• This series is compatible with the high-speed serial interface from leading machine-tool companies, allowing direct connection
to an NC controller.

Meaning of Model No.

ABS AT11 3 -
Effective length
Absolute Scale Unit

Interface specifications
ABS AT1100 Series

Applicable system Scale model

FANUC Ltd., Serial αi interface ABS AT1153
Mitsubishi Electric Corporation, High-speed serial interface ABS AT1143
Siemens AG, DRIVE-CLiQ ABS AT1123
Note: For the details of applicable systems, inquiries should be made of each manufacturer.

Scale configuration
[ABS AT1100 Series]
ABS origin, datum point position for length

ABS AT1153
ABS AT1143

(1) Discrete-wire specifications

(2) FANUC connector specifications

(3) Mitsubishi connector specifications

Datum point position for length

ABS AT1123

20
ABS origin (20mm left from edge of effective length) (4) Siemens connector specifications

54
Specifications
Items Model ABS AT11 3
Detection method Electromagnetic induction
Mounting method Frame multipoint
Reference position for expansion due Refer to the External View diagram (L5)
to temperature variation
Detection method 24 types: 140,240,340,440,540,640,740,840,940,1040,1140,1240,1340,1440,1540,1640,1740,1840,2040,2240,2440,2640,2840,3040
Resolution 0.05µm
Maximum response speed 3m/sec
Effective length L0=140 - 2040mm: 3+5L0/1000 (μm)
Indication accuracy (20ºC)
Effective length L0=2240 - 3040mm: 5+5L0/1000 (μm)
Expansion coefficient ≈8x10 –6 / K
Vibration resistance 196m/s2 (20G) (55 - 2000Hz)
Shock resistance Effective length L0=140~2040mm: 343m/s2 (35G) Effective lengthL0=2240~3040mm: 294m/s2 (30G) (1/2sin 11ms)
Power supply voltage ABS AT1153/1143: DC5V±10% ABS AT1123: DC24V (Conforming to DRIVE-CLiQ)
Maximum current consumption AT1153: 300mA (Max) AT1143: 290mA (Max) AT1123: 140mA (Max)
Operational temperature/humidity ranges 0 to 50ºC 20 to 80%RH (non-condensing)
Storage temperature/humidity ranges -20 to 70ºC 20 to 80%RH (non-condensing)

System Configuration (Example)

[ABS AT1153/AT1143]
Connector A

Discrete-wire specification (Grounding strap)

(NC device)
Scale main unit FANUC connector specification
Signal cable (option)
FANUC connector specification
(Tips)

Absolute Scale Unit

1. The signal cable is an option. The client should construct this according to the situation.

ABS AT1100 Series

2. The client should configure connector A according to the situation.
3. Installation of connector A and the grounding strap is the responsibility of the client.

[ABS AT1123]

To Siemens AG
Signal cable: Siemens I/F specification (optional) DRIVE-CLiQ compatible
controller

Extended connecting cable (1)* Extended connecting cable (2)*

* The extended connecting cables (1) and (2) should be constructed by the client.

Connection example (1) Extended connecting cable (2) To Siemens AG

DRIVE-CLiQ
ABS AT1123 compatible
Total length 29m controller

Connection example (2) Signal cable Extended connecting cable (2) To Siemens AG
Extended connecting cable (1)
DRIVE-CLiQ
ABS AT1123 compatible
Total length 29m controller
• Extended connecting cable (1) SIEMENS AG Model No. 6FX8002-2DC34 -
• Extended connecting cable (2) SIEMENS AG Model No. 6FX8002-2DC30 -
(NOTE)
1. The extended connecting cable(s) should be constructed by the client.
2. Keep the total length of signal cable and extended connecting cable(s) less than 29m.
3. For the signal cable specification and how to obtain, contact Siemens AG.

55
 Output specifications
• ABS AT1153/1143（(discrete-wire) • ABS AT1143
Wire color Signal Mitsubishi connector specifications (MDR)
Brown SD Pin No. Signal 10 . . . 2
Red *SD 1 5V
Orange RQ (REQ) 2 GND
Yellow *RQ (REQ) 3 RQDT
White (2P) +5V 4 RQDT 9 ... 1
Black (2P) GND 7 DT
Shield wire F.G 8 DT
* Cable to be constructed by the client (A total of 29 5.6.9.10 Not used
meters with the signal cable). Connector shell F.G

• ABS AT1153
FANUC connector specifications (FI-20)
Pin No. Signal 10 . . . . . . . . 1
1 SD
2 *SD
5 RQ(REQ)
6 *RQ(REQ) 20 . . . . . . . . 11
12.14 GND
18.20 +5V
16 F.G
3.4.7. - 13.15.17.19 Not used

• ABS AT1123（(discrete-wire) • ABS AT1123

Siemens connector specifications M12 connector specifications
Absolute Scale Unit
ABS AT1100 Series

Wire color Signal Pin No. Signal 3

4 2
White/Brown +24V 1 +24V
5 8
Brown GND 2 TEST
3 RXP 6 1
White/Blue TEST 7
Blue TEST 4 RXN
White/Orange TXP 5 GND
Orange TXN 6 TXN
White/Green RXP 7 TXP
Green RXN 8 TEST
Shield F.G Shield sleeve F.G
Note: Leave test terminals (TEST, TEST) disconnected Note: Leave test terminals (TEST, TEST) disconnected
during use. during use.

56
Cable Dimensions Unit: mm

• ABS AT1153/1143 (discrete-wire specification)

Detector head (custom) side: Waterproof Code No. Model Cable length (m)
06AFG596-1 AT1100F/M discrete-wire cable 1m 1
21

06AFG596-3 AT1100F/M discrete-wire cable 3m 3

ø6.5
16.5 (27) (21) L: Cable length 50 06AFG596-6 AT1100F/M discrete-wire cable 6m 6
06AFG596-9 AT1100F/M discrete-wire cable 9m 9
06AFG596-12 AT1100F/M discrete-wire cable 12m 12
* Discrete-wire cable can not be used for ABS AT1123 (SIEMENS I/F).

• ABS AT1153 (FANUC connector specifications)

NC (FI-20) side: Non-waterproof Code No. Model Cable length (m)
Detector head (custom) side: Waterproof
06AFF921-1 AT1100F Cable FUNUC 1m 1
06AFF921-3 AT1100F Cable FUNUC 3m 3
21

30
ø6.5

06AFF921-6 AT1100F Cable FUNUC 6m 6

16.5 (27) (21) L: Cable length 37 11.5 06AFF921-9 AT1100F Cable FUNUC 9m 9

• ABS AT1143 (Mitsubishi connector specifications)

Detector head (custom) side: Waterproof NC (MDR) side: Non-waterproof Code No. Model Cable length (m)
06AFF957-1 AT1100M Cable MDS-D 1m 1
22.7
21

06AFF957-3 AT1100M Cable MDS-D 3m 3

ø6.5

06AFF957-6 AT1100M Cable MDS-D 3m 6

Absolute Scale Unit

16.5 (27) (21) L: Cable length 29.5 29.5

ABS AT1100 Series

06AFF957-9 AT1100M Cable MDS-D 9m 9

• ABS AT1123 (discrete-wire specification)

Detector head (custom) side: Waterproof Code No. Model Cable length (m)
06AFM103-1 AT1100S discrete-wire cable 1m 1
21

06AFM103-3 AT1100S discrete-wire cable 3m 3

ø6.5

16.5 （27） （21） L:Cable length 50 06AFM103-6 AT1100S discrete-wire cable 3m 6

06AFM103-9 AT1100S discrete-wire cable 3m 9
06AFM103-12 AT1100S discrete-wire cable 9m 12

• ABS AT1123 (M12 connector specifications)

Detector head (custom) side: Waterproof NC (M12) side: Non-waterproof Code No. Model Cable length (m)
06AFL121-1 AT1100S Cable M12 1m 1
ø20
21

06AFL121-3 AT1100S Cable M12 3m 3

ø6.5

16.5 (27) (21) L: Cable length 62 06AFL121-6 AT1100S Cable M12 6m 6

06AFL121-9 AT1100S Cable M12 9m 9

57
 External View Overall length L2=L0+119 Unit: mm
• ABS AT1153/AT1143 62.5 L5
(L4= (L0/2)+65)
L3= (L0/2) +30: Overall length
R
0.1 G
P100×n
0.05/500
35 P100±0.2 (n＋2 or 3) – ø7through hole A B C
Y
6
58.5

X
62±0.2

Signal cable assembly

Signal cable connecting direction can be changed

ø6.5
40±0.2 2×ø7
ABS origin point 94 （45） Hex (both sides), depth 6.5
Datum point
Effective length L0 (M6x1.0, L40)
Maximum travel length L1
*Opposite side of mounting surface
9 76±0.2 2×M5 depth 5
25±0.2
P
0.1 G
0.05/500

Arrow view of "X" 24

Q
)

7
25 head and aluminum frame

Aluminum frame
Fixing example 1 SUS bushings
12.5

19 Fixing example 2 Fixing example 3

Gap between detector

Air purge
M5×0.8 depth 5 Special plate
spring
1.5±0.1
41.8

(Both directions)
17.2

M6x30+ small round

85

0.1 R
(

*Longitudinal plain washers

2±0.1 direction Arrow of "Y"
M5 bolts Note:
(Gap between detector head and aluminum frame) M6 nuts
1. G represents the machine guide.
37 2. P represents the opposite side of the aluminum frame mounting surface.
P
0.1 P
Also, S represents the opposite side of the detector head mounting surface.
3. Q and R represent the linear scale's reference surfaces for mounting.
4. For descriptions of L0 to L5 in the figure, refer to the next page.
5. For the center ø7, it is recommended that it be fastened at two points, A and C.
6. A-ø7 is identical to position C due to its effective length.
At this time, the center ø7 will be 2 points.
Dimensions
Absolute Scale Unit
ABS AT1100 Series

Effective length Maximum travel length Overall length Mounting pitch No. of mounting holes
Order No. Model
L0 (mm) L1 (mm) L2 (mm) L3 (mm) L4 (mm) L5 (mm) n
559-100- 3 AT11 3-140 140 148 259 100 135 90 2
559-101- 3 AT11 3-240 240 248 359 150 185 147.5 3
559-102- 3 AT11 3-340 340 348 459 200 235 190 4
559-103- 3 AT11 3-440 440 448 559 250 285 247.5 5
559-104- 3 AT11 3-540 540 548 659 300 335 290 6
559-105- 3 AT11 3-640 640 648 759 350 385 347.5 7
559-106- 3 AT11 3-740 740 748 859 400 435 390 8
559-107- 3 AT11 3-840 840 848 959 450 485 447.5 9
559-108- 3 AT11 3-940 940 948 1059 500 535 490 10
559-109- 3 AT11 3-1040 1040 1048 1159 550 585 547.5 11
559-110- 3 AT11 3-1140 1140 1148 1259 600 635 590 12
559-111- 3 AT11 3-1240 1240 1248 1359 650 685 647.5 13
559-112- 3 AT11 3-1340 1340 1348 1459 700 735 690 14
559-113- 3 AT11 3-1440 1440 1448 1559 750 785 747.5 15
559-114- 3 AT11 3-1540 1540 1548 1659 800 835 790 16
559-115- 3 AT11 3-1640 1640 1648 1759 850 885 847.5 17
559-116- 3 AT11 3-1740 1740 1748 1859 900 935 890 18
559-117- 3 AT11 3-1840 1840 1848 1959 950 985 947.5 19
559-118- 3 AT11 3-2040 2040 2048 2159 1050 1085 1047.5 21
559-119- 3 AT11 3-2240 2240 2248 2359 1150 1185 1147.5 23
559-120- 3 AT11 3-2440 2440 2448 2559 1250 1285 1247.5 25
559-121- 3 AT11 3-2640 2640 2648 2759 1350 1385 1347.5 27
559-122- 3 AT11 3-2840 2840 2848 2959 1450 1485 1447.5 29
559-123- 3 AT11 3-3040 3040 3048 3159 1550 1585 1547.5 31
* in Order No. and Model indicates the interface specification as follows:
AT1143: 4
AT1153: 5

58
External View Overall length L2=L0+119 Unit: mm
• ABS AT1123 62.5 L5
(L4 = (L0/2)+65)
L3 = (L0/2) + 30: Recommended
R
0.1 G
P100×n
0.05/500
35 P100±0.2 (n+2 or 3) – ø7through hole A B C
6 Y
58.5

X
62±0.2

Hex (both sides), depth

Signal cable connecting Signal cable assembly

ø6.5
direction can be changed 40±0.2
2×ø7 94 (45)
Hex (both sides), depth 6.5 Effective length L0
(20)
M6X1.0, length 40 ABS origin point Maximum travel length L1
Hex (both sides), depth 6.5
P * Opposite side of
0.1 G
mounting surface (M6x1.0, L40)
0.05/500
9 76±0.2 2–M5 depth 5
7 25±0.2

Arrow view of "X"

24 Q
Fixing example 1
Fixing example 2 Fixing example 3
17.2 12.5

19
25 head and aluminum

Aluminum frame
Gap between detector

Air purge
M5×0.8depth 5 SUS bushings
1.5±0.1
41.8

(Both directions)
Special plate spring
85

0.1 R
(

* Longitudinal M6x30+ small round plain washers

2±0.1 direction
Note: Arrow of "Y"
(Gap between detector head and aluminum frame) M6 nuts M5 bolts 1. G represents the machine guide.
37 2. P represents the opposite side of the aluminum frame mounting surface.
P
0.1 P
Also, S represents the opposite side of the detector head mounting surface.
3. Q and R represent the linear scale's reference surfaces for mounting.
4. For descriptions of L0 to L5 in the figure, refer to the next page.
5. For the center ø7, it is recommended that it be fastened at two points, A and C.
6. A-ø7 is identical to position C due to its effective length.
At this time, the center ø7 will be 2 points.
Dimensions

Absolute Scale Unit

ABS AT1100 Series
Effective length Maximum travel Overall length Mounting pitch No. of mounting
Order No. Model length holes
L0 (mm) L1 (mm) L2 (mm) L3 (mm) L4 (mm) L5 (mm) n
559-100-23 AT1123-140 140 148 259 100 135 90 2
559-101-23 AT1123-240 240 248 359 150 185 147.5 3
559-102-23 AT1123-340 340 348 459 200 235 190 4
559-103-23 AT1123-440 440 448 559 250 285 247.5 5
559-104-23 AT1123-540 540 548 659 300 335 290 6
559-105-23 AT1123-640 640 648 759 350 385 347.5 7
559-106-23 AT1123-740 740 748 859 400 435 390 8
559-107-23 AT1123-840 840 848 959 450 485 447.5 9
559-108-23 AT1123-940 940 948 1059 500 535 490 10
559-109-23 AT1123-1040 1040 1048 1159 550 585 547.5 11
559-110-23 AT1123-1140 1140 1148 1259 600 635 590 12
559-111-23 AT1123-1240 1240 1248 1359 650 685 647.5 13
559-112-23 AT1123-1340 1340 1348 1459 700 735 690 14
559-113-23 AT1123-1440 1440 1448 1559 750 785 747.5 15
559-114-23 AT1123-1540 1540 1548 1659 800 835 790 16
559-115-23 AT1123-1640 1640 1648 1759 850 885 847.5 17
559-116-23 AT1123-1740 1740 1748 1859 900 935 890 18
559-117-23 AT1123-1840 1840 1848 1959 950 985 947.5 19
559-118-23 AT1123-2040 2040 2048 2159 1050 1085 1047.5 21
559-119-23 AT1123-2240 2240 2248 2359 1150 1185 1147.5 23
559-120-23 AT1123-2440 2440 2448 2559 1250 1285 1247.5 25
559-121-23 AT1123-2640 2640 2648 2759 1350 1385 1347.5 27
559-122-23 AT1123-2840 2840 2848 2959 1450 1485 1447.5 29
559-123-23 AT1123-3040 3040 3048 3159 1550 1585 1547.5 31
 

59
 Assembly Type ABS AT Series
Absolute Scale Unit (Slim Spar Type)

ABS AT500 Series

(Resolution 0.001µm/0.005µm/0.01µm)

Features ABS AT500-S Series

• This scale achieves the Absolute Linear Scale's highest level resolution of 0.001 µm
• The ABS AT500-S Series realizes vibration resistance of 196m/s2 (20G) and shock-resistance of 343m/s2 ABS AT500-H Series
(35G), suitable for use with heavy cutting equipment and for high-speed machining.
• The ABS AT500-H Series has high repeatability, excellent temperature characteristics, and enables
highly accurate and stable positioning.
• Slim shape is suitable for space-saving designs.
• Compatible with servo amplifiers from a range of companies (high-speed serial interfaces).
How to read the code
ABS AT5 5 - -
Effective range
Interface specification Base position (the 'zero elongation' point)*
Applicable systems Scale code C: Midpoint of effective range
FANUC Ltd. control devices FS-i Series POWER Mate i ABS AT555 L: End of effective range (+ side end)
Mitsubishi Electric Corporation control devices MITSUBISHI CNC Series R: End of effective range (– side end)
ABS AT545 Note: L and R are only for the high-accuracy type
MDS-D/MDS-DH Series
* This refers to the fixed point on the scale around which
Mitsubishi Electric Corporation MR-J4/MR-J3 Series ABS AT545A clamping arrangements ensure that any expansion or
ABS AT505 contraction due to temperature change occurs.
Amplifier compatible with the Mitutoyo ENSIS interface ABS AT505A
Siemens AG DRIVE-CLiQ ABS AT524 AT527 Scale unit specifications
Note: ABS AT5 5 S: High-rigidity type
Communication method H: High-accuracy type
Resolution Blank: Full-duplex communication
7: 0.001μm *only for AT524 A: Half-duplex communication
5: 0.005μm (20μm/4096) AT524/527: DRIVE-CLiQ communicationcommunication
4: 0.01μm *only for AT524
Note: For details regarding the applicable system, please consult with the individual
Absolute Scale Unit

manufacturer.
ABS AT500 Series

Scale configuration ABS origin AT524/527

ABS origin, datum point position AT5□5
(20mm left from edge of effective length)
ABS AT500-S Series
ABS AT5 5-SC
ABS AT5 5A-SC
ABS AT524-SC
ABS AT527-SC Head cable 2m
Signal cable 3m
Model AT5XX-X
Part No. 06ACRXXX

I/F Box AT545A Signal cable 3m

Siemens AG communication cable

(M12 connector specification)
ABS origin AT524/527
ABS AT500-H Series (20mm left from edge of effective length)
ABS origin, datum point position AT5□5
ABS AT5 5-HC
ABS AT5 5A-HC
ABS AT524-HC
ABS AT527-HC ABS origin AT524/527
(20mm left from edge of effective length)
(datum point position) ABS origin AT5□5
ABS AT5 5-HR
ABS AT5 5A-HR
ABS AT524-HR
ABS AT527-HR
ABS origin AT524/527
(20mm left from edge of effective length) ABS origin AT5□5 (datum point position)
ABS AT5 5-HL
ABS AT5 5A-HL
ABS AT524-HL
ABS AT527-HL

60
Specifications
High-rigidity type High-accuracy type
Item     Code ABS AT -SC ABS AT -HC ABS AT -HL/HR
AT5 5/AT5 5A AT524 AT527 AT5 5/AT5 5A AT524 AT527 AT5 5/AT5 5A AT524 AT527
Detection method Electrostatic capacitance type / photoelectric type composite ABS linear encoder
Scale mounting method Multi-point elastic fixing 3 or 5-point elastic fixing 3 or 4-point elastic fixing
End of effective range
Base position Midpoint of effective range HL: (+ side of absolute value)
HR: (– side of absolute value)
Effective range 100 to 2200mm 100 to 1000mm 100 to 350mm
Resolution 0.005μm (20μm/4096)* 0.01μm 0.001μm 0.005μm (20μm/4096)* 0.01μm 0.001μm 0.005μm (20μm/4096)* 0.01μm 0.001μm
Maximum response speed 150m/min (2.5m/s) 72m/min (1.2m/s)
(3+3L 0/1000) μm (2+2L0/1000) μm
Accuracy (20ºC) L0: Effective range (mm) L0: Effective range (mm)
Thermal expansion coefficient ≈ 8.5 x 10 -6 / K
Vibration resistance 2
196m/s (20G) (55 to 2000Hz) 147m/s2 (15G) (55 to 2000Hz)
Shock resistance 343m/s2 (35G) (1/2sin 11ms) 196m/s2 (20G) (1/2sin 11ms)
DC24V (Conforms to DC24V (Conforms to DC24V (Conforms to
Power supply voltage DC5V±5% DRIVE-CLiQ) DC5V±5% DRIVE-CLiQ) DC5V±5% DRIVE-CLiQ)
Maximum current consumption 270mA (Max) 110mA (Max) 270mA (Max) 110mA (Max) 270mA (Max) 110mA (Max)
Maximum sliding force 4N
Operating temperature/humidity 0 to 45ºC 20 to 80%RH (no condensation)
Storage temperature/humidity -20 to 70ºC 20 to 80%RH (no condensation)
Alarm indication Scale alarm indicated by LED on I/F Box
Head cable length 2m
Signal cable length 3m

Absolute Scale Unit

Data at "o" Center of effective range of effective length Center of effective range 20mm
20mm left from edge left from edge 20mm left from edge of
of effective length Center of effective range

ABS AT500 Series

(ABS origin position) effective length
High-speed serial High-speed serial High-speed serial
I/O method DRIVE-CLiQ DRIVE-CLiQ DRIVE-CLiQ
communication communication communication
* Since the 20μm signal is divided by 4096, the actual value is 0.0048828125μm.When setting the minimum resolution on the controller, always enter the actual value.

61
 System configuration (See instruction manual)

Configuration example 1

I/F Box
Scale unit Connector A
Signal cable

I/F Box (Control device)

Scale unit Head cable
Model AT5XX-X

Connector A
Part No. 06ACRXXX

Notes Signal cable

(Grounding conductor)
1. Connector A is to be prepared by the user. (Control device)
2. Connector A and the grounding
Head cableconductor are to be connected by the user.
Model
Part No.
AT5XX-X
06ACRXXX

3. In the above I/F Box

Scale configuration,
unit the maximum cable length is 10m for the head cable and 10m(Grounding
for Connector
the signal Acable (total 20m).
conductor)
(Specifications other than the standard cable length are special order.) Signal cable
(Control device)
Head cable
Model AT5XX-X
Part No. 06ACRXXX

Configuration example 2 (Grounding conductor)

Connector B
I/F Box
Scale unit Connector A
Signal cable
Connector B (Control device)
I/F Box
Scale unit Head cable
Model AT5XX-X

Connector A
Part No. 06ACRXXX

Signal cable
Connector C Feedback cable (Grounding conductor)
(Control device)
Connector B
Head cable
Model AT5XX-X
Part No. 06ACRXXX

I/F Box Connector C

Scale unit Feedback cable (Grounding
Connectorconductor)
A
Notes Signal cable
1. Connectors A/B/C and the feedback cable are to be prepared by the user. (Control device)
2. Connectors A/B/C and the grounding conductor are to be connected by the user.
Head cable
Model AT5XX-X
Part No. 06ACRXXX

3. When fabricating a feedback cable, ensure that the total cable length is 29m orConnector
less. However,
C the maximum head cable length is 10m and the maximum
signal cable length is 5m. Feedback cable (Grounding conductor)
I/F Box
Scale unit Connector B Connector A
Signal cable
ABS AT545A Mitsubishi Electric Corporation
I/F Box MR-J4/MR-J3
Scale unit Head cable
Model AT5XX-X

Connector B Connector A
Part No. 06ACRXXX

Signal cable
Feedback cable (Grounding conductor) Mitsubishi Electric Corporation
Head cable
Model
Part No.
AT5XX-X
06ACRXXX
MR-J4/MR-J3
I/F Box
Absolute Scale Unit

Scale unit FeedbackConnector

cable B(Grounding
Connector
conductor)A
Signal cable
ABS AT500 Series

Mitsubishi Electric Corporation

Head cable
Model
Part No.
AT5XX-X
06ACRXXX
MR-J4/MR-J3
Notes Feedback cable (Grounding conductor)
1. Connectors A/B and the feedback cable are to be prepared by the user.
2. Connectors A/B and the grounding conductor are to be connected by the user.
3. A Mitsubishi Electric Corporation encoder cable can be used as the feedback cable.
Model: MR-JCCBL M-H is the cable length (2 or 5m)
* When using the encoder cable, ensure that the total cable length is 10m or less.
* The feedback cable configuration depends on the system. Please contact Mitsubishi Electric Corporation for details.

［ABS AT524/527］
CL

AT500

Scale unit CL
I/F Box
M12 connector
Siemens AG
Control device
Head cable
Signal cable
MOTION-CONNECT DRIVE-CLiQ cable (M12 connector specification)

Notes
1. Siemens signal cable is to be used. MOTION-CONNECT DRIVE-CLiQ cable (M12 connector specification)
2. Signal cable is to be prepared by the user.
*A total length of head cable and signal cable should be 29 meters or shorter. However, maximum head cable length is 10m.

62
Output specification
• ABS AT555/AT545/AT505 (discrete-wire) • ABS AT505A (discrete-wire)
Wire color Signal Wire color Signal
Brown/Red +5V Brown/Red +5V
White/Black GND White/Black GND
Orange DT Orange N.C
Yellow DT Yellow N.C
Green REQ Green REQ/DT
Blue REQ Blue REQ/DT
Purple Phase A Purple Phase A
Gray Phase B Gray Phase B
Shield FG Shield FG
Notes Notes
1: Phase A and Phase B are used as test signals. 1: Phase A and Phase B are used as test signals.
Keep them disconnected during use. Keep them disconnected during use.
2: Connect the shield wire to the grounding conductor. 2: Connect the shield wire to the grounding conductor.

• ABS AT545A • ABS AT524/AT527

Output connector (pin type): Tyco Electronics Japan DRIVE CLiQ serial communication
Mini-Universal Mate-N-Lock Connector 9P Connector: M12 connector (male)
172169-9 (Housing: Black)
Applicable connector: 172161-9 (Housing: Black)
Pin No. Signal 1 3 Pin No. Signal
4 3
1 MR (REQ/DT) 1 +24V 2
2 TEST 5 8
2 MRR (REQ/DT)
3 RXP 6 1
4 (DT) 7
5 (DT) 4 RXN
7 PS (+5V) 5 GND
8 OV (GND) 6 TXN
9 F.G 7 TXP
7 9 8 TEST
3.6 N.C
Shield sleeve F.G
Note: Leave test terminals (TEST, TEST) disconnected
during use.

Absolute Scale Unit

ABS AT500 Series
Cable dimensions Unit: mm
• ABS AT555/505 47.4 5.5 80 23.1
4

06ACRXXX
AT5X5-S
Part No.
Model
43
41.2

ø16
50
42

ø6.5

D-sub 15-pin (socket type) 68 4

L = 3m
19
16

14
ø6.5

Head cable 2m

• ABS AT545A 40 47.4 5.5 80 23.1

4

06ACRXXX
AT5X5-S
Part No.
Model
43
41.2
19.2

ø16
50
42

ø6.5

D-sub 15-pin (socket type) 68 4

2×M5, through hole
3m Hex socket headed screw M4×20 (spring washer)
19.6

19
16

14

Head cable 2m

63
 Mounting dimensions (SC Type) Unit: mm

15.2
0.2

0.2
16
Rigidly fixed portion Elastically secured portion
(4.8) L2 (4.8)
*Aluminum frame L4 L5±0.3 (P±0.2×n)
R surface (L3) ø5, through hole
0.1 G ø4.5, through hole, ø8.3 countersunk, depth 9 Hex socket headed screw M4×25
0.05/500 (small round plain washer, spring washer)
Hex socket headed screw M4×16

5.5±0.2
Q (small round plain washer, spring washer) *Special leaf spring used (long dashed double-dotted line)
*Aluminum 15.7 (Aluminum frame)
20±0.2
frame surface
Air purge M5×5
30.2

45.2±0.2
44.5

(Both) AIR

63.5
0.1 R
*Vertical direction *Longitudinal direction
1.5±0.2 M6, through hole ø8 countersunk, depth 5
1±0.1 (Gap between detector Hex socket headed screw M4×25
head and aluminum frame) *Longitudinal 66±0.2 (small round plain washer, spring washer)
(Step between detector 23 *Adjusted with special jig direction ABS zero point, base position
head and aluminum frame) 84
S *Mounting mating surface 92 (Detector head)
0.1 P Interface box Effective range L0
*Vertical direction (Note: Not waterproof) Maximum travel length L1
*Longitudinal direction (5.5) 80 (23.1)
Aluminum frame Stainless steel bushing
4

06ACRXXX Part No.

AT5X5-S Model
42
50

Alarm display LED

2×M5, through hole 68 4
Special leaf spring
Hex socket headed screw M4×20 Head cable
(spring washer) Hex socket headed screw M4×25
(small round plain washer, spring washer)
19

Notes
14

Details of elastically secured portion

ø6.5
1. G indicates the machine guideway.
2. P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface
P *Mounting mating surface for mounting the detector head.
0.1 G 3. Q and R indicate the datum surfaces for mounting this linear scale.
0.05/500
SERIAL

Dimensions
No. 1234567

Effective range Maximum travel length Overall length Distance to center Mounting pitch No. of mounting holes
L0 (mm) L1 (mm) L 2 (mm) L 3 (mm) L4 (mm) L5 (mm) P (mm) n
100 120 225 112.5 37.5 150 75 2
200 220 325 162.5 37.5 250 125 2
300 320 425 212.5 37.5 350 175 2
400 420 525 262.5 62.5 400 200 2
500 520 625 312.5 62.5 500 125 4
600 620 725 362.5 62.5 600 150 4
700 720 825 412.5 62.5 700 175 4
800 820 925 462.5 62.5 800 200 4
900 920 1025 512.5 62.5 900 150 6
Absolute Scale Unit

1000 1020 1125 562.5 37.5 1050 175 6

ABS AT500 Series

1100 1120 1225 612.5 87.5 1050 175 6

1200 1220 1325 662.5 62.5 1200 200 6
1300 1320 1425 712.5 112.5 1200 150 8
1400 1420 1525 762.5 62.5 1400 175 8
1500 1520 1625 812.5 112.5 1400 175 8
1600 1620 1725 862.5 62.5 1600 200 8
1800 1820 1925 962.5 87.5 1750 175 10
2000 2020 2125 1062.5 62.5 2000 200 10
2200 2220 2325 1162.5 112.5 2100 175 12

Codes and Order Numbers

• ABS AT555-SC • ABS AT545/AT545A-SC • ABS AT505/AT505A-SC
Order No. Code Order No. Code Order No. Code
539-761-50 AT555- 100-SC 539-731- AT545(A)- 100-SC 539-161- AT505(A)- 100-SC
539-763-50 AT555- 200-SC 539-733- AT545(A)- 200-SC 539-163- AT505(A)- 200-SC
539-765-50 AT555- 300-SC 539-735- AT545(A)- 300-SC 539-165- AT505(A)- 300-SC
539-767-50 AT555- 400-SC 539-737- AT545(A)- 400-SC 539-167- AT505(A)- 400-SC
539-769-50 AT555- 500-SC 539-739- AT545(A)- 500-SC 539-169- AT505(A)- 500-SC
539-771-50 AT555- 600-SC 539-741- AT545(A)- 600-SC 539-171- AT505(A)- 600-SC
539-773-50 AT555- 700-SC 539-743- AT545(A)- 700-SC 539-173- AT505(A)- 700-SC
539-775-50 AT555- 800-SC 539-745- AT545(A)- 800-SC 539-175- AT505(A)- 800-SC
539-776-50 AT555- 900-SC 539-746- AT545(A)- 900-SC 539-176- AT505(A)- 900-SC
539-777-50 AT555-1000-SC 539-747- AT545(A)-1000-SC 539-177- AT505(A)-1000-SC
539-778-50 AT555-1100-SC 539-748- AT545(A)-1100-SC 539-178- AT505(A)-1100-SC
539-779-50 AT555-1200-SC 539-749- AT545(A)-1200-SC 539-179- AT505(A)-1200-SC
539-780-50 AT555-1300-SC 539-750- AT545(A)-1300-SC 539-180- AT505(A)-1300-SC
539-781-50 AT555-1400-SC 539-751- AT545(A)-1400-SC 539-181- AT505(A)-1400-SC
539-782-50 AT555-1500-SC 539-752- AT545(A)-1500-SC 539-182- AT505(A)-1500-SC
539-783-50 AT555-1600-SC 539-753- AT545(A)-1600-SC 539-183- AT505(A)-1600-SC
539-785-50 AT555-1800-SC 539-755- AT545(A)-1800-SC 539-185- AT505(A)-1800-SC
539-786-50 AT555-2000-SC 539-756- AT545(A)-2000-SC 539-186- AT505(A)-2000-SC
539-787-50 AT555-2200-SC 539-757- AT545(A)-2200-SC 539-187- AT505(A)-2200-SC
* The in the Order No. is as follows. AT545 : 50 * The in the Order No. is as follows. AT505 : 50
AT545A: 51 AT505A: 51

64
Mounting dimensions AT524/527-SC Unit: mm

0.2

15.2

0.2
16
Rigidly fixed portion Elastically secured portion
(4.8) L2 (4.8)
L4 L5±0.3 (P±0.2×n)
*Aluminum frame (L3) ø5, through hole
R surface Hex socket headed screw M4×25
0.1 G (small round plain washer, spring washer)
Q ø4.5, through hole, ø8.3 countersunk, depth 9 20±0.2 *Special leaf spring used (long dashed double-dotted line)

5.5±0.2
15.7 0.05/1000
*Aluminum Hex socket headed screw M4×16 (Aluminum frame)
frame surface (small round plain washer, spring washer)
Air purge M5×5
30.2

45.2±0.2
44.5

(Both) 0.1 R

63.5
*Vertical direction *Longitudinal
direction M6, through hole ø8 countersunk, depth 5
1.5±0.2
(Gap between detector (20) Hex socket headed screw M4×25
1±0.1 ABS zero point, 66±0.2 (small round plain washer, spring washer)
(Step between detector 23 head and aluminum frame) base position
*Adjusted with special jig 84 (Detector head)
head and aluminum frame) 92
S *Mounting mating surface
0.1 P *Longitudinal Effective range L0
*Vertical direction direction Maximum travel length L1
*Longitudinal direction Aluminum frame
Head cable Stainless steel bushing

ø6.5
(10.2) 100 (7.7) 28
92±0.2 4 20 Special leaf spring
4

Hex socket headed screw M4×25

32±0.2

(small round plain washer, spring washer)

40

M6, through hole (Details of elastically secured portion)

Alarm display LED Hex socket headed screw M4×28 Notes
(small round plain washer, spring washer) 1. G indicates the machine guideway.
2. P indicates the mating surface for mounting the aluminum frame.
P *Mounting mating surface
0.1 G S indicates the mating surface for mounting the detector head.
0.05/500 3. Q and R indicate the datum surfaces for mounting this linear scale.

Dimensions
Effective range Maximum travel length Overall length Distance to center
Hex socket headed screw M4×28 Mounting pitch No. of mounting holes
L0 (mm) L1 (mm) L 2 (mm) L 3 (mm)
(small 4 (mm)
round plain washer, springLwasher) L5 (mm) P (mm) n
100 120 225 112.5 37.5 150 75 2
200 220 325 162.5 37.5 250 125 2
300 320 425 212.5 37.5 350 175 2
400 420 525 262.5 62.5 400 200 2
500 520 625 312.5 62.5 500 125 4
600 620 725 362.5 62.5 600 150 4
700 720 825 412.5 62.5 700 175 4
800 820 925 462.5 62.5 800 200 4
900 920 1025 512.5 62.5 900 150 6

Absolute Scale Unit

1000 1020 1125 562.5 37.5 1050 175 6

ABS AT500 Series

1100 1120 1225 612.5 87.5 1050 175 6
1200 1220 1325 616.5 62.5 1200 200 6
1300 1320 1425 712.5 112.5 1200 150 8
1400 1420 1525 762.5 62.5 1400 175 8
1500 1520 1625 812.5 112.5 1400 175 8
1600 1620 1725 862.5 62.5 1600 200 8
1800 1820 1925 962.5 87.5 1750 175 10
2000 2020 2125 1062.5 62.5 2000 200 10
2200 2220 2325 1162.5 112.5 2100 175 12

Codes and Order Numbers

• ABS AT524-SC • ABS AT527-SC
Order No. Code Order No. Code
539-901N-13 AT524- 100-SC 539-901N-53 AT527- 100-SC
539-903N-13 AT524- 200-SC 539-903N-53 AT527- 200-SC
539-905N-13 AT524- 300-SC 539-905N-53 AT527- 300-SC
539-907N-13 AT524- 400-SC 539-907N-53 AT527- 400-SC
539-909N-13 AT524- 500-SC 539-909N-53 AT527- 500-SC
539-911N-13 AT524- 600-SC 539-911N-53 AT527- 600-SC
539-913N-13 AT524- 700-SC 539-913N-53 AT527- 700-SC
539-915N-13 AT524- 800-SC 539-915N-53 AT527- 800-SC
539-916N-13 AT524- 900-SC 539-916N-53 AT527- 900-SC
539-917N-13 AT524-1000-SC 539-917N-53 AT527-1000-SC
539-918N-13 AT524-1100-SC 539-918N-53 AT527-1100-SC
539-919N-13 AT524-1200-SC 539-919N-53 AT527-1200-SC
539-920N-13 AT524-1300-SC 539-920N-53 AT527-1300-SC
539-921N-13 AT524-1400-SC 539-921N-53 AT527-1400-SC
539-922N-13 AT524-1500-SC 539-922N-53 AT527-1500-SC
539-923N-13 AT524-1600-SC 539-923N-53 AT527-1600-SC
539-924N-13 AT524-1800-SC 539-924N-53 AT527-1800-SC
539-925N-13 AT524-2000-SC 539-925N-53 AT527-2000-SC
539-926N-13 AT524-2200-SC 539-926N-53 AT527-2200-SC

65
 Mounting dimensions (HC Type) 29 Unit: mm
8
Q *Mounting block (Mounting block) (Mounting block) (Mounting block) (Mounting block)

17.5
0.6
surface

(Mounting block) Rigidly Elastically Elastically

23
R *Aluminum frame surface fixed portion secured portion secured portion
0.1 G
(4.3) 0.05/1000 L2 (4.3)
8 L3±0.3
L4±0.3 ø4.6

17.9±0.1 3.2±0.1
L5±0.2 L6±0.2 L6±0.2 Hex socket headed screw M4×25
11.6
(6.7)

Air purge M5×5 Cumulative tolerance (small round plain washer,

7.2
35.8
(Scale unit)

0.5
for L5 and L6: ±0.3 0.1 R spring washer)
(Both)
27.8
36.8

*Vertical direction
(62)

M6, through hole, ø8 countersunk, depth 5

24.1±0.1

ø7.5, through hole,

ø14 countersunk, depth 9.5 Hex socket headed screw M4×25
*Longitudinal

detector head and

(small round plain washer, spring washer)

54.8
1.6±0.1 22

1.5±0.2
66±0.2

aluminum frame
Hex socket headed screw M6×25 direction

Gap between
24 84 Detector head
Step between detector (small round plain washer, spring washer)
92 ABS zero point, base position
head and aluminum frame S *Mounting mating surface Effective range L0
0.1 P
Interface box Maximum travel length L1
*Vertical direction
*Longitudinal direction (Note: Not waterproof)
(5.5) 80 (23.1)
4

06ACRXXX Part No.

AT5X5-S Model
42
50

Alarm display LED

2×M5, through hole 68 4
Hex socket headed screw M4×20 Head cable
(spring washer) Notes
1. G indicates the machine guideway.
19
14

ø6.5

2. P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface
P *Mounting mating surface for mounting the detector head.
0.1 G 3. Q and R indicate the datum surfaces for mounting this linear scale.
0.05/1000
SERIAL
No. 1234567

Dimensions
Effective range Maximum travel length Overall length Mounting pitch
L0 (mm) L1 (mm) L 2 (mm) L 3 (mm) L4 (mm) L5 (mm) L6 (mm)
100 120 265 249 124.5 — —
150 170 315 299 149.5 — —
200 220 365 349 174.5 — —
250 270 415 399 199.5 — —
300 320 465 449 224.5 — —
350 370 515 499 249.5 — —
Absolute Scale Unit

400 420 565 549 274.5 — —

ABS AT500 Series

450 470 615 599 299.5 — —

500 520 665 649 324.5 — —
600 620 765 749 (374.5) 204.5 170
700 720 865 849 (424.5) 224.5 200
750 770 915 899 (449.5) 224.5 225
800 820 965 949 (474.5) 244.5 230
900 920 1065 1049 (524.5) 264.5 260
1000 1020 1165 1149 (574.5) 284.5 290

Codes and Order Numbers

• ABS AT555-HC • ABS AT545/AT545A-HC • ABS AT505/AT505A-HC
Order No. Code Order No. Code Order No. Code
539-761-60 AT555- 100-HC 539-731- AT545(A)- 100-HC 539-161- AT505(A)- 100-HC
539-762-60 AT555- 150-HC 539-732- AT545(A)- 150-HC 539-162- AT505(A)- 150-HC
539-763-60 AT555- 200-HC 539-733- AT545(A)- 200-HC 539-163- AT505(A)- 200-HC
539-764-60 AT555- 250-HC 539-734- AT545(A)- 250-HC 539-164- AT505(A)- 250-HC
539-765-60 AT555- 300-HC 539-735- AT545(A)- 300-HC 539-165- AT505(A)- 300-HC
539-766-60 AT555- 350-HC 539-736- AT545(A)- 350-HC 539-166- AT505(A)- 350-HC
539-767-60 AT555- 400-HC 539-737- AT545(A)- 400-HC 539-167- AT505(A)- 400-HC
539-768-60 AT555- 450-HC 539-738- AT545(A)- 450-HC 539-168- AT505(A)- 450-HC
539-769-60 AT555- 500-HC 539-739- AT545(A)- 500-HC 539-169- AT505(A)- 500-HC
539-771-60 AT555- 600-HC 539-741- AT545(A)- 600-HC 539-171- AT505(A)- 600-HC
539-773-60 AT555- 700-HC 539-743- AT545(A)- 700-HC 539-173- AT505(A)- 700-HC
539-774-60 AT555- 750-HC 539-744- AT545(A)- 750-HC 539-174- AT505(A)- 750-HC
539-775-60 AT555- 800-HC 539-745- AT545(A)- 800-HC 539-175- AT505(A)- 800-HC
539-776-60 AT555- 900-HC 539-746- AT545(A)- 900-HC 539-176- AT505(A)- 900-HC
539-777-60 AT555-1000-HC 539-747- AT545(A)-1000-HC 539-177- AT505(A)-1000-HC
* The in the Order No. is as follows. AT545 : 60 * The in the Order No. is as follows. AT545 : 60
AT545A: 61 AT545A: 61

66
Mounting dimensions AT524/527-HC 29 Unit: mm
8
Q *Mounting block (Mounting block) (Mounting block) (Mounting block) (Mounting block)

17.5
0.6
surface

(Mounting block) Rigidly Elastically

23
Elastically
fixed portion secured portion secured portion
R *Aluminum frame surface
0.1 G
(4.3) 0.05/1000 L2 (4.3)
8 L3±0.3
L4±0.3 ø4.6
11.6 L5±0.2 L6±0.2 L6±0.2 Hex socket headed screw M4×25

24.1±0.1 17.9±0.1 3.2±0.1

(small round plain washer,
(6.7)
Air purge M5×5 Cumulative tolerance (Scale unit)

7.2
35.8
spring washer)

0.5
for L5 and L6: ±0.3 0.1 R
(Both)
27.8
36.8

*Vertical direction
(62)

(20) M6, through hole, ø8 countersunk, depth 5

22 Hex socket headed screw M4×25

detector head and

1.6±0.1

54.8
(small round plain washer, spring washer)

aluminum frame
ø7.5, through hole, *Longitudinal

1.5±0.2
66±0.2

Gap between
Step between detector 24 ø14 countersunk, depth 9.5 direction
84 (Detector head)
head and aluminum frame Hex socket headed screw M6×25 92
(small round plain washer, spring washer)
Effective range L0
S *Mounting mating surface ABS zero point, Maximum travel length L1
0.1 P
base position

ø6.5
*Vertical direction
*Longitudinal direction
Head cable
(10.2) 100 (7.7) 28 Notes
92±0.2 4 20 1. G indicates the machine guideway.
2. P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface
32±0.2

for mounting the detector head.

40

3. Q and R indicate the datum surfaces for mounting this linear scale.
M6, through hole
Alarm display LED Hex socket headed screw M4×28
(spring washer)
P *Mounting mating surface
0.1 G
0.05/1000

Dimensions
Effective range Maximum travel length Overall length Mounting pitch
L0 (mm) L1 (mm) L 2 (mm) L 3 (mm) L4 (mm) L5 (mm) L6 (mm)
100 120 265 249 124.5 — —
150 170 315 299 149.5 — —
200 220 365 349 174.5 — —
250 270 415 399 199.5 — —
300 320 465 449 224.5 — —
350 370 515 499 249.5 — —

Absolute Scale Unit

400 420 565 549 274.5 — —

ABS AT500 Series

450 470 615 599 299.5 — —
500 520 665 649 324.5 — —
600 620 765 749 (374.5) 204.5 170
700 720 865 849 (424.5) 204.5 200
750 770 915 899 (449.5) 204.5 225
800 820 965 949 (474.5) 244.5 230
900 920 1065 1049 (524.5) 264.5 260
1000 1020 1165 1149 (574.5) 284.5 290

Codes and Order Numbers

• ABS AT524-HC • ABS AT527-HC
Order No. Code Order No. Code
539-901N-23 AT524- 100-HC 539-901N-63 AT527- 100-HC
539-902N-23 AT524- 150-HC 539-902N-63 AT527- 150-HC
539-903N-23 AT524- 200-HC 539-903N-63 AT527- 200-HC
539-904N-23 AT524- 250-HC 539-904N-63 AT527- 250-HC
539-905N-23 AT524- 300-HC 539-905N-63 AT527- 300-HC
539-906N-23 AT524- 350-HC 539-906N-63 AT527- 350-HC
539-907N-23 AT524- 400-HC 539-907N-63 AT527- 400-HC
539-908N-23 AT524- 450-HC 539-908N-63 AT527- 450-HC
539-909N-23 AT524- 500-HC 539-909N-63 AT527- 500-HC
539-911N-23 AT524- 600-HC 539-911N-63 AT527- 600-HC
539-913N-23 AT524- 700-HC 539-913N-63 AT527- 700-HC
539-914N-23 AT524- 750-HC 539-914N-63 AT527- 750-HC
539-915N-23 AT524- 800-HC 539-915N-63 AT527- 800-HC
539-916N-23 AT524- 900-HC 539-916N-63 AT527- 900-HC
539-917N-23 AT524-1000-HC 539-917N-63 AT527-1000-HC

67
 Mounting dimensions (HR Type)
Unit: mm
29
8 (Mounting block)
Q *Mounting (Mounting block) (Mounting block)

0.6

17.5
block surface

(Mounting block) Elastically secured portion Elastically secured portion

23
Rigidly fixed portion
Elastically ø4.6 ø7.5, through hole, ø14 countersunk, depth 9.5
secured portion Hex socket headed screw M4×25 (small round plain washer, spring washer)
Hex socket headed screw M6×25
(4.3) L2 (small round plain washer, spring washer) (4.3)
8 L3±0.3 8
(L4) *Aluminum

17.9±0.1 3.2±0.1
74.5±0.2 (L5) L6±0.2 R frame surface
Air purge M5×5 11.6
(6.7)

35.8
Cumulative tolerance (Scale unit) 0.1 G

7.2
0.5
(Both) for L5 and L6: ±0.3 0.1 R
0.05/1000
27.8
36.8
(62)

*Vertical direction
M6, through hole, ø8 countersunk, depth 5
24.1±0.1

Hex socket headed screw M4×25

and aluminum frame

1.5±0.2
54.8
1.6±0.1 22 Base position 66±0.2 (small round plain washer, spring washer)
*Longitudinal

detector head
Gap between
Step between detector 24 direction 84
head and aluminum frame 92
S *Mounting mating surface ABS zero point (Detector head)
0.1 P Effective range L0
*Vertical direction Interface box Maximum travel length L1
*Longitudinal direction (Note: Not waterproof)
(5.5) 80 (23.1)
4

06ACRXXX Part No.

AT5X5-S Model
50
42

Alarm display LED

2×M5, through hole 68 4
Hex socket headed screw M4×20 Head cable Notes
(spring washer) 1. G indicates the machine guideway.
2. P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface
19
14

ø6.5

for mounting the detector head.

3. Q and R indicate the datum surfaces for mounting this linear scale.
P *Mounting mating surface
0.1 G
0.05/1000
SERIAL
No. 1234567

Dimensions
Effective range Maximum travel length Overall length Mounting pitch
L0 (mm) L1 (mm) L2 (mm) L3 (mm) L4 (mm) L6 (mm)
100 120 265 249 124.5 —
150 170 315 299 149.5 100
Absolute Scale Unit

200 220 365 349 174.5 130

ABS AT500 Series

250 270 415 399 199.5 160

300 320 465 449 224.5 190
350 370 515 499 249.5 220

Codes and Order Numbers

• ABS AT555-HR • ABS AT545/AT545A-HR • ABS AT505/AT505A-HR
Order No. Code Order No. Code Order No. Code
539-761-70 AT555-100-HR 539-731- AT545(A)-100-HR 539-161- AT505(A)-100-HR
539-762-70 AT555-150-HR 539-732- AT545(A)-150-HR 539-162- AT505(A)-150-HR
539-763-70 AT555-200-HR 539-733- AT545(A)-200-HR 539-163- AT505(A)-200-HR
539-764-70 AT555-250-HR 539-734- AT545(A)-250-HR 539-164- AT505(A)-250-HR
539-765-70 AT555-300-HR 539-735- AT545(A)-300-HR 539-165- AT505(A)-300-HR
539-766-70 AT555-350-HR 539-736- AT545(A)-350-HR 539-166- AT505(A)-350-HR
* The in the Order No. is as follows. AT545 : 70 * The in the Order No. is as follows. AT505 : 70
AT545A: 71 AT505A: 71

68
Mounting dimensions AT524/527-HR
Unit: mm
29
8 (Mounting block)
Q *Mounting (Mounting block) (Mounting block)

17.5
0.6
block surface

(Mounting block) Elastically secured portion

23
Rigidly fixed portion Elastically secured portion
Elastically ø7.5, through hole, ø14 countersunk, depth 9.5
secured portion ø4.6 Hex socket headed screw M6×25
Hex socket headed screw M4×25 (small round plain washer, spring washer) (small round plain washer, spring washer)
(4.3) L2 (4.3)
8 L3±0.3
(L4)
74.5±0.2 (L5) L6±0.2 *Aluminum
11.6 R frame surface
17.9±0.1 3.2±0.1
(6.7)

Air purge M5×5 Cumulative tolerance (Scale unit) 0.1 G

7.2
35.8
0.1 R
0.5

for L5 and L6: ±0.3 0.05/1000

(Both)
27.8
36.8

*Vertical direction
(62)

M6, through hole, ø8 countersunk, depth 5

24.1±0.1

Hex socket headed screw M4×25

and aluminum frame

1.6±0.1 22 (20)

54.8
(small round plain washer, spring washer)

1.5±0.2
24 ABS zero point 66±0.2

detector head
Gap between
Step between detector 84 (Detector head)
head and aluminum frame *Longitudinal direction
92
S *Mounting mating surface Effective range L0
0.1 P
Maximum travel length L1
*Vertical direction
*Longitudinal direction
ø6.5

Head cable
(10.2) 100 (7.7) 28 Notes
92±0.2 4 20 1. G indicates the machine guideway.
4

2. P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface
32±0.2

for mounting the detector head.

40

3. Q and R indicate the datum surfaces for mounting this linear scale.
M6, through hole
Alarm display LED Hex socket headed screw M4×28 (spring washer)

S *Mounting mating surface

0.1 G
0.05/1000

Dimensions
Effective range Maximum travel length Overall length Mounting pitch
L0 (mm) L1 (mm) L2 (mm) L3 (mm) L4 (mm) L6 (mm)
100 120 265 249 124.5 —
150 170 315 299 149.5 100

Absolute Scale Unit

200 220 365 349 174.5 130

ABS AT500 Series

250 270 415 399 199.5 160
300 320 465 449 224.5 190
350 370 515 499 249.5 220

Codes and Order Numbers

• ABS AT524-HR • ABS AT527-HR
Order No. Code Order No. Code
539-901N-33 AT524- 100-HR 539-901N-73 AT527- 100-HR
539-902N-33 AT524- 150-HR 539-902N-73 AT527- 150-HR
539-903N-33 AT524- 200-HR 539-903N-73 AT527- 200-HR
539-904N-33 AT524- 250-HR 539-904N-73 AT527- 250-HR
539-905N-33 AT524- 300-HR 539-905N-73 AT527- 300-HR
539-906N-33 AT524- 350-HR 539-906N-73 AT527- 350-HR

69
 Mounting dimensions (HL Type) Unit: mm

29
8
Q *Mounting block (Mounting block) (Mounting block) (Mounting block)

0.6

17.5
surface

(Mounting block) Elastically secured portion Rigidly fixed portion Elastically secured portion

23
Elastically secured portion ø4.6
Hex socket headed screw M4×25 (small round plain washer, spring washer)
(4.3) L2 (4.3)
8 L3 8
R *Aluminum frame surface (L4)

17.9±0.1 3.2±0.1
0.1 G L6±0.2 74.5±0.2 (L5)
11.6 0.05/1000
(6.7)

Air purge M5×5

35.8
Cumulative tolerance

7.2
(Scale unit)

0.5
(Both) 0.1 R for L5 and L6: ±0.3
27.8
36.8

*Vertical direction
(62)

24.1±0.1

ø7.5, through hole,

*Longitudinal M6, through hole, ø8 countersunk, depth 5 Base position

and aluminum frame

1.5±0.2
54.8
1.6±0.1 22 ø14 countersunk, depth 9.5 direction 66±0.2 Hex socket headed screw M4×25

detector head
Gap between
24 Hex socket headed screw M6×25 84 (small round plain washer, spring washer)
Step between detector (small round plain washer, spring washer) ABS zero point
head and aluminum frame 92
(Detector head)
S *Mounting mating surface Effective range L0
0.1 P Maximum travel length L1
*Vertical direction Interface box
*Longitudinal direction (Note: Not waterproof)
(5.5) 80 (23.1)
4

06ACRXXX Part No.

AT5X5-S Model
42
50

Alarm display LED

2×M5, through hole 68 4
Hex socket headed screw M4×20 Head cable
(spring washer)
Notes
19
14

1. G indicates the machine guideway.

ø6.5

2. P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface
P *Mounting mating surface for mounting the detector head.
0.1 G 3. Q and R indicate the datum surfaces for mounting this linear scale.
0.05/1000
SERIAL
No. 1234567

Dimensions
Effective range Maximum travel length Overall length Mounting pitch
L0 (mm) L1 (mm) L2 (mm) L3 (mm) L4 (mm) L6 (mm)
100 120 265 249 124.5 —
150 170 315 299 149.5 100
Absolute Scale Unit

200 220 365 349 174.5 130

ABS AT500 Series

250 270 415 399 199.5 160

300 320 465 449 224.5 190
350 370 515 499 249.5 220

Codes and Order Numbers

• ABS AT555-HL • ABS AT545/AT545A-HL • ABS AT505/AT505A-HL
Order No. Code Order No. Code Order No. Code
539-761-80 AT555-100-HL 539-731- AT545(A)-100-HL 539-161- AT505(A)-100-HR
539-762-80 AT555-150-HL 539-732- AT545(A)-150-HL 539-162- AT505(A)-150-HR
539-763-80 AT555-200-HL 539-733- AT545(A)-200-HL 539-163- AT505(A)-200-HR
539-764-80 AT555-250-HL 539-734- AT545(A)-250-HL 539-164- AT505(A)-250-HR
539-765-80 AT555-300-HL 539-735- AT545(A)-300-HL 539-165- AT505(A)-300-HR
539-766-80 AT555-350-HL 539-736- AT545(A)-350-HL 539-166- AT505(A)-350-HR
* The in the Order No. is as follows. AT545 : 80 * The in the Order No. is as follows. AT505 : 80
AT545A: 81 AT505A: 81

70
Mounting dimensions AT524/527-HC 29
単位：mm
8
Q *Mounting block (Mounting block) (Mounting block) (Mounting block) (Mounting block)

17.5
0.6
surface

(Mounting block) Rigidly Elastically

23
Elastically
fixed portion secured portion secured portion
R *Aluminum frame surface
0.1 G
(4.3) 0.05/1000 L2 (4.3)
8 L3±0.3
L4±0.3 ø4.6
11.6 L5±0.2 L6±0.2 L6±0.2 Hex socket headed screw M4×25

24.1±0.1 17.9±0.1 3.2±0.1

(small round plain washer,
(6.7)

Air purge M5×5 Cumulative tolerance (Scale unit)

7.2
35.8
spring washer)

0.5
for L5 and L6: ±0.3 0.1 R
(Both)
27.8
36.8

*Vertical direction
(62)

(20) M6, through hole, ø8 countersunk, depth 5

22 Hex socket headed screw M4×25

detector head and

1.6±0.1

54.8
(small round plain washer, spring washer)

aluminum frame
ø7.5, through hole, *Longitudinal

1.5±0.2
66±0.2

Gap between
Step between detector 24 ø14 countersunk, depth 9.5 direction
84 (Detector head)
head and aluminum frame Hex socket headed screw M6×25 92
(small round plain washer, spring washer)
Effective range L0
S *Mounting mating surface ABS zero point, Maximum travel length L1
0.1 P
base position

ø6.5
*Vertical direction
*Longitudinal direction
Head cable
(10.2) 100 (7.7) 28 Notes
92±0.2 4 20 1. G indicates the machine guideway.
2. P indicates the mating surface for mounting the aluminum frame. S indicates the mating surface
32±0.2

for mounting the detector head.

40

3. Q and R indicate the datum surfaces for mounting this linear scale.
M6, through hole
Alarm display LED Hex socket headed screw M4×28
(spring washer)
P *Mounting mating surface
0.1 G
0.05/1000

Dimensions
Effective range Maximum travel length Overall length Mounting pitch
L0 (mm) L1 (mm) L2 (mm) L3 (mm) L4 (mm) L5 (mm) L6 (mm)
100 120 265 249 124.5 — —
150 170 315 299 149.5 — —
200 220 365 349 174.5 — —
250 270 415 399 199.5 — —
300 320 465 449 224.5 — —
350 370 515 499 249.5 — —

Absolute Scale Unit

400 420 565 549 274.5 — —

ABS AT500 Series

450 470 615 599 299.5 — —
500 520 665 649 324.5 — —
600 620 765 749 (374.5) 204.5 170
700 720 865 849 (424.5) 204.5 200
750 770 915 899 (449.5) 204.5 225
800 820 965 949 (474.5) 244.5 230
900 920 1065 1049 (524.5) 264.5 260
1000 1020 1165 1149 (574.5) 284.5 290

Codes and Order Numbers

• ABS AT524-HC • ABS AT527-HC
Order No. Code Order No. Code
539-901N-23 AT524- 100-HC 539-901N-63 AT527- 100-HC
539-902N-23 AT524- 150-HC 539-902N-63 AT527- 150-HC
539-903N-23 AT524- 200-HC 539-903N-63 AT527- 200-HC
539-904N-23 AT524- 250-HC 539-904N-63 AT527- 250-HC
539-905N-23 AT524- 300-HC 539-905N-63 AT527- 300-HC
539-906N-23 AT524- 350-HC 539-906N-63 AT527- 350-HC
539-907N-23 AT524- 400-HC 539-907N-63 AT527- 400-HC
539-908N-23 AT524- 450-HC 539-908N-63 AT527- 450-HC
539-909N-23 AT524- 500-HC 539-909N-63 AT527- 500-HC
539-911N-23 AT524- 600-HC 539-911N-63 AT527- 600-HC
539-913N-23 AT524- 700-HC 539-913N-63 AT527- 700-HC
539-914N-23 AT524- 750-HC 539-914N-63 AT527- 750-HC
539-915N-23 AT524- 800-HC 539-915N-63 AT527- 800-HC
539-916N-23 AT524- 900-HC 539-916N-63 AT527- 900-HC
539-917N-23 AT524-1000-HC 539-917N-63 AT527-1000-HC

71
 Assembly Type ABS AT Series
Absolute Scale Unit (Slim Spar Type)

ABS AT500 Series

(Resolution 0.05µm)
ABS AT500-S Series

ABS AT500-H Series

Features
• High-performance Absolute Linear Scale with a resolution of 0.05µm and maximum response speed of 150 m/min.
• The ABS AT500-S Series realizes vibration resistance of 196m/s2 (20G) and shock-resistance of 343m/s2 (35G), suitable for use
with heavy cutting equipment and for high-speed machining.
• The ABS AT500-H Series has high repeatability, excellent temperature characteristics, and enables highly accurate and stable
positioning.
• Slim shape is suitable for space-saving designs.
• Compatible with servo amplifiers from a range of companies (high-speed serial interfaces).

How to read the code

ABS AT5 3 - Effective range -
Interface specification
Scale code Base position (the 'zero elongation' point)*
Applicable systems C: Midpoint of effective range
FANUC Ltd. control devices FS-i Series POWER Mate i ABS AT553 L: End of effective range (+ side end)
Mitsubishi Electric Corporation control devices MITSUBISHI CNC Series R: End of effective range (– side end)
MDS-D/MDS-DH Series ABS AT543 Note: L and R are only for the high-accuracy type
Mitsubishi Electric Corporation * This refers to the base point of fixed point on the scale around
ABS AT543A which clamping arrangements ensure that any expansion or
MR-J4/MR-J3 Series
contraction due to temperature change occurs.
Panasonic Corporation, Motor business unit
MINAS-A5, A5L, A5N, A5NL Series ABS AT573A
MINAS-A4, A4P, A4N, A4NL Series Scale unit specifications
Amplifier compatible with the Mitutoyo ENSIS interface S: High-rigidity type
Nikki Denso Co., Ltd. VCII/VC/VPS Series*1 H: High-accuracy type
Servoland Corporation SVF Series*1 ABS AT503A
PMAC JAPAN Co., Ltd. UMAC-Turbo PMAC2
Other machine types
Absolute Scale Unit

ABS AT503
ABS AT500 Series

*1 For connection to ABS AT503A

Note: ABS AT5 3
Communication method
Blank: Full-duplex communication
A: Half-duplex communication
Note: For details regarding the applicable system, please consult with the individual manufacturer.

Scale configuration (ABS zero point, base position)

ABS AT500-S Series
ABS AT5 3-SC AT500
MADE IN JAPAN

ABS AT5 3A-SC

Head cable 2m Mitutoyo Corporation
Signal cable 3m
ALARM 1234567 No.
SERIAL

AT��� Model

AT545A signal cable 3m

I/F Box
ABS AT500-H Series
(ABS zero point, base position)
ABS AT5 3-HC
ABS AT5 3A-HC AT500
MADE IN JAPAN

Base position
ABS zero point
ABS AT5 3-HL
ABS AT5 3A-HL AT500
MADE IN JAPAN

Base position ABS zero point

ABS AT5 3-HR
ABS AT5 3A-HR AT500
MADE IN JAPAN

72
Specifications
High-rigidity type High-accuracy type
Item Code
ABS AT5 3-SC ABS AT5 3-HC ABS AT5 3-HL/HR
Detection method Electrostatic capacitance type / photoelectric type composite ABS linear encoder
How to mount the scale unit Multi-point elastic fixing 3 or 5-point elastic fixing 3 or 4-point elastic fixing
End of effective range
Base position Midpoint of effective range HL: (+ side of absolute value)
HR: (– side of absolute value)
Effective range 100 to 2200mm 100 to 1000mm 100 to 350mm
Resolution 0.05μm
Maximum response speed 150m/min (2.5m/s)
(3+3L0/1000) μm (2+2L0/1000 ) μm
Accuracy (20°C) L0: Effective range (mm) L0: Effective range (mm)
Thermal expansion coefficient ≈ 8.5 x 10-6 / K
Vibration resistance 196 m/s2 (20G) (55 to 2000Hz) 147 m/s2 (15G) (55 to 2000Hz)
2
Shock resistance 343m/s (35G) (half-sine 11ms) 196m/s2 (20G) (half-sine 11ms)
Power supply voltage 5VDC±5%
Maximum current consumption 270mA (Max)
Maximum sliding force 4N
Operating temperature/humidity 0 to 45°C, 20 to 80%RH (no condensation)
Storage temperature/humidity -20 to 70°C, 20 to 80%RH (no condensation)
Alarm indication Scale alarm indicated by LED on I/F Box
Head cable length 2m
Signal cable length 3m

System configuration (See instruction manual)

Configuration example 1

AT500
MADE IN JAPAN

Scale unit I/F Box

Signal cable Connector A
Mitutoyo Corporation

(Control device)
ALARM 1234567 No.
SERIAL

AT��� Model

Absolute Scale Unit

Head cable
Notes

ABS AT500 Series

(Grounding conductor)
1. Connector A is to be prepared by the user.
2. Connector A and the grounding conductor are to be connected by the user.
3. In the above configuration, the maximum cable length is 10m for the head cable and 10m for the signal cable Connector B
(total 20m).
(Specifications other than the standard cable length are special order.)
Scale unit I/F Box Signal cable Connector A
Configuration example 2 MADE IN JAPAN Mitutoyo Corporation

(Control device)
ALARM 1234567 No.
SERIAL
AT∃∃∃ Model

Head cable
Connector C Feedback cableConnector B
(Grounding conductor)

Scale unit I/F Box Signal cable Connector A

MADE IN JAPAN Mitutoyo Corporation

(Control device)
ALARM 1234567 No.
SERIAL
AT∃∃∃ Model

Notes Head cable

1. Connectors A/B/C and the feedback cable are to be prepared by the user. Connector C Feedback cable (Grounding conductor)
2. Connectors A/B/C and the grounding conductor are to be connected by the user.
3. When fabricating a feedback cable, ensure that the total cable length is 29m or less. However, the maximum head cable length is 10m and the maximum
signal cable length is 5m.
［ABS AT543A］

Scale unit I/F Box Signal cable Connector B Connector A

ALARM
MADE IN JAPAN Mitutoyo Corporation

1234567
AT∃∃∃
No.
SERIAL Mitsubishi Electric Corporation
MR-J4/MR-J3
Model

Head cable
Notes Feedback cable (Grounding conductor)
1. Connectors A/B and the feedback cable are to be prepared by the user.
2. Connectors A/B and the grounding conductor are to be connected
Scale unit by the user. Signal cable
I/F Box Connector B Connector A
3. A Mitsubishi Electric Corporation encoder cable can be used as the feedback cable.
Model: MR-JCCBL M-H is the cable length (2 or 5m) ALARM
MADE IN JAPAN Mitutoyo Corporation

1234567
AT∃∃∃
No.
SERIAL Mitsubishi Electric Corporation
MR-J4/MR-J3
Model

* When using the encoderHeadcable, ensure that the total cable length is 10m or less.
cable
* The feedback cable configuration depends on the system. Please contact Mitsubishi Electric Corporation for details.
Feedback cable (Grounding conductor)

73
 Output specification
• ABS AT553/AT543/AT503 (discrete-wire) • ABS AT573A/AT503A (discrete-wire)
Wire color Signal Wire color Signal
Brown/Red +5V Brown/Red +5V
White/Black GND White/Black GND
Orange DT Orange N.C
Yellow DT Yellow N.C
Green REQ Green REQ/DT
Blue REQ Blue REQ/DT
Purple Phase A Purple Phase A
Gray Phase B Gray Phase B
Shield FG Shield FG
Notes Notes
1: Phase A and Phase B are used as test signals. 1: Phase A and Phase B are used as test signals.
Keep them disconnected during use. Keep them disconnected during use.
2: Connect the shield wire to the grounding conductor. 2: Connect the shield wire to the grounding conductor.

• ABS AT545A
Output connector (pin type): Tyco Electronics Japan
Mini-Universal Mate-N-Lock Connector 9P
172169-9 (Housing: Black)
Applicable connector: 172161-9 (Housing: Black)
Pin No. Signal 1 3
1 MR (REQ/DT)
2 MRR (REQ/DT)
4 (DT)
5 (DT)
7 PS (+5V)
8 LG (GND)
9 F.G
50 L=3m 43 Round waterproof connector
3.6 N.C
15 7 9 L=2m
ø17
ø6.5

ø6.5

19.4 0.8 103 Head cable (minimum bend radius R=50 [fixed], R=100 [moving])
Signal cable (minimum bend radius R=50 [fixed], R=100 [moving]) 13.4 80 PVC sheathed
PVC sheathed
4.5

Cable dimensions
31±0.2
40

Model AT���
SERIAL
No. 1234567 ALARM

• ABS AT553/AT543/AT573A/AT503 (A)

Mitutoyo Corporation MADE IN JAPAN

M6, through hole

4.5 71±0.2 Unit: mm
Hex socket headed screw M4×16 (small round plain washer, spring washer)
Alarm display LED
Absolute Scale Unit

50 L=3m 43 Round waterproof connector

ABS AT500 Series

15 L=2m
ø17
ø6.5

ø6.5

19.4 0.8 103 Head cable (minimum bend radius R=50 [fixed], R=100 [moving])
Signal cable (minimum bend radius R=50 [fixed], R=100 [moving]) 13.4 80 PVC sheathed
PVC sheathed
4.5
31±0.2
40

Model AT���
SERIAL
No. 1234567 ALARM

Mitutoyo Corporation MADE IN JAPAN

M6, through hole

4.5 71±0.2 Hex socket headed screw M4×16 (small round plain washer, spring washer)
Alarm display LED

• ABS AT543A
Mini•Universal Mate-N-Lock Connector 9P (pin type)
Applicable housing: 172161-9 (Tyco Electronics Japan or equivalent)
40 L=3m 43 Round waterproof connector
L=2m
ø17
19.2

ø6.5

ø6.5

19.4 0.8 103 Head cable (minimum bend radius R=50 [fixed], R=100 [moving])
13.4 80 PVC sheathed
19.6

4.5

Signal cable (minimum bend radius R=50 [fixed], R=100 [moving])

31±0.2
40

Model AT���
SERIAL
1234567 ALARM

PVC sheathed
No.

Mitutoyo Corporation MADE IN JAPAN

M6, through hole

Mini•Universal Mate-N-Lock Connector 9P (pin type) 4.5 71±0.2 Hex socket headed screw M4×16 (small round plain washer, spring washer)
Alarm display LED
Applicable housing: 172161-9 (Tyco Electronics Japan or equivalent)
40 L=3m 43 Round waterproof connector
L=2m
ø17
19.2

ø6.5

ø6.5

19.4 0.8 103 Head cable (minimum bend radius R=50 [fixed], R=100 [moving])
13.4 80 PVC sheathed
19.6

4.5

Signal cable (minimum bend radius R=50 [fixed], R=100 [moving])

31±0.2
40

Model AT���
SERIAL
1234567 ALARM

PVC sheathed
No.

Mitutoyo Corporation MADE IN JAPAN

M6, through hole

4.5 74 71±0.2 Hex socket headed screw M4×16 (small round plain washer, spring washer)
Alarm display LED
Mounting dimensions (SC Type) Unit: mm

15.2
0.2

0.2
16
Rigidly fixed portion Elastically secured portion
(4.8) L2 (4.8)
*Aluminum L4 L5±0.2 (P±0.2×n)
R frame surface (L3) ø5, through hole
0.1 G ø4.5, through hole, ø8.3 countersunk, depth 9 Hex socket headed screw M4×25
0.05/500 (small round plain washer, spring washer)

45.2±0.2 5.5±0.2
Hex socket headed screw M4×16 20±0.2
Q (small round plain washer, spring washer) *Special leaf spring used (long dashed double-dotted line)
*Aluminum 15.7 (Aluminum frame)
frame surface
Air purge M5×5
30.2

63.5
44.5
(Both) AT500
AIR

0.1 R
*Vertical direction *Longitudinal direction M6, through hole, ø8 countersunk, depth 5
Hex socket headed screw M4×25
(Gap between detector head

*Longitudinal ABS zero point, base position 66±0.2

*Adjusted with special jig
1±0.1 84 (small round plain washer, spring washer)
direction
and aluminum frame)

(Step between detector 23 92 (Detector head)

head and aluminum frame) Effective range L0
Maximum travel length L1
Aluminum frame
1.5±0.2

Stainless steel bushing

S *Mounting mating surface

ø6.5
0.1 P (103)
19.4 0.8
*Vertical direction 13.4 80
31±0.2 4.5

*Longitudinal direction Alarm display LED Special leaf spring

Hex socket headed screw M4×25
40

AT���
1234567
Mitutoyo Corporation
ALARM
(small round plain washer, spring washer)
M6, through hole Details of elastically secured portion
4.5 71±0.2 Notes
Hex socket headed screw M4×16 1. G indicates the machine guideway.
(small round plain washer, spring washer) 2. P indicates the mating surface for mounting the aluminum frame. S indicates
the mating surface for mounting the detector head.
P *Mounting mating surface 3. Q and R indicate the datum surfaces for mounting this linear scale.
0.1 G 4. For the values of L0 to L5, P, n in the figure, refer to the table below.
0.05/500
1234567

Dimensions
Effective range Maximum travel length Overall length Distance to center Mounting pitch No. of mounting holes
L0 (mm) L1 (mm) L 2 (mm) L 3 (mm) L4 (mm) L5 (mm) P (mm) n
100 120 225 112.5 37.5 150 75 2
200 220 325 162.5 37.5 250 125 2
300 320 425 212.5 37.5 350 175 2
400 420 525 262.5 62.5 400 200 2
500 520 625 312.5 62.5 500 125 4
600 620 725 362.5 62.5 600 150 4
700 720 825 412.5 62.5 700 175 4
800 820 925 462.5 62.5 800 200 4

Absolute Scale Unit

ABS AT500 Series
900 920 1025 512.5 62.5 900 150 6
1000 1020 1125 562.5 37.5 1050 175 6
1100 1120 1225 612.5 87.5 1050 175 6
1200 1220 1325 662.5 62.5 1200 200 6
1300 1320 1425 712.5 112.5 1200 150 8
1400 1420 1525 762.5 62.5 1400 175 8
1500 1520 1625 812.5 112.5 1400 175 8
1600 1620 1725 862.5 62.5 1600 200 8
1800 1820 1925 962.5 87.5 1750 175 10
2000 2020 2125 1062.5 62.5 2000 200 10
2200 2220 2325 1162.5 112.5 2100 175 12

Codes and Order Numbers

• ABS AT553-SC • ABS AT543/AT543A-SC • ABS AT573A-SC • ABS AT503/AT503A-SC
Order No. Code Order No. Code Order No. Code Order No. Code
539-761-10 AT553- 100-SC 539- 731- AT543(A)- 100-SC 539-871-11 AT573A- 100-SC 539-161- AT503(A)- 100-SC
539-763-10 AT553- 200-SC 539-733- AT543(A)- 200-SC 539-873-11 AT573A- 200-SC 539-163- AT503(A)- 200-SC
539-765-10 AT553- 300-SC 539-735- AT543(A)- 300-SC 539-875-11 AT573A- 300-SC 539-165- AT503(A)- 300-SC
539-767-10 AT553- 400-SC 539-737- AT543(A)- 400-SC 539-877-11 AT573A- 400-SC 539-167- AT503(A)- 400-SC
539-769-10 AT553- 500-SC 539-739- AT543(A)- 500-SC 539-879-11 AT573A- 500-SC 539-169- AT503(A)- 500-SC
539-771-10 AT553- 600-SC 539-741- AT543(A)- 600-SC 539-881-11 AT573A- 600-SC 539-171- AT503(A)- 600-SC
539-773-10 AT553- 700-SC 539-743- AT543(A)- 700-SC 539-883-11 AT573A- 700-SC 539-173- AT503(A)- 700-SC
539-775-10 AT553- 800-SC 539-745- AT543(A)- 800-SC 539-885-11 AT573A- 800-SC 539-175- AT503(A)- 800-SC
539-776-10 AT553- 900-SC 539-746- AT543(A)- 900-SC 539-886-11 AT573A- 900-SC 539-176- AT503(A)- 900-SC
539-777-10 AT553-1000-SC 539-747- AT543(A)-1000-SC 539-887-11 AT573A-1000-SC 539-177- AT503(A)-1000-SC
539-778-10 AT553-1100-SC 539-748- AT543(A)-1100-SC 539-888-11 AT573A-1100-SC 539-178- AT503(A)-1100-SC
539-779-10 AT553-1200-SC 539-749- AT543(A)-1200-SC 539-889-11 AT573A-1200-SC 539-179- AT503(A)-1200-SC
539-780-10 AT553-1300-SC 539-750- AT543(A)-1300-SC 539-890-11 AT573A-1300-SC 539-180- AT503(A)-1300-SC
539-781-10 AT553-1400-SC 539-751- AT543(A)-1400-SC 539-891-11 AT573A-1400-SC 539-181- AT503(A)-1400-SC
539-782-10 AT553-1500-SC 539-752- AT543(A)-1500-SC 539-892-11 AT573A-1500-SC 539-182- AT503(A)-1500-SC
539-783-10 AT553-1600-SC 539-753- AT543(A)-1600-SC 539-893-11 AT573A-1600-SC 539-183- AT503(A)-1600-SC
539-785-10 AT553-1800-SC 539-755- AT543(A)-1800-SC 539-895-11 AT573A-1800-SC 539-185- AT503(A)-1800-SC
539-786-10 AT553-2000-SC 539-756- AT543(A)-2000-SC 539-896-11 AT573A-2000-SC 539-186- AT503(A)-2000-SC
539-787-10 AT553-2200-SC 539-757- AT543(A)-2200-SC 539-897-11 AT573A-2200-SC 539-187- AT503(A)-2200-SC
* The in the Order No. is as follows. AT543 : 10 * The in the Order No. is as follows. AT503 : 10
AT543A: 11 AT503A: 11

75
 Mounting dimensions (HC Type) Unit: mm

29
Q *Mounting block 8
(Mounting block) (Mounting block) (Mounting block) (Mounting block)

17.5
0.6
surface
 
(Mounting block)

23
R *Aluminum frame surface Elastically secured portion Elastically secured portion
0.1 G Rigidly fixed portion
(4.3) 0.05/1000 L2 (4.3)
8 L3±0.3
L4±0.3

24.1±0.1 17.9±0.1 3.2±0.1

11.6 L5±0.2 L6±0.2 L6±0.2 ø4.6
Air purge M5×5 Hex socket headed screw M4x25
36.8 (6.7)
Cumulative tolerance (Scale unit)

7.2
0.1 R

35.8
0.5
for L5 and L6: ±0.3 (small round plain washer, spring washer)
(Both)
27.8

*Vertical direction
(62)

AT500

M6, through hole,

ø8 countersunk, depth 5

54.8
1.6±0.1 22 *Longitudinal

head and aluminum frame

Hex socket headed screw M4x25

1.5±0.2
66±0.2

Gap between detector

Step between detector 24 direction (small round plain washer, spring washer)
84
head and aluminum frame *Mounting mating ø7.5, through hole, 92 (Detector head)
S surface ø14 countersunk, depth 9.5 Effective range L0 ABS zero point, base position
0.1 P Hex socket headed screw M6×25 Maximum travel length L1
*Vertical direction (small round plain washer, spring washer)
*Longitudinal direction
ø6.5
19.4 0.8 (103)
13.4 80
31±0.2 4.5

Notes
1. G indicates the machine guideway.
40

AT���
1234567 ALARM

2. P indicates the mating surface for mounting the unit. S indicates the mating
Mitutoyo Corporation

M6, through hole

4.5 71±0.2 Hex socket headed screw M4×16 surface for mounting the detector head.
(small round plain washer, spring washer) 3. Q and R indicate the datum surfaces for mounting this linear scale.
Alarm display LED 4. For the values of L0 to L6 in the figure, refer to the table below.
P *Mounting mating surface
0.1 G
0.05/1000
1234567

Dimension
Effective range Maximum travel length Overall length Mounting pitch
L0 (mm) L1 (mm) L 2 (mm) L 3 (mm) L4 (mm) L5 (mm) L6 (mm)
100 120 265 249 124.5 — —
150 170 315 299 149.5 — —
200 220 365 349 174.5 — —
250 270 415 399 199.5 — —
Absolute Scale Unit

300 320 465 449 224.5 — —

ABS AT500 Series

350 370 515 499 249.5 — —

400 420 565 549 274.5 — —
450 470 615 599 299.5 — —
500 520 665 649 324.5 — —
600 620 765 749 (374.5) 204.5 170
700 720 865 849 (424.5) 224.5 200
750 770 915 899 (449.5) 224.5 225
800 820 965 949 (474.5) 244.5 230
900 920 1065 1049 (524.5) 264.5 260
1000 1020 1165 1149 (574.5) 284.5 290

Codes and Order Numbers

• ABS AT553-HC • ABS AT543/AT543A-HC • ABS AT573A-HC • ABS AT503/AT503A-HC
Order No. Code Order No. Code Order No. Code Order No. Code
539-761-20 AT553- 100-HC 539-731- AT543(A)- 100-HC 539-871-21 AT573A- 100-HC 539-161- AT503(A)- 100-HC
539-762-20 AT553- 150-HC 539-732- AT543(A)- 150-HC 539-872-21 AT573A- 150-HC 539-162- AT503(A)- 150-HC
539-763-20 AT553- 200-HC 539-733- AT543(A)- 200-HC 539-873-21 AT573A- 200-HC 539-163- AT503(A)- 200-HC
539-764-20 AT553- 250-HC 539-734- AT543(A)- 250-HC 539-874-21 AT573A- 250-HC 539-164- AT503(A)- 250-HC
539-765-20 AT553- 300-HC 539-735- AT543(A)- 300-HC 539-875-21 AT573A- 300-HC 539-165- AT503(A)- 300-HC
539-766-20 AT553- 350-HC 539-736- AT543(A)- 350-HC 539-876-21 AT573A- 350-HC 539-166- AT503(A)- 350-HC
539-767-20 AT553- 400-HC 539-737- AT543(A)- 400-HC 539-877-21 AT573A- 400-HC 539-167- AT503(A)- 400-HC
539-768-20 AT553- 450-HC 539-738- AT543(A)- 450-HC 539-878-21 AT573A- 450-HC 539-168- AT503(A)- 450-HC
539-769-20 AT553- 500-HC 539-739- AT543(A)- 500-HC 539-879-21 AT573A- 500-HC 539-169- AT503(A)- 500-HC
539-771-20 AT553- 600-HC 539-741- AT543(A)- 600-HC 539-881-21 AT573A- 600-HC 539-171- AT503(A)- 600-HC
539-773-20 AT553- 700-HC 539-743- AT543(A)- 700-HC 539-883-21 AT573A- 700-HC 539-173- AT503(A)- 700-HC
539-774-20 AT553- 750-HC 539-744- AT543(A)- 750-HC 539-884-21 AT573A- 750-HC 539-174- AT503(A)- 750-HC
539-775-20 AT553- 800-HC 539-745- AT543(A)- 800-HC 539-885-21 AT573A- 800-HC 539-175- AT503(A)- 800-HC
539-776-20 AT553- 900-HC 539-746- AT543(A)- 900-HC 539-886-21 AT573A- 900-HC 539-176- AT503(A)- 900-HC
539-777-20 AT553-1000-HC 539-747- AT543(A)-1000-HC 539-887-21 AT573A-1000-HC 539-177- AT503(A)-1000-HC
* The in the Order No. is as follows. AT543 : 20 * The in the Order No. is as follows. AT503 : 10
AT543A: 21 AT503A: 11

76
Mounting dimensions (HR Type) Unit: mm

29
8 (Mounting block)
Q *Mounting (Mounting block) (Mounting block)

17.5
0.6
block surface

(Mounting block) Elastically secured portion

23
Rigidly fixed portion Elastically secured portion
Elastically secured portion ø4.6 ø7.5, through hole, ø14 countersunk, depth 9.5
Hex socket headed screw M4×25 (small round plain washer, spring washer) Hex socket headed screw M6×25
(4.3) L2 (small round plain washer, spring washer) (4.3)
8 L3±0.3
(L4)

24.1±0.1 17.9±0.1 3.2±0.1

*Aluminum
11.6 74.5±0.2 (L5) L6±0.2 R frame surface
Air purge M5×5
(6.7)

Cumulative tolerance
(Scale unit) 0.1 G

7.2
0.1 R

35.8
0.5
for L5 and L6: ±0.3
(Both) 0.05/1000
27.8
36.8

*Vertical direction
(62)

AT500

M6, through hole, ø8 countersunk, depth 5

Hex socket headed screw M4x25

54.8
1.6±0.1 22 Base position

1.5±0.2
head and aluminum frame
*Longitudinal 66±0.2 (small round plain washer, spring washer)

Gap between detector

Step between detector head 24 direction 84 (Detector head)
and aluminum frame S *Mounting mating surface 92 ABS zero point, base position
0.1 P Effective range L0
*Vertical direction Maximum travel length L1
*Longitudinal direction
ø6.5

19.4 0.8 (103)

13.4 80
31±0.2 4.5

Notes
1. G indicates the machine guideway.
40

AT���
1234567 ALARM

M6, through hole

Mitutoyo Corporation

2. P indicates the mating surface for mounting the unit. S indicates

Hex socket headed screw M4×16 the mating surface for mounting the detector head.
4.5 71±0.2 3. Q and R indicate the datum surfaces for mounting this linear scale.
*Mounting (small round plain washer, spring washer) 4. For the values of L0 to L4 and L6 in the figure, refer to the table
P mating surface Alarm display LED
0.1 G below.
0.05/1000
1234567

Dimensions
Effective range Maximum travel length Overall length Mounting pitch
L0 (mm) L1 (mm) L 2 (mm) L 3 (mm) L4 (mm) L6 (mm)
100 120 265 249 124.5 —
150 170 315 299 149.5 100
200 220 365 349 174.5 130
250 270 415 399 199.5 160

Absolute Scale Unit

300 320 465 449 224.5 190

ABS AT500 Series

350 370 515 499 249.5 220

Codes and Order Numbers

• ABS AT553-HR • ABS AT543/AT543A-HR • ABS AT573A-HR • ABS AT503/AT503A-HR
Order No. Code Order No. Code Order No. Code Order No. Code
539-761-30 AT553-100-HR 539-731- AT543(A)-100-HR 539-871-31 AT573A-100-HR 539-161- AT503(A)-100-HR
539-762-30 AT553-150-HR 539-732- AT543(A)-150-HR 539-872-31 AT573A-150-HR 539-162- AT503(A)-150-HR
539-763-30 AT553-200-HR 539-733- AT543(A)-200-HR 539-873-31 AT573A-200-HR 539-163- AT503(A)-200-HR
539-764-30 AT553-250-HR 539-734- AT543(A)-250-HR 539-874-31 AT573A-250-HR 539-164- AT503(A)-250-HR
539-765-30 AT553-300-HR 539-735- AT543(A)-300-HR 539-875-31 AT573A-300-HR 539-165- AT503(A)-300-HR
539-766-30 AT553-350-HR 539-736- AT543(A)-350-HR 539-876-31 AT573A-350-HR 539-166- AT503(A)-350-HR
* The in the Order No. is as follows. AT543 : 30 * The in the Order No. is as follows. AT503 : 30
AT543A: 31 AT503A: 31

77
 Mounting dimensions (HL Type) Unit: mm

29
Q *Mounting 8
(Mounting block) (Mounting block) (Mounting block)

17.5
0.6
block surface

(Mounting block)

23
Elastically secured portion Rigidly fixed portion Elastically secured portion
ø4.6
Elastically secured portion
Hex socket headed screw M4×25 (small round plain washer, spring washer)
(4.3) L2 (4.3)
L3±0.3 8
(L4)
24.1±0.1 17.9±0.1 3.2±0.1
*Aluminum
11.6 R frame surface L6±0.2 74.5±0.2 (L5)
Air purge M5×5 0.1 G
36.8 (6.7)

(Scale unit) Cumulative tolerance

7.2
0.1 R

35.8
(Both) 0.5 0.05/1000 for L5 and L6: ±0.3
27.8

*Vertical direction
(62)

AT500

*Longitudinal M6, through hole, ø8 countersunk, depth 5 Base position

54.8
1.6±0.1

1.5±0.2
22

and aluminum frame

direction 66±0.2 Hex socket headed screw M4x25
Step between detector head 24 84 (small round plain washer, spring washer)

detector head
Gap between
ø7.5, through hole,
and aluminum frame *Mounting ø14 countersunk, depth 9.5 92 Detector head
Effective range L0 ABS zero point, base position
S mating surface Hex socket headed screw M6×25
0.1 P (small round plain washer, spring washer) Maximum travel length L1
*Vertical direction
*Longitudinal direction
ø6.5
19.4 0.8 (103)
13.4 80
31±0.2 4.5

Notes
40

1. G indicates the machine guideway.

AT���
1234567 ALARM

M6, through hole

Mitutoyo Corporation

2. P indicates the mating surface for mounting the unit. S indicates the mating
4.5 71±0.2 Hex socket headed screw M4×16 surface for mounting the detector head.
*Mounting (small round plain washer, spring washer) 3. Q and R indicate the datum surfaces for mounting this linear scale.
P mating surface Alarm display LED 4. For the values of L0 to L4 and L6 in the figure, refer to the table below.
0.1 G
0.05/1000
1234567

Dimensions
Effective range Maximum travel length Overall length Mounting pitch
L0 (mm) L1 (mm) L 2 (mm) L 3 (mm) L4 (mm) L6 (mm)
100 120 265 249 124.5 —
150 170 315 299 149.5 100
Absolute Scale Unit

200 220 365 349 174.5 130

ABS AT500 Series

250 270 415 399 199.5 160

300 320 465 449 224.5 190
350 370 515 499 249.5 220

Codes and Order Numbers

• ABS AT553-HL • ABS AT543/AT543A-HL • ABS AT573A-HL • ABS AT503/AT503A-HL
Order No. Code Order No. Code Order No. Code Order No. Code
539-761-40 AT553-100-HL 539-731- AT543(A)-100-HL 539-871-41 AT573A-100-HL 539-161- AT503(A)-100-HL
539-762-40 AT553-150-HL 539-732- AT543(A)-150-HL 539-872-41 AT573A-150-HL 539-162- AT503(A)-150-HL
539-763-40 AT553-200-HL 539-733- AT543(A)-200-HL 539-873-41 AT573A-200-HL 539-163- AT503(A)-200-HL
539-764-40 AT553-250-HL 539-734- AT543(A)-250-HL 539-874-41 AT573A-250-HL 539-164- AT503(A)-250-HL
539-765-40 AT553-300-HL 539-735- AT543(A)-300-HL 539-875-41 AT573A-300-HL 539-165- AT503(A)-300-HL
539-766-40 AT553-350-HL 539-736- AT543(A)-350-HL 539-876-41 AT573A-350-HL 539-166- AT503(A)-350-HL
* The in the Order No. is as follows. AT543 : 40 * The in the Order No. is as follows. AT503 : 40
AT543A: 41 AT503A: 41

78
ABS AT500 Series
Structural Features
• ABS AT500-S Series combines high vibration resistance with shock resistance
1. Example of vibration resistance characteristics 2. Vibration resistance

Vibration resistance Shock resistance characteristics

(ABS AT500-S resonance characteristics)
ABS AT500-S Previous type
X-axis Y-axis Z-axis
direction direction direction 30
20
25

Scale output fluctuation (µm)

Scale output fluctuation

15 20
(µm / 2G)

15
10
10
5
20
0 0
0 500 1000 1500 2000
0 10 20 30 40 50 60 70
Vibration frequency (Hz)
Shock (G)

• ABS AT500-H Series combines outstanding thermal characteristics with high repeatability
1. Structural concept 2. Example of thermal characteristics

Aluminum frame Stability of base position

Fixing block (ABS AT500-H)
Shock resistanceTemperature
Scale output characteristics
10 ABS AT500-S Previous type 40
8 30 35

Absolute Scale Unit

Scale output variation (µm)

ABS AT500 Series

Center 6 25 30

Temperature (°C)
Parallel leaf spring function
Scale output fluctuation (µm)

(Middle block)
4 25
Flexible mechanism 20
2 20
15
0 15
10
Frame elongation -2 10
20
0 10 20 30 40
0 Elapsed time (h)
0 10 20 30 40 50 60 70
Flexible mechanism Note: This refers to the fixed pointShock
on the
Fixed Fixed (G) scale around which clamping
arrangements ensure that any expansion or contraction due to
temperature change occurs.

79
 Discontinued models and succession models specification compatibility
: Compatible (with limitations)

Separate type ST scales

Output connector
Discontinued models Current model Scale grating pitch Output signal Accuracy Mounting dimensions specification pin
specifications
assignment
ST31A, ST32A ST36A Yes Yes Yes No Yes
ST33C ST36C Yes Yes Yes No No
ST52B ST46-EZA Yes Yes Yes No No
ST62C ST46-EZA Yes *1 Yes No No
ST34C ST36C Yes Yes Yes No Yes
ST44B/ST44C ST46-EZA Yes Yes Yes No Yes
ST46 ST46-EZA Yes Yes Yes No Yes
LHS21/23C None — — — — —
*1 Up/down pulse output cannot be supported.

Assembly type AT scales

Output connector
Discontinued models Current model Scale grating pitch Output signal Accuracy Mounting dimensions specification pin
specifications
assignment
AT2-N Yes *2 Yes Yes *2
AT103
AT2-FN Yes *2 Yes Yes *2
AT11-N Yes *2 Yes Yes *2
AT113
AT11-FN Yes *2 Yes Yes *2
AT12-N Yes *2 Yes Yes *2
AT112
AT12 Yes *2 Yes Yes *2
AT81-C None Yes No *3 Yes No
AT21-C Yes *4 *3 No No
AT211
AT21 No *4 *3 No No
AT25 AT211 No *4 *3 No No
AT102 AT103 Yes Yes Yes Yes Yes
AT111 AT113 Yes Yes Yes Yes Yes
AT181 None — — — — —
AT212 AT211 Yes Yes *3 No No
*2 This can only be supported with an adapter when connected to an old counter.
*3 This must be checked for each scale effective range.
*4 Compatible with the output signal of the pulse signal unit
TIP: Refer to the Linear Scale DRO Systems for AT103/AT112-F/AT113 (Catalog No. E13000).

Absolute scale unit

Output connector
Technical Information

Discontinued models Current model Interface Resolution Maximum response Mounting dimensions specification pin
speed assignment
AT3 2 ABS AT3 3 Yes *5 Yes No *6
ABS AT500-S series Yes Yes Yes No *7
AT500 series
ABS AT500-H series Yes Yes Yes No *7
*5 You can control this by changing the NC parameter settings. For details, contact your NC manufacturer.
*6 Check that pins No. 9 and 10 of the AT353 output connector are not connected before you make the connection.
*7 The AT543A is compatible. Other current models have discrete-wire specifications.

80
 Handling linear scales

Mounting scales
1. AT scale mounting posture 3. Cautions regarding mounting the ST scale
The scale unit is designed so that it is difficult for (excluding the ABS ST700)
contamination to enter the unit, but determine the • Mount the main scale so that the detector head is facing
mounting posture after considering the arrival directions of the scale front surface (the surface on which rainbow colors
coolant and dust so that these substances do not come into are visible when light strikes the surface at an angle).
direct contact with the aperture. Also, be sure to prepare a (Models that have the Mitutoyo logo on the main scale are
scale cover. mounted correctly when the logo can be read from the
Coolant, dust, etc. Coolant, dust, etc.
detector head side.)
• Ambient light entering from the back of the main scale will
cause incorrect operation, so the scale mounting design
must ensure that ambient light does not enter.
AT211

Rubber lip

AT211

toyo
M i tu
Main scale Direction from which
the Mitutoyo logo can be read
Vertical mounting Horizontal mounting Perpendicular mounting Detector head
Coolant, dust, etc. Coolant, dust, etc.

Coolant, Coolant,
dust, etc. dust, etc.
• Use a tool such as a lever type indicator or dial gage to move
the head bracket and the scale mounting relatively in order
Recommended Do not install Possible to install like this to check whether the scale mounting surface has been
mounting direction like this
*When using the device in
an environment with
prepared as shown in the mounting diagram.
Possible to install Do not install
coolant or cutting oil mist,
do not mount the device like this like this • Use flexible adhesive with adhesive type scales.
in the vertical direction.
We recommend that you use KE441T manufactured by
Shin-Etsu Chemical Co, Ltd.
2. Mounting the AT scale unit • Remove the protective tape attached to the glass scale and
detector head when you install the device.
As shown in the following figure, use dial gauges or similar
devices close to the two effective range marks to check and
adjust their parallelism with the machine guideway.
To adjust the parallelism: (1) move the mechanically movable G
parts such as the slide table to adjust the parallelism of the 0.01
scale unit or (2) measure the position from the mechanism's

Technical Information
guide rail or from a corresponding reference.
G G indicates the
• Permissible parallelism value: Less
M i tu
toyothan 0.1mm or less than 0.2mm 0.01 machine guideway Main scale
scale
Main Direction from
(This varies depending onwhich
the scale model.) is the reference surface
the Mitutoyo logo can be read
Detector head yo
uto
M it

Effective range
Dial gauge

Up and down MODE

L AT2 Front and back
directions directions

ALE
R SC
EA
LIN

Mitu
toyo
Remove the scale protective tape
Lever type dial gauge

81
 Specifications of Air Supply Unit for AT Scale

Supplying clean compressed air to the scale unit is important 3. Air Supply Unit
as a means of improving the environmental resistance [For a typical linear scale]
(resistance to coolant and dust ingress) of assembly-type Be sure to use dry compressed air through an air dryer and a main line air filter
linear scales. Provide piping to either of the two M5 screw without directly supplying air from the compressor. Replace each filter element
every year. Mount the fixed reducer on the scale side.
holes situated on both sides of the scale unit to enable
compressed air delivery. • CKD Corporation air supply unit
Air dryer and main line air filter
Note: AT211 (multipoint fixed), AT203, ABS AT500 series, AT1100 series and
AT402E are standard equipped with the air supply connector.
Note: This air supply method is an auxiliary measure. The orientation of air-
supply piping is a matter of importance. Observe the piping orientation
described in the manual to implement piping. After the air supply has been Compressor side Scale side
started, the air filter must be replaced periodically depending on the degree
of contamination of the air source to be used. If a contaminated filter Optional configuration Optional configuration
continues to be used this will allow contamination of the scale unit, resulting
in failure. [For ABS AT1100 series]
1. Air quality specifications The ABS AT1100 series does not need an air dryer and a high-performance
ISO 85731-1 Class 1.4.1 or equivalent oil mist filter. Be sure to use dry compressed air through a main line air filter
Maximum particle diameter (μm) 0.1
Minimum-pressure dew point (°C) +3 without directly supplying air from the compressor.
3
Oil concentration (mg/m ) 0.01
• CKD Corporation air supply unit
2. Air flow rate 10 to 20 L/min (per axis) Main line air filter
IMPORTANT: This flow rate should be maintained to the degree that air leaks
out slightly past the dustproof rubber.
2.1 Using the Mitutoyo-spec fixed reducer (fixed reducer diameter: ø0.9)
Adjust air pressure so that the air flow rate becomes 10 to 20 L/min (per axis). Optional configuration Scale side
(TIP) When air pressure is 0.1 MPa for one axis, the airflow rate will be approx. 12.7 Optional configuration Optional configuration
L/min.
When air pressure is 0.2 MPa, the airflow rate will be approx.19 L/min.
2.2 Using any other fixed reducer
Adjust air pressure so that the air flow rate becomes 10 to 20 L/min (per axis).
For the relation between flow rate and air pressure, refer to the flow rate
characteristics (relation between flow rate depending on fixed reducer diameter and
pressure) published by pneumatic device makers.
2.3 Using a flow regulating valve
Adjust air pressure so that the air flow rate becomes 10 to 20 L/min (per axis).
However, be careful not to supply a large flow of air before adjustment. Otherwise
damage may occur, resulting in a failure.

Part No.
No. Configuration element Specifications Order No. Maker’s model No.
(Mitutoyo) (Maker name)
• Used fluid: Compressed air • Maximum allowable working pressure: 1.0MPa
F1000-8-W
① Air filter • Guaranteed safe pressure: 1.5ＭPa • Maximum particle diameter (filterability): 5μm —
(CKD)
Technical Information

• Secondary oil concentration: −

• Used fluid: Compressed air • Maximum allowable working pressure: 1.0MPa
• Guaranteed withstanding pressure: 1.5ＭPa • Maximum particle diameter (filterability): 5μm M1000-8-W
② Oil mist filter —
• Secondary oil concentration: 0.01mg/m3 or less (CKD)
• Element replacement: Every year (6000 hours) or upon pressure drop of 0.1MPa
• Used fluid: Compressed air • Maximum allowable working pressure: 1.0MPa
• Guaranteed safe pressure: 1.5ＭPa • Maximum particle diameter (filterability): 5μm MX1000-8-W
③ High-performance oil mist filter —
• Secondary oil concentration: 0.001mg/m3 or less (CKD)
• Element replacement: Every year (6000 hours) or upon pressure drop of 0.1MPa
• Used fluid: Compressed air • Maximum allowable working pressure: 1.0MPa
RA-050-L
④ Regulator • Guaranteed withstanding pressure: 1.5ＭPa • Settable pressure range: 0.1 to 0.7MPa —
(CKD)
• Banned-oil processing type
• Used fluid: Air • Usable pressure range: 0.1 to 0.9MPa PC6-M5M-0.9
⑤ Fixed reducer • Screw clamping torque: 1.0 to 1.5N・m • Flow rate at pressure of 0.1MPa: Approx. 12.7L/min 06ACJ155 (Pisco custom-
• Flow rate at pressure of 0.2MPa: Approx. 19L/min (per axis) made part)
ISO -8573-1 Class 1.4.1 or equivalent
• Maximum particle diameter (filterability): 0.01μm IN OUT
① Air unit • Minimum pressure dew point: −
to (① Air filter + ② Oil mist filter + ③ High- • Oil concentration (oil mist concentration): 0.001mg/m3 or less 06ACJ154 —
④ performance oil mist filter + ④ Regulator) • Pressure: Flow rate at pressure of 0.1MPa: 12.7L/min (per axis)
• Maximum air flow rate: 75 L/min
• Replacement cycle of each filter element: Yearly ① ② ③ ④

82
• Air Unit Dimensions 4. Connection Method
Unit: mm Be sure to use dry compressed air through an air dryer and a main line air filter
without directly supplying air from the compressor.
Also, mount the fixed reducer on the scale side.
40
(69)

Arrangement for supplying air to scales on 2 axes:

(29)

T-joint
(181)
(173) Linear scale (optional)
(18) 119.6
(58) 40 Air unit mounting hole × 4 (M5 screw used) Fixed reducer
ø6 tube
11

(10)
5.5

Output pressure
Air unit 0.1MPa
(27)

10

(Order No.06ACJ154) Accessory set for 2 axes (Option: Order No.06ACJ162)

(45)

Arrangement for supplying air to scales on 3 axes:

100
IN
80

T-joint
(142)
141

Linear scale (optional)

114

0.5
0
1.0
MPa
OUT
(Maintenance space: 60mm or more)

Output pressure
Air unit 0.1MPa
O S O S O S
(Order No.06ACJ154)
ø6 tube Fixed reducer
60

Accessory set for 3 axes (Option: Order No.06ACJ163)

Note: One air supply unit allows connection of scales on up to 5 axes.

Accessory sets for 2 axes and 3 axes are available. The combination of these
2 sets allows a maximum 4 or 5 axes to be connected. ø6 air tubes 20m in
length are supplied with each accessory set.
Supply air to each linear scale for approx. 30 minutes prior to use. It is also
recommended to supply air to each scale for approx. 30 minutes after use to
provide further protection to the scale.

5. Air Supply Unit Configuration and Maintenance Parts

Order No. Name / Packaged items Remarks
06ACJ154 Air unit (Appendix ① to ④)
Optional accessory
06ACJ162 Accessory set for 2 axes / Fixed reducer: 2 pcs, ø6 urethane tube: 20m, T-joint (2 pcs, one is a spare)

Technical Information
(extra-cost)
06ACJ163 Accessory set for 3 axes / Fixed reducer: 3 pcs, ø6 urethane tube: 20m, T-joint (3 pcs, one is a spare)

06ACJ155 Fixed reducer / PC6-M5M-0.9 or equivalent (Appendix ⑤)

06ACJ159*1 Air filter element (CKD) / F1000-ELEMENT-ASSY (for the first step)
Maintenance parts
(extra-cost)
06ACJ160*1 Mist separator element (CKD) / M1000-MANTLE-ASSY (for the second step)

06ACJ161*1 Micro-mist separator element (CKD) / MX1000-MANTLE-ASSY (for the third step)

* 1: Replace the elements of 06ACJ159, 06ACJ160 and 06ACJ161 every year.

  The replacement cycle differs depending on the usage and circumstances.
Note: For the maintenance method, confirm with the User's Manual supplied with the scale unit.

83
 Technical Information

Structure and features of the 6. Maintenance of the seal

assembly type linear scale (AT) To maintain the dustproof property of the rubber seal and
1. AT series detector joint mechanism extend its life, apply a small amount of good-quality silicone
(Adoption of simple joint structure offering high rigidity) grease (such as G-30L made by Shin-Etsu Chemical Co, Ltd.)
to the contacting area of the rubber and detector head once
The detector head and slider (sensor) of the scale unit
a year. (The maintenance interval will vary slightly according
are connected by the joint shown in the following figure.
to the operating conditions of the scale.)
Because of this structure, if values are less than or equal to
Apply grease. Scale unit
the scale mounting standard values, detector head mounting
errors and parallelism differences between the scale unit and
the machine guideway are absorbed, and normal operation
is assured. Also, the simple and highly rigid structure provides 15mm max.
superior durability. Slider (sensor)
Coupling rod Detector head
Soak cloth, paper, or other similar material in silicone grease, and
Coupling spring Dustproof rubber then apply to the entire length of the contacting area.

Durability of cables used with the linear scale

The life expectancy of the linear scale cables has been tested
using the methods shown below.
A Tensile strength: Approx. 1N
Test method A
Detector head
Approx. 90° Approx. 90°
2. Advantage of special waterproof connectors
Adopting waterproof and oilproof connectors makes it
possible to separate the signal cable. In turn, this makes B R50 C
installation and maintenance easy.
Bend fulcrum
3. Signal cable conduit Test conditions Hard-wired band
Bend angle: ±90°
Signal cables that are enclosed in a stainless-steel, spiral Test speed: 30 times per minute
cover (conduit), for protection, are also available. The (For the number of bends, A, B, A, C, and then A represents one bend.)
conduit will not rust or corrode, so these signal cables can Bend radius: R = 50mm
be used over an extended period. Evaluation standard value: 3,000,000 times
(No breaks in the signal wires or shield)
4. Adoption of rubber lip thrust method (Mitutoyo's
proprietary technology) Test method B
The thrust part (see the following figure)
Movable cable Fixed cable
pushes aside the rubber seal like a
ship's keel pushes aside water. One half
sliding distance
500mm

5. Adoption of specially formed urethane rubber lip

with reinforcing wire Test conditions
Resistance to oil and dust has been improved. Bend radius: R = 40mm
Speed: 2m/s
*Available with the AT103, AT203, ABS AT500, and ABS AT300. Arc length Travel distance: 1000mm
*Can be specially ordered for the AT113 and AT211. 80mm
Without wire Scales Test method Signal cable test result*1
With wire AT100 series A 3 million times
4 AT211 A 3 million times
AT203 A 3 million times
3 Wire AT300 series A 3 million times
Elongation (%)

AT500 series A 3 million times

ST700 series B 96 million times or more*2
2
ST36 B 96 million times or more*2
ST24 B 54 million times or more*2
1
ST422 A 96 million times
Rubber lip shape ST46 B 59 million times
12 5 10 20 30 (Days) *1 Also including the head cable
Elongation of dustproof rubber against coolant exposure *2 Testing still ongoing as of September 2016

Note 1: The test data stated above does not represent guaranteed values.
   Depending on the bend conditions, the number of times that the cables can bend
without failure may be less than indicated.
Note 2: When bending cables, the recommended bend radius is 100mm or more.

84
Alarm functions 5. Detection of momentary power failures
A momentary power failure or voltage drop greater than the
1. Detection of detector disconnection and short-circuit errors
allowable range occurring in the power supply that is being
Disconnection of and short circuits to 0V of the phase A and supplied to the PSU, counter, or other device (devices that
phase B signal lines from the linear scale as well as other use an AC power supply) is detected as an error.
similar errors are detected.
2. Detection of excess response speed of detector feed (over-speed) 6. Detection of scale errors
The feed speed of the linear scale (detector) exceeding the Errors that occur inside the linear scale are detected.
maximum feed speed as well as other similar errors are 7. Detection of detector circuit errors
detected. Errors caused by the incremental count or absolute count in
3. Detection of input signal errors absolute linear scales are detected.
The amplitude voltage, DC voltage, or phase difference of the 8. Detection of CPU errors (detection of internal errors)
phase A and phase B signals from the linear scale being outside of For linear scales, counters, and other devices that use CPUs,
the corresponding allowable range as well as other similar errors
are detected. the CPU stopping operating normally is detected as an error.
4. Drop in line voltage Note: The alarm functions vary according to the product. For
The line voltage supplied to the linear scale, PSU, and other details, see the alarm functions available with each product.
devices (particularly devices that use a DC power supply) Also note that the allowable ranges used to detect alarms
dropping below the allowable range is detected as an error. vary according to the product.

Alarm detection functions available with each product

(1) Alarm functions on the AT scales (sinusoida signal output type) + PSU-200
PSU-200
PSU-200

Alarm function
Detected inside the scale Detected inside the PSU

Detection Disconnection
Input or short
Scale error Over-speed of scale
signal error circuit in
errors signal cable
Scale code
PSU
　AT103 Yes PSU
AT113 Yes
AT112 No (4) Alarm functions on the ST scales (square wave signal output type)
PSU-200 Yes Yes Yes PSU-200
Yes
PSU-250 series Yes Yes Yes Yes I/F
I/F
(2) Alarm functions on the AT scales (square wave signal output type) Alarm function
Detected inside the I/F

Alarm function Disconnection or

Detected inside the detector head (inside the I/FPSU-200
on the AT212) Ove-speed Input signal error short circuit in
signal cable
Scale code
Over-speed Input signal errorPSU
Scale code ST24B(C) Yes Yes Yes
ST36 Yes Yes Yes
AT203 Yes Yes ST422 Yes Yes Yes PSU-200
AT211 Yes Yes ST46-EZA Yes Yes Yes
I/F
(3) Alarm functions on the ST scales (sinusoidal signal output type) + PSU-200 (5) Alarm functions on the absolute scales

PSU
Alarm function
Alarm function Detected inside the I/F
Detected inside the scale Detected inside the PSU

Over- Input Detector PSU

I/F Disconnection Scale error
Input
Detection
or short speed signal error circuit error CPU error
Scale error Over-speed signal error of scale
errors circuit in Scale code
Scale code signal cable
ABS ST700 series Yes Yes Yes Yes Yes
ST36A Yes ABS ST1300 series Yes Yes Yes Yes I/FYes
ST24 Yes ABS AT300 series Yes Yes Yes Yes Yes
PSU-200 Yes Yes Yes Yes ABS AT500 series Yes Yes Yes Yes Yes
PSU-250 series Yes Yes Yes Yes ABS AT1100 series Yes Yes Yes Yes Yes

85
 Technical Information

Explanation of terms Serial interface

This refers to a communication channel in which digital data is transmitted
Linear scale accuracy sequentially 1bit at a time. While it has inferior real-time characteristics, the
advantages are that it requires less wiring and has high reliability.
(1) Linear scale accuracy (This is the main communication method for feedback encoders.)
As shown in Figure 1, the linear scale accuracy is determined by using an accuracy
inspection device to perform comparisons at fixed intervals between the value measured Line-driver output
with the linear scale and the reference value according to a laser length measuring device. This refers to signals that are output as square waves. A signal that has the inverted polarity
The inspection environment temperature is 20°C, so the accuracy is at this temperature. of the output signal is generated, and the difference between these signals is set as the signal
The inspections are performed with other inspection conditions and standard values that (differential signal output). This complies with EIA standards RS-422 and RS-485.
comply with Mitutoyo's internal standards.
Laser length measuring
PC Digital counter
RS-422
device counter This was standardized by the Electronic Industries Alliance (EIA) of the U.S. It is
one of the balanced type serial communications standards, and it has excellent
noise reducing characteristics. The maximum transmission speed is 10Mbps, but
Interferometer Cube corner limitations on the transmission speed arise as the cable length increases.
Laser oscillator Laser beam axis Mounting bracket
RS-485
Scale unit This was standardized by the Electronics Industries Alliance (EIA) of the U.S. It is one of
Sliding table the balanced type serial communications standards, and it ranks higher than RS-422.
RS-422 is upwardly compatible with this standard. While RS-422 is a communication
standard that supports point-to-point, multi-drop connections, this standard supports
bus type multi-point connections and bidirectional communications.

Minimum edge interval

[Figure 1] Linear scale accuracy inspection device, overview This refers to the minimum time between a rising edge or falling edge of a square wave
being output (or input) and the next edge being output (or input). For square wave
The accuracy (error) at each measured point is determined according to the following formula. output type linear scales, even with the same resolution, the shorter the minimum edge
interval, the faster the response speed.
Error = reference value of the laser length measuring device – value measured by the linear scale
Here, the words "accuracy" and "error" have the same meaning. Thermal expansion coefficient
We refer to the plot on a graph of the error at each measured point in the effective This refers to the thermal expansion of an object in response to a change in
range as an accuracy chart. temperature, which is measured as elongation per unit length for each 1°C increase
in temperature of the material.
Based on this accuracy chart, the accuracy of the linear scale is noted as the range between
the maximum error and minimum error. There are the following two notation methods.
(1) Note the size of the range between the maximum error and minimum error as 'a'.
Full duplex communication and half duplex communication
Full duplex communication refers to a system in which devices (for example, a scale
The value 'a' shown in Figure 2-1 indicates the accuracy. This standard value is and a servo amplifier) each have two communication lines and can communicate
indicated using the conversion formula ( + L) μm. Here, L is the effective range (in with each other at the same time. On the other hand, half duplex communication
mm) and and are coefficients that are set on each model. refers to a system in which devices have a single communication line, so devices
cannot communicate with each other at the same time, and communications can
For example, for a linear scale with an accuracy standard value of (3 + 3L/1000) only be sent from a single device at any one time.
μm and an effective range L of 1000mm, 'a' is 6μm.
2) Note the size of the range between the maximum error and minimum error as '±a/2'.
Full duplex communication Half duplex communication
The center value between the maximum error and minimum error is 0, the
maximum value is noted as '+a/2', the minimum value is noted as '-a/2', and the size Scale Servo amplifier Scale Servo amplifier
of the error range is noted as '±a/2'. This notation is mainly applied to ST scales.
Transmission Reception
In notations (1) and (2), 'a' in (1) and '±a/2' in (2) are the same accuracy standard value. Transmission Transmission
Linear scales use a straight-line scale that has fixed-pitch graduations as the and reception and reception
Reception Transmission
reference to detect the amount of movement and the amount of change in
position. By detecting graduations, a linear scale obtains 2-phase sinusoidal
signals that have the same pitch as the graduations. The linear scale is designed
Technical Information

so that it can perform readings with greater detail than the straight-line scale by
interpolating this sine wave signal with an electronic circuit. Interpolation means
that these 2-phase sinusoidal signals are interpolated, and the result is divided
into pulse signals corresponding to the resolution. For example, if the graduation
pitch is 20μm, readings can be performed with a resolution of 1μm.
Here, error within the graduation pitch range will occur according to the accuracy of
this interpolation processing. This is called interpolation accuracy.
The accuracy standard value of a linear scale includes the aforementioned errors
inspected at fixed intervals and interpolation accuracy.
Accuracy chart (error plot)
Error Accuracy: a (µm)
a
0
Effective range X: Measurement position
[Figure 2-1] Accuracy notation method (1)

Error Accuracy: ±a/2 (µm)

0 ± a
2

Effective range X: Measurement position

[Figure 2-1] Accuracy notation method (2)

86
MEMO

87
 310 1706(2)A-(CH)NE, Printed in Japan
Export permission by the Japanese government may
be required for exporting our products according to
the Foreign Exchange and Foreign Trade Law. Please
consult our sales office near you before you export
our products or you offer technical information to a
nonresident.

Mitutoyo Corporation
20-1, Sakado 1-Chome,
Takatsu-ku, Kawasaki-shi,
Kanagawa 213-8533, Japan
T +81 (0) 44 813-8230
F +81 (0) 44 813-8231
Note: All information regarding our products, and in particular the illustrations, drawings, dimensional and performance data contained in this pamphlet, as well as other
technical data are to be regarded as approximate average values. We therefore reserve the right to make changes to the corresponding designs, dimensions and weights. http://www.mitutoyo.co.jp
The stated standards, similar technical regulations, descriptions and illustrations of the products were valid at the time of printing. Only quotations submitted by ourselves
may be regarded as definitive.
Our products are classified as regulated items under Japanese Foreign Exchange and Foreign Trade Law. Please consult us in advance if you wish to export our products to
any other country. If the purchased product is exported, even though it is not a regulated item (Catch-All controls item), the customer service available for that product
may be affected. If you have any questions, please consult your local Mitutoyo sales office.