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Monitoring

MOS sensors originated from the MOSFET invented in 1959 and have since been widely used to measure physical, chemical, biological and environmental parameters. The earliest MOSFET sensors included the open-gate field-effect transistor and the ion-sensitive field-effect transistor invented in 1970. By the mid-1980s, numerous other sensor types had been developed such as gas sensors, pressure sensors, and biosensors. MOS technology is also the basis for modern image sensors found in digital cameras.

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45 views2 pages

Monitoring

MOS sensors originated from the MOSFET invented in 1959 and have since been widely used to measure physical, chemical, biological and environmental parameters. The earliest MOSFET sensors included the open-gate field-effect transistor and the ion-sensitive field-effect transistor invented in 1970. By the mid-1980s, numerous other sensor types had been developed such as gas sensors, pressure sensors, and biosensors. MOS technology is also the basis for modern image sensors found in digital cameras.

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MOS sensors[edit]

Metal-oxide-semiconductor (MOS) technology originates from the MOSFET (MOS field-effect


transistor, or MOS transistor) invented by Mohamed M. Atalla and Dawon Kahng in 1959, and
demonstrated in 1960.[6] MOSFET sensors (MOS sensors) were later developed, and they have
since been widely used to measure physical, chemical, biological and environmental parameters.
[7]

Biochemical sensors[edit]
A number of MOSFET sensors have been developed, for
measuring physical, chemical, biological and environmental parameters.[7] The earliest MOSFET
sensors include the open-gate field-effect transistor (OGFET) introduced by Johannessen in
1970,[7] the ion-sensitive field-effect transistor (ISFET) invented by Piet Bergveld in 1970,
[8]
 the adsorption FET (ADFET) patented by P.F. Cox in 1974, and a hydrogen-sensitive MOSFET
demonstrated by I. Lundstrom, M.S. Shivaraman, C.S. Svenson and L. Lundkvist in 1975.[7] The
ISFET is a special type of MOSFET with a gate at a certain distance,[7] and where the metal
gate is replaced by an ion-sensitive membrane, electrolyte solution and reference electrode.[9] The
ISFET is widely used in biomedical applications, such as the detection of DNA
hybridization, biomarker detection
from blood, antibody detection, glucose measurement, pH sensing, and genetic technology.[9]
By the mid-1980s, numerous other MOSFET sensors had been developed, including the gas
sensor FET (GASFET), surface accessible FET (SAFET), charge flow transistor (CFT), pressure
sensor FET (PRESSFET), chemical field-effect transistor (ChemFET), reference
ISFET (REFET), biosensor FET (BioFET), enzyme-modified FET (ENFET) and immunologically
modified FET (IMFET).[7] By the early 2000s, BioFET types such as the DNA field-effect
transistor (DNAFET), gene-modified FET (GenFET) and cell-potential BioFET (CPFET) had been
developed.[9]

Image sensors[edit]
Main articles: Image sensor, Charge-coupled device, and Active-pixel sensor
MOS technology is the basis for modern image sensors, including the charge-coupled
device (CCD) and the CMOS active-pixel sensor (CMOS sensor), used in digital
imaging and digital cameras.[10] Willard Boyle and George E. Smith developed the CCD in 1969.
While researching the MOS process, they realized that an electric charge was the analogy of the
magnetic bubble and that it could be stored on a tiny MOS capacitor. As it was fairly
straighforward to fabricate a series of MOS capacitors in a row, they connected a suitable voltage
to them so that the charge could be stepped along from one to the next.[10] The CCD is a
semiconductor circuit that was later used in the first digital video cameras for television
broadcasting.[11]
The MOS active-pixel sensor (APS) was developed by Tsutomu Nakamura at Olympus in 1985.
[12]
 The CMOS active-pixel sensor was later developed by Eric Fossum and his team in the early
1990s.[13]
MOS image sensors are widely used in optical mouse technology. The first optical mouse,
invented by Richard F. Lyon at Xerox in 1980, used a 5 µm NMOS sensor chip.[14][15] Since the first
commercial optical mouse, the IntelliMouse introduced in 1999, most optical mouse devices use
CMOS sensors.[16]

Monitoring sensors[edit]
Lidar sensor on iPad Pro[17]

MOS monitoring sensors are used for house monitoring, office and agriculture monitoring, traffic


monitoring (including car speed, traffic jams, and traffic accidents), weather monitoring (such as
for rain, wind, lightning and storms), defense monitoring, and
monitoring temperature, humidity, air pollution, fire, health, security and lighting.[18] MOS gas
detector sensors are used to detect carbon monoxide, sulfur dioxide, hydrogen sulfide, ammonia,
and other gas substances.[19] Other MOS sensors include intelligent sensors[20] and wireless
sensor network (WSN) technology.[21]

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