Thin and
Thin and
Chemistly
and Physt'cs,
27 (1991)
1-43
REVIEW
CHEBII~L DEl?aSITIIcsJ
OFMEmL CXAtCOGENIDE THIN FILMS
C. D. LWHANDE
Department of Physics, Shivajj. University, Kolhapur 416 004 (India)
I. Introduction .............................................. 2
2 Theoretical background .................................... 4
3 Deposition of metal chalcogenide thin films ............... 13
4 Conclusions ............................................... 37
5 References ................................................ 38
ABSTRACT
0254-0584/91/$3.50 OElsevier
SequoiaiPrinted
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2
1 INTROWCTIQN
MS, CdSe, Bi2S3, BiZSeg, Pbs, PbSe, Ag2S, TlSe, MoS2, urSe~$
2 TH~OKtiTICHL
DACKGP.OlJND
2.1 Solubilitv and Ionic Product
C
'A+ . B-
1. -
2.2
=AB(s)
Cm (5) = aconstant-K
C C
A* B-
K= 2.3
t
K
or rac’ = c c 2.4
A+ B-
KS f c x c 2.5
A+ B-
appropriate sites.
2.8
result there are many more centres upon which the growth
process can take place, none of the particles can becane very
ment in purity.
The films are grown by the ion by ion or the cluster by cluster
proposed as :
cd*2 +2a
-- - GdKw2
LCd2+] Em3 1 -8
1. 7.56 x Pz!O 2.18
[Cd (NH,),2']
13.5
-
---
T-L
‘1
T
12.5
31
o- --Y
11.5 ,-_
I
10.5
-0.45 -03 -035 0
Puw3 I-
have been proposed for PbSe, Cds, Ybs and HgS 115,ISl.
nccording to Lundin and Kiteav[14]nucleation on substrates
will be formed.
2.5.2 Effect
of deposition.
properties,
NH&H
CdCl2 + iNH2) CS -CdS +CH&+ 2H++ 2Cr 3.1.1
Cd.5 fran alkaline solution. Main results are (i) films prepared
1233 using TEA ccanple~d Cd. ions, have reported film growth
At 30°C, the rate of growth was slow and the terminal thick-
rate was higher and the terminal thickness was 1.7 microns in
Cd+2 ions is
Nair et.el 1291. They reported that the films with equimolar
was In the 0.3 to 0.4 micron range. The films were prepared
excellent optoelectronicpraperties,
A number of d0pants have heen added to CdS films,
Bharadwajet al. (241prepared doped films by the addition of
CuI and AlCl3 in the reacticw bath, Sahu and Chandra 1251 and
shikalgar and Pawar [29] prepared Li doped Cds films. Sahu
end Cnandra [ZS] added Li203 (la-5 N)in to the loath,The
optical bandgap of CdS:Li films was 2.35 eV and the resistivity
of the films was lower. Shfkalgar and Pawar [ZS] added 0.1%
by weight fithum salt to the bath. XRD showed that CdStLi
films are polycrystallineand contain a mixture of 90% of
B cubic and lOXhexagonal forms of CdS. Further optical
properties of these films were studied in detail.
Bargale et-al,1303 prepared Na daped cds fflms to &ding
sodium sulphate ( 1 wt% ) to a bath, The films became less
films. The surface state density was 1017 cmq3 eV-I. Pawar &
a. [37] prepared CdS:In and Deshmukh et al. [39] prepared
CdS:As films and their structural and electrical characteriz-
ations are reported. Indium doping was reported to be 0.01 wt
%.
Recently Lokhande [44] has reported on CdS film deposition
films were deposited ato glass, titanium and tin oxide coated
resistivity was lo3 - lo4 ohm cm-l. The optical bandgap was
2.55 eV.
The XRD showed that 2n.S films are of wurtzite form. ‘l&he
n- type in nature.
decay time was lo4 sec. Similarly Nair and Nair f493 have
and thiourea in the 1:3 molar ratio. Reddy et a&. [50] have pre-
film canposition was Cul 8S. The stirring of the solution led
.
to a nonuniform and very poor quality film. Pramanik et al. [52]
have mixed 0.15 M CdS04, 7.4 M TEA and 14M ammonia anu to this
tion time. The XRD showed that films are amorphous and film
canplexing agent into the bath formed with CuCl, Nacl and
metry range was 1.83Cx<1.85. 'Ihe optical bandgap was 1.45 eV.
The film thickness was 3-6 micron. The films are n- type in
micron. The XRD showed that films are amorphous in nature. The
mixed. The bath temperature was varied fran 8 to 55OC and EDTA
was 8.2 x lo4 ohm cm-l. The activation energy is 0.1 eV. With
Hg+2 and Au+~. Of these oily Au" and lig+2 were suitable
canplexed with EDTA andNa 2S 203 solution was added to it. The
solution and 7.4 TEA and lM NH4Cl were mixed together and the
solution was stirred well and after 1.5 hours, the slide was
lo5 ohrt+cm and activation energy was 1.5 eV. The terminal
N2H4
Mn(T&1)+2 + NH4Cl + Ui3CSNH2 + MnS + TEA + CH3CCNH2
21°C
+ H20
3.1.3
The filrma were deposited by the ion-by-ion condensation
process.
the sliaes was covered with a thin black deposit. The reaction
is as follows :
t=25Oc
Co(TW)+2 + CH3CSNH2 + 2d+ O2 - CoS + TEA* CH3CO NH2
+ H20 3.1.4
4 hours, the slide was covered with a black deposit. The film
3o"c
Ni(TEA)+2 CH3CSNH2 +2CIi- ~Nj.s + G-13Cl;rjH
2
+ TEi+ +H20 3.1.5
canplexed with TEA was mixed with lM thiourea and l7M NH4CH.
The bath was heated to 100 - llO°C for 40 mins and kept at
was 0.05 to 0.1 micron. The XRD showed that films are amorphous
was 2.6 x 1014 per cm3 and mobility was 0.07 cm2/V+Sec. fran
as follows :
solution of Sb203 was prepared and .EDm was used for ccmpfex-
ing Sbi3 ions. To it, 100 mM NaZS203 solution was added. The
solution. The Sb S
films with the alkaline bath were uniform
23
and conpact. The film thickness was between 0,3 and G.4 microns,
The optical bandgsp of films from the EGTA complexed bath was
solution was added to it. The bath was heated to 90°C for 30
mins and then the beaker was kept at room temperature for 5
showed that MoS2 films are amorphous. The plots (hhv ) I'2 E
Large area films (%50 an') have been prepared. The increase
Thin films of Cdl-x ZnxS (X = 0.2, 0.4, 0.6 and 0.8) were
PEC cells.
mixed and NH4Cfi was added. The pH of the mixture was maintained
*
er Indrum Sulnhxde iCZxL&a2)
3.1.18 &C!om~
InC13, 0.5M thiourea, O,SM TEA and 13.4M ammonia were mixed
used were glass, MO, Si, quartz and conducting glass. 'Ihe
grain size and canposition depend on the substrate material.
-1
The electrical resistivity was 0.1 to 100 ohm cm . The films
were p- type. The TED and XRD showed that films are single
process.
Pramanik and Biswas [79]. For this 1M ZnC12 solution was mixed
with 7.4H TEA, 7.5M NaCii and 14M ammonia solution. To this,
were added. The temperature of the oil bath was 1OO'C. After
PbSe, The reaction was slow and about an hour was required for
seX.enosu1phat.esolutions.
and Skovlin f82I. 0,lM lead citrate, 7.9 NH4C%i solutions were
i861. For this lead acetate solution was carrplexed with sodium
citrate and the prS was adjusted with NH4M. 0.l.M lead canplex
were 3-4 microns thick. The hot probe method showed that films
are p type. Gold and silver gave ohmic contacts to TiSe films.
obtained. The films thickness was 0.3 - 0.5 micron. Ihe films
and carrier ccncentration was 8.5 x 10lg cm3. The 'Egr was
carried cut at 100°C for 1.5 hours. The slides wsfe CoiTered
solution was mixed with 7.4M TW, 14M ammonia and 5M NaQI
0.06 to 0.25 microns. XRD showed that the NiSe films are poly-
electr ical resistivity was lo2 ohm cm. The reaction mechanism
Na2SeS03, 7.4M TEA and 13M NH40H solutions were mixed together.
that the films are hanogenous with average grain size of the
order of 0.7 micron. The XRD showed the cubic form of CusxSe.
34
The optical bandgap was estimated to be 1.2 eV, The films were
p- type in nature and with electrical resistivity of 0.1 to
2 x 10m2 ohm cm-'.
‘Ihe maximum film thickness was 0.5 t0 0.6 miCr0IL The XRD
showed that the MaSe2 films are polycrystallinein nature. The
'Eg' was estimat8d to be 1.14 eV. The 'IZPmeasurement showed
films are n- type in nature. The resistivity of film Was
IO4 ohmtcm-'
are n-type. The thickness of the snSe film ~a.5 Ck 0.4 micron.
tion was kept at 30% for 2 hours. The films of 0 to 0.2 micron
more than 10, the deposition rate is too slow to obtain a tnin
The deposition was carried out at 30°C for 10 hours cnto glass
0.04% TEA and ammonia was added . The film thickness was
The films deposited at SO'C were Cul 011nSe2,02 and the thick-
.
ness was 2 to 3 microns. XRD showed that films are chalcopyrite
with extra lines of C&Se, The grain size was between 0.4 to
the 90°C bath had the canposItian Cul .011nSel.8~~ The film
thickness was 1.3 to 1.5 microns and films were single phase
chalccpyrite, tie grains were elliptical and oriented al-g I1121-
37
The grain size was 0.2 to 0.3 micron and resistivity was 50
to 0.2 ohnrcm, All films were p type and 'Eg' was 0.98 eV.
3.2.6
reaction bath.
4 CONCLUSIONS
coatings etc.
5 REFERENCES
1988.
4 S.H. Pawar, C.H. Bhosale and R.N. Patil, in C.D. Lokhande and
Conversion, 1985.
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10 S.H. Pawar, p,N. Bhosale and S.P. Tamhankar, Thin Solid Films,
(1983) 165.
11 S,D, Sathye and A.P.B. Sinha, Thin Solid Films, 44 (1977) 57.
21 R.L. Call, N.K. Jaber, K.Seshan and J.R. whyte Sr., solar
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40
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42
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