Sondy-Pomiarowe
Sondy-Pomiarowe
probing technology
Rugged and flexible solutions for
discrete point measurement on CMMs
Touch-trigger probe technologies
Resistive
• Simple
• Compact
• Rugged
Strain-gauge
• Solid-state switching
• High accuracy and repeatability
• Long operating life
Kinematic resistive probe operation
A trigger signal is generated A spring holds the stylus
on contact with the component against the kinematic contacts
surface and is used to stop and returns the probe to a
the machine seated position following
contact between the stylus
and the part
Three rods, each resting on two
balls, providing six points of contact
in a kinematic location
The stylus ball is uniquely located,
returning to the same position to
within 0.00004 “ (1 micron)
Kinematic resistive probe operation
• Probe in seated position All kinematics in contact
Motion of
machine
Kinematic resistive probe operation
• Probe in seated position
Contact
force
Kinematic resistive probe operation
• Probe in seated position Pivot about Contacts
these contacts separate
• Stylus makes contact with component
• Resistance measured
Current flows
• Contact patches reduce in through kinematics
size as stylus forces build
Kinematics bonded to (and
Close-up view Resistance rises as
insulated from) probe body
of kinematics: area reduces (R = /A)
• Resistance breaches
threshold and probe triggers Force on kinematics
when stylus is in
• Kinematics are still in free space
contact when probe triggers
• Stylus in defined position
Trigger
• Current cut before threshold
kinematics separate to
avoid arcing
R1 > R2
FC1 > FC2
Pivot Pivot
point point
Factors in measurement performance
Pre-travel variation - ‘lobing’
• Trigger force in Z direction is higher than in XY plane
• No mechanical advantage over spring
• FC = FS
• Kinematic resistive probes exhibit 3D (XYZ) pre-travel variation
• Combination of Z and XY trigger effects
• Low XYZ PTV useful for contoured part inspection
Test data:
• ISO 10360-2 3D form
• TP20 with 50 mm stylus: 4.0 µm (0.00016 in)
Factors in measurement performance
Probe calibration
• Pre-travel can be compensated by probe calibration
• A datum feature (of known size and position) is measured to
establish the average pre-travel
• Key performance factor is repeatability
Limitations
• On complex parts, many probing directions may be needed
• Low PTV means simple calibration can be used for complex
measurements
• If PTV is significant compared to allowable measurement error,
may need to qualify the probe / stylus in each probing direction
Factors in measurement performance
Typical pre-travel variation
Scale in µm
• XY plane
Probe: TP6
Stylus: 50 mm
Pre-travel variation: 3.28 µm
Trigger force: 15 gram
Repeatability (2 Sigma): 0.5 µm
Factors in measurement performance
Repeatability
• The ability of a probe to trigger at the same point each time
• A random error with a normal distribution
• For a given probe and probing condition, repeatability is
equal to twice the standard deviation (2) of the normal
distribution
• 95% confidence level that all readings taken in this
mode will repeat within ±2 from a mean value
Factors in measurement performance
Hysteresis
• Error arising from the direction of the preceding probing move
• Maximum hysteresis occurs when a measurement follows a probing
moves in opposite directions to each other in the probe’s XY plane
• Hysteresis error increases linearly with trigger force and stylus length
• Kinematic mechanism minimises hysteresis
Factors in measurement performance
Ranked in terms of importance
Repeatability
• Key requirement of any trigger probe
• Fundamental limit on system measurement performance
• Hysteresis contributes to measurement repeatability
Pre-travel variation
• Can be calibrated, provided all probing directions are known
• Measurement accuracy will be reduced if probe used in un-qualified direction and PTV is high
• Increases rapidly with stylus length
Hysteresis
• Small error factor for probes with kinematic mechanisms
Kinematic resistive probe technology
Simple electro-mechanical switching
General use
Probe: TP7M
Stylus: 50 mm M4
Maximum variation: 0.34 µm
Sensitivity: HIGH
Strain-gauge probe operation
Lobing comparison
• Plots at same scale
Strain-gauge
XY PTV = 0.34 m
Kinematic resistive
XY PTV = 3.28 m
Strain-gauge probe characteristics
High accuracy and repeatability
• Probe accuracy even better than standard kinematic probes
• Minimal lobing (very low pre-travel variation)
Reliable operation
• No reseat failures
• Suitable for intensive "peck" or "stitch” scanning
• Life greater than 10 million triggers
Flexibility
• Long stylus reach
• Suitable for mounting on articulating heads and extension bars
• Stylus changing available on some models
TP7M strain-gauge probe
Concept
• 25 mm (1 in) diameter probe
• Autojoint mounted for use with PH10M PLUS
• Multi-wire probe output
TP7M strain-gauge probe
Benefits
• Highest accuracy, even when used with long styli - up to
180 mm long ("GF" range)
• Compatible with full range of multi-wired probe heads and
extension bars for flexible part access
• Plus general strain-gauge benefits:
• Non-lobing
• No reseat failures
• Extended operating life
• 6-way measuring capability
TP7M performance
Uni - directional repeatability
0.3
0.25
0.2
Microns
0.05
0
0
10
12
14
16
18
20
No. of triggers (*1,000,000)
TP7M performance
XY (2D) form measurement deviation
0.6
0.5
0.4
Microns
0.1
0
0
10
12
14
16
18
20
No. of triggers (*1,000,000)
TP200 stylus changing probe
Concept
• TP2-sized probe, with strain gauge accuracy
• Stylus changing for greater flexibility and measurement automation
• 2-wire probe output (like TP20)
Benefits
• Long stylus reach - up to 100 mm long ("GF" range)
• Match stylus to the workpiece using high-speed stylus changing
• Improve accuracy for each feature
• No re-qualification
• Manual or automatic changing with SCR200
• Compatible with full range of heads and extension bars
TP200 stylus modules
Optimal sensor performance
• 6-way operation ±X, ±Y and ±Z
• Two types of module:
• SF (standard force)
• LF (low force) provides lower overtravel force option
for use with small ball styli and for probing soft
materials
• Detachable from probe sensor via a highly repeatable
magnetic coupling
• Provides overtravel capability
• Suitable for both automatic and manual stylus changing
• Module life of >10 million triggers
Trigger probe measurement performance comparison
Renishaw touch-trigger
probing technology
Issue 10 technology
SP25M brings exciting new
benefits
SP25M encompasses
™ technology
System components - a
highly modular concept
Design characteristics,
performance & specification
Ordering information
• Two sensors in one!
– a SCANNING probe for form measurement
and reverse engineering applications,
capable of high-accuracy scanning across a
stylus length range of 20 mm to 200 mm
– a TOUCH TRIGGER probe, using the
versatile TP20 range of stylus modules
Flexibility through
modular design
Flexibility through
modular design
Compact size
enhances feature
access
• Feature access
– total reach of nearly
400 mm (15.7 in) is
100 mm
possible by using a extensi
probe extension bar on
– three scanning
modules each Carbon fibre extensions for
optimised for a accuracy and long EWL
specific range of
stylus lengths
– stiff carbon fibre
stylus extensions
for excellent effective
working length
– uses M3 styli up to
200 mm (7.9 in)
Feature access - SP25M
• probe can be mounted on an
articulating head means that
many features can be
accessed with fewer styli
• lower stylus costs
• shorter cycle times
SP25M brings exciting new
benefits
SP25M encompasses
™ technology
System components - a
highly modular concept
Design characteristics,
performance & specification
Ordering information
Our innovative ™ technology
scanning philosophy is encompassed by
the SP25M probe system ...
• Speed and accuracy
– sensors with high dynamic response to provide high
accuracy data at high speed
– accuracy through sophisticated probe calibration
– match styli materials to applications for best results
• Flexibility
– probe changing, stylus changing, articulation
• Cost effectiveness
– innovative hardware and scanning techniques reduce
complexity
– robust designs and responsive service for lower lifetime
costs
SP25M’s specific design objectives have
been met ...
• the most compact scanning and touch
trigger probe available
• innovative pivoting sensor design optimised
for high accuracy across 20mm to 200 mm
stylus range
• system modularity to provide unmatched
user flexibility
• passive design to avoid unnecessary system
complexity
• isolated optical metrology to avoid stacked
axis errors
• compact and light, with excellent dynamic
response
SP25M brings exciting new
benefits
SP25M encompasses
™ technology
System components - a
highly modular concept
Design characteristics,
performance & specification
Ordering information
SP25M - product naming ... SP25M
Probe Body
SM25-1/2/3
TM25-20
TP20
FCR25 module
20-50 mm
– each has a design optimised to
maintain high accuracy and low
50-105 mm
contact forces over the following
dedicated range of stylus lengths:
SM25-1 + SH25-1 (20mm - 50mm)
SM25-2 + SH25-2 (50mm - 105mm)
120-200 mm
SM25-3 + SH25-3 (120mm - 200mm)
SP25M - as a TOUCH TRIGGER PROBE ...
• the probe body - would have the SM25-#
scanning module replaced by the...
• TTP module adaptor (TM25-20) which
directly carries any of Renishaw’s TP20
range of stylus modules:
– TP20 LF/SF/MF/EF
– TP20 EM1/EM2
– TP20-6W
FCR25 - the most flexible change rack FCR25
ever from Renishaw …
• rapidly change between scanning and
touch trigger mode to match the ideal
solution to the application
• FCR25 is a triple-port unit, each port is
easily configured to carry any system PA25-20/SH
element of the system:
SM25-1/2/3 SH25-1/2/3
• OEM’s controller
– AC3 interface card (ISA Bus) is
provided
SP25M encompasses
™ technology
System components - a
highly modular concept
Design characteristics,
performance & specification
Ordering information
Autojoint
SP25M probe body houses
the optical transducer ...
• isolated optical transducer uses
proven IRED beams and PSD
sensor technology (see later slide)
• Autojoint provides compatibility
with all Renishaw’s multiwired
heads and extension bars Optical
• The SM25-1/2/3 scanning transducer
system
modules and TM25-20 touch
trigger adaptor mount directly to
the body via repeatable
kinematic joint Kinematic mount for
SM25-# or TM25-20
• ultra-compact mechanism - fits
inside Ø25 mm (Ø1 in) probe
SM25-1/2/3 scanning modules
house the motion system ...
• patented, pivoting mechanism
featuring two diaphragm springs
• optimised to give very low
inertia, low spring rates of
< 0.6 N/mm and high accuracy
over dedicated stylus range
‘Isle of Man’
• high natural frequency (rigid spring creates
member) when in contact XY pivot point
with the component
• ultra-compact mechanism - fits
inside Ø25 mm (Ø1 in) probe
Second spring
• 0.5 mm spherical radius allows translation
measuring range in all directions
SP25M designed for “isolated 2 PSDs (in body)
optical metrology” detect stylus 2 IRED sources
deflection (in body)
• IREDs in probe body reflect light
off mirrors in scanning module
IRED
back onto PSDs beams
• highly integrity performance -
2 Mirrors (in
motion is faithfully translated to scan module)
PSD’s reflect beams
back to PSD’s
• non-linear outputs are
compensated by sophisticated
3rd order polynomial algorithms
• no moving wires Kinematic joint line
between probe
body and scanning
module
2. Swept area
Why are there 3 scan modules to cover the across PSD is
optimised over
stylus range? - traditionally, increasing specified
stylus length leads to reducing accuracy stylus range
2.0
Filtered (60 Hz harmonic)
1.5
No filter (raw data)
1.0 Module/Stylus used:
0.5 21 = SM25-1 with 21 x 3 mm, SS stem
50 = SM25-1 with 50 x 5 mm, Ceramic
0 stem
21 50 100 200 100 = SM25-2 with 100 x 6 mm, GF stem
Stylus length (mm) 200 = SM25-3 with 200 x 6 mm, GF stem
Design characteristics, performance and specification
Radius Error
1.72 µm
10
Automatic changer(s) FCR25 (triple ported unit for mounting to MRS - each port can
be configured to accept any system
element)
FCR25-L3 (3 port standalone rack with single leg)
FCR25-L6 (6 port standalone rack with single leg)
Rev 02
45.55
typ
Ø25
62.5
TP20
module
Ø13.25
SP25M encompasses
™ technology
System components - a
highly modular concept
Design characteristics,
performance & specification
Ordering information
Please contact your local Renishaw supplier for
pricing details
SAVES 20%
OFF LIST
TOUCH
TRIGGER
MODULE
KITS
Part No. Description
CHANGE RACK
Part No. Description OPTIONS
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technology