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38 Materials Fabrication and Characterization Techniques

This document introduces a new course on Materials Fabrication and Characterization Techniques to be offered at the Indian Institute of Information Technology Design and Manufacturing (IIITDM) Kanchipuram. The 3 credit core course is proposed by Dr. Y. Ashok Kumar Reddy and was submitted for approval to the 38th Senate. The course aims to teach deposition techniques for manufacturing products, and study the physical, morphological and chemical properties of samples. Topics will include thin film deposition methods and characterization techniques to analyze properties and applications of thin films.

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MPD19I001 VITHISHA M
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101 views1 page

38 Materials Fabrication and Characterization Techniques

This document introduces a new course on Materials Fabrication and Characterization Techniques to be offered at the Indian Institute of Information Technology Design and Manufacturing (IIITDM) Kanchipuram. The 3 credit core course is proposed by Dr. Y. Ashok Kumar Reddy and was submitted for approval to the 38th Senate. The course aims to teach deposition techniques for manufacturing products, and study the physical, morphological and chemical properties of samples. Topics will include thin film deposition methods and characterization techniques to analyze properties and applications of thin films.

Uploaded by

MPD19I001 VITHISHA M
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
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IND I AN I NS TI TU T E OF I NF O RM A TI ON T EC H NO L OG Y

DESIGN AND MANUFACTURING (IIITDM) KANCHEEPURAM


INTRODUCTION OF NEW COURSE

Materials Fabrication and Course No


Course Title (to be assigned by PHY5XXX
Characterization Techniques
Academic Cell)
Specialization Materials Science Structure (LTPC) 3 0 0 3

To be offered for UG / PG / Ph.D. Status Core Elective

Faculty Proposing Dr. Y. Ashok Kumar Reddy Type New Modification


the course
Date of DAC 05/09/2018 Members Present All Faculty Members of the Dept.

None Submitted for 38th Senate


Pre-requisite
approval
Learning • To know the deposition techniques for the manufacture of products
Objectives • To study the physical, morphological and chemical properties

• This course aims to learn the different techniques to fabricate the device samples
Learning
• It can be mainly useful for PG, DD and as well as PhD students towards making the
Outcomes
products and study the basic properties of the synthesized samples
I. Preparation of Thin Films
A. Vacuum basics: (5)
Production of Vacuum, Pressure measurement Gauges in Vacuum system
B. Physical methods: (10)
Thermal evaporation, Electron beam evaporation, Pulsed laser deposition and Molecular beam
epitaxy.
Sputtering: DC and RF sputtering, Glow discharge and Reactive magnetron sputtering.
C: Chemical methods: (5)
Atomic layer deposition, Chemical vapour deposition, Spray pyrolysis and Spin-coating.
Contents of the
course II. properties and Applications of Thin Films
(With A. Characterization of thin films: (15)
approximate Crystallography Technique: X-Ray Diffraction.
break up of Imaging Techniques: Scanning electron microscopy, Transmission electron microscopy, Atomic
hours) force microscopy and Rutherford Backscattering Spectrometry.
Spectroscopic Techniques: Energy Dispersive Spectroscopy, X-ray Photo electron Spectroscopy,
Raman Spectroscopy, Secondary Ion Mass Spectrometry, Auger Electron Spectroscopy, UV-Vis-NIR
Spectroscopy and Fourier Transform Infrared Spectroscopy.
B. Applications of Thin Films: (7)
Photolithography: Photoresists, Mask and pattern generation;
Thin film capacitors, diodes and photodetectors;
Thin film solar cells, Thin film micro-batteries;
Thin film sensors: Gas sensors, Bolometers.
1. Handbook of Thin Film Technology, Hartmut Frey, H.R. Khan, Springer, 1st ed. 2015.
Text Books 2. Materials Science of Thin Films: Deposition and Structure, Milton Ohring , D. Gall, S. P.
Baker, Academic Press Inc, 3rd ed. 2014.
1. Handbook of Thin Film Deposition, K. Seshan, D. Schepis, William Andrew, 4th ed. 2018.
2. Surface Analysis Methods in Materials Science, J. O'Connor, B. Sexton, R.S.C. Smart,
Reference Books Springer-Verlag Berlin Heidelberg, 2nd ed. 2003.
3. Materials Science of Thin Films: Deposition and Structure, Milton Ohring , D. Gall, S.P.
Baker, Academic Press Inc, 3rd ed. 2014.

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