Electronic Micrometer

Mu-Checker

SENSOR SYSTEMS

Bulletin No. 2215

 Mitutoyo Electronic Micrometers Adaptable
Suited to a Wide Application Range from
a Production Line!
A low-measuring-force sensor enables even a soft workpiece
to be measured without significant deformation.

Standard type measuring force: 0.2N (No. 519-521) Low-force type measuring force: 0.02N (No. 519-522)

Compact models are best suited for in-line use.

No. 519-346 No. 519-347

Analog and digital indicator units are both equipped

with a Zero-setting function.

No. 519-552A No. 519-562A

2
to Customer Demands
the Inspection Room to Building into

Measurement Principle
This instrument uses a differential
Moving iron core
inductance displacement sensor energized Mu-checker Block Diagram
by a 5kHz AC exciting voltage applied
Coil across two identical series-connected coils,
L1 R1 Probe
L1 and L2. An iron core connected to the Amplifier Synchronous Low-pass Analog output
wave-shaping
stylus moves close to both cores and varies circuit circuit filter (to a recorder, etc.)
5kHz Analog indicator
Coil the impedance of each coil depending on
R2 oscillator
L2 its position, and the voltage at the junction Waveform
shaping
between the coils varies as the impedance circuit A/D
converter 199.9
Digital output
Workpiece Indicator difference. Two resistors, R1 and R2, form BCD output
Power supply circuit Output
unit a bridge circuit with the coils and the Oscillator
circuit Amplifier Constant-voltage unit RS-232C output
circuit
bridge output voltage drives electronic Digital indicator
amplification and conditioning circuits to
provide a voltage signal proportional to
displacement of the stylus.

3
 Applications

Measuring runout Measuring the inclination of a pin

The distortion of a core is measured with lever head No. The inclination of a capstan pin is measured with cartridge
519-522 and Mu-checker No. 519-552A. head No. 519-385 and digital Mu-checker No. 519-562A.

Pin inclination measurement (X-axis direction)

(Max - Min) measurement

(Max - Min) measurement
Pin inclination measurement (Y-axis direction)

Measuring the thickness of rolled sheet Measuring the maximum runout of a gear
The thickness of a rolled sheet material is measured with The maximum runout of a gear is measured with lever head
lever head No. 519-521 and Mu-checker counter EV-16A. No. 519-521 and Mu-checker counter EV-16A.

振れ測定

Multipoint measurement/judgment
振れ測定
Maximum value measurement

Measuring straightness of sheet metal Multipoint measurement on a VTR chassis

The straightness of a component is measured with cartridge A VTR chassis is measured at multiple points with cartridge
厚さ測定
head No. 519-385 and Mu-checker No. 519-552A. head No. 519-385 and Mu-checker counter EV-16A.

Note: A measuring fixture isolates the

gage from the component to avoid
sliding wear on the gage contact point as
the component is moved as shown. 最大値測定

Straightness measurement

Multipoint measurement/judgment

4
Measuring the pitch of HDD head components Measuring the concentricity of a shaft
The pitch of HDD detector head components is measured with The concentricity and runout of a shaft are measured with
lever head No. 519-521 and Mu-checker counter EV-16A. cartridge head No. 519-385 and Mu-checker counter
EV-16A. Note: Measuring fixtures isolate the gages
from the component to avoid sliding wear
on the gage contact points as the
component is rotated.

Multipoint measurement/
judgment Multipoint measurement/
judgment

Measuring the inside width of a wheel Measuring the height of a piston head
The inside width of a car wheel is measured with lever head The height of a piston head is measured with cartridge head
No. 519-521 and digital Mu-checker No. 519-562A. No. 519-385 and Mu-checker counter EV-16A.

Inside width
measurement

Multipoint measurement/
judgment

Measuring the pitch and runout of slitter blades Measuring the warp on an LCD panel
The pitch and runout of slitter blades are measured with lever The warp of an LCD panel is measured with lever head No.
head No. 519-521 and Mu-checker counter EV-16A. 519-522 and Mu-checker No. 519-552A. This lever head
with a low measuring force allows measurement without
振れ測定／判定
scratching the workpiece.

Multipoint measurement/
judgment

Height measurement

5
 Mu-Checker System Diagram

Lever Head
No. 519-327
±0.5mm P8

Lever Head
No. 519-521
±0.5mm P8

Standard type
Mu-Checker
Lever Head No. 519-552A P14
No. 519-522
±0.5mm P8

Lever Head
No. 519-326
±0.5mm P8

Differential type
Cartridge Head
Mu-Checker
No. 519-331
No. 519-554A P14
No. 519-332
±0.5mm P10

Cartridge Head
No. 519-346
±0.25mm P10

Cartridge Head
No. 519-347 Digital differential type
±0.5mm Mu-Checker
P10 No. 519-562A
(with Digimatic output) P15

Cartridge Head
No. 519-385
±1.5mm
P10

Cartridge Head
No. 519-341
±2.5mm
P10

Mu-Checker Counter
Cartridge Head EV-16A
No. 519-348 No. 519-355 P16
±1.0mm
P10

6
 Analog signal
Digimatic signal

Personal Computer
(separately required)

Programmable Controller
(sold separately)

Digimatic Mini-Processor
DP-1VR No. 264-504-5A

Display unit D-EV

No. 02ADD400

Analog Recorder
(sold separately)

7
 Probes
Lever Head Type This type allows multipoint measurement of small parts, flatness and straightness measurement on an X/Y table, etc. and runout measurement of shafts.

Specifications
Order No. External dimensions Measuring range Stylus stroke
[mm] [mm] [mm]

14
5
9.2 19 21.3 φ6.5 φ14

1.75
35

（27.75）
φ6.6
No. 519-521

26
17
4
24.9 5.8
30.7 52.3 13

14
5
9.2 19 21.3 φ6.5 φ14

1.75
35

（27.75）
φ6.6
No. 519-522

26
±0.5 ±0.6

17
4

24.9 5.8
30.7 52.3 13

43 13
14

6.5 9 7
.5
ø6

No. 519-326
8

R7
ø2

26
4.5

22.5 5.5
67.6

25.3 56 13
16

No. 519-327 24 ±0.5 ±0.65

32.3
3.5

6.5 15.8 ø6.5

7

R7
24
7

8
 Note on stylus angle
If the stylus of a pivot bearing type probe (No. 519-521, No. 519-522, or
No. 519-327) makes an angle with a workpiece surface, as in the figure,
Measuring Linearity Bearing unit Remarks/ calibration should be performed for accurate measurement. Alternatively,
force [%] structure Interchangeable stylus
the displayed value may be corrected by multiplying it by the appropriate
correction factor as given in the table.
Angle Correction factor
0° 1.00
Measuring direction 10° 0.98
changed with the forward 20° 0.94
Approx. reverse lever 30° 0.87
Pivot bearing type 40° 0.77
0.2N No. 520940 (ø1) θ
50° 0.64
No. 520939 (ø2) 60° 0.50
No. 520938 (ø3)
Display value × Correction factor = Corrected value
60゜
Dimensions of Dovetail Plate 15

±0.3 on probe body （5.934）

1.5
Transfer Stand
ø30
80
Low measuring force ø30
80
Stem mounting hole
Approx. without Bush ø9.53
Pivot bearing type No. 520940 (ø1)

50
0.02N ø8 with Bush ø8
No. 520939 (ø2)
No. 520938 (ø3)
60

40
430

44

635
16

ø58 焼入鋼 385

430

平面度1μm以下
No. 519-109-10 Anvil
59
45

(with a serrated anvil) ø58

Flatness of 1.3 µm or less

65
160（W）×100（D）
215
45

Major Specifications 168

The measuring force is
adjustable with the upper Effective transfer range Fine adjustment range Mounting hole
dial. Order No. [mm] [mm] [mm]
No need for displayed value 519-109-10 0-320 1 ø9.53, ø8 with Bush
correction when stylus makes
Approx. Parallel leaf spring an angle with surface
0.15N ±0.3 type Lever Head Mounting Brackets (Option)
No. 102824 (ø1) クランプ
No. 102832 (ø2) Stem Clamp
ø18
No. 102826 (ø3)
Note: Only the ø2 stylus tip ø6
6

is a standard accessory.
10.9

ø4 dovetail-grooved stem ø6 dovetail-grooved stem Clamp for ø6/ø8 dovetail-

12.2

No. 902802 No. 902803 grooved stem ø6 ø8

No. 902053 5.8 16.2
27.5

No need for change of No. 902053

measuring direction due to
no-clutch type ø8 dovetail-grooved stem ø9.5 dovetail-grooved stem Clamp for o6/o9.5 dovetail-grooved stem
Approx. No. 902804 No. 902805 No. 900320
±0.5 Pivot bearing type No. 102824 (ø1)
0.15N No. 102832 (ø2) Holder 扌ø6扌 ø6
No. 102826 (ø3) 扌 扌
Note: Only the ø2 stylus tip
is a standard accessory. Holder arm A (square 9×9×100) Holder arm B (ø8×115)
No. 900209 No. 900211

.25” x .5" 953639 (Length: 2")

900306 (Length: 4")

9
 Cartridge Head Type A cartridge head type is easily built-in to the equipment due to its slim and compact shape.
This type of sensor is optimal for an automatic measuring machine.

Specifications
Order No. External dimensions [mm] Measuring
range [mm]
8.1 (0-point position) 71
1.3
R1. 5 15 4.5
5
No. 519-331
±0.5
No. 519-332
7.3

ø8h6 -0.009

ø12
0
* for 519-332: (ø) .375" stem, 4-48UNF contact point
25
3.5 (0-point position) 12
0.26 0.34

No. 519-346 ±0.25

.25
R1

ø8h6 -0.009
0
ø3.5

0.65 0.85

ø8h6 -0.009
0
R1.
5
No. 519-347 ±0.5

6.8 (0-point position) 22.5

34.5

112.3
21.65 (0-point position) 58 31
1.65 2.35
No. 519-385 ±1.5
1.5
SR
φ8h6 -0.009
0

2.8
3.2
ø8h6 -0.009

R1
.5
0

No. 519-341 ±2.5

14.75 (0-point position) 2 71 4.5 8

-0.009
0
ø8h6

15.25 (0-point position) 48 31

No. 519-348 ±2.5

R1.5
1.15 1.35

Common Specifications
Connection method——————————————————————— Half-bridge type Cord length——————————————————————————————————— 2m
Exciting voltage———————————————————————————————3.0VRMS Cord thickness———————————————————————————————— ø4mm
Exciting frequency——————————————————————————————— 5kHz Connector type———————————————————————— Mas-5100 (DIN5P)
Exciting waveform———————————————————————————— Sinusoidal

10
Maximum stylus stroke Measuring force Linearity [%] * Dust-proof rubber
[mm] boot Bearing unit structure Remarks/Interchangeable stylus

Accepts
±0.65 0.25N ±0.5 No Plain type Low measuring force interchangeable styli
for dial indicators
M2.5×5

+0.34 Compact type

0.7N ±0.3 No Linear ball bearing type Suitable for inside-
–0.26 diameter measurement

Dedicated stylus used

Non-interchangeable

+0.85
–0.65 0.7N ±0.3 Yes Linear ball bearing type Compact type

+2.35 Standard type with

–1.65 0.7N ±0.3 Yes Linear ball bearing type cable strain-relief

Accepts
+3.2 0.9N ±0.5 Yes Linear ball bearing type Standard type
interchangeable styli
–2.8 for dial indicators
M2.5×5

+1.35 0.7N ±0.3 Yes Linear ball bearing type Standard type with
–1.15 cable strain-relief

* Indicates a value with respect to that at full scale.

11
 Styli/Extension Rods (interchangeable styli for dial indicators are usable)
• All threaded portions are M2.5x0.45 × 5mm.
• When exchanging a stylus, firmly tighten the screw so it will not loosen during use. (Recommended tightening torque: 5N·cm)
• Carbide styli are resistant to abrasion.

■ Ball point ■ Flat point

Standard styli are provided. Convenient for measuring a workpiece with a spherical measuring surface.
Ungrooved Grooved Unit: mm 8 3 10 Unit: mm
L L
Material: Hardened steel

ø10
øD
ø5
Sø3 Sø3 øD Order No.
No.131365 No.101117
Note: A tip ball of ø0.5 to 10 is available by special order. (Flatness: 3µm) (Flatness: 5µm) 10 101117
Carbide Ruby Nylon 15 21AAA341
Ball material
Grooved L Order No. 20 21AAA342
L Ungrooved Ungrooved Ungrooved 8 13165 25 21AAA343
(Waterproof)
7.3 Order No. 901312 – 120047 901994 10 21AAA340 30 21AAA344
8.3 Order No. – 902119 – – Note: A flat point diameter (øD) of up to 50 is available by special order.
12.1 Order No. – 21AZA320 – – Note: If a probe using the flat point stylus requires squareness to the stem and parallelism with
14 Order No. 21JAA225 – – – the reference plane, these must be adjusted including the cartridge head before use.
15 Order No. 120049 – 120051 – Please consult Mitutoyo for special orders.
17 Order No. 21JAA224 – – –
19.3 Order No. – 21AZA321 – – ■ Flat point (Carbide) 8 Unit: mm
L
20 Order No. 137391 – 137392 – Material: Carbide

ø5
ø2
22 Order No. 21JAA226 – – –
 25 Order No. 120053 – 120055 – No.120056 (Flatness: 3µm)

ød
øD
30 Order No. 21AAA252 – 21AAA253 – 10
2 3
Note: If a probe using the flat point stylus requires squareness to the stem and parallelism with 1.7
the reference plane, these must be adjusted including the cartridge head before use.
Note: A flat point diameter (ød) of up to 40 is

ød0
øD
Please consult Mitutoyo for special orders.

ød
available by special order.
Order No. d D L Flatness(μm)
120041 4.3 5.2 5 d0 ø3 ø4.5
■ Spherical point (Carbide) 120042 6.5 7 3 d ø6.4 ø8
L 120043 9.5 10.5
Unit: mm D ø7 ø9
1.7 21AAA345 15 17
Material: Carbide (only for tip of sphere) 10 Order No. 137255 137399
21AAA346 20 22
5 (Flatness: 3μm)
21AAA347 25 27
21AAA348 30 32
øD
ød

Note: If a probe using the flat point stylus requires squareness to the stem and parallelism with
SR the reference plane, these must be adjusted including the cartridge head before use.
Please consult Mitutoyo for special orders.
Note: A spherical point with ød of up to 40 is available by special order.
D ø5.2 ø7.5 ø10.5
L (ø4.3×5) (ø6.5×10) (ø9.5×10)
■ Needle point
SR 5 7 10 Convenient for measuring the bottom face of a groove or hole.
L
5 Order No. 120058 – – Unit: mm
ℓ
10 Order No. – 120059 120060 Material: Hardened steel
ø5

■ Shell type point SR0.4

Note: A needle point with SR of 0.2 and ℓ of up to 20 is available by special order.
Provided with a large spherical point. This stylus is convenient for plane measurement.
Order No. L
Note: A shell type point with øD of 0.5 to 40, 101121 11 15
SR of 0.2 or more and L of up to 100 is Unit: mm
available by special order. 137413 13 17
Material: Hardened steel 21AAA255 21 25
øD SR L Order No. 21AAA256 31 35
L
5 101386
10 101118
12 137393
■ Needle point (Carbide)
øD

5 2.5 ℓ 7
20 101387 Unit: mm
25 101388 SR Material: Carbide
φD

30 21AAA254
φ5

Flatness: 3µm

■ Ball point D ℓ 3 5 8 10 13 18 20 28 40
ø0.45 Order No. 120066 21AAA329
Convenient for measuring an indentation. ø1 Order No. 120065 21AAA330 21AAA331 21AAA332 21AAA333 21AAA334
7.3 Unit: mm ø1.5 Order No. 21AAA335 21AAA336 120064 21AAA337 21AAA338
SøD ød Order No. ø2 Order No. 137257 21AAA257 21AAA258 21AAA339
Material: Hardened steel
1 21AAA349
ø5

1.5 21AAA350 Note: Consult Mitutoyo for the specifications of products shown in the table above.
No.101122
1.8 5 101122 SR1.8
2.5 21AAA351 Note: If a probe using the flat point stylus requires squareness to the stem and parallelism with
the reference plane, these must be adjusted including the cartridge head before use.
4 21AAA352 * A tip ball of ø0.5 to 10 is available by special order. Please consult Mitutoyo for special orders.

12
■ Conical point ■ Blade point (Carbide)
Used for positioning a measuring point accurately.
Convenient for measuring a cylindrical workpiece.
The stylus is not suitable for measuring a soft workpiece since its tip
easily scratches the workpiece. 10 Unit: mm
Material: Carbide
Tip angle: 60° 10 Unit: mm 2.5
Material: Hardened steel

øD
H
φ5

No.101120
5 Note: A blade point with H of 0.4 or more and D of ø0.5
5 or more is available by special order.
Tip angle: 90°
D
L 0.4 0.6 1
ø5

No.101385 ø2 Order No. 120061 120062 –

ø4 Order No. – – 120063
■ Conical point (Carbide)
9 Note: If a probe using the blade point stylus requires squareness to the stem, parallelism with
ø2

Unit: mm the reference plane and stylus orientation, these must be adjusted including the
Material: Carbide (only for tip of sphere) cartridge head before use. Please consult Mitutoyo for special orders.
90°

ø5

No.120057

15
8
90°

■ Roller point
ø5
ø2

Convenient for measuring a moving workpiece such as rolled strip.

No.120068 The stylus is also convenient for sliding a workpiece under
the roller point from the side.
90°
ø1

Note: Other angles are available Unit: mm

by special order. hexagon nut Roller material: Hardened steel
0.5
Roller runout: 10µm
23
15

Note: A roller point with a desired

■ Knife-edge point (Carbide) øD is available by special order.
φ10 R5
Convenient for measuring a narrow groove 3
9
Note: A high-accuracy type stylus
diameter. Unit: mm 10 with a roller runout of 5μm is
8 Material: Carbide (only for tip of sphere) also available. (special order)
ℓ （36.8）
No.901954
φD

φ5
φ4

No.120067 15
Note: A knife edge point with øD of 0.5 or
more and ℓ of 5 to 40 is available
by special order.

Note: If a probe using the knife-edge point stylus requires squareness to the stem, parallelism
with the reference plane and stylus orientation, these must be adjusted including the
■ Extension rod
cartridge head before use. Please consult Mitutoyo for special orders.
φ5.2

φ5

■ Spherical point L 5
Convenient for sliding a workpiece under the point from the side external thread internal thread
since it has a large spherical face. M2.5×0.45 M2.5×0.45
L
Unit: mm L Order No. L Order No.
Material: Hardened steel 10 303611 55 21AAA259G
15 21AAA259A 60 304146
øD

20 303612 65 21AAA259H
25 21AAA259B 70 21AAA259J
SR 30 303613 75 21AAA259L
35 21AAA259C 80 21AAA259M
D ø5.5 ø7.9 ø10 40 21AAA259D 90 304147
L
45 21AAA259E 100 303614
SR 5 5 7
50 21AAA259F
3 Order No. 111460 – –
5 Order No. – 125258 101119

13
 Mu-checkers • Zero-setting can be performed with a single touch of a button. A Mu-checker can be combined
with peripheral devices because zero-setting is enabled with an external signal input.

Analog Type • Easy to read, highly responsive

Differential type analog Mu-Checker Differential type analog Mu-Checker

(for step and sheet thickness measurement) (for step and sheet thickness measurement)
No. 519-552A No. 519-554A

Common Specifications Individual Specifications

Indication accuracy ±1%/± full scale Order No. 519-552A 519-554A
Analog output accuracy ±0.1%± within full scale (excluding the probe) ±A Yes Yes
Analog output ±1V/± full scale Calculation mode ±B — Yes
Meter indication response Approx. 0.3s ±A±B — Yes
Zero-setting enabled zone 1/3 scale or less (CMP mode) Tolerance judgment — —
Zero point thermal coefficient 100ppm/°C or less Tolerance judgment output — —
Sensitivity thermal coefficient 100ppm/°C or less Tolerance judgment output mode — —
Power consumption 5VA or less Number of connectable probes 1 2
Operating temperature range (ºC) 0 to 40 Mass 1.7kg 1.8kg
Storage temperature range (ºC) -10 to 50
Power supply 120VAC
External dimensions (mm) 134 (W) ×210 (H) ×183 (D)
Measuring range (μm) ±1500, 500, 150, 50, 15, 5
Minimum reading (μm) 50, 10, 5, 1, 0.5, 0.1
Measuring range (in) ±.05, ±.015, ±.005, ±.0015, ±.0005, ±.00015
Minimum reading (in) .001", .0005", .0001, .000050", .000010", .000005"

• Special Options
Description/Illustration Analog type Digital type EV-16A
Digimatic mini processor DP-1VR
No. 264-504-5A
1.1m
DP-1VR connecting cable
No. 936937 10P 10P

1m
Analog output cord A
No. 934795 7P
Banana-shaped tip

External output connector

Analog, limit output (7P)
No. 529035
Extension cord A Extension cord (5m) to enable probe
No. 934386 and indicator to be separated
Note: Items marked with are optional accessories.

14
 • Easy-to-read, digital readout
Digital Type • A measurement data output function is standard, allowing connection to various processors.
• Dual input

Differential type digital Mu-Checker

(for step and sheet thickness measurement)
No. 519-562A

Specifications
Order No. 519-562A
• Digital Output Connector PIN No.
1
Signal
GND
High: ±2.000mm / ±.08" ⑨ DATA OUT ① 2 DATA
Readout range
Low: ±0.2000mm / ±.008" 3 CK
On High range: 0.001mm / ±.000010" 4 NC
Resolution
On Low range: 0.0001mm / ±.000001" 5 REQ
Calculation mode ±A, ±B, ±A±B 6 NC
⑩ ②
Measurement mode ABS/CMP
Zero-setting enabled zone (1) Digimatic code format
LL: 1/3 scale or less, H: Full scale 60 A data string for each measurement consists of 13 digits (d1 to d13), assigning 4 bits to 1
Indication accuracy 3 LCD digit. data strings are output as 1 set according to the timing.
Operating temperature range (ªC) 0 to 40 d1 d2 d3 d4 d5 d6 d7 d8 d9 d10 d11 d12 d13
Storage temperature range (ªC) -10 to 50
Analog output ±1V/±FS MSD
Sign Measured value Unit
Analog output accuracy ±0.1% or less All "F" 0:＋ 0 : mm
Digital output Digimatic code format Data type 8:－ Decimal point position (0 to 5) 1 : E
Digital output mode 1 ch
(2) Timing chart
Power consumption 5VA or less 5ms
External dimensions (mm) 134 (W) × 183 (H) × 210 (D) REQ
Power supply 120 VAC
2.5ms 2.5ms
(MAX)
CK

DATA

Analog Output Connector Pin Assignment and Interface Applicable plug: No. 529035 (Option)
Signal name Mu-checker I/O interface Driving circuit and recommended load Timing
Analog output connector 200Ω
③
Pin No. Signal name Analog
⑦ ⑥ ① +NG output output 100Ω 300KΩ or
② HOLD input (tolerance judgment result hold) ⑤ more
③ Analog output ±1V 12V For a relay t
③ ① 6.8KΩ
④ 0V (logic GND) ZEROSET ⑦
⑤ 0V (analog GND) 10KΩ
For a transistor
⑤ ④ ⑥ –NG output 230ms MAX
② ⑦ ZERO SET ④ Zero-setting is
enabled within
2SC1815Y
230ms.
12V HOLD
HOLD 20KΩ
CMOS ②
10KΩ
HOLD

6.8KΩ
④
1μs or less

＋V ＋V
TD-62504P or equivalent
① Relay

±NG output Or ⑥
＋V
④ Ic30mA～50mA MAX＋V 35V MAX

15
 Features
• The EV-16A allows 6 probes to be connected unit simultaneously. one unit.
Mu-Checker Counter EV-16A The use of the RS link enables easy construction of a multi-point measuring
system that allows a maximum of 10 units (60 probes).
• I/O outputs such as RS-232C, BCD, tolerance judgment and segment are selectable.
• Peak measurement and arithmetic operation between axes (in the same unit)
are also possible in addition to normal measurement for each axis.
Major Functions
• External control (zero-setting, presetting, etc.)
• Direction switching
• Error messaging
• Tolerance judgment output
• Various data output (RS-232C, BCD, segment)
• Peak measurement (maximum value, minimum value, runout) and arithmetic
operation (addition, average, maximum value, minimum value, maximum
width) between axes
Specifications
Order No. 519-355
External dimensions Unit: mm Model No.
Number of input probes 6 axes
EV-16A

Mounting fixtures M4×8 pan-head Quantizing

screws error ±1 LCD
(4 pieces, standard accessory) Resolution
(8 pieces, standard [mm] ( ): Max. counting range
accessory) 0.001(±2.000mm), 0.0001(±0.200mm)
LED display Parameter display: 8 digits (setting display), error message: 1 digit
Error message Power supply voltage error, probe malfunction, etc.
External display Dedicated external display unit: D-EV (special option) connectable
4

Number of input switches 4

Input switch function Measurement mode selection, parameter setting
Input/Output Tolerance judgment output
1 to 6 axes (L1, L2, L3), open collector
64

BCD output BCD parallel output (positive-true logic/negative logic, open collector
6.5 output
Segment Function to turn output ON only for the terminal corresponding to the count value, open collector
Control output Normal operation signal (Normal), open collector
4.5
4

Control input Output channel designation (upon segment output or in the BCD mode), presetting,
4 136 4 5 161 5 peak clear, range selection (upon segment output), count value hold, open-collector
or no-voltage contact signal (contact/noncontact)
144 16 139 16
Interface RS-232C Measured data output and control input, compatible with EIA RS-232C
M4×8 pan-head screws Fixing brackets Home position DTE (terminal definition): Use a crossover cable.
unting fixtures
eces, standard accessory) (8 pieces, standard accessory) RS link
(4 pieces, standard accessory) Maximum number of connectable units: 10
Connecting cable length: Up to 10m (total length of all linked cables)
Data transmission time: 1.1 sec/60CH (at a baud rate of 19200bps)
Rating Power supply voltage Terminal board (M3 screws), +12 to 24VDC
Consumption current 1A
Operating temperature (humidity) range 0 to 40°C(20 to 80%RH, non condensing)
Storage temperature (humidity) range -10 to 50°C(20 to 80%RH, non condensing)
External dimensions 144(W)×72(H)×139(D)mm
6.5 Mass Approx. 1000g
Standard accessories Fixing bracket (4), mounting fixture (4), mounting screw M4×8 (8)
4.5

Optional accessories (custom-ordered) I/O output connector (No. 02ADB440)

136 4 5 161 5 D-EV external unit (No. 02ADD400)
RS-link connecting cable 0.5m (No. 02ADD950)
144 16 139 16
RS-link connecting cable 1m (No. 936937)
Fixing brackets RS-link connecting cable 2m (No. 965014)
(4 pieces, standard accessory) Applicable probes Lever head, cartridge head
*1. To calibrate the EV-16A properly, be sure to purchase dedicated display unit D-EV. When multiple units of EV-16A units are to
be used, at least one D-EV unit is required.
*2. As a power supply is not supplied as standard, an appropriate power supply with a current capacity of 1A or more must be
Display unit for the EV counter provided for each EV-16A.

Display Unit D-EV D-EV No. 02ADD400

• This display unit allows an EV-16A to be set up without using a PC.
• D-EV can display each axis measurement value, go/no go judgment results, setting data,
go/no go judgment bars of all axes and error messages.
Specifications
Connecting condition Allows external display and setting control of one EV-16A unit.
Number of displayed digitsSign + 6 digits (EV16-A processes 8-digit data internally)
Channel display (shared with judgment result display): 3 digits (3 color LEDs)
LED display Measurement mode (current value, maximum value, minimum value, runout) display: 2 digits GAGE

MAX
TIR
MIN
Code No. 02ADD400
Model EV-I
Serial No. 000001

Status display: 1 digit (2 colors)

UNIT +NG
MADE IN JAPAN
DC12-24V
200mA
44.4

GO
RS LINK +V -V
48

IN OUT

External dimensions Unit: mm

-NG

Operation switch 4 DISP Fn MODE P.SET

Operation switch function Channel

selection, measurement mode selection (current value, maximum value, 96 6.6 67 （11） 91.4
minimum value, runout), parameter setting, presetting and tolerance limit setting GAGE
TIR Code No. 02ADD400

Input/output RS-link connector IN, OUT each 1

Model EV-I
MAX MIN Serial No. 000001
UNIT +NG
MADE IN JAPAN
DC12-24V
200mA
44.4

GO

Error message Power supply voltage error, probe malfunction, etc. RS LINK +V -V
48

IN OUT
-NG

Power supply Terminal board (M3 screws), + 12 to 24VDC, 200mA DISP Fn MODE P.SET

Operating temperature
0 to 40ºC (20 to 80％RH, non condensing) 96 6.6 67 （11） 91.4
(humidity) range
Storage temperature
-10 to 50ºC (20 to 80％RH, non condensing)
(humidity) range
External dimensions 96 (W) × 48 (H) × 84.6 (D) mm
RS-link connecting cable 0.5m: No. 02ADD950 *1
RS-link connecting cable 1m: No. 936937 *1 12-24
DC 0mA
20 -V
V

Option RS-link connecting cable 2m: No. 965014 *1

00
D4 +V
02AD
. EV-I 01
No
de 0000
Co del .
Morial No AN OU
T

Terminal board connecting cable: No. 02ADD930 *2

JAP
Se IN
DE K
MA
LIN
RS
IN

AC adapter: No. 02ADN460/AC cord: No. 02ZAA000

*1: Required for connecting with an EV-16A.
*2: Connected to the terminal board when using the AC adapter.

16
4V
12-2
DC 0mA
20 -V
D4
00
+V
02-IAD
.
No EV0001
de 00
Coodel .
M rial No JAPAN OU
T
Se IN
DE K
MA
LIN
RS
IN
 I/O connector RS-link connecting cable
No. 02ADB440 (with cover) Order No. Cable length
Receptacle to fit the I/O output plug of 02ADD950 0.5m
the EV-16A 936937 1m
965014 2m
This cable is used to connect the EH/EV counters and the RS unit.
Terminal board AC adapter AC cord
connecting cable No. 02ADN460 No. 02ZAA010
No. 02ADD930

This AC adapter is used to connect to the power supply terminal of the EV-16A and
display unit D-EV. This terminal board connecting cable is used to supply power to
the EV-16A and display unit D-EV.

RS Link Function
This function allows up to 10 EV-16A units to connect with each other, thus enabling multipoint measurement of up to 60 channels. The dedicated RS-link
connecting cable No. 02ADD950 (0.5m), No. 936937 (1m) or No. 965014 (2m) is used for connection. (The total length of RS-link connecting cables is limited
to a maximum of 10m over the entire system.)
Unit 1 Unit 2

IN OUT IN OUT IN OUT IN OUT

RS-232C connector RS-232C connector
RS-232C EV-16A D-EV EV-16A D-EV
cable
External display unit 1 External display unit 2
Personal computer

…… ……

Probe No. 01 06 07 12……

RS-232C Communication Function RS-232C Specifications

This function enables remote operation of measurement data entry and
various settings such as zero-setting for the EV-16A. (1) Suitable plug: D-sub 9-pin (female), inch screw
1 5
Command format Corresponding output Operation details
Receptacle
GA**CRLF G**,+01234.567CRLF Output of [display value] via RS-232C (2) Pin assignment D-sub 9-pin (male),
CN**CRLF CH**CRLF Switching display to [current value] inch screw specification
CX**CRLF CH**CRLF Switching display to [maximum value]
Switching display to [minimum value] 6 9
CM**CRLF CH**CRLF
CW**CRLF CH**CRLF Switching display to [TIR (runout)] Pin No. Signal name IN/OUT Description (use)
CR**CRLF CH**CRLF Zero-setting 2 RXD IN Receive data
CL**CRLF CH**CRLF Clear of peak value 3 TXD OUT Transmit data
CP**,01234567CRLF CH**CRLF Input of preset value and execution of presetting 4 DTR OUT Data terminal ready
CD**,01234567CRLF CH**CRLF Input of lower tolerance limit 5 GND — Ground
CG**,01234567CRLF CH**CRLF Input of upper tolerance limit 6 DSR IN Data set ready
CS**CRLF CH**CRLF Cancel of error 7 RTS OUT Request to send
CK**CRLF CH**, $CRLF ($0 or 1) Verification of HOLD status 8 CTS IN Clear to send
CT¥¥CRLF CH¥¥,+01234.567CRLF Output of [calculation value] via RS-232C 1, 9 N.C. — No connection
Note 1: "**" indicates a probe channel number between 01 and 60 (all channels for 00).
Note 2: "#" indicates a type of data [N: current value, X: maximum value, M: minimum value, W: TIR (3) Communication specification (compatible with EIA RS-232C)
(runout)]. Home position DTE (terminal definition), A crossover cable must be used.
Note 3: CRLF means carriage return (CR) and line feed (LF).
Note 4: Input presetting and tolerance setting values with a sign and 8-digit numerical value without Communication method Half-duplex, nonprocedural
placing a decimal point. Baud rate 4800 9600 19200bps
Note 5: Set a tolerance limit in order of command CD and CG.
Note 6: Upon data request of a calculation value, all channels cannot be specified.
Start bit: 1
Note 7: The RS communication function is temporarily stopped during key operation (for setting of a
Data bit: 7 & 8, ASCII, upper case
parameter, preset value or tolerance limit) and then executes command and data output when Bit configuration Parity bit: none, even number, odd number
the count enabled status is restored. Stop bit: 2
Note 8: Execute cancellation of the count standby status with CS00CRLF (all-channel designation). Communication condition setting Setting with a parameter

17
 Power Min 2sec
supply

(3) I/O circuitry HOLD

Min 35ms

(1) Output circuitry: Output of tolerance judgment, NOM segment, etc. (nominal),
NORMAL (2) Input circuitry: Input of P.SET, HOLD, SET, etc.
Max 35ms
The transistor turns "ON" at input 'low'. (Open Collector output). Max 2sec An input is effective at 'low'.
I/O output
Power Min 2sec
EV-16A External device reference circuit supply EV-16A External device reference circuit
Min 35ms
HOLD Use a non-voltage
＋5V output such as an
NORMAL Max 35ms open-collector output
Power Min 5.1KΩ and relay output.
5KΩ supply Max2sec
2sec
TD62583 or equivalent I/O output Min 35ms
HOLD
0.01μF 74HC14 NORMAL Max 35ms Upper tolerance limit
or equivalent
Max 2sec
Min 70ms Min 15ms
COM I/O output 74HC14 0.01μF Lower tolerance limit
HOLD or equivalent Max 35ms ( ): Time upon output in high-speed mode
Data latch 2.5ms (40ms at smoothing ON) （Max 10ms） However, only for the specified CEL
Withstand voltage: Max. 24V START ［Max 90ms］ (excluding All-CEL)
Output current: Max. 20mA [ ]: Time upon output in calculation mode
Max 40ms 5ms・6ms Input current: Max.1mA Output saturation voltage: Max. 0.7V
Output saturation voltage: Max. 0.7V NG limit Max 35ms
1.6ms・2ms Upper－tolerance
Min 15ms （Max 10ms）
READY Min 70ms ［Max 90ms］
Lower tolerance limit
(4) Timing chart Tolerance
HOLD judgment, segment, BCD data
＋NG Max 35ms ( ): Time upon output in high-speed mode
Data latch 2.5ms (40ms at smoothing ON) （Max 10ms） However, only for the specified CEL
(1) Power-ON characteristic START CEL1 CEL2 CEL3 CEL4 CEL5 CEL6 (4) External presetting ［Max 90ms］ (excluding All-CEL)
Min 70ms Min 15ms [ ]: Time upon output in calculation mode
In the RS LINK connection mode, the time when 2)Max
Command
40ms mode (Discrete CEL・output)
5ms 6ms Assume that the current value of a CEL specified from
1.6ms
HOLDThis ・2ms
mode allows data output of discrete CEL (specified －NG Max 35ms
the EV-16A is initially turned on becomes the among SET1 to SET3 is equal to a preset value.
（Max 10ms）
READY
with one ofData
SET1latch
to SET3) underatthe
2.5ms (40ms concurrent
smoothing ON) control ［Max 90ms］
reference. START
Tolerance judgment,
of HOLD segment, BCD data
and READY. SET 1, 2, 3
Power Min 2sec ＋NG
supply Max 40ms 5ms・6ms
Min 35ms 1.6ms・2ms CEL1 CEL2 CEL3 CEL4
Min 70ms
CEL5 CEL6
Min 15ms P.SET
HOLD
READY
HOLD Upper tolerance limitMin 10ms Min 10ms Min 15ms
NORMAL Max 35ms Tolerance judgment, segment, BCD data
Data latch 2.5ms (40ms at smoothing ON) Lower tolerance limit
DATA
Max 2sec Max 40msCEL2 CEL3 CEL4 CEL5 CEL6 Max 40ms
CEL1 Max 35ms ( ): Time upon output in high-speed mode
I/O output （Max 15ms） 12ms・15ms ( ): Time upon output in SET 1, 2, 3 （Max 10ms）
［Max 80ms］ （1.6ms・2ms） high-speed mode However, only for the specified CEL
[ ]: Time upon output in ［Max 90ms］ (excluding All-CEL)
Min 15ms
calculation mode When presetting is executed, the peak value is cleared.
P.SET [ ]: Time upon output in calculation mode
(2) Tolerance judgment result output time Min 70ms
READY (Max.－ =NG
Min. = Current value, TIR = 0) Max 35ms
HOLD judgment, segment, BCD data
Tolerance Min 10ms Min 10ms Min 15ms
（Max 10ms）
Each CEL output is not concurrent.
Data latch 2.5ms (40ms at smoothing ON) SET 1, 2, 3 ［Max 90ms］
Max 40ms (5) DATA
Output＋NG
CEL designation/calculation
Max 40ms
Upper tolerance limit （Max 15ms） Min 12ms・15ms ( ): TimeMin upon15ms
output in
70ms OUTSEL selection
［Max 80ms］ （1.6ms・2ms）
Note: If using the high-speed mode or all-CEL
high-speed mode method
HOLD [ ]: Timeoutput, use ina
upon output
Lower tolerance limit Min 10ms fromMin
Designate a CEL specified 10ms SET1Min
among to 15ms
SET3 as a
device with an input response time ofcalculation
1ms ormode
less.
Max 35ms ( ): Time upon output READY Data latch 2.5ms (40ms at smoothing ON)
（Max 10ms） Min 70ms Min in15ms
high-speed mode
Max 40ms
Tolerance judgment, segment, 30ms ・35ms
BCD data
data output CEL.
DATA
However, only for the specified CEL Max 40ms
［Max 90ms］ (excluding All-CEL) （Max 15ms） 12ms・15ms ( ): Time upon output in
HOLD START ［Max 80ms］ （1.6ms・2ms） high-speed mode SET 1, 2, 3
[ ]: Time upon output in calculation mode 3) Interval mode (All-CEL output) [ ]: Time upon output in SET 1, 2, 3
Data latch 2.5ms (40ms at smoothing 5ms 6ms
・
Max 35msON) This mode allows calculationofmode
1.6mscontinuous data output All-CEL
NG
－START
OUTSEL
Power （Max 10ms） READY ・2ms
P.SET
supply Min 2sec (specified with SET1 to SET3) at the internal timing of the
Max 40ms 5ms・6ms Max 90ms］
［ Tolerance judgment, segment, BCD data
READY Min 10ms Min 10ms Min 15ms
1.6ms・2ms Min 35ms EV-16A. SET 1, 2, 3 Min 10ms Min 10ms Min 15ms
＋NGHOLD Tolerance judgment, segment, BCD data
READY 30ms・35ms DATA
DATA Max 40ms
NORMALjudgment, segment, BCD data
Tolerance Max 35ms START CEL1 CEL2 CEL3 CEL4 CEL5 CEL6 P.SET Max 40ms
Max 2sec 5ms・6ms Input of SET1 from SET3 at the timeMin
of segment
15ms output
(3) Data output
I/O output CEL1 CEL2 CEL3 CEL4 CEL5 CEL6
SET1
Min 10ms
Min 10ms
to SET3 normally operate as range specification data.
1.6ms・2ms HOLD
Data output is provided with two methods, READY
30ms・35ms Maxupon
(This data operates as designation of an output CEL 40msinput of
SET 1, 2, 3
command mode and interval mode which can be START
Tolerance judgment, segment, BCD data SETDATA
1, 2, 3
OUTCEL.)
P.SET set with each I/O output mode parameter.
5ms・6ms SET 1, 2, 3
Data operation differs depending on the setting from among I/O
1) Command mode (All-CEL output) CEL1
1.6ms・CEL2
2ms CEL3 CEL4 CEL5 CEL6 P.SET
Min 10ms Min 10ms Min 15ms function
OUTSEL selection parameters.
This mode allows data output of All-CEL (specified 30ms・35ms（5ms） Min 15ms
Min 15ms with READY
Note: If using the high-speed mode or all-CEL output, use a Min 10ms
•NORMAL, high-speed Min
mode: Output CEL designation
10ms
DATA Min 70ms Tolerance judgment,12ms
segment,
・ 15msBCD
（ data
1.6ms・ 2ms） HOLD Min 10ms Min 10ms Min 15ms
SET1 to SET3) underMax
the concurrent
40ms control of HOLD and device with an input response time of 1ms or less.
HOLD ( ): Time upon output in high-speed mode•Calculation mode: Calculation method selection
Max 40ms
READY. CEL1 CEL2 CEL3 CEL4 CEL5 CEL6 DATA
Data latch 2.5ms (40ms at smoothing ON) READY (6)DATA
Peak clear Max 40ms
Min 70ms Min 15ms
Max 40ms Tolerance judgment, segment, BCD data
（Max 15ms） 12ms・15ms ( ): Time upon output in This function clears a peak value.
HOLD
［Max 80ms］ （1.6ms・2ms） high-speed mode 4) Interval mode (Discrete CEL output)
[ ]: Time upon
Data latch 2.5ms (40ms at smoothing ON)output in This mode allows30ms ・35ms（data
continuous 5ms）output of discrete (Max. = Min. = Current value, TIR = 0)
SET 1, 2,START
3 calculation mode
CEL (specified12ms
with one（of
・15ms SET1
1.6ms to ）
・2ms SET3) at the internal
READY
Max 40ms
Tolerance 5ms
judgment, segment, BCD ・6ms
data timing of the EV-16A. ( ): Time upon output in high-speed mode SET 1, 2, 3
OUTSEL 1.6ms・2ms READY
READY Min 10ms Min 10ms Min 15ms Tolerance judgment,30ms
segment,
・35msBCD
（data
5ms） P.SET
Tolerance judgment, segment, BCD data 12ms・15ms（1.6ms・2ms） Min 15ms
Min 10ms
DATA ( ): Time upon output in high-speed mode HOLD Min 10ms
CEL1 Max
CEL240msCEL3 CEL4 CEL5 CEL6
READY Max 40ms
30ms・35ms Tolerance judgment, segment, BCD data DATA
Note: UNIT LED (on D-EV) blinks during HOLD input.
START
5ms・6ms Note: Peak clear is executed only in the Peak mode.
SET 1, 2, 3
1.6ms・2ms (Presetting is executed when the current value is selected.)
READY Min 15ms
P.SET Min 70ms
Tolerance judgment, segment, BCD data
Min 15ms
MinHOLD
10ms
HOLD Min 10msCEL2 CEL3 CEL4 CEL5 CEL6
CEL1
Data latch 2.5ms (40ms at smoothing ON)
Max 40ms Max 40ms
（Max 15ms） 12ms・15ms ( ): Time upon output in
DATA ［Max 80ms］ （1.6ms・2ms） high-speed mode
[ ]: Time upon output in
calculation mode
READY
18 Tolerance judgment, segment, BCD data
SENSORPAK (Data Import Software for EV Counter)
• This software imports measurement data from a 6-channel
input type EV-16A to a PC.
• Measurement points can be processed up to 60 channels.
• Arithmetic operation and maximum width calculation from
measurement data are also enabled.
• Measurement data can be transferred to MS-Excel.
• Analog display with aids such as bar-graph meters can be
displayed in real time.

Real-time Display of Measurement Data

Measurement screen A vertical pin is measured from 3 directions to determine the reference
position and pin inclination.
A real-time display of measured data also allows installation of a part
while positioning it.

C1

C2

B1
A1

A1 B2

Meter screen
Monitoring the Feedback State of Measurement Data
The feedback state of press working data can be monitored. This allows
verification of time series data.

Chart screen

SPECIFICATIONS
Order No. 02NGB073 (Software plus I/O cable)
Display type: Counter, bar graph, meter, chart (capable of simultaneous display)
Display function Tolerance judgment result: Color display (green/red)
Connectable gages: max. 60 gages
Calculation items: Sum, difference, total, average, maximum, minimum, range (maximum–minimum), calculation with a constant
Calculation functions Connectable gages: Max. 30 calculation functions (between two gages)
Go/no go judgment (by specifying gages to be used for total tolerance judgment)
Total tolerance judgment Go/no go signal output with optional I/O cable
Trigger function: by means of key, timer or external TRG (with optional I/O cable)
Input function Data input frequency: Max. 9999 times (with 60 gages connected) to 60000 times (with 6 gages connected)
Output function Direct output to EXCEL spreadsheet, CSV file output (compatible with MeasurLink)
Connectable items Various Mitutoyo counters (those compatible with RS Link)
Recommendation: PC/AT compatible machine, CPU: Clock 2GHz or more, Memory: 2GB or more
System Environments Disk: 2GB or more
OS: Windows 7/8.1 (32bit/64bit)
Currently supported languages: English, German, French, Spanish
User’s manual: English

19
 © 2016 Mitutoyo America Corporation
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by comprehensive services that ensure your staff can
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Note: All information regarding our products, and in particular the illustrations, drawings, dimensional and performance
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General Trading Conditions will apply. Only quotations submitted by ourselves may be regarded as definitive. Specifications M3 Solution Centers:
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1M 1215-05 • Printed in USA • Jan. 2016