AFM

Atomic Force Microscopy

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 PRINCIPLE
Physical probe that raster scans a specimen

Key elements:

1. Probe

2. Detector & Feedback

3. Piezo actuators

http://ssd.phys.strath.ac.uk/index.php/Scanning_tunnelling_luminescence
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db AFM COMPONENTS

Figures from Wikipedia

 Beam-bounce technique

•
Mironov: Fundamentals of scanning probe microscopy, 2004
OU NanoLab/NSF NUE/Bumm & Johnson
 Feedback system

•
Mironov: Fundamentals of scanning probe microscopy, 2004
 Examples of cantilevers

Si3N4, Si

Different spring constants and resonant frequencies

•
Images: Mironov, Fundamentals of scanning probe microscopy, 2004
 Applications

 
Scanning probe microscope (SPM) defines a broad group of instrument used
for topographical surface characterizations. SPMs investigate the surface
properties down to atomic scale and has variety of applications in various
fields e.g. semiconductor industry, electronic materials, polymer science,
pharmaceutical and life sciences to visualize biological objects from living cells
down to single molecule levels.

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 Motivation
• Digitally image a topographical surface
• Determine the roughness of a surface sample or
to measure the thickness of a crystal growth
layer
• Image non-conducting surfaces such as proteins
and DNA
• Study the dynamic behavior of living and fixed
cells

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 History
• The Scanning Tunneling Microscope (STM) was
invented by G. Binnig and H. Rohrer, for which
they were awarded the Nobel Prize in 1984
• A few years later, the first Atomic Force
Microscope (AFM) was developed by G. Binnig,
Ch. Gerber, and C. Quate at Stanford University
by gluing a tiny shard of diamond onto one end
of a tiny strip of gold foil
• Currently AFM is the most common form of
scanning probe microscopy

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 How the AFM Works
• The AFM brings a probe
in close proximity to the
surface
• The force is detected by
the deflection of a spring,
van der Waals force curve
usually a cantilever
(diving board)
• Forces between the
probe tip and the sample
are sensed to control the
distance between the the
tip and the sample.

OU NanoLab/NSF NUE/Bumm & Johnson

 Two Modes
Repulsive (contact)
• At short probe-sample
distances, the forces are
repulsive
Attractive Force (non-contact)
• At large probe-sample
distances, the forces are
attractive
The AFM cantelever can be used
to measure both attractive
force mode and repulsive
forces.

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 Non-Contact Mode
• Uses attractive forces to
interact surface with tip
• Operates within the
van der Waal radii of the
atoms
• Oscillates cantilever near
its resonant frequency
(~ 200 kHz) to improve
sensitivity
• Advantages over contact:
no lateral forces,
non-destructive/no
contamination to sample, van der Waals force curve
etc.

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 Contact Mode
• Contact mode operates in
the repulsive regime of
the van der Waals curve
• Tip attached to cantilever
with low spring constant
(lower than effective
spring constant binding
the atoms of the sample
together).
• In ambient conditions
there is also a capillary
force exerted by the thin
water layer present
(2-50 nm thick). van der Waals force curve

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 Force Measurement
• The cantilever is designed with
a very low spring constant (easy
to bend) so it is very sensitive to
force.

• The laser is focused to reflect off

the cantilever and onto the
sensor

• The position of the beam in the

sensor measures the deflection
of the cantilever and in turn the
force between the tip and the
sample.

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 Raster the Tip: Generating an Image
• The tip passes back and forth in
a straight line across the sample
Scanning Tip

(think old typewriter or CRT)

• In the typical imaging mode, the
tip-sample force is held constant
by adjusting the vertical position
of the tip (feedback).
Raster Motion

• A topographic image is built up

by the computer by recording the
vertical position as the tip is
rastered across the sample.

Top Image Courtesy of Nanodevices, Inc. (www.nanodevices.com)

Bottom Image Courtesy of Stefanie Roes
OU NanoLab/NSF NUE/Bumm & Johnson (www.fz-borstel.de/biophysik/ de/methods/afm.html)
 Scanning the Sample
• Tip brought within nanometers
of the sample (van der Waals)
 Radius of tip limits the
accuracy of analysis/
resolution
 Stiffer cantilevers protect
against sample damage
because they deflect less in
response to a small force
 This means a more sensitive
detection scheme is needed
 measure change in resonance
frequency and amplitude of
oscillation

OU NanoLab/NSF NUE/Bumm & Johnson Image courtesy of (www.pacificnanotech.com)

 Noise: < 0.3Å RMS in vertical (Z) dimension with vibration
isolation
Resolution: Atomic Scale Resolution (STM), sub-nanometre (AFM)
Scanning Probe Microscope (SPM):
Scanning Tunnelling Microscopy (STM)
Atomic Force Microscopy (AFM)
Modes:
Contact mode AFM
Tapping mode AFM
Other form of SPM:
Magnetic Force Microscopy (MFM)
Electric Force Microscopy (EFM)
Scanners Lateral Range Vertical (z) Range
A 0.4 µm X 0.4 µm 0.4 µm
E 10 µm X 10 µm 2.5 µm
J 125 µm X 125 µm 5.0 µm

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 Sample type: Preferably, the samples should
be in thin film form on suitable substrate.
Sample Parameters:
Lateral Size: Maximum of 15 mm diameter
(Preferably: 10 mm)
Thickness: Sample + Substrate ≤ 5 mm
(Preferably: 1-2 mm)
Surface Roughness: Not more than 500nm
Nature of characterization: Non Destructive

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 Pictures
2D topographical image of
Atomic Step 3D Image

Screw dislocations on InSb grown by MBE

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 The Good Examples

Carbon Nanotube Used as a Conducting

AFM Tip for Local Oxidation of Si.
View of Silicon Surface Reconstruction

OU NanoLab/NSF NUE/Bumm & Johnson Right Image Courtesy of Dai, et al. from Stanford
 The Bad Examples
Histogram shows level surface, but Typically the sample will have a slight tilt
scan is very streaky with respect to the AFM. The AFM can
compensate for this tilt.

The horizontal lines are due to tip hops –

where the tip picks up or loses a small In this image the tilt have not yet
“nanodust” been removed.
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 And the Ugly!

Teeny little dust mites, ultra tiny dust mites

about 2,000 in the average bed

OU NanoLab/NSF NUE/Bumm & Johnson Image courtesy of http://www.micropix.demon.co.uk/sem/dustmite/article/page_2.htm

 Topography Scanning
Example of generated
image upon scanning
Pd thermally evaporated on Si

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 Elimination of Extreme Points

This targets the highest points of the

sample and eliminates them
It then manipulates the image to
create a smaller dynamic depth

Centering on pt.

extreme
(Height)

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 A Better View

Now:
• Removed extreme points
• Digitally decreased the
height of analysis
• Less than 1/3 as high
as initial scan
•Lose resolution and data
by clipping off extreme
points

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 Thickness of a Thin Layer
of Pd on Si Wafer
Si/Pd step

Step (where Pd coating ends)

Systematic error

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 Surface Roughness

Roughness typically measured

as root mean squared (RMS)

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 Other Types of SPM Techniques
• Lateral Force Microscopy (LFM)
– Frictional forces measured by twisting or “sideways” forces on
cantilever.
• Magnetic Force Microscopy (MFM)
– Magnetic tip detects magnetic fields/measures magnetic properties
of the sample.
• Electrostatic Force Microscopy (EFM)
– Electrically charged Pt tip detects electric fields/measures dielectric
and electrostatic properties of the sample
• Chemical Force Microscopy (CFM)
– Chemically functionalized tip can interact with molecules on the
surface – giving info on bond strengths, etc.
• Near Field Scanning Optical Microscopy (NSOM)
– Optical technique in which a very small aperture is scanned very
close to sample
– Probe is a quartz fiber pulled to a sharp point and coated with
aluminum to give a sub-wavelength aperture (~100 nm)

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 SPM techniques (NT-MDT)
visit these links for animations
STM modes
constant current
constant height

AFM modes
contact
non-contact

SPM lithography
STM lithography
AFM lithography – scratching
AFM lithography – Dynamic Plowing

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EFM: Electrical AFM
High resolution technique. Has to be done in air.
Need conductive probe.

First tap along one raster line. Then do a non-contact trace (fly) with applied
electric field and monitor forces on cantilever. “Nap” mode

Can “see” hidden conductive elements under the surface of the material (carbon
nanotubes in polymer)

SKPM: Scanning Kelvin Probe Microscopy

Monitors surface potential. Less resolution than EFM. Uses a conductive probe
and applied a bias to the tip. Detects potential difference between tip and
sample. “Nap-mode”
SKPM is QUANTITATIVE

PFM: Piezo responsive force microscopy

Tune the tip in contact with the surface – which gives the resonance of the
‘combined system’. This can be used to investigate internal dipoles in the
system and can also be used as lithography technique if the dipoles are
rewritable.
EFM: Electrical AFM
High resolution technique. Has to be done in air.
Need conductive probe.

First tap along one raster line. Then do a non-contact trace (fly) with applied
electric field and monitor forces on cantilever. “Nap” mode

Can “see” hidden conductive elements under the surface of the material (carbon
nanotubes in polymer)

SKPM: Scanning Kelvin Probe Microscopy

Monitors surface potential. Less resolution than EFM. Uses a conductive probe
and applied a bias to the tip. Detects potential difference between tip and
sample. “Nap-mode”
SKPM is QUANTITATIVE

PFM: Piezo responsive force microscopy

Tune the tip in contact with the surface – which gives the resonance of the
‘combined system’. This can be used to investigate internal dipoles in the
system and can also be used as lithography technique if the dipoles are
rewritable.
 Carbon Nanotube Tips
 Well defined shape and composition.
 High aspect ratio and small radius of curvature (“perfect” tip would be a delta
function tip).
 Mechanically robust.
 Chemical functionalization at tip.
DNA
CNT Tips

Images taken from Nanodevices, Inc. (www.nanodevices.com)

OU NanoLab/NSF NUE/Bumm & Johnson and Wooley, et al., Nature Biotech. 18, 760